JP2015532535A - 電気めっき金属グリッドを用いた光起電力装置 - Google Patents
電気めっき金属グリッドを用いた光起電力装置 Download PDFInfo
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- JP2015532535A JP2015532535A JP2015535787A JP2015535787A JP2015532535A JP 2015532535 A JP2015532535 A JP 2015532535A JP 2015535787 A JP2015535787 A JP 2015535787A JP 2015535787 A JP2015535787 A JP 2015535787A JP 2015532535 A JP2015532535 A JP 2015532535A
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 210
- 239000002184 metal Substances 0.000 title claims abstract description 210
- 238000000034 method Methods 0.000 claims description 38
- 230000000873 masking effect Effects 0.000 claims description 29
- 239000002019 doping agent Substances 0.000 claims description 14
- 238000009713 electroplating Methods 0.000 claims description 14
- 238000005240 physical vapour deposition Methods 0.000 claims description 13
- 238000000151 deposition Methods 0.000 claims description 11
- 229910052802 copper Inorganic materials 0.000 claims description 9
- 229910052721 tungsten Inorganic materials 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- 229910021341 titanium silicide Inorganic materials 0.000 claims description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 7
- HBVFXTAPOLSOPB-UHFFFAOYSA-N nickel vanadium Chemical compound [V].[Ni] HBVFXTAPOLSOPB-UHFFFAOYSA-N 0.000 claims description 7
- -1 tantalum silicide nitride Chemical class 0.000 claims description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 6
- 229910052698 phosphorus Inorganic materials 0.000 claims description 6
- 239000011574 phosphorus Substances 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 229910052715 tantalum Inorganic materials 0.000 claims description 5
- 229910052718 tin Inorganic materials 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- 239000010937 tungsten Substances 0.000 claims description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 4
- 229910004200 TaSiN Inorganic materials 0.000 claims description 4
- 229910008484 TiSi Inorganic materials 0.000 claims description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 4
- 229910052796 boron Inorganic materials 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 4
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 3
- 229910021332 silicide Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 239000008151 electrolyte solution Substances 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- CIJJJPBJUGJMME-UHFFFAOYSA-N [Ta].[Ta] Chemical compound [Ta].[Ta] CIJJJPBJUGJMME-UHFFFAOYSA-N 0.000 claims 1
- 229910052720 vanadium Inorganic materials 0.000 claims 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims 1
- 239000010410 layer Substances 0.000 description 145
- 239000000758 substrate Substances 0.000 description 17
- 239000000463 material Substances 0.000 description 15
- 229910021419 crystalline silicon Inorganic materials 0.000 description 13
- 230000035882 stress Effects 0.000 description 13
- 230000032798 delamination Effects 0.000 description 9
- 229920002120 photoresistant polymer Polymers 0.000 description 9
- 238000007639 printing Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 229910052709 silver Inorganic materials 0.000 description 8
- 230000003667 anti-reflective effect Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 238000007747 plating Methods 0.000 description 6
