JP2013076119A - 銅または銅合金用エッチング液 - Google Patents
銅または銅合金用エッチング液 Download PDFInfo
- Publication number
- JP2013076119A JP2013076119A JP2011215885A JP2011215885A JP2013076119A JP 2013076119 A JP2013076119 A JP 2013076119A JP 2011215885 A JP2011215885 A JP 2011215885A JP 2011215885 A JP2011215885 A JP 2011215885A JP 2013076119 A JP2013076119 A JP 2013076119A
- Authority
- JP
- Japan
- Prior art keywords
- copper
- acid
- group
- etching solution
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010949 copper Substances 0.000 title claims abstract description 84
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 83
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 83
- 229910045601 alloy Inorganic materials 0.000 title abstract 7
- 239000000956 alloy Substances 0.000 title abstract 7
- 238000005530 etching Methods 0.000 claims abstract description 91
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 76
- 239000002253 acid Substances 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 30
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract description 29
- 239000002738 chelating agent Substances 0.000 claims abstract description 24
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 37
- 238000000034 method Methods 0.000 claims description 24
- 125000000217 alkyl group Chemical group 0.000 claims description 21
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 21
- 229910000570 Cupronickel Inorganic materials 0.000 claims description 12
- 150000007524 organic acids Chemical class 0.000 claims description 11
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 8
- ABLZXFCXXLZCGV-UHFFFAOYSA-N phosphonic acid group Chemical group P(O)(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 claims description 7
- 125000004432 carbon atom Chemical group C* 0.000 claims description 6
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 6
- 125000002947 alkylene group Chemical group 0.000 claims description 5
- 229920000768 polyamine Polymers 0.000 claims description 5
- 125000000542 sulfonic acid group Chemical group 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 abstract description 26
- 230000005587 bubbling Effects 0.000 abstract 1
- 150000003839 salts Chemical class 0.000 description 57
- 239000000243 solution Substances 0.000 description 31
- -1 gold metals Chemical class 0.000 description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 238000012360 testing method Methods 0.000 description 12
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 8
