JP2019530201A5 - - Google Patents
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- JP2019530201A5 JP2019530201A5 JP2018564747A JP2018564747A JP2019530201A5 JP 2019530201 A5 JP2019530201 A5 JP 2019530201A5 JP 2018564747 A JP2018564747 A JP 2018564747A JP 2018564747 A JP2018564747 A JP 2018564747A JP 2019530201 A5 JP2019530201 A5 JP 2019530201A5
- Authority
- JP
- Japan
- Prior art keywords
- transfer
- support
- microdevices
- transfer body
- adhesive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662348691P | 2016-06-10 | 2016-06-10 | |
| US62/348,691 | 2016-06-10 | ||
| PCT/US2017/036804 WO2017214540A1 (en) | 2016-06-10 | 2017-06-09 | Maskless parallel pick-and-place transfer of micro-devices |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019530201A JP2019530201A (ja) | 2019-10-17 |
| JP2019530201A5 true JP2019530201A5 (enExample) | 2020-07-16 |
| JP6976972B2 JP6976972B2 (ja) | 2021-12-08 |
Family
ID=60573075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018564747A Active JP6976972B2 (ja) | 2016-06-10 | 2017-06-09 | マイクロデバイスのマスクレス並列ピックアンドプレース移載 |
Country Status (7)
| Country | Link |
|---|---|
| US (5) | US10217793B2 (enExample) |
| EP (1) | EP3469424A4 (enExample) |
| JP (1) | JP6976972B2 (enExample) |
| KR (1) | KR102427231B1 (enExample) |
| CN (2) | CN116047871A (enExample) |
| TW (2) | TWI723178B (enExample) |
| WO (1) | WO2017214540A1 (enExample) |
Families Citing this family (58)
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| JP6231432B2 (ja) * | 2014-05-02 | 2017-11-15 | 富士フイルム株式会社 | 導電性フイルム、それを備える表示装置及び導電性フイルムの評価方法 |
| US11776989B2 (en) * | 2016-06-10 | 2023-10-03 | Applied Materials, Inc. | Methods of parallel transfer of micro-devices using treatment |
| US11756982B2 (en) | 2016-06-10 | 2023-09-12 | Applied Materials, Inc. | Methods of parallel transfer of micro-devices using mask layer |
| TWI723178B (zh) | 2016-06-10 | 2021-04-01 | 美商應用材料股份有限公司 | 微型裝置的無遮罩並行取放轉印 |
| CN106098697B (zh) * | 2016-06-15 | 2019-04-02 | 深圳市华星光电技术有限公司 | 微发光二极管显示面板及其制作方法 |
| US10978530B2 (en) * | 2016-11-25 | 2021-04-13 | Vuereal Inc. | Integration of microdevices into system substrate |
| TWI661533B (zh) * | 2017-06-07 | 2019-06-01 | 台灣愛司帝科技股份有限公司 | 晶片安裝系統以及晶片安裝方法 |
| US20190058081A1 (en) * | 2017-08-18 | 2019-02-21 | Khaled Ahmed | Micro light-emitting diode (led) display and assembly apparatus |
| US10511554B2 (en) | 2017-12-05 | 2019-12-17 | International Business Machines Corporation | Maintaining tribal knowledge for accelerated compliance control deployment |
| CN110120186A (zh) * | 2018-02-06 | 2019-08-13 | 南京瀚宇彩欣科技有限责任公司 | 显示模块 |
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| KR102782924B1 (ko) * | 2018-07-23 | 2025-03-19 | 삼성전자주식회사 | Led 전송 장치를 포함하는 전자 장치 및 그 제어 방법 |
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| CN109524512B (zh) * | 2018-11-15 | 2020-07-03 | 华中科技大学 | 基于可控微反射镜阵列的微型发光二极管巨量转移方法 |