- 239000012790 adhesive layer Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000007650 screen-printing Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- JAONJTDQXUSBGG-UHFFFAOYSA-N dialuminum;dizinc;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Zn+2].[Zn+2] JAONJTDQXUSBGG-UHFFFAOYSA-N 0.000 description 2
- 238000003618 dip coating Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000007641 inkjet printing Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000005360 phosphosilicate glass Substances 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007766 curtain coating Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000002803 fossil fuel Substances 0.000 description 1
- 238000004952 furnace firing Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 238000003631 wet chemical etching Methods 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022433—Particular geometry of the grid contacts
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/02002—Arrangements for conducting electric current to or from the device in operations
- H01L31/02005—Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier
- H01L31/02008—Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier for solar cells or solar cell modules
- H01L31/0201—Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier for solar cells or solar cell modules comprising specially adapted module bus-bar structures
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- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0684—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells double emitter cells, e.g. bifacial solar cells
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
- H01L31/0747—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer
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- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E10/547—Monocrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
Description
[0001]本開示は、概して太陽電池に関する。より具体的には、本開示は、電気めっき技術によって製造された金属グリッドを含む太陽電池に関する。
[0002]化石燃料の使用によって引き起こされた環境への悪影響及びそれらのコストの上昇により、よりクリーンで、安価な代替エネルギー源の緊急の必要性が生じた。異なる形態の代替エネルギー源の中でも、太陽光発電は、そのクリーンさ及び幅広い可用性により好まれてきた。
[0009]本発明の一実施形態は、太陽電池を提供する。太陽電池は、光起電力構造と、光起電力構造の上方に位置する前面金属グリッドとを含む。前面金属グリッドは、1つ又は複数の電気めっき金属層も含む。前面金属グリッドは、1つ又は複数のフィンガーラインも含み、各フィンガーラインの各端部が追加の金属ラインを介して隣接するフィンガーラインの対応する端部に連結されることによって、各フィンガーラインが開放端を有さないことを確実にする。
[0029]以下の説明は、当業者が実施形態を製造及び使用できるように示したものであり、ある具体的な用途及びその要件に関連して提供される。開示された実施形態に対する様々な変更形態が当業者には容易に明白となり、本明細書に定義される一般的原理は、本開示の精神及び範囲から逸脱することなく、他の実施形態及び用途に適用され得る。従って、本発明は、示された実施形態に限定されず、本明細書に開示された原理及び特徴に一致する最も広い範囲に合致するものである。
[0030]本発明の実施形態は、電気めっき金属グリッドを含む太陽電池の金属剥離を回避するための解決策を提供する。太陽電池は、結晶性Si(c−Si)基板、エミッタ層、パッシベーション層、金属接着層、及び前面及び裏面電極金属グリッドを含む。金属接着層は、スパッタリング又は蒸着等の物理的気相成長(PVD)技術を用いて形成される。前面金属グリッドは、金属接着層上に、単一層又は多層構造でもよい金属スタックを選択的に電気めっきすることによって形成される。金属ラインの剥離の原因となり得る応力を軽減するために、グリッドパターンは、開放端又は不連続点が存在しないことを確実にするように特別に設計される。裏面電極金属グリッドは、前面電極金属グリッドの形成に使用されたのと同じ方法を用いて形成することができる。さらに、金属グリッドのスクリーン印刷、電気めっき、又はエアロゾルジェット印刷による裏面電極の形成が可能である。
[0031]太陽電池電極として使用される電気めっき金属グリッドは、印刷されたAlグリッドよりも低い抵抗を示した。しかしながら、電気めっき金属ラインと、その下地の透明導電酸化物(TCO)層又は半導体層との接着が問題点となり得る。たとえ接着層を導入したとしても、電気めっき金属ラインの厚さが増加することから(低抵抗を確実にするため)、応力が高すぎる場合には、金属ラインの剥離がやはり生じ得る。金属ラインの剥離は、電気めっき金属と、その下地構造(これは、TCO層又は半導体構造でもよい)との界面に蓄積された応力の結果の場合がある。金属とシリコン基板との熱膨張係数の差及び太陽電池が置かれた環境の熱サイクルは、このような応力の原因となることが多い。応力の量が接着層によってもたらされた接着強さを上回ると、金属と下地層との結合が壊れる。
Claims (23)
- 光起電力構造と、
前記光起電力構造の上方に位置する前面金属グリッドと、