- 238000005187 foaming Methods 0.000 description 8
- 239000002518 antifoaming agent Substances 0.000 description 7
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 7
- 238000007654 immersion Methods 0.000 description 7
- 239000007788 liquid Substances 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000006260 foam Substances 0.000 description 4
- LNTHITQWFMADLM-UHFFFAOYSA-N gallic acid Chemical compound OC(=O)C1=CC(O)=C(O)C(O)=C1 LNTHITQWFMADLM-UHFFFAOYSA-N 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical group O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 3
- 239000004743 Polypropylene Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- LHIJANUOQQMGNT-UHFFFAOYSA-N aminoethylethanolamine Chemical compound NCCNCCO LHIJANUOQQMGNT-UHFFFAOYSA-N 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- LQZZUXJYWNFBMV-UHFFFAOYSA-N dodecan-1-ol Chemical compound CCCCCCCCCCCCO LQZZUXJYWNFBMV-UHFFFAOYSA-N 0.000 description 3
- 150000007522 mineralic acids Chemical class 0.000 description 3
- 229920001155 polypropylene Polymers 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000001629 suppression Effects 0.000 description 3
- 239000004094 surface-active agent Substances 0.000 description 3
- TYJJJZBLPWLKNN-UHFFFAOYSA-N 1-[2-(2-aminoethylamino)ethylamino]propan-2-ol Chemical compound CC(O)CNCCNCCN TYJJJZBLPWLKNN-UHFFFAOYSA-N 0.000 description 2
- GKCQLFULQJJWIF-UHFFFAOYSA-N 1-[2-[2-(2-aminoethylamino)ethylamino]ethylamino]propan-2-ol Chemical compound CC(O)CNCCNCCNCCN GKCQLFULQJJWIF-UHFFFAOYSA-N 0.000 description 2
- HVOBSBRYQIYZNY-UHFFFAOYSA-N 2-[2-(2-aminoethylamino)ethylamino]ethanol Chemical compound NCCNCCNCCO HVOBSBRYQIYZNY-UHFFFAOYSA-N 0.000 description 2
- BYACHAOCSIPLCM-UHFFFAOYSA-N 2-[2-[bis(2-hydroxyethyl)amino]ethyl-(2-hydroxyethyl)amino]ethanol Chemical compound OCCN(CCO)CCN(CCO)CCO BYACHAOCSIPLCM-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical group N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- DBVJJBKOTRCVKF-UHFFFAOYSA-N Etidronic acid Chemical compound OP(=O)(O)C(O)(C)P(O)(O)=O DBVJJBKOTRCVKF-UHFFFAOYSA-N 0.000 description 2
- ZRALSGWEFCBTJO-UHFFFAOYSA-N Guanidine Chemical compound NC(N)=N ZRALSGWEFCBTJO-UHFFFAOYSA-N 0.000 description 2
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 2
- ZTHYODDOHIVTJV-UHFFFAOYSA-N Propyl gallate Chemical compound CCCOC(=O)C1=CC(O)=C(O)C(O)=C1 ZTHYODDOHIVTJV-UHFFFAOYSA-N 0.000 description 2
