JP2005159326A - 半導体装置及びその作製方法 - Google Patents
半導体装置及びその作製方法 Download PDFInfo
- Publication number
- JP2005159326A JP2005159326A JP2004311126A JP2004311126A JP2005159326A JP 2005159326 A JP2005159326 A JP 2005159326A JP 2004311126 A JP2004311126 A JP 2004311126A JP 2004311126 A JP2004311126 A JP 2004311126A JP 2005159326 A JP2005159326 A JP 2005159326A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- wiring
- conductive film
- insulating film
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 52
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 238000005530 etching Methods 0.000 claims description 47
- 239000000463 material Substances 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 39
- 230000008569 process Effects 0.000 claims description 22
- 229910052782 aluminium Inorganic materials 0.000 claims description 21
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 20
- 239000007769 metal material Substances 0.000 claims description 11
- 239000010936 titanium Substances 0.000 claims description 11
- 229910052719 titanium Inorganic materials 0.000 claims description 10
- 229910052721 tungsten Inorganic materials 0.000 claims description 10
- 239000003870 refractory metal Substances 0.000 claims description 8
- 239000010937 tungsten Substances 0.000 claims description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 7
- 229910052715 tantalum Inorganic materials 0.000 claims description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 7
- 150000004767 nitrides Chemical class 0.000 claims description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 295
- 239000010408 film Substances 0.000 description 252
- 239000011229 interlayer Substances 0.000 description 61
- 230000004888 barrier function Effects 0.000 description 54
- 238000002347 injection Methods 0.000 description 33
- 239000007924 injection Substances 0.000 description 33
- 239000000758 substrate Substances 0.000 description 29
- 239000004020 conductor Substances 0.000 description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 19
- 229910052814 silicon oxide Inorganic materials 0.000 description 18
- 239000004973 liquid crystal related substance Substances 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 14
- 229910052710 silicon Inorganic materials 0.000 description 14
- 239000010703 silicon Substances 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 229910045601 alloy Inorganic materials 0.000 description 12
- 239000000956 alloy Substances 0.000 description 12
- 230000006870 function Effects 0.000 description 11
- 230000005525 hole transport Effects 0.000 description 11
- 239000010949 copper Substances 0.000 description 9
- 239000004642 Polyimide Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- 229920001721 polyimide Polymers 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 229910052783 alkali metal Inorganic materials 0.000 description 7
- 150000001340 alkali metals Chemical class 0.000 description 7
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 7
- 150000001342 alkaline earth metals Chemical class 0.000 description 7
- 229910010272 inorganic material Inorganic materials 0.000 description 7
- 239000011147 inorganic material Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- 239000011347 resin Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 239000011368 organic material Substances 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 6
- 125000001424 substituent group Chemical group 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- -1 composed of aluminum Chemical compound 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 4
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229910003468 tantalcarbide Inorganic materials 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 4
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 239000004952 Polyamide Substances 0.000 description 3
- 125000000217 alkyl group Chemical group 0.000 description 3
