JP2018157017A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
- Publication number
- JP2018157017A JP2018157017A JP2017051240A JP2017051240A JP2018157017A JP 2018157017 A JP2018157017 A JP 2018157017A JP 2017051240 A JP2017051240 A JP 2017051240A JP 2017051240 A JP2017051240 A JP 2017051240A JP 2018157017 A JP2018157017 A JP 2018157017A
- Authority
- JP
- Japan
- Prior art keywords
- region
- opening
- photoresist film
- manufacturing
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 190
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 65
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 129
- 239000012535 impurity Substances 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims description 38
- 230000008569 process Effects 0.000 claims description 16
- 230000015572 biosynthetic process Effects 0.000 claims description 9
- 239000002344 surface layer Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000005468 ion implantation Methods 0.000 abstract description 26
- 238000013461 design Methods 0.000 abstract description 11
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 229910052734 helium Inorganic materials 0.000 description 39
- 239000001307 helium Substances 0.000 description 39
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 38
- 230000007547 defect Effects 0.000 description 17
- 239000010410 layer Substances 0.000 description 16
- 230000001133 acceleration Effects 0.000 description 12
- 150000002500 ions Chemical class 0.000 description 10
- 238000011161 development Methods 0.000 description 8
- 239000011229 interlayer Substances 0.000 description 7
- 238000004380 ashing Methods 0.000 description 6
- 238000002513 implantation Methods 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000000605 extraction Methods 0.000 description 4
- 238000000227 grinding Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000003848 UV Light-Curing Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- -1 helium ions Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/266—Bombardment with radiation with high-energy radiation producing ion implantation using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
- H01L21/0275—Photolithographic processes using lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/0455—Making n or p doped regions or layers, e.g. using diffusion
- H01L21/046—Making n or p doped regions or layers, e.g. using diffusion using ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
- H01L21/3221—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/083—Anode or cathode regions of thyristors or gated bipolar-mode devices
- H01L29/0834—Anode regions of thyristors or gated bipolar-mode devices, e.g. supplementary regions surrounding anode regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/30—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface
- H01L29/32—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface the imperfections being within the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
- H01L29/6609—Diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66325—Bipolar junction transistors [BJT] controlled by field-effect, e.g. insulated gate bipolar transistors [IGBT]
- H01L29/66333—Vertical insulated gate bipolar transistors