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 239000003963 antioxidant agent Substances 0.000 description 2
- 230000003078 antioxidant effect Effects 0.000 description 2
- 235000006708 antioxidants Nutrition 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 150000007514 bases Chemical class 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 2
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 2
- DSGUSEBCDAKBCM-UHFFFAOYSA-N ethane-1,2-disulfonic acid;dihydrate Chemical compound O.O.OS(=O)(=O)CCS(O)(=O)=O DSGUSEBCDAKBCM-UHFFFAOYSA-N 0.000 description 2
- HVQAJTFOCKOKIN-UHFFFAOYSA-N flavonol Chemical compound O1C2=CC=CC=C2C(=O)C(O)=C1C1=CC=CC=C1 HVQAJTFOCKOKIN-UHFFFAOYSA-N 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- 229940074391 gallic acid Drugs 0.000 description 2
- 235000004515 gallic acid Nutrition 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- SUMDYPCJJOFFON-UHFFFAOYSA-N isethionic acid Chemical compound OCCS(O)(=O)=O SUMDYPCJJOFFON-UHFFFAOYSA-N 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- FBSFWRHWHYMIOG-UHFFFAOYSA-N methyl 3,4,5-trihydroxybenzoate Chemical compound COC(=O)C1=CC(O)=C(O)C(O)=C1 FBSFWRHWHYMIOG-UHFFFAOYSA-N 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- XUYJLQHKOGNDPB-UHFFFAOYSA-N phosphonoacetic acid Chemical compound OC(=O)CP(O)(O)=O XUYJLQHKOGNDPB-UHFFFAOYSA-N 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- CYIDZMCFTVVTJO-UHFFFAOYSA-N pyromellitic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C=C1C(O)=O CYIDZMCFTVVTJO-UHFFFAOYSA-N 0.000 description 2
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 2
- 239000012085 test solution Substances 0.000 description 2
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 2
- PFTAWBLQPZVEMU-DZGCQCFKSA-N (+)-catechin Chemical compound C1([C@H]2OC3=CC(O)=CC(O)=C3C[C@@H]2O)=CC=C(O)C(O)=C1 PFTAWBLQPZVEMU-DZGCQCFKSA-N 0.000 description 1
- DCCWEYXHEXDZQW-BYPYZUCNSA-N (2s)-2-[bis(carboxymethyl)amino]butanedioic acid Chemical compound OC(=O)C[C@@H](C(O)=O)N(CC(O)=O)CC(O)=O DCCWEYXHEXDZQW-BYPYZUCNSA-N 0.000 description 1
- TYISLNPYSBJJMW-UHFFFAOYSA-N 1-[2-aminoethyl-[2-(2-aminoethylamino)ethyl]amino]propan-2-ol Chemical compound CC(O)CN(CCN)CCNCCN TYISLNPYSBJJMW-UHFFFAOYSA-N 0.000 description 1
- LWMWZNOCSCPBCH-UHFFFAOYSA-N 1-[bis[2-[bis(2-hydroxypropyl)amino]ethyl]amino]propan-2-ol Chemical compound CC(O)CN(CC(C)O)CCN(CC(O)C)CCN(CC(C)O)CC(C)O LWMWZNOCSCPBCH-UHFFFAOYSA-N 0.000 description 1
- HXKKHQJGJAFBHI-UHFFFAOYSA-N 1-aminopropan-2-ol Chemical compound CC(O)CN HXKKHQJGJAFBHI-UHFFFAOYSA-N 0.000 description 1