- 150000001408 amides Chemical class 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 3
- 239000002585 base Substances 0.000 description 3
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 150000002894 organic compounds Chemical class 0.000 description 3
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229920002647 polyamide Polymers 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 229910018459 Al—Ge Inorganic materials 0.000 description 2
- 229910004261 CaF 2 Inorganic materials 0.000 description 2
- 102100040844 Dual specificity protein kinase CLK2 Human genes 0.000 description 2
- 101000749291 Homo sapiens Dual specificity protein kinase CLK2 Proteins 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical class C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 description 2
- IVHJCRXBQPGLOV-UHFFFAOYSA-N azanylidynetungsten Chemical compound [W]#N IVHJCRXBQPGLOV-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 150000004696 coordination complex Chemical class 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- 239000003550 marker Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- IBHBKWKFFTZAHE-UHFFFAOYSA-N n-[4-[4-(n-naphthalen-1-ylanilino)phenyl]phenyl]-n-phenylnaphthalen-1-amine Chemical compound C1=CC=CC=C1N(C=1C2=CC=CC=C2C=CC=1)C1=CC=C(C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C3=CC=CC=C3C=CC=2)C=C1 IBHBKWKFFTZAHE-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- 229910001935 vanadium oxide Inorganic materials 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- BCMCBBGGLRIHSE-UHFFFAOYSA-N 1,3-benzoxazole Chemical class C1=CC=C2OC=NC2=C1 BCMCBBGGLRIHSE-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910021364 Al-Si alloy Inorganic materials 0.000 description 1
- 229910018182 Al—Cu Inorganic materials 0.000 description 1
- 229910018575 Al—Ti Inorganic materials 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 102100040862 Dual specificity protein kinase CLK1 Human genes 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 101000749294 Homo sapiens Dual specificity protein kinase CLK1 Proteins 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910015711 MoOx Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 1
- 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 229910002808 Si–O–Si Inorganic materials 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000005407 aluminoborosilicate glass Substances 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000005923 long-lasting effect Effects 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- JMANVNJQNLATNU-UHFFFAOYSA-N oxalonitrile Chemical compound N#CC#N JMANVNJQNLATNU-UHFFFAOYSA-N 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Chemical class COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000013079 quasicrystal Substances 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- YYMBJDOZVAITBP-UHFFFAOYSA-N rubrene Chemical compound C1=CC=CC=C1C(C1=C(C=2C=CC=CC=2)C2=CC=CC=C2C(C=2C=CC=CC=2)=C11)=C(C=CC=C2)C2=C1C1=CC=CC=C1 YYMBJDOZVAITBP-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Electroluminescent Light Sources (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Thin Film Transistor (AREA)
Abstract
【解決手段】 下層配線とその上方に絶縁層を介して配設される上層配線とを、下層配線に設けられた凸状部において電気的に接続した多層配線構造を形成する。凸状部は、柱状の導電性部材とその上層及び下層に形成されたものであり、下層配線の全体に渡って形成された導電層とで構成され、上層配線は、凸状部が絶縁層の上面と略同一平面で露出した部箇所で、下層配線と電気的に接続していることを特徴としている。
【選択図】 図4
Description
101、203 第1の絶縁膜
103 第1のコンタクト層
104 第1のバリア層
105 第1の導電膜
107、108、119 プラグ
109 第2のコンタクト層
110 第2のバリア層
111 第2の導電膜
112 第3のバリア層
113 第3のコンタクト層
115、207 第2の絶縁膜
116 第4のバリア層
117 第3の導電膜
120 第4のコンタクト層
121 第5のバリア層
122 第4の導電膜
123 第6のバリア層
124 第5のコンタクト層
125 ハードマスク
126 ハードマスク
202 TFT
204、205 配線
208 第1の電極
209 第3の絶縁膜
210 EL層
211 第2の電極
212 保護膜
213 発光素子
Claims (6)
- 下層配線の上方に、絶縁層を介して配設される上層配線との電気的な接続を、前記下層配線に設けられた凸状部において形成した多層配線構造を有し、
前記凸状部は、柱状の導電性部材と、その上層及び下層に形成され、前記下層配線の全体に渡って形成された導電膜とで構成され、
前記上層配線は、前記凸状部が前記絶縁層と略同一平面で露出した部箇所で、前記下層配線と電気的に接続していること
を特徴とする半導体装置。 - コンタクトホールが形成された第1の絶縁膜と、前記第1の絶縁膜上に形成された第1の配線と前記第1の配線の上方に、第2の絶縁膜を介して配設された第2の配線とを有し、
