JP2018503968A - 六方格子結晶構造を有するiii−v族半導体層を含んだ半導体構造 - Google Patents
六方格子結晶構造を有するiii−v族半導体層を含んだ半導体構造 Download PDFInfo
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- 239000000758 substrate Substances 0.000 claims abstract description 67
- 239000000203 mixture Substances 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 17
- 229910002704 AlGaN Inorganic materials 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 4
- 238000001451 molecular beam epitaxy Methods 0.000 claims description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 3
- 238000000927 vapour-phase epitaxy Methods 0.000 claims description 3
- 230000003247 decreasing effect Effects 0.000 claims description 2
- 230000007423 decrease Effects 0.000 abstract description 8
- 239000010410 layer Substances 0.000 description 409
- 229910052733 gallium Inorganic materials 0.000 description 33
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 32
- 230000008859 change Effects 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000015556 catabolic process Effects 0.000 description 5
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- 229910052594 sapphire Inorganic materials 0.000 description 4
- 239000010980 sapphire Substances 0.000 description 4
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000006911 nucleation Effects 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 150000002258 gallium Chemical class 0.000 description 1
- 238000001534 heteroepitaxy Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000005533 two-dimensional electron gas Effects 0.000 description 1
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Abstract
Description
基板と、
上記基板の上に配置される、立方晶または六方晶格子構造を有するIII−VまたはII−VI族半導体の第1の層において、上記基板が、その材料の格子定数と上記半導体の格子定数が異なるような、第1の層と、
上記基板と上記第1の層の間に、交互に配置された互いに接触する上記半導体を含んだ複数の第2および第3の層からなる第1の積層体とを、少なくとも含んだ、半導体構造であって、
上記第2の層における半導体元素の比率が、上記基板から上記第1の層に向かう方向に沿って、上記第2の層ごとに変化しながら増加し、
上記第3の層における上記半導体元素の比率が、立方晶格子構造の事例では、隣接する第2の層と第3の層からなる各グループの平均格子定数値が第1の積層体内でほぼ一定であるように、上記方向に沿って上記第3の層ごとに変化しながら減少し、あるいは、六方晶格子構造の事例では、隣接する第2の層と第3の層からなる各グループの平均格子定数値が上記方向に沿って第1の積層体内でひとグループごとに増加するように、ほぼ一定または上記方向に沿って上記第3の層ごとに減少するように変化し、
上記第2および第3の層のそれぞれの厚さが約5nmより薄い、半導体構造である。
基板と、
上記基板の上に配置され、格子定数が上記基板の材料の格子定数と同一でないような、AlXGaYIn(1−X−Y)Nに対応する半導体の第1の層と、ここで0≦X<1、0<Y≦1かつ(X+Y)≦1であり、
上記半導体を含んだ、互いに交互に配置された複数の第2および第3の層からなる、第1および第2の積層体において、上記第1の積層体が、上記基板と上記第1の層の間に配置され、上記第2の積層体が、上記第1の積層体と上記第1の層の間に配置される、第1および第2の積層体と、
上記第1の積層体と上記第2の積層体の間に配置される、上記第1の層における上記半導体とほぼ同じ組成を有する半導体の第4の層と、
上記第4の層と上記第2の積層体の間に配置される、AlNを含んだ緩和層とを、少なくとも備える半導体構造において、
上記第1および上記第2の積層体のそれぞれで、
上記第2の層における上記半導体のGaの比率が、上記基板から上記第1の層に向かう方向に沿って、上記第2の層ごとに変化しながら増加し、
上記第3の層における上記半導体のGaの比率がほぼ一定、または、1つの第2の層とそれに隣接する第3の層からなる各グループの平均格子定数が、上記第1の積層体内で上記方向に沿ってひとグループごとに増加するように、上記方向に沿って上記第3の層ごとに変化しながら減少し、
上記第2および第3の層のそれぞれの厚さが約5nmより薄い、半導体構造に対応する。
上記第1の積層体と上記第1の層の間に配置される、上記半導体を含み上下に交互に配置された複数の第2および第3の層からなる、n個の第2の積層体と、
上記第1の層の半導体の組成に非常に類似した組成を有する半導体の、n個の第4の層において、上記第4の層の1つが上記第1の積層体に接触して配置され、上記第4の層または他の各第4の層が他の第2の積層体のうちの1つに隣接して配置されるような、n個の第4の層と、
