JP2019057709A5 - - Google Patents

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JP2019057709A5
JP2019057709A5 JP2018175730A JP2018175730A JP2019057709A5 JP 2019057709 A5 JP2019057709 A5 JP 2019057709A5 JP 2018175730 A JP2018175730 A JP 2018175730A JP 2018175730 A JP2018175730 A JP 2018175730A JP 2019057709 A5 JP2019057709 A5 JP 2019057709A5
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carrier
plate
support
inserts
support structure
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JP2019057709A (ja
JP7166858B2 (ja
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JP2018175730A 2017-09-21 2018-09-20 半導体プロセスモジュールのためのインサイチュ装置 Active JP7166858B2 (ja)

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US201762561463P 2017-09-21 2017-09-21
US62/561,463 2017-09-21
US16/103,531 2018-08-14
US16/103,531 US11075105B2 (en) 2017-09-21 2018-08-14 In-situ apparatus for semiconductor process module

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JP2019057709A JP2019057709A (ja) 2019-04-11
JP2019057709A5 true JP2019057709A5 (https=) 2021-09-09
JP7166858B2 JP7166858B2 (ja) 2022-11-08

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US (2) US11075105B2 (https=)
JP (1) JP7166858B2 (https=)
KR (2) KR102641354B1 (https=)
CN (3) CN109545642B (https=)
TW (3) TWI830351B (https=)

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