JP2009088497A - 半導体装置及び電子機器 - Google Patents
半導体装置及び電子機器 Download PDFInfo
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- JP2009088497A JP2009088497A JP2008232376A JP2008232376A JP2009088497A JP 2009088497 A JP2009088497 A JP 2009088497A JP 2008232376 A JP2008232376 A JP 2008232376A JP 2008232376 A JP2008232376 A JP 2008232376A JP 2009088497 A JP2009088497 A JP 2009088497A
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/78654—Monocrystalline silicon transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
- H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
- H01L21/2007—Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
- H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
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Abstract
【解決手段】絶縁基板上の絶縁層と、絶縁層上の接合層と、接合層上の単結晶半導体層と有し、単結晶半導体層は、その上部表面における凹凸形状の算術平均粗さが1nm以上7nm以下とする。または、凹凸形状の二乗平均平方根粗さが1nm以上10nm以下であっても良い。または、凹凸形状の最大高低差が5nm以上250nm以下であっても良い。
【選択図】図1
Description
図1及び図2は、本発明の半導体装置に用いるSOI基板の作製方法の一例を示す断面図である。以下において、図1及び図2を参照してSOI基板の作製方法の一例について説明する。
・加速電圧 10kV以上100kV以下
(好ましくは20kV以上80kV以下)
・ドーズ量 1×1016ions/cm2以上4×1016ions/cm2以下
・ビーム電流密度 2μA/cm2以上
(好ましくは5μA/cm2以上、より好ましくは10μA/cm2以上)
・Ra:7nm以下
・RMS:10nm以下
・P−V:250nm以下
・Ra:1nm未満
・RMS:1nm未満
・P−V:5nm未満
・Ra:1nm以上7nm以下(好ましくは、1nm以上3nm以下)
・RMS:1nm以上10nm以下(好ましくは、1nm以上4nm以下)
・P−V:5nm以上250nm以下(好ましくは、5nm以上50nm以下)
図3及び図4は、本発明の半導体装置に用いるSOI基板の作製方法の別の一例を示す断面図である。以下、図3及び図4を参照してSOI基板の作製方法の別の一例について説明する。
図5および図6は、本発明の半導体装置に用いるSOI基板の作製方法の別の一例を示す断面図である。以下において、図5および図6を参照してSOIの基板の作製方法の一例について説明する。
実施の形態1乃至3において、半導体層115に対してレーザー光122を照射する前に、半導体層115をエッチング処理(又はエッチバック処理)によって薄くする薄膜化工程を行うことができる。脆化層113の形成にイオンドーピング装置を用いた場合、半導体層115の厚さを100nm以下にすることが難しい。このため、剥離直後の半導体層115は比較的厚くなる。半導体層115が厚い場合には、レーザー光122の照射エネルギー密度を高くする必要があるため、許容される照射エネルギー密度の範囲が狭くなり、レーザー光122の照射によって、歩留まり良く半導体層115の平坦化および結晶性の回復を行うことが難しくなる。
図1〜図6を用いて説明したSOI基板の作製方法では、無アルカリガラス基板などの各種のガラス基板をベース基板101に適用することが可能となる。従って、ベース基板101にガラス基板を用いることで、一辺が1メートルを超える大面積なSOI基板を製造することができる。このような大面積な半導体製造基板に複数の半導体素子を形成することで、液晶表示装置、エレクトロルミネッセンス表示装置を作製することができる。また、このような表示装置だけでなく、SOI基板を用いて、太陽電池、フォトIC、半導体記憶装置など各種の半導体装置を製造することができる。
・チャネル長:10μm
・ゲート絶縁層の厚さ:20nm
・単結晶シリコン層の厚さ:100nm
・Ra:1.5nm
・RMS:1.9nm
・P−V:18.0nm
102 絶縁層
103 窒化酸化シリコン膜
104 酸化窒化シリコン膜
105 接合層
111 半導体基板
112 保護膜
113 脆化層
114 接合層
115 半導体層
115A 半導体層
115B 半導体層
116 絶縁層
117 酸化窒化シリコン膜
118 窒化酸化シリコン膜
121 イオンビーム
122 レーザー光
131 SOI基板
131A SOI基板
131B SOI基板
132 SOI基板
132A SOI基板
132B SOI基板
133 SOI基板
133A SOI基板
133B SOI基板
151 半導体層
152 半導体層
153 ゲート絶縁層
154 ゲート電極
155 サイドウォール絶縁層
156 窒化シリコン層
157 高濃度不純物領域
158 低濃度不純物領域
159 チャネル形成領域
160 高濃度不純物領域
163 絶縁層
164 層間絶縁層
165 コンタクトホール
166 コンタクトプラグ
167 配線
168 層間絶縁膜
200 マイクロプロセッサ
201 演算回路
202 演算回路制御部
203 命令解析部
204 割り込み制御部
205 タイミング制御部
206 レジスタ
207 レジスタ制御部
208 バスインターフェース
209 読み出し専用メモリ
210 メモリインターフェース
211 RFCPU
212 アナログ回路部
213 デジタル回路部
214 共振回路
215 整流回路
216 定電圧回路
217 リセット回路
218 発振回路
219 復調回路
220 変調回路
221 RFインターフェース
222 制御レジスタ
223 クロックコントローラ
224 CPUインターフェース
225 中央処理ユニット
226 ランダムアクセスメモリ
227 読み出し専用メモリ
228 アンテナ