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| JP6911003B2 (ja) * | 2018-12-14 | 2021-07-28 | Tdk株式会社 | 素子アレイの製造方法と特定素子の除去方法 |
| JP7319044B2 (ja) * | 2018-12-14 | 2023-08-01 | Tdk株式会社 | 素子アレイの製造装置と特定素子の除去装置 |
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| WO2020153766A1 (en) * | 2019-01-22 | 2020-07-30 | Samsung Electronics Co., Ltd. | Method for displaying visual information associated with voice input and electronic device supporting the same |
| US11538786B2 (en) | 2019-03-19 | 2022-12-27 | Ordos Yuansheng Optoelectronics Co., Ltd. | Transfer printing method and transfer printing apparatus |
| EP3742477A1 (en) | 2019-05-21 | 2020-11-25 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO | Light induced selective transfer of components using a jet of melted adhesive |
| KR20200135069A (ko) * | 2019-05-24 | 2020-12-02 | (주)포인트엔지니어링 | 마이크로 led 디스플레이 제작 방법 및 이를 이용한 마이크로 led 디스플레이 |
| US10964582B2 (en) * | 2019-06-24 | 2021-03-30 | Palo Alto Research Center Incorporated | Transfer substrate utilizing selectable surface adhesion transfer elements |
| KR20210023375A (ko) * | 2019-08-23 | 2021-03-04 | 삼성전자주식회사 | 레이저 전사 장치 및 이를 이용한 전사 방법 |
| USD966207S1 (en) * | 2019-09-23 | 2022-10-11 | Star Co Scientific Technologies Advanced Research Co, Llc | Light-emitting diode array |
| CN112701076A (zh) * | 2019-10-23 | 2021-04-23 | 北京小米移动软件有限公司 | 显示屏的制作方法及系统 |
| US11302561B2 (en) | 2019-11-12 | 2022-04-12 | Palo Alto Research Center Incorporated | Transfer elements that selectably hold and release objects based on changes in stiffness |
| WO2021109010A1 (zh) * | 2019-12-03 | 2021-06-10 | 重庆康佳光电技术研究院有限公司 | 一种半导体装置巨量转移方法和系统 |
| CN110993749B (zh) * | 2019-12-09 | 2021-02-23 | 深圳市华星光电半导体显示技术有限公司 | 微型发光二极管的巨量转移方法及显示面板 |
| EP3840030A1 (en) * | 2019-12-16 | 2021-06-23 | FRAUNHOFER-GESELLSCHAFT zur Förderung der angewandten Forschung e.V. | Massive parallel assembly method |
| KR102820198B1 (ko) | 2019-12-26 | 2025-06-13 | 삼성전자주식회사 | 엘이디 전사시스템 및 이의 제어 방법 |
| CN111128813B (zh) * | 2020-01-20 | 2022-10-28 | 福州大学 | 一种μLED巨量转移方法 |
| EP4107775A1 (de) * | 2020-02-18 | 2022-12-28 | EV Group E. Thallner GmbH | Verfahren und vorrichtung zur übertragung von bauteilen |
| US11348905B2 (en) * | 2020-03-02 | 2022-05-31 | Palo Alto Research Center Incorporated | Method and system for assembly of micro-LEDs onto a substrate |
| WO2021182318A1 (ja) * | 2020-03-09 | 2021-09-16 | 積水化学工業株式会社 | 電子部品の製造方法、及び、表示装置の製造方法 |
| KR102754349B1 (ko) * | 2020-03-20 | 2025-01-14 | 삼성전자주식회사 | 디스플레이 모듈 및 디스플레이 모듈의 리페어 방법 |
| US11199774B2 (en) * | 2020-03-30 | 2021-12-14 | Canon Kabushiki Kaisha | Method and apparatus to improve frame cure imaging resolution for extrusion control |
| TWI872235B (zh) * | 2020-03-30 | 2025-02-11 | 加拿大商弗瑞爾公司 | 微裝置轉移中之偏移對齊及修復 |
| US20230178410A1 (en) * | 2020-05-29 | 2023-06-08 | Erich Thallner | Method for bonding and debonding substrates |
| US11343888B1 (en) * | 2020-12-15 | 2022-05-24 | Lumileds Llc | MicroLED power considering outlier pixel dynamic resistance |