- 125000004066 1-hydroxyethyl group Chemical group [H]OC([H])([*])C([H])([H])[H] 0.000 description 1
- IHPYMWDTONKSCO-UHFFFAOYSA-N 2,2'-piperazine-1,4-diylbisethanesulfonic acid Chemical compound OS(=O)(=O)CCN1CCN(CCS(O)(=O)=O)CC1 IHPYMWDTONKSCO-UHFFFAOYSA-N 0.000 description 1
- VILCJCGEZXAXTO-UHFFFAOYSA-N 2,2,2-tetramine Chemical compound NCCNCCNCCN VILCJCGEZXAXTO-UHFFFAOYSA-N 0.000 description 1
- 125000004825 2,2-dimethylpropylene group Chemical group [H]C([H])([H])C(C([H])([H])[H])(C([H])([H])[*:1])C([H])([H])[*:2] 0.000 description 1
- PQHYOGIRXOKOEJ-UHFFFAOYSA-N 2-(1,2-dicarboxyethylamino)butanedioic acid Chemical compound OC(=O)CC(C(O)=O)NC(C(O)=O)CC(O)=O PQHYOGIRXOKOEJ-UHFFFAOYSA-N 0.000 description 1
- MIJDSYMOBYNHOT-UHFFFAOYSA-N 2-(ethylamino)ethanol Chemical compound CCNCCO MIJDSYMOBYNHOT-UHFFFAOYSA-N 0.000 description 1
- RILLZYSZSDGYGV-UHFFFAOYSA-N 2-(propan-2-ylamino)ethanol Chemical compound CC(C)NCCO RILLZYSZSDGYGV-UHFFFAOYSA-N 0.000 description 1
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 1
- JPGSFSFMINKKJZ-UHFFFAOYSA-N 2-[1,2-dicarboxyethyl(hydroxy)amino]butanedioic acid Chemical compound OC(=O)CC(C(O)=O)N(O)C(CC(O)=O)C(O)=O JPGSFSFMINKKJZ-UHFFFAOYSA-N 0.000 description 1
- MYQSUSHLWUPYLB-UHFFFAOYSA-N 2-[2-(2-aminoethylamino)ethyl-(2-hydroxyethyl)amino]ethanol Chemical compound NCCNCCN(CCO)CCO MYQSUSHLWUPYLB-UHFFFAOYSA-N 0.000 description 1
- LSYBWANTZYUTGJ-UHFFFAOYSA-N 2-[2-(dimethylamino)ethyl-methylamino]ethanol Chemical compound CN(C)CCN(C)CCO LSYBWANTZYUTGJ-UHFFFAOYSA-N 0.000 description 1
- DGZKNRWILMSAAJ-UHFFFAOYSA-N 2-[2-[2-aminoethyl(2-hydroxyethyl)amino]ethylamino]ethanol Chemical compound NCCN(CCO)CCNCCO DGZKNRWILMSAAJ-UHFFFAOYSA-N 0.000 description 1
- URDCARMUOSMFFI-UHFFFAOYSA-N 2-[2-[bis(carboxymethyl)amino]ethyl-(2-hydroxyethyl)amino]acetic acid Chemical compound OCCN(CC(O)=O)CCN(CC(O)=O)CC(O)=O URDCARMUOSMFFI-UHFFFAOYSA-N 0.000 description 1
- ZXNFXBYPFOIXKT-UHFFFAOYSA-N 2-[2-[bis(carboxymethyl)amino]ethyl-(carboxymethyl)amino]-4,4-dihydroxybutanoic acid Chemical compound OC(O)CC(C(O)=O)N(CC(O)=O)CCN(CC(O)=O)CC(O)=O ZXNFXBYPFOIXKT-UHFFFAOYSA-N 0.000 description 1
- CYOIAXUAIXVWMU-UHFFFAOYSA-N 2-[2-aminoethyl(2-hydroxyethyl)amino]ethanol Chemical compound NCCN(CCO)CCO CYOIAXUAIXVWMU-UHFFFAOYSA-N 0.000 description 1
- WUXYGKZSOBYDPP-UHFFFAOYSA-N 2-[bis(2-aminoethyl)amino]ethanol Chemical compound NCCN(CCN)CCO WUXYGKZSOBYDPP-UHFFFAOYSA-N 0.000 description 1
- 229940058020 2-amino-2-methyl-1-propanol Drugs 0.000 description 1