- H01L29/66348—Vertical insulated gate bipolar transistors with a recessed gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
- H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
- H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/8613—Mesa PN junction diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
- H01L29/407—Recessed field plates, e.g. trench field plates, buried field plates
Abstract
【解決手段】半導体装置の製造方法は、まず、半導体ウエハ10の第1主面にフォトレジストを塗布してフォトレジスト膜31を形成する第1工程を行う。次に、フォトレジスト膜31に、第1開口部を形成する第1マスクパターン32aを転写する第2工程を行う。次に、フォトレジスト膜31に、第1開口部と位置が異なる第2開口部を形成する第2マスクパターン32bを転写する第3工程を行う。次に、第1マスクパターン32aおよび第2マスクパターンに基づいてフォトレジスト膜31を選択的に除去して、フォトレジスト膜31の第1開口部および第2開口部を有するレジストマスクを形成する第4工程を行う。次に、レジストマスク31をマスクとして、半導体ウエハ10に不純物をイオン注入する第5工程を行う。
【選択図】図3
Description
実施の形態にかかる半導体装置の製造方法について、FWD領域にヘリウム(He)照射によりヘリウムの欠陥を導入した耐圧1200VクラスのRC−IGBTを例に説明する。耐圧とは、素子が誤動作や破壊を起こさない限界の電圧である。図1は、実施の形態にかかる半導体装置の製造途中の状態を示す断面図である。図2は、実施の形態にかかる半導体装置の製造途中の別の一例の状態を示す断面図である。図1,2には、それぞれ、半導体ウエハ10のおもて面10a側および裏面10b側からヘリウム照射を行っている状態を模式的に示す。
2 p型ベース領域
3 n+型エミッタ領域
4 p+型コンタクト領域
5 n型蓄積層
6 トレンチ
7 ゲート絶縁膜
8 ゲート電極
9 層間絶縁膜
10 半導体ウエハ
10a 半導体ウエハのおもて面
10b 半導体ウエハの裏面
10c 半導体ウエハの端部
10d 半導体ウエハの周縁部
11 おもて面電極
12 n型フィールドストップ層
13 p+型コレクタ領域
14 n+型カソード領域
15 欠陥
21 IGBT領域
22 FWD領域
31、33 フォトレジスト膜
31a フォトレジスト膜の開口部
31b、31c フォトレジストの感光部
32a、32b レクチル
35、36,37 開口
38 開口形成領域
40、42、43、44 端部
41 側面
A 残し幅
B 抜き幅
C 段差
f1 フォーカス基準位置
f2 フォーカス設定値
wt レジストパターンの残し幅
Claims (16)
- 半導体ウエハの第1主面にフォトレジストを塗布してフォトレジスト膜を形成する第1工程と、
前記フォトレジスト膜に、第1開口部を形成する第1マスクパターンを転写する第2工程と、
前記フォトレジスト膜に、前記第1開口部と位置が異なる第2開口部を複数形成する第2マスクパターンを転写する第3工程と、
前記第1マスクパターンおよび前記第2マスクパターンに基づいて前記フォトレジスト膜を選択的に除去して、前記フォトレジスト膜の前記第1開口部および前記第2開口部を有するレジストマスクを形成する第4工程と、
前記レジストマスクをマスクとして、前記半導体ウエハに不純物をイオン注入する第5工程と、
を含むことを特徴とする半導体装置の製造方法。 - 前記第2工程の後、前記第3工程の前に、
前記第1マスクパターンに基づいて前記フォトレジスト膜を選択的に除去して、前記フォトレジスト膜に前記第1開口部を形成する工程を含み、
前記第4工程では、前記第2マスクパターンに基づいて前記フォトレジスト膜を選択的に除去して、前記フォトレジスト膜に前記第2開口部を複数形成することを特徴とする請求項1に記載の半導体装置の製造方法。 - 前記第4工程の後、前記第5工程の前に、
前記レジストマスクに紫外線を照射する工程、または、前記レジストマスクを加熱する工程を含むことを特徴とする請求項1または2に記載の半導体装置の製造方法。 - 前記第1開口部と前記第2開口部は離れていることを特徴とする請求項1〜3のいずれか一つに記載の半導体装置の製造方法。
- 前記第2開口部の深さは、前記第1開口部の深さより浅いことを特徴とする請求項1〜4のいずれか一つに記載の半導体装置の製造方法。
- 前記第2開口部の幅は、前記第1開口部の幅より狭いことを特徴とする請求項1〜5のいずれか一つに記載の半導体装置の製造方法。
- 前記第2開口部の深さは、0.5μm以上1μm以下であることを特徴とする請求項1〜6のいずれか一つに記載の半導体装置の製造方法。
- 前記第2開口部の幅は、1μm以上3μm以下であることを特徴とする請求項1〜7のいずれか一つに記載の半導体装置の製造方法。
- 前記第2マスクパターンの開口幅は、1μm以上3μm以下であることを特徴とする請求項1〜8のいずれか一つに記載の半導体装置の製造方法。
- 前記第2マスクパターンの開口部は、1μm以上3μm以下の間隔で並んでいることを特徴とする請求項1〜9のいずれか一つに記載の半導体装置の製造方法。
- 化学増幅型の前記フォトレジストを用いることを特徴とする請求項1〜10のいずれか一つに記載の半導体装置の製造方法。
- ポジ型の前記フォトレジストを用いることを特徴とする請求項1〜10のいずれか一つに記載の半導体装置の製造方法。
- ネガ型の前記フォトレジストを用いることを特徴とする請求項1〜10のいずれか一つに記載の半導体装置の製造方法。
- 前記第1工程の前に、前記半導体ウエハの第1領域に第1半導体素子を形成し、前記半導体ウエハの第2領域に第2半導体素子を形成する素子形成工程をさらに含み、
前記フォトレジスト膜の前記第1開口部は、前記第2領域の形成領域に対応する箇所であることを特徴とする請求項1〜13のいずれか一つに記載の半導体装置の製造方法。 - 前記第1半導体素子は絶縁ゲート型バイポーラトランジスタであり、
前記第2半導体素子はダイオードであり、
前記素子形成工程では、第1導電型の前記半導体ウエハの第1主面の表面層に、前記絶縁ゲート型バイポーラトランジスタのベース領域および前記ダイオードのアノード領域となる第2導電型半導体領域を形成し、
前記第5工程では、前記半導体ウエハの第1主面から、前記半導体ウエハの、前記第2導電型半導体領域との界面付近に前記不純物を注入することを特徴とする請求項14に記載の半導体装置の製造方法。 - 前記第1半導体素子は絶縁ゲート型バイポーラトランジスタであり、
前記第2半導体素子はダイオードであり、
前記素子形成工程では、第1導電型の前記半導体ウエハの第2主面の表面層に、前記絶縁ゲート型バイポーラトランジスタのベース領域および前記ダイオードのアノード領域となる第2導電型半導体領域を形成し、