上記第4の層の1つと上記第2の積層体の1つの間にそれぞれ配置される、AlNを含んだ複数の緩和層とを備えるようなものでありうる。
ここでnは2〜19の整数である。
上記第1の積層体と上記第1の層の間に配置される、上記第1の積層体における第2および第3の層に類似した、それぞれ互いに接触して交互に配置された複数の第2および第3の層からなる第2の積層体と、
上記第1の積層体と上記第2の積層体の間に配置される、上記第1の層の半導体とほぼ同じ組成を有する半導体の第4の層とを、少なくとも含みうる。
102 基板
104 緩衝層
106 第1の半導体層
107 第1の積層体
108 第2の半導体層
109 第2の積層体
110 第3の半導体層
112 第4の半導体層
114 緩和層
116 第5の層
200 HEMTトランジスタ
202 追加の層
204 スペーサ層
206 AlGaN層
208 ソース領域
210 ドレイン領域
212 ゲート
300 発光ダイオード
302 量子井戸構造
304 pドープされたGaN層
Claims (14)
- 基板(102)と、
前記基板(102)の上に配置され、格子定数が前記基板(102)の材料の格子定数と同一でないような、AlXGaYIn(1−X−Y)Nに対応する半導体の第1の層(106)と、ここで0≦X<1、0<Y≦1かつ(X+Y)≦1であり、
前記半導体を含んだ、互いに交互に配置された複数の第2および第3の層(108、110)からなる、第1および第2の積層体(107、109)において、前記第1の積層体(107)が、前記基板(102)と前記第1の層(106)の間に配置され、前記第2の積層体(109)が、前記第1の積層体(107)と前記第1の層(106)の間に配置される、第1および第2の積層体(107、109)と、
前記第1の積層体(107)と前記第2の積層体(109)の間に配置される、前記第1の層(106)における前記半導体とほぼ同じ組成を有する半導体の第4の層(112)と、
前記第4の層(112)と前記第2の積層体(109)の間に配置される、AlNを含んだ緩和層(114)とを、少なくとも備える半導体構造(100)であって、
前記第1および前記第2の積層体(107、109)のそれぞれで、
前記第2の層(108)における前記半導体のGaの比率が、前記基板(102)から前記第1の層(106)に向かう方向に沿って、前記第2の層ごとに変化しながら増加し、
前記第3の層(110)における前記半導体のGaの比率がほぼ一定、または、1つの第2の層とそれに隣接する第3の層(108、110)からなる各グループの平均格子定数が、前記第1の積層体内で前記方向に沿ってひとグループごとに増加するように、前記方向に沿って前記第3の層ごとに変化しながら減少し、
前記第2および第3の層(108、110)のそれぞれの厚さが約5nmより薄い、半導体構造(100)。 - 請求項1に記載の半導体構造(100)であって、
前記第1の積層体(107)と前記第1の層(106)の間に配置される、前記半導体を含み上下に交互に配置された複数の第2および第3の層(108、110)からなる、n個の第2の積層体(109)と、
前記第1の層(106)の半導体の組成に非常に類似した組成を有する半導体の、n個の第4の層(112)において、前記第4の層(112)の1つが前記第1の積層体(107)に接触して配置され、前記第4の層(112)または他の各第4の層(112)が他の第2の積層体(109)のうちの1つに隣接して配置されるような、n個の第4の層(112)と、
前記第4の層(112)の1つと前記第2の積層体(109)の1つの間にそれぞれ配置される、AlNを含んだ複数の緩和層(114)とを備え、
ここでnは2〜19の整数である、半導体構造(100)。 - 1つまたは複数の前記第4の層(112)のそれぞれの厚さが、その第4の層(112)が接触して配置される前記積層体(107、109)の厚さの約0.5〜1.5倍である、請求項1から請求項2のいずれか一項に記載の半導体構造(100)。
- 前記第1の層(106)の半導体がGaNであり、かつ/または前記第2の層(108)の半導体がAlXGa(1−X)Nであり、かつ/または前記第3の層(110)の半導体がGaNである、請求項1から請求項3のいずれか一項に記載の半導体構造(100)。
- 前記第1および第2の積層体(107、109)のそれぞれで、前記第2の層(108)の半導体が、前記基板(102)から前記第1の層(106)に向かう方向に沿って、前記第2の層ごとにXが約1から約0.3まで変化するような、AlXGa(1−X)Nである、請求項1から請求項4のいずれか一項に記載の半導体構造(100)。
- 前記第1および第2の積層体の1つまたは複数の中において、前記第2および第3の層(108、110)の半導体の組成と異なる組成を有する、AlNまたはAlGaNを含んだ第5の層(116)が、それぞれ第2および第3の層(108、110)からなる層グループ同士の間に差し挟まれる、請求項1から請求項5のいずれか一項に記載の半導体構造(100)。
- 前記基板(102)と前記第1の積層体(107)の間に配置される、AlNを含んだ第1の緩衝層(104)もまた備える、請求項1から請求項6のいずれか一項に記載の半導体構造(100)。
- 前記第2および第3の層(108、110)のそれぞれの厚さが約2nmより薄い、請求項1から請求項7のいずれか一項に記載の半導体構造(100)。
- 各前記第2の層(108)の厚さが同様の厚さであり、かつ/または全ての前記第3の層(110)の厚さが同様の厚さである、請求項1から請求項8のいずれか一項に記載の半導体構造(100)。
- 前記基板(102)が単結晶シリコンを含む、請求項1から請求項9のいずれか一項に記載の半導体構造(100)。
- 前記第1の積層体(107)の全体の厚さおよび/または1つまたは複数の前記第2の積層体(109)のそれぞれの全体の厚さが、約5μm以下である、請求項1から請求項10のいずれか一項に記載の半導体構造(100)。
- 少なくとも前記第1、第2、第3および第4の層(106、108、110、112)と前記緩和層(114)が、分子線エピタキシまたは気相エピタキシによって作製される、請求項1から請求項11のいずれか一項に記載の半導体構造(100)を作製する方法。
- 請求項1〜11のいずれか一項に記載の少なくとも1つの半導体構造(100)と活性域とを含んだ半導体デバイス(200、300)であって、前記活性域が、前記半導体構造(110)の前記第1の層(106)を含む、あるいは前記半導体構造(110)の前記第1の層(106)の上に配置される、半導体デバイス(200、300)。
- 前記活性域を含んだ少なくとも1つの発光ダイオード(300)および/または少なくとも1つのトランジスタ(200)を含む、請求項13に記載の半導体デバイス(200、300)。
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