- NLBSQHGCGGFVJW-UHFFFAOYSA-N 2-carboxyethylphosphonic acid Chemical compound OC(=O)CCP(O)(O)=O NLBSQHGCGGFVJW-UHFFFAOYSA-N 0.000 description 1
- BFSVOASYOCHEOV-UHFFFAOYSA-N 2-diethylaminoethanol Chemical compound CCN(CC)CCO BFSVOASYOCHEOV-UHFFFAOYSA-N 0.000 description 1
- 125000004828 2-ethylpropylene group Chemical group [H]C([H])([H])C([H])([H])C([H])(C([H])([H])[*:1])C([H])([H])[*:2] 0.000 description 1
- UTCHNZLBVKHYKC-UHFFFAOYSA-N 2-hydroxy-2-phosphonoacetic acid Chemical compound OC(=O)C(O)P(O)(O)=O UTCHNZLBVKHYKC-UHFFFAOYSA-N 0.000 description 1
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 1
- OFLNEVYCAMVQJS-UHFFFAOYSA-N 2-n,2-n-diethylethane-1,1,1,2-tetramine Chemical compound CCN(CC)CC(N)(N)N OFLNEVYCAMVQJS-UHFFFAOYSA-N 0.000 description 1
- KTLIZDDPOZZHCD-UHFFFAOYSA-N 3-(2-aminoethylamino)propan-1-ol Chemical compound NCCNCCCO KTLIZDDPOZZHCD-UHFFFAOYSA-N 0.000 description 1
- WKCYFSZDBICRKL-UHFFFAOYSA-N 3-(diethylamino)propan-1-ol Chemical compound CCN(CC)CCCO WKCYFSZDBICRKL-UHFFFAOYSA-N 0.000 description 1
- XPIQJMUYUKAKNX-VOTSOKGWSA-N 3-[(2e)-octa-2,7-dienyl]oxolane-2,5-dione Chemical compound C=CCCC\C=C\CC1CC(=O)OC1=O XPIQJMUYUKAKNX-VOTSOKGWSA-N 0.000 description 1
- UWRBFYBQPCJRRL-UHFFFAOYSA-N 3-[bis(carboxymethyl)amino]propanoic acid Chemical compound OC(=O)CCN(CC(O)=O)CC(O)=O UWRBFYBQPCJRRL-UHFFFAOYSA-N 0.000 description 1
- JIGUICYYOYEXFS-UHFFFAOYSA-N 3-tert-butylbenzene-1,2-diol Chemical compound CC(C)(C)C1=CC=CC(O)=C1O JIGUICYYOYEXFS-UHFFFAOYSA-N 0.000 description 1
- CUVGUPIVTLGRGI-UHFFFAOYSA-N 4-(3-phosphonopropyl)piperazine-2-carboxylic acid Chemical compound OC(=O)C1CN(CCCP(O)(O)=O)CCN1 CUVGUPIVTLGRGI-UHFFFAOYSA-N 0.000 description 1
- JXBUOZMYKQDZFY-UHFFFAOYSA-N 4-hydroxybenzene-1,3-disulfonic acid Chemical compound OC1=CC=C(S(O)(=O)=O)C=C1S(O)(=O)=O JXBUOZMYKQDZFY-UHFFFAOYSA-N 0.000 description 1
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Natural products OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- TUYRAIOYNUOFNH-UHFFFAOYSA-N CP(=O)(O)OP(=O)O Chemical compound CP(=O)(O)OP(=O)O TUYRAIOYNUOFNH-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- QPCDCPDFJACHGM-UHFFFAOYSA-N N,N-bis{2-[bis(carboxymethyl)amino]ethyl}glycine Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(=O)O)CCN(CC(O)=O)CC(O)=O QPCDCPDFJACHGM-UHFFFAOYSA-N 0.000 description 1
- JYXGIOKAKDAARW-UHFFFAOYSA-N N-(2-hydroxyethyl)iminodiacetic acid Chemical compound OCCN(CC(O)=O)CC(O)=O JYXGIOKAKDAARW-UHFFFAOYSA-N 0.000 description 1