前記第5工程では、前記半導体ウエハの第2主面から、前記半導体ウエハの、前記第2導電型半導体領域との界面付近に前記不純物を注入することを特徴とする請求項14に記載の半導体装置の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017051240A JP7325167B2 (ja) | 2017-03-16 | 2017-03-16 | 半導体装置の製造方法 |
CN201810058342.7A CN108630532B (zh) | 2017-03-16 | 2018-01-22 | 半导体装置的制造方法 |
US15/883,393 US10553436B2 (en) | 2017-03-16 | 2018-01-30 | Method of manufacturing semiconductor device using photoresist as ion implantation mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017051240A JP7325167B2 (ja) | 2017-03-16 | 2017-03-16 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018157017A true JP2018157017A (ja) | 2018-10-04 |
JP7325167B2 JP7325167B2 (ja) | 2023-08-14 |
Family
ID=63520244
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017051240A Active JP7325167B2 (ja) | 2017-03-16 | 2017-03-16 | 半導体装置の製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US10553436B2 (ja) |
JP (1) | JP7325167B2 (ja) |
CN (1) | CN108630532B (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020072137A (ja) * | 2018-10-30 | 2020-05-07 | 三菱電機株式会社 | 半導体装置 |
WO2020149354A1 (ja) * | 2019-01-18 | 2020-07-23 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
WO2021044814A1 (ja) * | 2019-09-05 | 2021-03-11 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
US11901443B2 (en) | 2018-08-14 | 2024-02-13 | Fuji Electric Co., Ltd. | Semiconductor device and manufacturing method |
JP7484224B2 (ja) | 2020-03-02 | 2024-05-16 | 富士電機株式会社 | 半導体装置の製造方法 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105814694B (zh) | 2014-10-03 | 2019-03-08 | 富士电机株式会社 | 半导体装置以及半导体装置的制造方法 |
JP7325167B2 (ja) * | 2017-03-16 | 2023-08-14 | 富士電機株式会社 | 半導体装置の製造方法 |
JP2019145708A (ja) * | 2018-02-22 | 2019-08-29 | 株式会社東芝 | 半導体装置 |
US10651281B1 (en) * | 2018-12-03 | 2020-05-12 | Globalfoundries Inc. | Substrates with self-aligned buried dielectric and polycrystalline layers |
CN116313876B (zh) * | 2023-05-25 | 2023-08-04 | 粤芯半导体技术股份有限公司 | 离子注入工艺中衬底温度的监测方法 |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06204162A (ja) * | 1992-12-28 | 1994-07-22 | Mitsubishi Electric Corp | 半導体装置の製造方法および該方法に用いられるレジスト組成物 |
JP2001297997A (ja) * | 2000-04-17 | 2001-10-26 | Sony Corp | 半導体装置の製造方法 |
JP2007103418A (ja) * | 2005-09-30 | 2007-04-19 | Seiko Epson Corp | 半導体装置、半導体装置の製造方法、並びに電気光学装置 |
JP2008192737A (ja) * | 2007-02-02 | 2008-08-21 | Denso Corp | 半導体装置 |
JP2009109610A (ja) * | 2007-10-29 | 2009-05-21 | Seiko Epson Corp | 露光用マスク、及び薄膜トランジスタの製造方法 |
JP2010141093A (ja) * | 2008-12-11 | 2010-06-24 | Sony Corp | 半導体装置とその製造方法 |
JP2010147252A (ja) * | 2008-12-18 | 2010-07-01 | Sharp Corp | イオン注入方法、および半導体装置の製造方法 |
JP2011114063A (ja) * | 2009-11-25 | 2011-06-09 | Fujifilm Corp | 固体撮像装置の製造方法 |
JP2011164628A (ja) * | 2011-03-02 | 2011-08-25 | Semiconductor Energy Lab Co Ltd | 電気光学装置の作製方法 |
JP2012064861A (ja) * | 2010-09-17 | 2012-03-29 | Toshiba Corp | 半導体装置の製造方法 |
JP2016192467A (ja) * | 2015-03-31 | 2016-11-10 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
Family Cites Families (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05343308A (ja) * | 1992-06-09 | 1993-12-24 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JP3956258B2 (ja) * | 1998-06-30 | 2007-08-08 | 信越石英株式会社 | 高純度溝切り面を有するシリコンウエーハ熱処理用石英ガラス治具およびその製造方法 |
US20010038153A1 (en) * | 2000-01-07 | 2001-11-08 | Kiyofumi Sakaguchi | Semiconductor substrate and process for its production |
