JP2012074712A5 - - Google Patents
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- JP2012074712A5 JP2012074712A5 JP2011235682A JP2011235682A JP2012074712A5 JP 2012074712 A5 JP2012074712 A5 JP 2012074712A5 JP 2011235682 A JP2011235682 A JP 2011235682A JP 2011235682 A JP2011235682 A JP 2011235682A JP 2012074712 A5 JP2012074712 A5 JP 2012074712A5
- Authority
- JP
- Japan
- Prior art keywords
- purge gas
- gas mixture
- humidifier
- region
- moisture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/623,180 US7384149B2 (en) | 2003-07-21 | 2003-07-21 | Lithographic projection apparatus, gas purging method and device manufacturing method and purge gas supply system |
| US10/623,180 | 2003-07-21 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006521216A Division JP2006528431A (ja) | 2003-07-21 | 2004-07-21 | リソグラフ投影装置、パージガス供給システムおよびガスパージ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012074712A JP2012074712A (ja) | 2012-04-12 |
| JP2012074712A5 true JP2012074712A5 (enExample) | 2013-02-07 |
Family
ID=34079792
Family Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006521023A Expired - Lifetime JP4487108B2 (ja) | 2003-07-21 | 2004-07-20 | リソグラフィ投影装置、ガスパージ方法、デバイス製造方法およびパージガス供給システム |
| JP2006521216A Withdrawn JP2006528431A (ja) | 2003-07-21 | 2004-07-21 | リソグラフ投影装置、パージガス供給システムおよびガスパージ |
| JP2007299182A Withdrawn JP2008160080A (ja) | 2003-07-21 | 2007-11-19 | リソグラフ投影装置、パージガス供給システムおよびガスパージ |
| JP2011235682A Withdrawn JP2012074712A (ja) | 2003-07-21 | 2011-10-27 | リソグラフ投影装置、パージガス供給システムおよびガスパージ |
Family Applications Before (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006521023A Expired - Lifetime JP4487108B2 (ja) | 2003-07-21 | 2004-07-20 | リソグラフィ投影装置、ガスパージ方法、デバイス製造方法およびパージガス供給システム |
| JP2006521216A Withdrawn JP2006528431A (ja) | 2003-07-21 | 2004-07-21 | リソグラフ投影装置、パージガス供給システムおよびガスパージ |
| JP2007299182A Withdrawn JP2008160080A (ja) | 2003-07-21 | 2007-11-19 | リソグラフ投影装置、パージガス供給システムおよびガスパージ |
Country Status (9)
| Country | Link |
|---|---|
| US (4) | US7384149B2 (enExample) |
| EP (3) | EP1649325B1 (enExample) |
| JP (4) | JP4487108B2 (enExample) |
| KR (3) | KR100846184B1 (enExample) |
| CN (3) | CN1853142B (enExample) |
| DE (1) | DE602004027497D1 (enExample) |
| SG (1) | SG141460A1 (enExample) |
| TW (3) | TWI251130B (enExample) |
| WO (2) | WO2005008339A2 (enExample) |
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2003
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2004
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- 2004-07-20 WO PCT/NL2004/000519 patent/WO2005008339A2/en not_active Ceased
- 2004-07-20 CN CN2004800266052A patent/CN1853142B/zh not_active Expired - Lifetime
- 2004-07-20 US US10/894,365 patent/US7113254B2/en not_active Expired - Lifetime
- 2004-07-20 JP JP2006521023A patent/JP4487108B2/ja not_active Expired - Lifetime
- 2004-07-20 TW TW093121654A patent/TWI251130B/zh not_active IP Right Cessation
- 2004-07-20 KR KR1020067001345A patent/KR100846184B1/ko not_active Expired - Fee Related
- 2004-07-21 US US10/565,486 patent/US7879137B2/en not_active Expired - Fee Related
- 2004-07-21 TW TW093121732A patent/TW200511389A/zh unknown
- 2004-07-21 KR KR1020077023567A patent/KR20070106805A/ko not_active Abandoned
- 2004-07-21 KR KR1020067001321A patent/KR101077683B1/ko not_active Expired - Fee Related
- 2004-07-21 DE DE602004027497T patent/DE602004027497D1/de not_active Expired - Lifetime
- 2004-07-21 EP EP04757185A patent/EP1646915B1/en not_active Expired - Lifetime
- 2004-07-21 JP JP2006521216A patent/JP2006528431A/ja not_active Withdrawn
- 2004-07-21 CN CN2007101812213A patent/CN101144986B/zh not_active Expired - Fee Related
- 2004-07-21 EP EP10162412A patent/EP2211233A2/en not_active Withdrawn
- 2004-07-21 WO PCT/US2004/023490 patent/WO2005010619A2/en not_active Ceased
- 2004-07-21 TW TW096131640A patent/TW200801848A/zh unknown
- 2004-07-21 CN CN200480021018A patent/CN100590530C/zh not_active Expired - Fee Related
- 2004-07-21 SG SG200802367-3A patent/SG141460A1/en unknown
-
2006
- 2006-09-25 US US11/525,934 patent/US7450215B2/en not_active Expired - Lifetime
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2007
- 2007-11-19 JP JP2007299182A patent/JP2008160080A/ja not_active Withdrawn
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2011
- 2011-10-27 JP JP2011235682A patent/JP2012074712A/ja not_active Withdrawn
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