- CHJJGSNFBQVOTG-UHFFFAOYSA-N N-methyl-guanidine Natural products CNC(N)=N CHJJGSNFBQVOTG-UHFFFAOYSA-N 0.000 description 1
- OPKOKAMJFNKNAS-UHFFFAOYSA-N N-methylethanolamine Chemical compound CNCCO OPKOKAMJFNKNAS-UHFFFAOYSA-N 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical group OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Chemical class 0.000 description 1
- WUGQZFFCHPXWKQ-UHFFFAOYSA-N Propanolamine Chemical compound NCCCO WUGQZFFCHPXWKQ-UHFFFAOYSA-N 0.000 description 1
- MTCFGRXMJLQNBG-UHFFFAOYSA-N Serine Natural products OCC(N)C(O)=O MTCFGRXMJLQNBG-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- SLINHMUFWFWBMU-UHFFFAOYSA-N Triisopropanolamine Chemical compound CC(O)CN(CC(C)O)CC(C)O SLINHMUFWFWBMU-UHFFFAOYSA-N 0.000 description 1
- YDONNITUKPKTIG-UHFFFAOYSA-N [Nitrilotris(methylene)]trisphosphonic acid Chemical compound OP(O)(=O)CN(CP(O)(O)=O)CP(O)(O)=O YDONNITUKPKTIG-UHFFFAOYSA-N 0.000 description 1
- PDIZYYQQWUOPPK-UHFFFAOYSA-N acetic acid;2-(methylamino)acetic acid Chemical compound CC(O)=O.CC(O)=O.CNCC(O)=O PDIZYYQQWUOPPK-UHFFFAOYSA-N 0.000 description 1
- WDJHALXBUFZDSR-UHFFFAOYSA-M acetoacetate Chemical compound CC(=O)CC([O-])=O WDJHALXBUFZDSR-UHFFFAOYSA-M 0.000 description 1
- 230000001476 alcoholic effect Effects 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 125000005263 alkylenediamine group Chemical group 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- CBTVGIZVANVGBH-UHFFFAOYSA-N aminomethyl propanol Chemical compound CC(C)(N)CO CBTVGIZVANVGBH-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000003254 anti-foaming effect Effects 0.000 description 1
- 150000004982 aromatic amines Chemical class 0.000 description 1
- 235000010323 ascorbic acid Nutrition 0.000 description 1
- 229960005070 ascorbic acid Drugs 0.000 description 1
- 239000011668 ascorbic acid Substances 0.000 description 1
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Classifications
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Abstract
【解決手段】 銅または銅合金とニッケルを同時に有する電子基板から銅または銅合金を選択的にエッチングする工程用のエッチング液であって、鎖状アルカノールアミン(A)、酸基を分子内に有するキレート剤(B)、および過酸化水素(C)を必須成分とする銅または銅合金用エッチング液を使用する。
【選択図】 図4
Description
すなわち、本発明は、銅または銅合金とニッケルを同時に有する電子基板から銅または銅合金を選択的にエッチングする工程用のエッチング液であって、鎖状アルカノールアミン(A)、酸基を分子内に有するキレート剤(B)、および過酸化水素(C)を必須成分とする銅または銅合金用エッチング液;並びにこのエッチング液を用いて、銅または銅合金とニッケルを同時に有する電子基板から選択的に銅または銅合金をエッチングする工程を含むことを特徴とする電子基板の製造方法である。