JP2001203167A (ja) * | 2000-01-20 | 2001-07-27 | Hitachi Kokusai Electric Inc | 半導体製造装置 |
TW474023B (en) * | 2001-02-27 | 2002-01-21 | Hannstar Display Corp | Thin film transistor process of liquid crystal display |
US7141455B2 (en) * | 2002-11-25 | 2006-11-28 | Texas Instruments Incorporated | Method to manufacture LDMOS transistors with improved threshold voltage control |
US7372077B2 (en) * | 2003-02-07 | 2008-05-13 | Sanyo Electric Co., Ltd. | Semiconductor device |
KR100496643B1 (ko) * | 2003-10-25 | 2005-06-20 | 한국전자통신연구원 | 마이크로칼럼 전자빔 장치의 자체정렬 적층 금속 박막전자빔 렌즈 및 그 제작방법 |
JP2005150403A (ja) * | 2003-11-14 | 2005-06-09 | Fujitsu Ltd | 半導体装置の製造方法 |
JP2006173501A (ja) * | 2004-12-17 | 2006-06-29 | Sanyo Electric Co Ltd | 半導体装置及びその製造方法 |
KR100687883B1 (ko) * | 2005-09-03 | 2007-02-27 | 주식회사 하이닉스반도체 | 이중 노광용 포토마스크 및 이를 이용한 이중 노광 방법 |
US7662721B2 (en) * | 2006-03-15 | 2010-02-16 | Infineon Technologies Ag | Hard mask layer stack and a method of patterning |
JP5057816B2 (ja) * | 2006-03-27 | 2012-10-24 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JP2009031417A (ja) * | 2007-07-25 | 2009-02-12 | Omron Corp | レーザ転写装置 |
EP2061084A1 (en) | 2007-11-14 | 2009-05-20 | ABB Technology AG | Reverse-conducting insulated gate bipolar transistor and corresponding manufacturing method |
JP4871912B2 (ja) * | 2008-05-19 | 2012-02-08 | 芝浦メカトロニクス株式会社 | 基板の処理装置、ブラシ洗浄装置 |
JP5438945B2 (ja) * | 2008-10-02 | 2014-03-12 | 株式会社半導体エネルギー研究所 | ボンド基板の作製方法 |
US8114720B2 (en) * | 2008-12-25 | 2012-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
CN102024700B (zh) * | 2009-09-17 | 2012-09-26 | 北大方正集团有限公司 | 沟槽型双扩散金属氧化物半导体晶体管的制作方法 |
JP5560897B2 (ja) * | 2010-05-20 | 2014-07-30 | 富士電機株式会社 | 超接合半導体装置の製造方法 |
CN102543670A (zh) * | 2010-12-13 | 2012-07-04 | 中国科学院微电子研究所 | 金属前介质层的平坦化方法 |
JP2012146858A (ja) * | 2011-01-13 | 2012-08-02 | Sharp Corp | レーザドーピング方法および該方法に基づいて製造された半導体基板 |
JP5815254B2 (ja) * | 2011-03-14 | 2015-11-17 | 昭和電工株式会社 | 厚膜金属電極の形成方法、及び厚膜レジストの形成方法 |
US8513078B2 (en) * | 2011-12-22 | 2013-08-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and method for fabricating fin devices |
JP5440623B2 (ja) * | 2012-01-30 | 2014-03-12 | 株式会社日立製作所 | 回路チップ及びこれを搭載したrfid回路装置 |
CN102916024B (zh) * | 2012-10-08 | 2015-12-02 | 上海华力微电子有限公司 | 一种形成双深度隔离沟槽的方法 |
KR102009357B1 (ko) * | 2012-11-26 | 2019-08-09 | 엘지디스플레이 주식회사 | 유기전계 발광소자 및 이의 제조 방법 |
JP6263966B2 (ja) | 2012-12-12 | 2018-01-24 | 富士電機株式会社 | 半導体装置 |
JP6119593B2 (ja) | 2013-12-17 | 2017-04-26 | トヨタ自動車株式会社 | 半導体装置 |
JP2015122133A (ja) * | 2013-12-24 | 2015-07-02 | 株式会社東芝 | パターン形成方法、スタンパーの製造方法、及び磁気記録媒体の製造方法 |
US9324619B2 (en) * | 2014-08-25 | 2016-04-26 | Samsung Electronics Co., Ltd. | Semiconductor device and method of fabricating the same |
JP6638245B2 (ja) * | 2014-12-12 | 2020-01-29 | 王子ホールディングス株式会社 | 半導体発光素子用基板、および、半導体発光素子 |
US9535319B2 (en) * | 2015-03-31 | 2017-01-03 | Globalfoundries Inc. | Reticle, system comprising a plurality of reticles and method for the formation thereof |
KR102619528B1 (ko) * | 2015-12-09 | 2023-12-29 | 삼성전자주식회사 | 포토레지스트 조성물, 패턴 형성 방법 및 반도체 장치의 제조 방법 |
US9831134B1 (en) * | 2016-09-28 | 2017-11-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of manufacturing a semiconductor device having deep wells |