第1の配線と第2の配線との電気的な接続を、前記第1配線に設けられた凸状部において形成し、
前記コンタクトホールは、前記柱状の導電性部材と、同じ材料が充填され、かつ、
前記凸状部は、柱状の導電性部材と、その上層及び下層に形成され、前記下層配線の全体に渡って形成された導電膜とで構成され、
前記第2の配線は、前記凸状部が前記第2の絶縁膜と略同一平面で露出した部箇所で、前記第1の配線と電気的に接続していること
を特徴とする半導体装置。 - 請求項1又は2において、前記柱状の導電性部材は、アルミニウム若しくはアルミニウムを主成分とする金属材料で形成され、前記柱状の導電性部材の上層及び下層に形成される前記導電膜は、チタン、タンタル、タングステンから選ばれた高融点金属、若しくは該高融点金属の窒化物から選ばれた一種であることを特徴とする半導体装置。
- 第1の導電膜を一主表面の全面に形成し、
前記第1の導電膜上に第1のマスクを形成し、前記第1の導電膜の少なくとも一部が前記一主表面を覆った状態でエッチング処理を止め、前記マスクを形成した位置に凸状部を形成し、
前記凸状部を覆って第2の導電膜とハードマスク層を前記一主表面の全面に形成し、
前記第2の導電膜上に第2のマスクを形成し、前記第1の導電膜若しくは前記第2の導電膜の少なくとも一部が前記一主表面を覆った状態でエッチング処理を止め、前記第2のマスクを除去し、
前記ハードマスク層に覆われていない、前記一主表面上に残存している前記第1の導電膜若しくは前記第2の導電膜を除去する
各工程を有すること
を特徴とする半導体装置の作製方法。 - 第1の絶縁膜のコンタクトホールを形成し、
前記第1の絶縁膜上及びコンタクトホールに第1の導電膜を形成し、
前記第1の絶縁膜において前記コンタクトホールによる凹部を第1の導電膜が充填するように加熱処理を行い、
前記第1の導電膜上に第1のマスクを形成し、前記第1の導電膜の少なくとも一部が前記第1の導電膜を覆い前記コンタクトホールを充填している状態でエッチング処理を止め、前記マスクを形成した位置に凸状部を形成し、
前記凸状部を覆って第2の導電膜とハードマスク層を前記第1の絶縁膜の全面に形成し、
前記第2の導電膜上に第2のマスクを形成し、前記第1の導電膜若しくは前記第2の導電膜の少なくとも一部が前記一主表面を覆った状態でエッチング処理を止め、前記第2のマスクを除去し、
前記ハードマスク層に覆われていない、前記第1の絶縁膜上に残存している前記第1の導電膜若しくは前記第2の導電膜を除去する
各工程を有すること
を特徴とする半導体装置の作製方法。 - 請求項4又は5において、
前記第1の導電膜は、チタン、タンタル、タングステンから選ばれた高融点金属、若しくは該高融点金属の窒化物から選ばれた一種で形成する第1層と、
アルミニウム若しくはアルミニウムを主成分とする金属材料で形成される第2層を含んで形成すること
を特徴とする半導体装置の作製方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004311126A JP4748967B2 (ja) | 2003-11-04 | 2004-10-26 | 半導体装置の作製方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003375038 | 2003-11-04 | ||
JP2003375038 | 2003-11-04 | ||
JP2004311126A JP4748967B2 (ja) | 2003-11-04 | 2004-10-26 | 半導体装置の作製方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005159326A true JP2005159326A (ja) | 2005-06-16 |
JP2005159326A5 JP2005159326A5 (ja) | 2007-08-16 |
JP4748967B2 JP4748967B2 (ja) | 2011-08-17 |
Family
ID=34741376
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004311126A Expired - Fee Related JP4748967B2 (ja) | 2003-11-04 | 2004-10-26 | 半導体装置の作製方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4748967B2 (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009088497A (ja) * | 2007-09-14 | 2009-04-23 | Semiconductor Energy Lab Co Ltd | 半導体装置及び電子機器 |
JP2009224238A (ja) * | 2008-03-18 | 2009-10-01 | Toppan Printing Co Ltd | 有機エレクトロルミネッセンス素子及びその製造方法 |
JP2010251574A (ja) * | 2009-04-17 | 2010-11-04 | Sony Corp | 薄膜トランジスタの製造方法および薄膜トランジスタ |
JP2011100994A (ja) * | 2009-10-09 | 2011-05-19 | Semiconductor Energy Lab Co Ltd | 半導体装置及び半導体装置の作製方法 |
JP2013080935A (ja) * | 2005-08-31 | 2013-05-02 | Semiconductor Energy Lab Co Ltd | 半導体装置及び電子機器 |
WO2019220266A1 (ja) * | 2018-05-18 | 2019-11-21 | 株式会社半導体エネルギー研究所 | 半導体装置、および半導体装置の作製方法 |
JP2021005113A (ja) * | 2005-12-05 | 2021-01-14 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02168625A (ja) * | 1988-09-14 | 1990-06-28 | Nec Corp | 多層配線構造体の製造方法 |
JPH08181213A (ja) * | 1994-12-27 | 1996-07-12 | Kawasaki Steel Corp | 半導体装置の製造方法 |
JPH08274164A (ja) * | 1995-03-31 | 1996-10-18 | Seiko Epson Corp | 半導体装置 |
JPH08306779A (ja) * | 1995-05-10 | 1996-11-22 | Sony Corp | 半導体装置の製造方法 |
JP2000012683A (ja) * | 1998-06-17 | 2000-01-14 | Nec Corp | 集積回路とその製造方法 |
-
2004
- 2004-10-26 JP JP2004311126A patent/JP4748967B2/ja not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02168625A (ja) * | 1988-09-14 | 1990-06-28 | Nec Corp | 多層配線構造体の製造方法 |
JPH08181213A (ja) * | 1994-12-27 | 1996-07-12 | Kawasaki Steel Corp | 半導体装置の製造方法 |
JPH08274164A (ja) * | 1995-03-31 | 1996-10-18 | Seiko Epson Corp | 半導体装置 |
JPH08306779A (ja) * | 1995-05-10 | 1996-11-22 | Sony Corp | 半導体装置の製造方法 |
JP2000012683A (ja) * | 1998-06-17 | 2000-01-14 | Nec Corp | 集積回路とその製造方法 |
Cited By (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013080935A (ja) * | 2005-08-31 | 2013-05-02 | Semiconductor Energy Lab Co Ltd | 半導体装置及び電子機器 |
JP2021005113A (ja) * | 2005-12-05 | 2021-01-14 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
US11899329B2 (en) | 2005-12-05 | 2024-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US11592719B2 (en) | 2005-12-05 | 2023-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