229 容量部
230 電源管理回路
301 マザーガラス
302 半導体層
310 形成領域
311 走査線駆動回路形成領域
312 信号線駆動回路形成領域
313 画素形成領域
321 半導体層
322 走査線
323 信号線
324 画素電極
325 TFT
327 層間絶縁膜
328 電極
329 柱状スペーサ
330 配向膜
332 対向基板
333 対向電極
334 配向膜
335 液晶層
401 選択用トランジスタ
402 表示制御用トランジスタ
403 半導体層
404 半導体層
405 走査線
406 信号線
407 電流供給線
408 画素電極
411 電極
412 ゲート電極
413 電極
427 層間絶縁膜
428 隔壁層
429 EL層
430 対向電極
431 対向基板
432 樹脂層
901 携帯電話機
902 表示部
903 操作スイッチ
911 デジタルプレーヤー
912 表示部
913 操作部
914 イヤホン
921 電子ブック
922 表示部
923 操作スイッチ
Claims (16)
- 絶縁基板上の絶縁層と、
前記絶縁層上の接合層と、
前記接合層上の単結晶半導体層と有し、
前記単結晶半導体層は、その上部表面における凹凸形状の算術平均粗さが1nm以上7nm以下であることを特徴とする半導体装置。 - 絶縁基板上の絶縁層と、
前記絶縁層上の接合層と、
前記接合層上の単結晶半導体層と有し、
前記単結晶半導体層は、その上部表面における凹凸形状の二乗平均平方根粗さが1nm以上10nm以下であることを特徴とする半導体装置。 - 絶縁基板上の絶縁層と、
前記絶縁層上の接合層と、
前記接合層上の単結晶半導体層と有し、
前記単結晶半導体層は、その上部表面における凹凸形状の最大高低差が5nm以上250nm以下であることを特徴とする半導体装置。 - 耐熱温度が700℃以下の基板と、
前記基板上の絶縁層と、
前記絶縁層上の接合層と、
前記接合層上の単結晶半導体層と有し、
前記単結晶半導体層は、その上部表面における凹凸形状の算術平均粗さが1nm以上7nm以下であることを特徴とする半導体装置。 - 耐熱温度が700℃以下の基板と、
前記基板上の絶縁層と、
前記絶縁層上の接合層と、
前記接合層上の単結晶半導体層と有し、
前記単結晶半導体層は、その上部表面における凹凸形状の二乗平均平方根粗さが1nm以上10nm以下であることを特徴とする半導体装置。 - 耐熱温度が700℃以下の基板と、
前記基板上の絶縁層と、
前記絶縁層上の接合層と、
前記接合層上の単結晶半導体層と有し、
前記単結晶半導体層は、その上部表面における凹凸形状の最大高低差が5nm以上250nm以下であることを特徴とする半導体装置。 - 請求項4乃至6のいずれか一において、
前記基板は、アルミノシリケートガラス、アルミノホウケイ酸ガラス、バリウムホウケイ酸ガラスのいずれかを含むガラス基板であることを特徴とする半導体装置。 - 請求項1乃至7のいずれか一において、
前記絶縁層は、酸化窒化シリコン膜又は窒化酸化シリコン膜を有することを特徴とする半導体装置。 - 請求項1乃至8のいずれか一において、
前記接合層は、有機シランガスを用いて化学気相成長法により形成される酸化シリコン膜を含むことを特徴とする半導体装置。 - 請求項1乃至9のいずれか一において、
前記単結晶半導体層は、(100)面を主表面として有することを特徴とする半導体装置。 - 請求項1乃至9のいずれか一において、
前記単結晶半導体層は、(110)面を主表面として有することを特徴とする半導体装置。 - 請求項1乃至11のいずれか一において、
前記単結晶半導体層の上部表面は、レーザー光が照射された表面であることを特徴とする半導体装置。 - 請求項1乃至12のいずれか一において、
前記単結晶半導体層の上部表面は、エッチング処理又はエッチバック処理が施された表面であることを特徴とする半導体装置。 - 請求項1乃至13のいずれか一において、
前記凹凸形状における各凹部の幅の平均値又は各凸部の幅の平均値は、60nm以上120nm以下であることを特徴とする半導体装置。 - 請求項14において、
前記各凹部の幅又は各凸部の幅は、平均高さにおいて測定されるものであることを特徴とする半導体装置。 - 請求項1乃至15のいずれか一に記載の半導体装置を用いた電子機器。
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JPWO2016114382A1 (ja) * | 2015-01-16 | 2017-11-30 | 住友電気工業株式会社 | 半導体基板の製造方法、半導体基板、複合半導体基板の製造方法、複合半導体基板、および半導体接合基板 |
US10304739B2 (en) | 2015-01-16 | 2019-05-28 | Sumitomo Electric Industries, Ltd. | Method for manufacturing semiconductor substrate, semiconductor substrate, method for manufacturing combined semiconductor substrate, combined semiconductor substrate, and semiconductor-joined substrate |
JP2020506150A (ja) * | 2017-02-02 | 2020-02-27 | ソワテク | 六方晶構造の二次元膜の製造方法 |
WO2022131028A1 (ja) * | 2020-12-18 | 2022-06-23 | Agc株式会社 | 接合用ガラス体、及び接合体 |
Also Published As
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WO2009035063A1 (en) | 2009-03-19 |
CN102646698A (zh) | 2012-08-22 |
KR20100065145A (ko) | 2010-06-15 |
CN102646698B (zh) | 2015-09-16 |
TW200935594A (en) | 2009-08-16 |
JP5577027B2 (ja) | 2014-08-20 |
TWI469330B (zh) | 2015-01-11 |
US20090072343A1 (en) | 2009-03-19 |
CN101796613B (zh) | 2012-06-27 |
CN101796613A (zh) | 2010-08-04 |
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