このような一部が水酸基で置換されているアルキル基としては、ヒドロキシメチル基、1−ヒドロキシエチル基、2−ヒドロキシエチル基、1−ヒドロキシプロピル基、2−ヒドロキシプロピル基、3−ヒドロキシプロピル基、1−ヒドロキシイソプロピル基、2−ヒドロキシイソプロピル基、ジヒドロキシメチル基、1,1−ジヒドロキシエチル基、1,2−ジヒドロキシエチル基、2、3−ジヒドロキシプロピル基、1,2,3−トリヒドロキシプロピル基などが挙げられる。
具体的には、メチレン基、エチレン基、プロピレン基、テトラメチレン基、ブチレン基、2,2−ジメチルプロピレン基、2−エチルプロピレン基などが挙げられる。
Y1及びY2で示されるアルキレン基の炭素数は、エッチング液の泡立ち抑制等の観点から、1〜4が好ましく、さらに好ましくは1〜3、特に好ましくは2である。
HLB値は有機化合物の有機性の値と無機性の値との比率から計算することができる。
HLB≒10×無機性/有機性
HLBを導き出すための有機性の値及び無機性の値については前記「界面活性剤入門」213頁に記載の表の値を用いて算出できる。
本発明のおける酸基を分子内に有するキレート剤(B)は、キレート効果を有するための官能基を2個以上有するものであって、そのうちの1個以上が酸基であれば、他の官能基はアルコール性水酸基、フェノール性水酸基、二トリル基、チオール基、アミノ基などでもよい。
本発明のおけるキレート剤(B)中の酸基としては、カルボキシル基、ホスホン基、スルホン基、リン酸基、硫酸基、硝酸基、ホウ酸基などが挙げられる。
なお、キレート剤(B)は、エッチング液中で塩の形で含有してもよい。
また、酸基を分子内に有するキレート剤(B)としては、キレート効果を示す水酸基を分子内に有するものであれば、酸基としてカルボキシル基、ホスホン酸基またはスルホン酸基を1個だけ含むキレート剤(B5)であっても差しつかえない。
エッチング液の溶剤として取り扱いやすさの観点から好ましいのは水である。
酸化防止剤としては、カテキン、トコフェロール、カテコール、メチルカテコール、エチルカテコール、tert−ブチルカテコール、没食子酸、没食子酸メチル、没食子酸プロピル等のフェノール類、3−ヒドロキシフラボン、アスコルビン酸等が挙げられる。
その目的で添加する塩基性化合物は、アンモニア、アミンまたはテトラアルキルアンモニウムヒドロキシド、含窒素複素環式化合物である。アミンとしては、脂肪族アミン、アルキレンジアミン、ポリアルキレンポリアミン、芳香族アミン、脂環式アミン、グアニジンなどが挙げられる。
また、その目的で添加する酸性化合物は、硫酸、塩酸、硝酸、フッ化水素酸などの無機酸、酢酸などの有機酸である。
消泡剤としては、シリコーン消泡剤、長鎖アルコール消泡剤、脂肪酸エステル消泡剤及び金属セッケン消泡剤等が挙げられる。エチレンオキサイドプロピレンオキサイド共重合体も消泡剤として使用することができる。
表1に記載した鎖状アルカノールアミン(A)、酸基を分子内に有するキレート剤(B)、過酸化水素(C)、および水をポリプロピレン製の容器中で混合して、本発明のエッチング液と比較のためのエッチング液を得た。
(A−1):トリエタノールアミン
(A−2):2−[(2−アミノエチル)アミノ]エタノール
(A−3):1、2−ビス[ジ(ヒドロキシエチル)アミノ]エタン(三洋化成工業(株)製、商品名「サンニックス NE−240」)
(A’−1):ラウリルアルコールのEO9モル付加物
(B−1):クエン酸
(B−2):60%1−ヒドロキシエチリデン−1,1−ジホスホン酸の水溶液
(B−3):1,2−エタンジスルホン酸二水和物
(B−4):ニトリロトリスメチレンホスホン酸
(B’−1):エチレンジアミン
(C−1):35%過酸化水素水
抑泡性はロス・マイルス試験[JISK3362(1998)]に準じて測定することができ、本JISで定める装置、また試験液として超純水を用いて調整したエッチング剤を用いた試験により、全ての試験液を流出した直後の泡の高さ(mm)を目視にて測定し、下記の判定基準で抑泡性を評価した。
○:50mm未満
×:50mm以上
銅のエッチング時間を、以下の操作方法で銅シード層の光沢が消失するまでの時間(分)で評価した。
(1)シリコン基板に加工を加えて図4の状態まで作成したウエハ(銅シード層の厚み1μm)を15mm角の正方形に切断してテストピースを作成した。
なお、走査型電子顕微鏡(日立ハイテク社製S−4800)でウエハを1cm各に切断したテストピースの断面を観察したところ、バンプの幅は約30μm、バンプの高さは約8μmであった。銅シード層の厚みは1μmであった。
(2)エッチング液をポリプロピレン製の容器に入れて、この中に上記のテストピースを浸漬し、マグネチックスターラーで撹拌した。
(3)撹拌しながら液中に浸漬した状態でテストピースの表面を目視で観察し、銅シード層の全面の銅の光沢が消失する(図5の3:チタン層の全面が見える状態)までの時間を測定した。
この目的で使用されるエッチング液においては、銅光沢の消失時間が10分以内であることが好ましい。
なお、60分で光沢が消失しなかったものは、60分で浸漬を中止し、表1中には「>60」と表記した。
ニッケルのエッチング量およびニッケル/銅のエッチングレート比を、以下の操作方法で測定し、評価した。
(1)シリコン基板に加工を加えて図4の状態まで作成したウエハ(銅シード層の厚み1μm)を15mm角の正方形に切断してテストピースを作成した。
(2)エッチング液をポリプロピレン製の容器に入れて、この中に上記のテストピースを1分間浸漬してマグネチックスターラーで撹拌した後、取り出した。
(3)走査型電子顕微鏡(日立ハイテク社製S−4800)で、浸漬前のテストピースと浸漬後のテストピースのそれぞれニッケル層の浸食の程度とその幅が確認できる側面の写真撮影をした。そして、写真画像から、浸漬前のテストピースのニッケル層(図4の7)の幅A1(μm)と、浸漬後のテストピースのニッケル層(図5の7)の幅A2(μm)を測定した。
(4)ニッケルのエッチング量として、下記数式(1)で算出される浸漬前後のテストピースのニッケル層の幅の変化(差)ΔANiを算出した。
○:1μm未満
×:1μm以上
(5)読み取った2つの値及び銅のエッチング時間を下記数式(2)に代入しニッケル/銅のエッチングレート比を算出した。
TNi:ニッケルのエッチング時間で、本評価法では1分
ACu:銅シード層の厚みで、本評価法では1μm
○:0.5未満
×:0.5以上
鎖状アルカノールアミンを含んでいない比較例3では、銅シード層のエッチングは速いものの、ニッケルをエッチングしてしまい、高選択的に銅シード層をエッチングできない。
鎖状アルカノールアミン(A)の代わりにラウリルアルコールのEO9モル付加物(A’−1)を使用した比較例4では、高選択的に銅シード層をエッチングするが、泡立ちは多くなってしまう。
酸基を分子内に有しないキレート剤(B’−1)を使用した比較例5についても銅シード層のエッチングは遅い。
また、キレート剤の代わりに硫酸を使用した比較例6についてはニッケルをエッチングしてしまう。
1: シリコン基板
2: シリコン酸化膜
3: チタン層
4: 銅シード層
5: レジスト樹脂
6: 銅めっき層
7: ニッケルめっき層
8: 金めっき層
9: バンプ
Claims (8)
- 銅または銅合金とニッケルを同時に有する電子基板から銅または銅合金を選択的にエッチングする工程用のエッチング液であって、鎖状アルカノールアミン(A)、酸基を分子内に有するキレート剤(B)、および過酸化水素(C)を必須成分とすることを特徴とする銅または銅合金用エッチング液。
- 該鎖状アルカノールアミン(A)が下記一般式(1)で表される鎖状アルカノールモノアミン(A1)または下記一般式(2)で表される鎖状アルカノールポリアミン(A2)である請求項1記載のエッチング液。
- 該鎖状アルカノールアミン(A)のHLBが12〜45である請求項1または2記載のエッチング液。
- 該キレート剤(B)が、ホスホン酸基および/またはスルホン酸基を分子内に合計2個以上有する有機酸である請求項1〜3いずれか記載のエッチング液。
- 該キレート剤(B)がカルボキシル基を分子内に2個以上有する有機酸である請求項1〜3いずれか記載のエッチング液。
- 該鎖状アルカノールアミン(A)と該キレート剤(B)の重量比(B)/(A)が1〜100である請求項1〜5いずれか記載のエッチング液。
- 該キレート剤(B)と過酸化水素(C)の重量比(B)/(C)が1〜30である請求項1〜6いずれか記載のエッチング液。
- 請求項1〜7いずれか記載の銅または銅合金用エッチング液を用いて、銅または銅合金とニッケルを同時に有する電子基板から選択的に銅または銅合金をエッチングする工程を含むことを特徴とする電子基板の製造方法。
Priority Applications (7)
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JP2011215885A JP5933950B2 (ja) | 2011-09-30 | 2011-09-30 | 銅または銅合金用エッチング液 |
TW101135853A TWI565835B (zh) | 2011-09-30 | 2012-09-28 | 銅或銅合金用蝕刻液及使用其之電子基板製造方法 |
KR1020197018287A KR102055161B1 (ko) | 2011-09-30 | 2012-09-28 | 구리 또는 구리 합금용 에칭액 |
PCT/IB2012/003029 WO2013076587A2 (ja) | 2011-09-30 | 2012-09-28 | 銅または銅合金用エッチング液 |
US14/348,115 US9175404B2 (en) | 2011-09-30 | 2012-09-28 | Etching agent for copper or copper alloy |
KR1020147011679A KR101995090B1 (ko) | 2011-09-30 | 2012-09-28 | 구리 또는 구리 합금용 에칭액 |
US14/929,803 US9790600B2 (en) | 2011-09-30 | 2015-11-02 | Etching agent for copper or copper alloy |
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JP2011215885A JP5933950B2 (ja) | 2011-09-30 | 2011-09-30 | 銅または銅合金用エッチング液 |
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US9790600B2 (en) | 2017-10-17 |
WO2013076587A4 (ja) | 2014-02-20 |
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KR102055161B1 (ko) | 2019-12-13 |
TW201319320A (zh) | 2013-05-16 |
TWI565835B (zh) | 2017-01-11 |
KR20140068255A (ko) | 2014-06-05 |
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US20160053383A1 (en) | 2016-02-25 |
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