JP7008114B2 (ja) | 2005-12-05 | 2022-01-25 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
US11126053B2 (en) | 2005-12-05 | 2021-09-21 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US11048135B2 (en) | 2005-12-05 | 2021-06-29 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
JP2009088497A (ja) * | 2007-09-14 | 2009-04-23 | Semiconductor Energy Lab Co Ltd | 半導体装置及び電子機器 |
JP2009224238A (ja) * | 2008-03-18 | 2009-10-01 | Toppan Printing Co Ltd | 有機エレクトロルミネッセンス素子及びその製造方法 |
JP2010251574A (ja) * | 2009-04-17 | 2010-11-04 | Sony Corp | 薄膜トランジスタの製造方法および薄膜トランジスタ |
US9177855B2 (en) | 2009-10-09 | 2015-11-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10770596B2 (en) | 2009-10-09 | 2020-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10446693B2 (en) | 2009-10-09 | 2019-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP2019062231A (ja) * | 2009-10-09 | 2019-04-18 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US10043915B2 (en) | 2009-10-09 | 2018-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP2018101792A (ja) * | 2009-10-09 | 2018-06-28 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US11367793B2 (en) | 2009-10-09 | 2022-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9601635B2 (en) | 2009-10-09 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11695080B2 (en) | 2009-10-09 | 2023-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP2011100994A (ja) * | 2009-10-09 | 2011-05-19 | Semiconductor Energy Lab Co Ltd | 半導体装置及び半導体装置の作製方法 |
WO2019220266A1 (ja) * | 2018-05-18 | 2019-11-21 | 株式会社半導体エネルギー研究所 | 半導体装置、および半導体装置の作製方法 |
JPWO2019220266A1 (ja) * | 2018-05-18 | 2021-06-10 | 株式会社半導体エネルギー研究所 | 半導体装置、および半導体装置の作製方法 |
JP7235418B2 (ja) | 2018-05-18 | 2023-03-08 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
Also Published As
Publication number | Publication date |
---|---|
JP4748967B2 (ja) | 2011-08-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7524709B2 (en) | Manufacturing method for a display device | |
JP7216862B2 (ja) | 発光装置 | |
JP4519532B2 (ja) | 発光装置及び発光装置を用いた電子機器 | |
US7663311B2 (en) | Organic light emitting display (OLED) device and method of fabricating the same | |
EP1511081B1 (en) | Light emitting device | |
US6891270B2 (en) | Semiconductor device and method of manufacturing the same | |
US9547252B2 (en) | Organic light emitting device | |
JP2002258325A (ja) | 薄膜トランジスタ液晶表示装置 | |
TWI611613B (zh) | 有機發光裝置及該裝置的製造方法 | |
CN104952903A (zh) | 显示装置、制造显示装置的方法以及修复显示装置的方法 | |
US20130187177A1 (en) | Display panel manufacturing method and display panel | |
US7524734B2 (en) | Wiring substrate, electro-optic device, electric apparatus, method of manufacturing wiring substrate, method of manufacturing electro-optic device, and method of manufacturing electric apparatus | |
KR100846006B1 (ko) | 액티브 매트릭스 표시 장치 및 박막 트랜지스터 집적 회로 장치 | |
JP4748967B2 (ja) | 半導体装置の作製方法 | |
JP2006351844A (ja) | 電気光学表示装置およびその製造方法 | |
KR20180043896A (ko) | 표시 장치 및 그 제조 방법 | |
US9923039B2 (en) | Display panels, methods of manufacturing the same and organic light emitting display devices having the same | |
JP2017162832A (ja) | 表示装置および電子機器 | |
KR100623253B1 (ko) | 유기 전계 발광 소자의 제조방법 | |
WO2023052894A1 (ja) | 表示装置、表示モジュール、電子機器、及び、表示装置の作製方法 | |
JP7464541B2 (ja) | 表示バックプレート及びその製作方法、表示パネル及びその製作方法、表示装置 | |
US7838884B2 (en) | Display device and fabrication method of display device | |
KR20110113041A (ko) | 어레이 기판 및 이의 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070704 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070704 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090622 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20101019 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101216 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110510 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110517 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140527 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140527 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |