JP2016534560A5 - - Google Patents

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JP2016534560A5
JP2016534560A5 JP2016534851A JP2016534851A JP2016534560A5 JP 2016534560 A5 JP2016534560 A5 JP 2016534560A5 JP 2016534851 A JP2016534851 A JP 2016534851A JP 2016534851 A JP2016534851 A JP 2016534851A JP 2016534560 A5 JP2016534560 A5 JP 2016534560A5
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Japan
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silicon
composition
precursor
sih
formula
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JP2016534851A
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JP2016534560A (ja
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Priority claimed from PCT/US2014/051162 external-priority patent/WO2015023903A1/en
Publication of JP2016534560A publication Critical patent/JP2016534560A/ja
Publication of JP2016534560A5 publication Critical patent/JP2016534560A5/ja
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JP2016534851A 2013-08-16 2014-08-14 基板へのシリコン注入およびそのためのシリコン前駆体組成物の提供 Pending JP2016534560A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361866918P 2013-08-16 2013-08-16
US61/866,918 2013-08-16
PCT/US2014/051162 WO2015023903A1 (en) 2013-08-16 2014-08-14 Silicon implantation in substrates and provision of silicon precursor compositions therefor

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JP2019044461A Division JP6783338B2 (ja) 2013-08-16 2019-03-12 基板へのシリコン注入およびそのためのシリコン前駆体組成物の提供

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JP2016534560A JP2016534560A (ja) 2016-11-04
JP2016534560A5 true JP2016534560A5 (enExample) 2017-09-21

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JP2016534851A Pending JP2016534560A (ja) 2013-08-16 2014-08-14 基板へのシリコン注入およびそのためのシリコン前駆体組成物の提供
JP2019044461A Active JP6783338B2 (ja) 2013-08-16 2019-03-12 基板へのシリコン注入およびそのためのシリコン前駆体組成物の提供

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Country Status (8)

Country Link
US (1) US11062906B2 (enExample)
EP (1) EP3033765A4 (enExample)
JP (2) JP2016534560A (enExample)
KR (1) KR102306410B1 (enExample)
CN (1) CN105637616A (enExample)
SG (2) SG11201601015RA (enExample)
TW (2) TWI654136B (enExample)
WO (1) WO2015023903A1 (enExample)

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