JP2011510133A - シルセスキオキサン樹脂 - Google Patents

シルセスキオキサン樹脂 Download PDF

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Publication number
JP2011510133A
JP2011510133A JP2010543104A JP2010543104A JP2011510133A JP 2011510133 A JP2011510133 A JP 2011510133A JP 2010543104 A JP2010543104 A JP 2010543104A JP 2010543104 A JP2010543104 A JP 2010543104A JP 2011510133 A JP2011510133 A JP 2011510133A
Authority
JP
Japan
Prior art keywords
value
group
silsesquioxane resin
composition
solvent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010543104A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011510133A5 (enExample
Inventor
フゥ、プオン−フェイ
モイヤー、エリック・スコット
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Silicones Corp
Original Assignee
Dow Corning Corp
Dow Silicones Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning Corp, Dow Silicones Corp filed Critical Dow Corning Corp
Publication of JP2011510133A publication Critical patent/JP2011510133A/ja
Publication of JP2011510133A5 publication Critical patent/JP2011510133A5/ja
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/54Silicon-containing compounds
    • C08K5/541Silicon-containing compounds containing oxygen
    • C08K5/5415Silicon-containing compounds containing oxygen containing at least one Si—O bond
    • C08K5/5419Silicon-containing compounds containing oxygen containing at least one Si—O bond containing at least one Si—C bond
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04Polysiloxanes
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04Polysiloxanes
    • C08G77/045Polysiloxanes containing less than 25 silicon atoms
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/04Polysiloxanes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/111Anti-reflection coatings using layers comprising organic materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/075Silicon-containing compounds
    • G03F7/0752Silicon-containing compounds in non photosensitive layers or as additives, e.g. for dry lithography
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04Polysiloxanes
    • C08G77/12Polysiloxanes containing silicon bound to hydrogen
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04Polysiloxanes
    • C08G77/14Polysiloxanes containing silicon bound to oxygen-containing groups
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04Polysiloxanes
    • C08G77/20Polysiloxanes containing silicon bound to unsaturated aliphatic groups
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/70Siloxanes defined by use of the MDTQ nomenclature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Silicon Polymers (AREA)
  • Paints Or Removers (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
JP2010543104A 2008-01-15 2008-11-18 シルセスキオキサン樹脂 Pending JP2011510133A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US2109708P 2008-01-15 2008-01-15
PCT/US2008/083849 WO2009091440A1 (en) 2008-01-15 2008-11-18 Silsesquioxane resins

Publications (2)

Publication Number Publication Date
JP2011510133A true JP2011510133A (ja) 2011-03-31
JP2011510133A5 JP2011510133A5 (enExample) 2011-11-24

Family

ID=40885585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010543104A Pending JP2011510133A (ja) 2008-01-15 2008-11-18 シルセスキオキサン樹脂

Country Status (7)

Country Link
US (1) US9023433B2 (enExample)
EP (1) EP2238198A4 (enExample)
JP (1) JP2011510133A (enExample)
KR (1) KR20100114075A (enExample)
CN (1) CN101910253B (enExample)
TW (1) TWI437048B (enExample)
WO (1) WO2009091440A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2013008825A1 (ja) * 2011-07-11 2015-02-23 株式会社トクヤマ フォトクロミック硬化性組成物
WO2019235072A1 (ja) * 2018-06-06 2019-12-12 富士フイルム株式会社 組成物、ハードコートフィルム、ハードコートフィルムを備えた物品、及び画像表示装置
WO2020021931A1 (ja) * 2018-07-27 2020-01-30 富士フイルム株式会社 ハードコートフィルム、ハードコートフィルムを備えた物品、及び画像表示装置

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101970540B (zh) * 2008-03-05 2014-07-23 陶氏康宁公司 倍半硅氧烷树脂
CN102245722B (zh) * 2008-12-10 2014-12-10 陶氏康宁公司 可转换的抗反射涂层
WO2010068336A1 (en) 2008-12-10 2010-06-17 Dow Corning Corporation Silsesquioxane resins
JP5765538B2 (ja) * 2010-05-13 2015-08-19 日産化学工業株式会社 熱硬化性樹脂組成物及びディスプレイ装置
CN101891893B (zh) * 2010-07-23 2012-01-04 深圳市安品有机硅材料有限公司 Led封装用苯基氢基硅树脂的制备方法
US9086626B2 (en) * 2011-03-29 2015-07-21 Dow Corning Corporation Photo-patternable and developable silsesquioxane resins for use in device fabrication
US20140178698A1 (en) 2012-12-21 2014-06-26 3M Innovative Properties Company Curable silsesquioxane polymers, compositions, articles, and methods
JP2016507613A (ja) * 2012-12-21 2016-03-10 スリーエム イノベイティブ プロパティズ カンパニー 硬化性シルセスキオキサンポリマー、組成物、物品、及び方法
US8999625B2 (en) 2013-02-14 2015-04-07 International Business Machines Corporation Silicon-containing antireflective coatings including non-polymeric silsesquioxanes
KR101665308B1 (ko) * 2014-06-05 2016-10-13 한국과학기술연구원 양이온 경화성을 갖는 폴리에폭시계실세스퀴옥산 및 이를 이용한 고강도 필름
CN104356392B (zh) * 2014-11-07 2017-04-19 广州市白云化工实业有限公司 笼型枝状有机硅树脂及其制备方法和应用
TWI742160B (zh) 2016-09-30 2021-10-11 美商道康寧公司 橋接聚矽氧樹脂、膜、電子裝置及相關方法
TWI747956B (zh) 2016-09-30 2021-12-01 美商道康寧公司 橋接聚矽氧樹脂、膜、電子裝置及相關方法
KR20200037295A (ko) * 2017-07-28 2020-04-08 다우 실리콘즈 코포레이션 포지티브 포토레지스트 특징과 네거티브 포토레지스트 특징 둘 모두를 갖는 실세스퀴옥산 조성물
JP7119997B2 (ja) * 2018-12-28 2022-08-17 信越化学工業株式会社 感光性樹脂組成物、積層体、及びパターン形成方法
CN110452384B (zh) * 2019-08-30 2020-10-23 北京理工大学 一种笼型结构环氧基苯基硅倍半氧烷及其制备方法
CN111100463A (zh) * 2019-12-26 2020-05-05 广东盈骅新材料科技有限公司 环氧改性硅树脂组合物及其应用
CN115485350B (zh) 2020-05-07 2025-04-22 美国陶氏有机硅公司 有机硅混合压敏粘合剂及其制备方法和在不均匀表面上的用途
CN115516056B (zh) 2020-05-07 2025-04-25 美国陶氏有机硅公司 有机硅混合压敏粘合剂及其制备方法和在用于(光)电子装置制造的保护性膜中使用的方法
KR20230070489A (ko) 2020-09-22 2023-05-23 다우 실리콘즈 코포레이션 경화성 실리콘-(메트)아크릴레이트 조성물 및 이의 제조 및 사용 방법

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005517784A (ja) * 2002-02-19 2005-06-16 ハネウェル・インターナショナル・インコーポレーテッド オルガノシロキサン
JP2006503165A (ja) * 2002-06-03 2006-01-26 ハネウエル・インターナシヨナル・インコーポレーテツド オルガノシロキサン
US20060128163A1 (en) * 2004-12-14 2006-06-15 International Business Machines Corporation Surface treatment of post-rie-damaged p-osg and other damaged materials
WO2006065321A1 (en) * 2004-12-17 2006-06-22 Dow Corning Corporation Method for forming anti-reflective coating
WO2007148223A2 (en) * 2006-06-22 2007-12-27 Az Electronic Materials Usa Corp. Antireflective coating compositions comprising siloxane polymer
JP2008524650A (ja) * 2004-12-17 2008-07-10 ダウ・コーニング・コーポレイション 反射防止膜の形成方法
JP2010519584A (ja) * 2007-02-20 2010-06-03 エイゼット・エレクトロニック・マテリアルズ・ユーエスエイ・コーポレイション ケイ素ポリマーに基づく反射防止膜用組成物
JP2010519362A (ja) * 2007-02-26 2010-06-03 エイゼット・エレクトロニック・マテリアルズ・ユーエスエイ・コーポレイション シロキサンポリマーの製造方法
JP2011515514A (ja) * 2008-03-04 2011-05-19 ダウ・コーニング・コーポレイション シルセスキオキサン樹脂
JP2011517706A (ja) * 2008-03-05 2011-06-16 ダウ・コーニング・コーポレイション シルセスキオキサン樹脂
JP2012511742A (ja) * 2008-12-10 2012-05-24 ダウ コーニング コーポレーション 湿式エッチング可能な反射防止膜
JP2012511743A (ja) * 2008-12-10 2012-05-24 ダウ コーニング コーポレーション 切り替え可能な反射防止膜
JP2012511619A (ja) * 2008-12-10 2012-05-24 ダウ コーニング コーポレーション シルセスキオキサン樹脂