を含む太陽電池であって、前記前面金属グリッドは、1つ又は複数の電気めっき金属層を含み、前記前面金属グリッドは、1つ又は複数のフィンガーラインを含み、各フィンガーラインの各端部が追加の金属ラインを介して隣接するフィンガーラインの対応する端部に連結されることによって、前記各フィンガーラインが開放端を有さないことを確実にする、太陽電池。 - 前記追加の金属ラインは、前記太陽電池の縁端付近に位置し、前記追加の金属ラインは、前記各フィンガーラインの幅よりも大きな幅を有する、請求項1に記載の太陽電池。
- 前記追加の金属ラインと前記各フィンガーラインとの交差部は、丸みが付けられる又は面取りがされる、請求項1に記載の太陽電池。
- 前記金属グリッドは、前記電気めっき金属層と前記光起電力構造との間に位置する金属接着層をさらに含み、前記金属接着層は、Cu、Al、Co、W、Cr、Mo、Ni、Ti、Ta、窒化チタン(TiNx)、チタンタングステン(TiWx)、ケイ化チタン(TiSix)、ケイ化窒化チタン(TiSiN)、窒化タンタル(TaNx)、ケイ化窒化タンタル(TaSiNx)、ニッケルバナジウム(NiV)、窒化タングステン(WNx)、及びこれらの組み合わせの内の1つ又は複数をさらに含む、請求項1に記載の太陽電池。
- 前記光起電力構造は、透明導電酸化物(TCO)層を含み、前記金属接着層は、直接前記TCO層と接している、請求項4に記載の太陽電池。
- 前記電気めっき金属層は、
Cu層、
Ag層、及び
Sn層
の内の1つ又は複数を含む、請求項1に記載の太陽電池。 - 前記金属グリッドは、前記電気めっき金属層と光起電力構造との間に位置する金属シード層をさらに含む、請求項1に記載の太陽電池。
- 前記金属シード層は、蒸着及びスパッタリング堆積の一方を含む物理的気相成長(PVD)技術を用いて形成される、請求項7に記載の太陽電池。
- 前記各フィンガーラインの所定の縁端部分は、前記各フィンガーラインの中心部分の幅よりも大きな幅を有する、請求項1に記載の太陽電池。
- 前記光起電力構造は、
Siを含むベース層と、
前記ベース層の上方に位置するエミッタ層と、
を含み、前記エミッタ層は、
前記ベース層内に位置するドーパントを拡散させた領域、
前記ベース層の上方に位置するドーパントを拡散させたポリSi層、及び
前記ベース層の上方に位置するドープされたアモルファスSi(a−Si)層
の内の少なくとも1つを含む、請求項1に記載の太陽電池。 - 前記ドーパントは、
リン、及び
ホウ素
の一方を含む、請求項10に記載の太陽電池。 - 前記光起電力構造の下に位置する裏面金属グリッドをさらに含み、前記裏面金属グリッドは、1つ又は複数の電気めっき金属層を含み、前記裏面金属グリッドは、1つ又は複数のフィンガーラインを含み、各フィンガーラインの各端部は、追加の金属ラインを介して隣接するフィンガーラインの対応する端部に連結されることによって、前記各フィンガーラインが開放端を有さないことを確実にする、請求項1に記載の太陽電池。
- 半導体構造の上に透明導電酸化物(TCO)層を堆積させることによって、光起電力構造を形成するステップと、
前記光起電力構造の上に前面金属グリッドを形成するステップと、
を含む、太陽電池の製造方法であって、前記前面金属グリッドは、1つ又は複数の電気めっき金属層を含み、前記前面金属グリッドは、1つ又は複数のフィンガーラインを含み、各フィンガーラインの各端部が追加の金属ラインを介して隣接するフィンガーラインの対応する端部に連結されることにより、前記各フィンガーラインが開放端を有さないことを確実にする、太陽電池の製造方法。 - 前記追加の金属ラインは、前記太陽電池の縁端付近に位置し、前記追加の金属ラインは、前記各フィンガーラインの幅よりも大きな幅を有する、請求項13に記載の方法。
- 前記追加の金属ラインと前記各フィンガーラインとの交差部は、丸みが付けられる又は面取りがされる、請求項13に記載の方法。
- 前記前面金属グリッドの形成ステップは、物理的気相成長(PVD)技術を用いて、前記TCO層の上に金属接着層を堆積させるステップを伴い、前記金属接着層は、Cu、Al、Co、W、Cr、Mo、Ni、Ti、Ta、窒化チタン(TiNx)、チタンタングステン(TiWx)、ケイ化チタン(TiSix)、ケイ化窒化チタン(TiSiN)、窒化タンタル(TaNx)、ケイ化窒化タンタル(TaSiNx)、ニッケルバナジウム(NiV)、窒化タングステン(WNx)、及びこれらの組み合わせの内の1つ又は複数を含む、請求項13に記載の方法。
- 前記電気めっき金属層は、
Cu層、
Ag層、及び
Sn層
の内の1つ又は複数を含む、請求項13に記載の方法。 - 前記前面金属グリッドの形成ステップは、前記電気めっき金属層を形成するステップの前に、物理的気相成長(PVD)技術を用いて金属シード層を堆積させるステップを伴う、請求項13に記載の方法。
- 前記電気めっき金属層の形成ステップは、
前記金属シード層の上にパターニングされたマスキング層を堆積させるステップであって、前記マスキング層の開口部は、前記前面電極グリッドの位置に対応し、前記マスキング層は電気絶縁性である、ステップと、
前記太陽電池を電解質溶液中に沈めることによって、前記パターニングされたマスキング層の上に1つ又は複数の金属層を電気めっきするステップと、
前記パターニングされたマスキング層を除去するステップと、
エッチングプロセスを行うことによって、前記電気めっき金属層によって覆われていない前記金属シード層の部分を除去するステップと、
を伴う、請求項18に記載の方法。 - 前記各フィンガーラインの所定の縁端部分は、前記各フィンガーラインの中心部分の幅よりも大きな幅を有する、請求項13に記載の方法。
- 前記光起電力構造の形成ステップは、低濃度ドープベース層の上にエミッタ層を形成するステップをさらに含み、前記エミッタ層の形成ステップは、
Siを含む低濃度ドープベース層にドーパントを拡散させるステップ、
前記ベース層の上方に位置するポリSi層にドーパントを拡散させるステップ、及び
ドープされたアモルファスSi層を堆積させるステップ
の内の少なくとも1つを伴う、請求項13に記載の方法。 - 前記ドーパントは、
リン、及び
ホウ素
の一方を含む、請求項21に記載の方法。 - 前記光起電力構造の下に位置する裏面金属グリッドを形成するステップをさらに含み、前記裏面金属グリッドは、1つ又は複数の電気めっき金属層を含み、前記裏面金属グリッドは、1つ又は複数のフィンガーラインを含み、各フィンガーラインの各端部が追加の金属ラインを介して隣接するフィンガーラインの対応する端部に連結されることによって、前記各フィンガーラインが開放端を有さないことを確実にする、請求項13に記載の方法。
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AU2016231480B2 (en) | 2016-10-20 |
WO2014055781A1 (en) | 2014-04-10 |
US20140096823A1 (en) | 2014-04-10 |
US9461189B2 (en) | 2016-10-04 |
AU2013326971B2 (en) | 2016-06-30 |
MX342532B (es) | 2016-09-30 |
US9343595B2 (en) | 2016-05-17 |
US20160233354A1 (en) | 2016-08-11 |
EP2904643B1 (en) | 2018-12-05 |
MX2015004291A (es) | 2015-08-06 |
US20150311360A1 (en) | 2015-10-29 |
JP6351601B2 (ja) | 2018-07-04 |
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