US10157770B2 (en) * | 2016-11-28 | 2018-12-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device having isolation structures with different thickness and method of forming the same |
CN106681042B (zh) * | 2017-01-05 | 2021-01-26 | 京东方科技集团股份有限公司 | 触控显示屏及其制造方法、触控显示装置 |
JP7325167B2 (ja) * | 2017-03-16 | 2023-08-14 | 富士電機株式会社 | 半導体装置の製造方法 |
CN109116674B (zh) * | 2017-06-22 | 2022-01-21 | 华邦电子股份有限公司 | 光罩组及其光刻方法 |
US10591786B2 (en) * | 2017-06-22 | 2020-03-17 | Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Mask structure and manufacturing method for array substrate |
EP3422418B1 (en) * | 2017-06-27 | 2022-09-28 | Infineon Technologies Austria AG | Method of manufacturing a superjunction semiconductor device |
US11901190B2 (en) * | 2017-11-30 | 2024-02-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of patterning |
KR102374206B1 (ko) * | 2017-12-05 | 2022-03-14 | 삼성전자주식회사 | 반도체 장치 제조 방법 |
US10453812B2 (en) * | 2017-12-27 | 2019-10-22 | Intel Corporation | Polarization defined zero misalignment vias for semiconductor packaging |
KR20190085654A (ko) * | 2018-01-11 | 2019-07-19 | 삼성전자주식회사 | 반도체 소자의 제조 방법 |
CN108267926A (zh) * | 2018-01-31 | 2018-07-10 | 京东方科技集团股份有限公司 | 一种掩膜版、显示基板及其制作方法和显示装置 |
JP7084735B2 (ja) * | 2018-01-31 | 2022-06-15 | キヤノン株式会社 | 半導体装置の製造方法 |
-
2017
- 2017-03-16 JP JP2017051240A patent/JP7325167B2/ja active Active
-
2018
- 2018-01-22 CN CN201810058342.7A patent/CN108630532B/zh active Active
- 2018-01-30 US US15/883,393 patent/US10553436B2/en active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06204162A (ja) * | 1992-12-28 | 1994-07-22 | Mitsubishi Electric Corp | 半導体装置の製造方法および該方法に用いられるレジスト組成物 |
JP2001297997A (ja) * | 2000-04-17 | 2001-10-26 | Sony Corp | 半導体装置の製造方法 |
JP2007103418A (ja) * | 2005-09-30 | 2007-04-19 | Seiko Epson Corp | 半導体装置、半導体装置の製造方法、並びに電気光学装置 |
JP2008192737A (ja) * | 2007-02-02 | 2008-08-21 | Denso Corp | 半導体装置 |
JP2009109610A (ja) * | 2007-10-29 | 2009-05-21 | Seiko Epson Corp | 露光用マスク、及び薄膜トランジスタの製造方法 |
JP2010141093A (ja) * | 2008-12-11 | 2010-06-24 | Sony Corp | 半導体装置とその製造方法 |
JP2010147252A (ja) * | 2008-12-18 | 2010-07-01 | Sharp Corp | イオン注入方法、および半導体装置の製造方法 |
JP2011114063A (ja) * | 2009-11-25 | 2011-06-09 | Fujifilm Corp | 固体撮像装置の製造方法 |
JP2012064861A (ja) * | 2010-09-17 | 2012-03-29 | Toshiba Corp | 半導体装置の製造方法 |
JP2011164628A (ja) * | 2011-03-02 | 2011-08-25 | Semiconductor Energy Lab Co Ltd | 電気光学装置の作製方法 |
JP2016192467A (ja) * | 2015-03-31 | 2016-11-10 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11901443B2 (en) | 2018-08-14 | 2024-02-13 | Fuji Electric Co., Ltd. | Semiconductor device and manufacturing method |
JP7101593B2 (ja) | 2018-10-30 | 2022-07-15 | 三菱電機株式会社 | 半導体装置 |
CN111129135A (zh) * | 2018-10-30 | 2020-05-08 | 三菱电机株式会社 | 半导体装置 |
CN111129135B (zh) * | 2018-10-30 | 2023-09-29 | 三菱电机株式会社 | 半导体装置 |
JP2020072137A (ja) * | 2018-10-30 | 2020-05-07 | 三菱電機株式会社 | 半導体装置 |
JP7243744B2 (ja) | 2019-01-18 | 2023-03-22 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
US11355595B2 (en) | 2019-01-18 | 2022-06-07 | Fuji Electric Co., Ltd. | Semiconductor device and method of manufacturing semiconductor device |
JPWO2020149354A1 (ja) * | 2019-01-18 | 2021-09-09 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