Family Cites Families (77)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4587138A (en) * 1984-11-09 1986-05-06 Intel Corporation MOS rear end processing
US5010159A (en) * 1989-09-01 1991-04-23 Dow Corning Corporation Process for the synthesis of soluble, condensed hydridosilicon resins containing low levels of silanol
US5100503A (en) * 1990-09-14 1992-03-31 Ncr Corporation Silica-based anti-reflective planarizing layer
US5210168A (en) * 1992-04-02 1993-05-11 Dow Corning Corporation Process for forming siloxane bonds
EP0568476B1 (en) * 1992-04-30 1995-10-11 International Business Machines Corporation Silicon-containing positive resist and method of using the same in thin film packaging technology
JPH0656560A (ja) 1992-08-10 1994-03-01 Sony Corp Sog組成物及びそれを用いた半導体装置の製造方法
US5484867A (en) * 1993-08-12 1996-01-16 The University Of Dayton Process for preparation of polyhedral oligomeric silsesquioxanes and systhesis of polymers containing polyhedral oligomeric silsesqioxane group segments
US5412053A (en) * 1993-08-12 1995-05-02 The University Of Dayton Polymers containing alternating silsesquioxane and bridging group segments and process for their preparation
US5441765A (en) * 1993-09-22 1995-08-15 Dow Corning Corporation Method of forming Si-O containing coatings
JP3499032B2 (ja) * 1995-02-02 2004-02-23 ダウ コーニング アジア株式会社 放射線硬化性組成物、その硬化方法及びパターン形成方法
JP3324360B2 (ja) * 1995-09-25 2002-09-17 信越化学工業株式会社 ポリシロキサン化合物及びポジ型レジスト材料
GB9521996D0 (en) * 1995-10-27 1996-01-03 Boc Group Plc Air separation
JPH09124794A (ja) * 1995-11-06 1997-05-13 Dow Corning Asia Ltd 有機光機能材を含有するポリシロキサン樹脂組成物及びそれから得られる透明な光機能素子
JP3192947B2 (ja) * 1995-11-16 2001-07-30 東京応化工業株式会社 シリカ系被膜形成用塗布液の製造方法
JPH09221630A (ja) 1996-02-13 1997-08-26 Showa Denko Kk 塗料組成物及びそれを用いて得られる塗膜
US6143855A (en) * 1997-04-21 2000-11-07 Alliedsignal Inc. Organohydridosiloxane resins with high organic content
US6057239A (en) * 1997-12-17 2000-05-02 Advanced Micro Devices, Inc. Dual damascene process using sacrificial spin-on materials
US6344284B1 (en) * 1998-04-10 2002-02-05 Organic Display Technology Organic electroluminescent materials and devices made from such materials
US6156640A (en) * 1998-07-14 2000-12-05 United Microelectronics Corp. Damascene process with anti-reflection coating
US6087064A (en) * 1998-09-03 2000-07-11 International Business Machines Corporation Silsesquioxane polymers, method of synthesis, photoresist composition, and multilayer lithographic method
US6177143B1 (en) * 1999-01-06 2001-01-23 Allied Signal Inc Electron beam treatment of siloxane resins
US6461955B1 (en) * 1999-04-29 2002-10-08 Texas Instruments Incorporated Yield improvement of dual damascene fabrication through oxide filling
US6281285B1 (en) * 1999-06-09 2001-08-28 Dow Corning Corporation Silicone resins and process for synthesis
US6509259B1 (en) * 1999-06-09 2003-01-21 Alliedsignal Inc. Process of using siloxane dielectric films in the integration of organic dielectric films in electronic devices
AU5600200A (en) * 1999-06-10 2001-01-02 Allied-Signal Inc. Spin-on-glass anti-reflective coatings for photolithography
WO2003044078A1 (en) 2001-11-15 2003-05-30 Honeywell International Inc. Anti-reflective coatings for photolithography and methods of preparation thereof
US6824879B2 (en) 1999-06-10 2004-11-30 Honeywell International Inc. Spin-on-glass anti-reflective coatings for photolithography
US6268457B1 (en) * 1999-06-10 2001-07-31 Allied Signal, Inc. Spin-on glass anti-reflective coatings for photolithography
US6890448B2 (en) * 1999-06-11 2005-05-10 Shipley Company, L.L.C. Antireflective hard mask compositions
KR100708492B1 (ko) 1999-06-15 2007-04-16 아이피.원 피티와이. 엘티디. 비복귀형 밸브
US6329118B1 (en) * 1999-06-21 2001-12-11 Intel Corporation Method for patterning dual damascene interconnects using a sacrificial light absorbing material
US6982006B1 (en) * 1999-10-19 2006-01-03 Boyers David G Method and apparatus for treating a substrate with an ozone-solvent solution
US6359096B1 (en) * 1999-10-25 2002-03-19 Dow Corning Corporation Silicone resin compositions having good solution solubility and stability
KR100355604B1 (ko) * 1999-12-23 2002-10-12 주식회사 하이닉스반도체 난반사 방지막용 중합체와 그 제조방법
JP3795333B2 (ja) * 2000-03-30 2006-07-12 東京応化工業株式会社 反射防止膜形成用組成物
US6420088B1 (en) * 2000-06-23 2002-07-16 International Business Machines Corporation Antireflective silicon-containing compositions as hardmask layer
US6420084B1 (en) * 2000-06-23 2002-07-16 International Business Machines Corporation Mask-making using resist having SIO bond-containing polymer
US20030176614A1 (en) * 2000-06-30 2003-09-18 Nigel Hacker Organohydridosiloxane resins with high organic content
US6368400B1 (en) * 2000-07-17 2002-04-09 Honeywell International Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography
JP4141625B2 (ja) * 2000-08-09 2008-08-27 東京応化工業株式会社 ポジ型レジスト組成物およびそのレジスト層を設けた基材
EP1197998A3 (en) * 2000-10-10 2005-12-21 Shipley Company LLC Antireflective porogens
TW538319B (en) * 2000-10-10 2003-06-21 Shipley Co Llc Antireflective composition, method for forming antireflective coating layer, and method for manufacturing electronic device
JP3931951B2 (ja) 2001-03-13 2007-06-20 信越化学工業株式会社 高分子化合物、レジスト材料及びパターン形成方法
JP2002299441A (ja) * 2001-03-30 2002-10-11 Jsr Corp デュアルダマシン構造の形成方法
US6589711B1 (en) * 2001-04-04 2003-07-08 Advanced Micro Devices, Inc. Dual inlaid process using a bilayer resist
JP5225528B2 (ja) 2001-05-30 2013-07-03 株式会社Adeka ケイ素含有重合体の製造方法
JP2003025510A (ja) * 2001-07-16 2003-01-29 Shin Etsu Chem Co Ltd 反射防止性及び耐擦傷性を有する多層積層体
US6746530B2 (en) * 2001-08-02 2004-06-08 Chunghwa Pictures Tubes, Ltd. High contrast, moisture resistant antistatic/antireflective coating for CRT display screen
US20030096090A1 (en) * 2001-10-22 2003-05-22 Boisvert Ronald Paul Etch-stop resins
CN1606713B (zh) 2001-11-15 2011-07-06 霍尼韦尔国际公司 用于照相平版印刷术的旋涂抗反射涂料
KR100818678B1 (ko) 2001-11-16 2008-04-01 허니웰 인터내셔널 인코포레이티드 포토리소그라피용 스핀온 유리 반사 방지 피막
US6730454B2 (en) 2002-04-16 2004-05-04 International Business Machines Corporation Antireflective SiO-containing compositions for hardmask layer
WO2004014924A1 (ja) * 2002-08-07 2004-02-19 Chisso Corporation ケイ素化合物
WO2004044025A2 (en) 2002-11-12 2004-05-27 Honeywell International Inc Anti-reflective coatings for photolithography and methods of preparation thereof
KR100639862B1 (ko) * 2002-12-02 2006-10-31 토쿄오오카코교 가부시기가이샤 반사방지막형성용 조성물
TW200505966A (en) 2003-04-02 2005-02-16 Dow Global Technologies Inc Organosilicate resin formulation for use in microelectronic devices
JP2004361692A (ja) * 2003-04-07 2004-12-24 Dow Corning Asia Ltd 光伝送部材用硬化性オルガノポリシロキサン樹脂組成物、オルガノポリシロキサン樹脂硬化物からなる光伝送部材および光伝送部材の製造方法
CN100451070C (zh) * 2003-04-07 2009-01-14 陶氏康宁公司 用于光波导的固化性有机聚硅氧烷树脂组合物,光波导及其制造方法
KR101156200B1 (ko) * 2003-05-23 2012-06-18 다우 코닝 코포레이션 습식 에치율이 높은 실록산 수지계 반사 방지 피막 조성물
US7202013B2 (en) * 2003-06-03 2007-04-10 Shin-Etsu Chemical Co., Ltd. Antireflective film material, and antireflective film and pattern formation method using the same
CN100375908C (zh) * 2003-06-18 2008-03-19 旭化成株式会社 抗反射膜
WO2005005238A1 (en) 2003-07-02 2005-01-20 Keith Gilstrap Seatpost mounted bicycle wheel holding device
AU2003272401A1 (en) 2003-09-15 2005-04-27 Sunco Products, Inc. Sheeting system
EP1668698A1 (de) 2003-09-29 2006-06-14 Siemens Aktiengesellschaft Plastisch verformbarer kühlkörper für elektrische und/oder elektronische bauelemente
US8101015B2 (en) * 2003-10-07 2012-01-24 Honeywell International Inc. Coatings and hard mask compositions for integrated circuit applications methods of production and uses thereof
SG119201A1 (en) 2003-10-13 2006-02-28 Sportiv Tech Lab Pte Ltd Utility garment
WO2005076323A1 (ja) * 2004-02-10 2005-08-18 Nikon Corporation 露光装置及びデバイス製造方法、メンテナンス方法及び露光方法
EP1769018B1 (en) * 2004-07-16 2007-11-21 Dow Corning Corporation Radiation sensitive silicone resin composition
US20060019468A1 (en) 2004-07-21 2006-01-26 Beatty John J Method of manufacturing a plurality of electronic assemblies
JP2006117867A (ja) * 2004-10-25 2006-05-11 Takemoto Oil & Fat Co Ltd 有機シリコーン微粒子、有機シリコーン微粒子の製造方法、高分子材料改質剤及び化粧品原料
US7756384B2 (en) * 2004-11-08 2010-07-13 Dow Corning Corporation Method for forming anti-reflective coating
CN101073039B (zh) 2004-12-17 2011-12-14 陶氏康宁公司 形成抗反射涂层的方法
KR101191098B1 (ko) 2004-12-17 2012-10-15 다우 코닝 코포레이션 실록산 수지 피복물
KR101324052B1 (ko) 2006-02-13 2013-11-01 다우 코닝 코포레이션 반사방지 코팅 재료
WO2007094849A2 (en) 2006-02-13 2007-08-23 Dow Corning Corporation Antireflective coating material
US20070212886A1 (en) * 2006-03-13 2007-09-13 Dong Seon Uh Organosilane polymers, hardmask compositions including the same and methods of producing semiconductor devices using organosilane hardmask compositions
CN101910255B (zh) 2008-01-08 2013-07-10 道康宁东丽株式会社 倍半硅氧烷树脂

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005517784A (ja) * 2002-02-19 2005-06-16 ハネウェル・インターナショナル・インコーポレーテッド オルガノシロキサン
JP2006503165A (ja) * 2002-06-03 2006-01-26 ハネウエル・インターナシヨナル・インコーポレーテツド オルガノシロキサン
US20060128163A1 (en) * 2004-12-14 2006-06-15 International Business Machines Corporation Surface treatment of post-rie-damaged p-osg and other damaged materials
WO2006065321A1 (en) * 2004-12-17 2006-06-22 Dow Corning Corporation Method for forming anti-reflective coating
JP2008524650A (ja) * 2004-12-17 2008-07-10 ダウ・コーニング・コーポレイション 反射防止膜の形成方法
WO2007148223A2 (en) * 2006-06-22 2007-12-27 Az Electronic Materials Usa Corp. Antireflective coating compositions comprising siloxane polymer
JP2010519584A (ja) * 2007-02-20 2010-06-03 エイゼット・エレクトロニック・マテリアルズ・ユーエスエイ・コーポレイション ケイ素ポリマーに基づく反射防止膜用組成物
JP2010519362A (ja) * 2007-02-26 2010-06-03 エイゼット・エレクトロニック・マテリアルズ・ユーエスエイ・コーポレイション シロキサンポリマーの製造方法
JP2011515514A (ja) * 2008-03-04 2011-05-19 ダウ・コーニング・コーポレイション シルセスキオキサン樹脂
JP2011517706A (ja) * 2008-03-05 2011-06-16 ダウ・コーニング・コーポレイション シルセスキオキサン樹脂
JP2012511742A (ja) * 2008-12-10 2012-05-24 ダウ コーニング コーポレーション 湿式エッチング可能な反射防止膜
JP2012511743A (ja) * 2008-12-10 2012-05-24 ダウ コーニング コーポレーション 切り替え可能な反射防止膜
JP2012511619A (ja) * 2008-12-10 2012-05-24 ダウ コーニング コーポレーション シルセスキオキサン樹脂

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2013008825A1 (ja) * 2011-07-11 2015-02-23 株式会社トクヤマ フォトクロミック硬化性組成物
WO2019235072A1 (ja) * 2018-06-06 2019-12-12 富士フイルム株式会社 組成物、ハードコートフィルム、ハードコートフィルムを備えた物品、及び画像表示装置
JPWO2019235072A1 (ja) * 2018-06-06 2021-04-08 富士フイルム株式会社 組成物、ハードコートフィルム、ハードコートフィルムを備えた物品、及び画像表示装置
JP6999808B2 (ja) 2018-06-06 2022-02-10 富士フイルム株式会社 組成物、ハードコートフィルム、ハードコートフィルムを備えた物品、及び画像表示装置
WO2020021931A1 (ja) * 2018-07-27 2020-01-30 富士フイルム株式会社 ハードコートフィルム、ハードコートフィルムを備えた物品、及び画像表示装置
JPWO2020021931A1 (ja) * 2018-07-27 2021-07-01 富士フイルム株式会社 ハードコートフィルム、ハードコートフィルムを備えた物品、及び画像表示装置
JP7263356B2 (ja) 2018-07-27 2023-04-24 富士フイルム株式会社 ハードコートフィルム、ハードコートフィルムを備えた物品、及び画像表示装置
JP2023113598A (ja) * 2018-07-27 2023-08-16 富士フイルム株式会社 ハードコートフィルム、ハードコートフィルムを備えた物品、及び画像表示装置
US12305071B2 (en) 2018-07-27 2025-05-20 Fujifilm Corporation Hardcoat film and article and image display device having hardcoat film
JP7681638B2 (ja) 2018-07-27 2025-05-22 富士フイルム株式会社 ハードコートフィルム、ハードコートフィルムを備えた物品、及び画像表示装置

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