| CN112768399B (zh) * | 2021-01-11 | 2022-10-04 | 深圳市华星光电半导体显示技术有限公司 | 转移基板及转移装置 |
| CN112968084A (zh) * | 2021-02-04 | 2021-06-15 | 深圳市华星光电半导体显示技术有限公司 | 显示面板及其制作方法 |
| JP7387666B2 (ja) * | 2021-03-15 | 2023-11-28 | 東レエンジニアリング株式会社 | チップ部品除去装置 |
| TWI836592B (zh) * | 2021-09-20 | 2024-03-21 | 美商應用材料股份有限公司 | 使用掩模層來並行轉移微型設備的方法 |
| TWI831363B (zh) * | 2021-09-20 | 2024-02-01 | 美商應用材料股份有限公司 | 使用處理來並行轉移微型設備的方法 |
| EP4430657A1 (en) * | 2021-11-11 | 2024-09-18 | Terecircuits Corporation | Photochemical and thermal release layer processes and uses in device manufacturing |
| CN114170922A (zh) * | 2021-12-08 | 2022-03-11 | Tcl华星光电技术有限公司 | 显示面板及其制造方法 |
| WO2023108450A1 (zh) * | 2021-12-15 | 2023-06-22 | 厦门市芯颖显示科技有限公司 | 寻址转移设备 |
| US20240036363A1 (en) * | 2022-07-28 | 2024-02-01 | Palo Alto Research Center Incorporated | Optically activated object mass transfer apparatus |
| CN115356794A (zh) * | 2022-09-15 | 2022-11-18 | 苏州晶方光电科技有限公司 | 晶圆级微透镜阵列的压印固化设备、制造方法及应用 |
| JP2025099629A (ja) | 2023-12-22 | 2025-07-03 | エルジー ディスプレイ カンパニー リミテッド | 表示装置および表示装置の製造方法 |
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| JP2003005100A (ja) * | 2001-06-26 | 2003-01-08 | Canon Inc | 光変調器およびそれを用いた投射装置 |
| JP2003077940A (ja) * | 2001-09-06 | 2003-03-14 | Sony Corp | 素子の転写方法及びこれを用いた素子の配列方法、画像表示装置の製造方法 |
| JP2004299814A (ja) * | 2003-03-28 | 2004-10-28 | Takasago Thermal Eng Co Ltd | 除電された絶縁体基板の製造方法及び製造装置 |
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| US9555644B2 (en) | 2011-07-14 | 2017-01-31 | The Board Of Trustees Of The University Of Illinois | Non-contact transfer printing |
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| CN105493297B (zh) * | 2015-05-21 | 2018-09-11 | 歌尔股份有限公司 | 微发光二极管的转移方法、制造方法、装置和电子设备 |
| GB2544335A (en) * | 2015-11-13 | 2017-05-17 | Oculus Vr Llc | A method and apparatus for use in the manufacture of a display element |
| TWI723178B (zh) * | 2016-06-10 | 2021-04-01 | 美商應用材料股份有限公司 | 微型裝置的無遮罩並行取放轉印 |
-
2017
- 2017-06-09 TW TW106119234A patent/TWI723178B/zh active
- 2017-06-09 TW TW110106637A patent/TWI778528B/zh active
- 2017-06-09 CN CN202310084142.XA patent/CN116047871A/zh active Pending
- 2017-06-09 EP EP17811102.7A patent/EP3469424A4/en not_active Withdrawn
- 2017-06-09 US US15/619,226 patent/US10217793B2/en active Active
- 2017-06-09 KR KR1020197000831A patent/KR102427231B1/ko active Active
- 2017-06-09 CN CN201780032280.6A patent/CN109196424A/zh active Pending
- 2017-06-09 JP JP2018564747A patent/JP6976972B2/ja active Active
- 2017-06-09 WO PCT/US2017/036804 patent/WO2017214540A1/en not_active Ceased
- 2017-06-09 US US15/619,173 patent/US10153325B2/en active Active
-
2018
- 2018-11-16 US US16/194,176 patent/US10319782B2/en active Active
-
2019
- 2019-02-07 US US16/270,235 patent/US10580826B2/en active Active
-
2020
- 2020-02-28 US US16/805,378 patent/US11127781B2/en active Active
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