WO2020149354A1 (ja) * | 2019-01-18 | 2020-07-23 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP7201093B2 (ja) | 2019-09-05 | 2023-01-10 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JPWO2021044814A1 (ja) * | 2019-09-05 | 2021-03-11 | ||
WO2021044814A1 (ja) * | 2019-09-05 | 2021-03-11 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP7484224B2 (ja) | 2020-03-02 | 2024-05-16 | 富士電機株式会社 | 半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US10553436B2 (en) | 2020-02-04 |
CN108630532B (zh) | 2023-09-12 |
CN108630532A (zh) | 2018-10-09 |
US20180269063A1 (en) | 2018-09-20 |
JP7325167B2 (ja) | 2023-08-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7325167B2 (ja) | 半導体装置の製造方法 | |
US10629441B2 (en) | Method of manufacturing semiconductor device | |
JP6365165B2 (ja) | 半導体装置の製造方法 | |
WO2012124784A1 (ja) | 半導体装置およびその製造方法 | |
JP2015008235A (ja) | 半導体装置の製造方法 | |
US9331211B2 (en) | PN junctions and methods | |
JP5261640B2 (ja) | 半導体装置の製造方法 | |
JP5474068B2 (ja) | 炭化珪素半導体装置の製造方法 | |
JP2007165370A (ja) | 半導体装置及びその製造方法 | |
US20200258998A1 (en) | Method of manufacturing semiconductor device | |
CN111564370A (zh) | 沟槽型功率器件及其制作方法 | |
US10867798B2 (en) | Method of manufacturing semiconductor device | |
US7910449B2 (en) | Semiconductor device and method of manufacturing the same | |
KR100783283B1 (ko) | 반도체 소자 및 그 제조 방법 | |
US4762804A (en) | Method of manufacturing a bipolar transistor having emitter series resistors | |
JP7484224B2 (ja) | 半導体装置の製造方法 | |
TWI837961B (zh) | 半導體裝置與其製造方法 | |
JP2006164997A (ja) | 半導体装置の製造方法 | |
JP7486483B2 (ja) | パワー半導体デバイスおよびそのようなデバイスを製造するためのシャドーマスクフリー方法 | |
US20210272797A1 (en) | Method of manufacturing semiconductor device | |
JP2023073772A (ja) | 半導体装置の製造方法 | |
CN115101578A (zh) | 一种带反向恢复二极管的igbt器件及其制备方法 | |
JP5663275B2 (ja) | 半導体装置の製造方法 | |
KR20100019095A (ko) | 반도체 소자 및 그 제조 방법 | |
KR20070001571A (ko) | 반도체소자의 제조방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200214 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20201112 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210105 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210305 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210907 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20211221 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220210 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20220712 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20221006 |
|
C60 | Trial request (containing other claim documents, opposition documents) |
Free format text: JAPANESE INTERMEDIATE CODE: C60 Effective date: 20221006 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20221017 |
|
C21 | Notice of transfer of a case for reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C21 Effective date: 20221018 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20221228 |
|
C211 | Notice of termination of reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C211 Effective date: 20230105 |
|
C22 | Notice of designation (change) of administrative judge |
Free format text: JAPANESE INTERMEDIATE CODE: C22 Effective date: 20230412 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230623 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230801 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7325167 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |