JP2007523491A - 半導体製造用のゲート電極ドーパント活性化方法 - Google Patents
半導体製造用のゲート電極ドーパント活性化方法 Download PDFInfo
- Publication number
- JP2007523491A JP2007523491A JP2006554137A JP2006554137A JP2007523491A JP 2007523491 A JP2007523491 A JP 2007523491A JP 2006554137 A JP2006554137 A JP 2006554137A JP 2006554137 A JP2006554137 A JP 2006554137A JP 2007523491 A JP2007523491 A JP 2007523491A
- Authority
- JP
- Japan
- Prior art keywords
- polycrystalline layer
- layer
- dopant
- doped
- range
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 98
- 239000002019 doping agent Substances 0.000 title claims abstract description 69
- 239000004065 semiconductor Substances 0.000 title description 5
- 230000003213 activating effect Effects 0.000 title description 4
- 238000004519 manufacturing process Methods 0.000 title description 2
- 239000000758 substrate Substances 0.000 claims abstract description 50
- 238000005224 laser annealing Methods 0.000 claims abstract description 24
- 238000000137 annealing Methods 0.000 claims abstract description 22
- 238000000151 deposition Methods 0.000 claims abstract description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims description 20
- 239000010703 silicon Substances 0.000 claims description 20
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 18
- 229910052796 boron Inorganic materials 0.000 claims description 18
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 10
- 229910052698 phosphorus Inorganic materials 0.000 claims description 10
- 239000011574 phosphorus Substances 0.000 claims description 10
- 229910052785 arsenic Inorganic materials 0.000 claims description 9
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 229910052732 germanium Inorganic materials 0.000 claims description 6
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 6
- 238000004151 rapid thermal annealing Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 abstract description 13
- 239000013078 crystal Substances 0.000 abstract description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 66
- 229920005591 polysilicon Polymers 0.000 description 58
- 230000008569 process Effects 0.000 description 46
- 230000004913 activation Effects 0.000 description 11
- 238000009792 diffusion process Methods 0.000 description 11
- 238000001289 rapid thermal chemical vapour deposition Methods 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 238000000231 atomic layer deposition Methods 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 239000003989 dielectric material Substances 0.000 description 6
- 238000005240 physical vapour deposition Methods 0.000 description 6
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 238000003877 atomic layer epitaxy Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 229910052735 hafnium Inorganic materials 0.000 description 3
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 3
- 239000007943 implant Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910003811 SiGeC Inorganic materials 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 229910003465 moissanite Inorganic materials 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- 238000003892 spreading Methods 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- IOVCWXUNBOPUCH-UHFFFAOYSA-N Nitrous acid Chemical compound ON=O IOVCWXUNBOPUCH-UHFFFAOYSA-N 0.000 description 1
- 238000003917 TEM image Methods 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- YKTSYUJCYHOUJP-UHFFFAOYSA-N [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] Chemical compound [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] YKTSYUJCYHOUJP-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28035—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
【選択図】 図2
Description
[0001]本発明の実施形態は、一般に、半導体製造プロセスの分野に係り、より詳細には、ゲート電極のような半導体デバイスを形成するシリコン含有膜内のドーパントを活性化する方法に係る。
[0002]より小型のトランジスタが製造されるにつれて、デバイスの性能を向上させるために、より薄いゲート誘電体材料が必要とされる。しかしながら、キャリア空乏は、ボロンをドープしたp型ポリシリコン又は砒素及び/又は燐をドープしたn型ポリシリコンのような反転酸化物厚みゲート電極材料に対して約4Åの貢献をする。デバイスの性能を維持するために、ポリ空乏(poly-depletion)を減少することが重要になった。従来のプロセスは、熱履歴(thermal budget)制限を有する急速加熱アニールプロセスを含む。例えば、1050℃より高い温度は、ボロンがゲート誘電体材料を貫通してデバイスの性能及び信頼性を低下させるので、望ましくない。
実験
[0029]ドープされた多結晶シリコンゲート電極を模擬するために、テーブル1に示すように、シリコンオキシニトライドゲート電極の層を含む8つの基板(基板A−H)上に多結晶シリコンを堆積した。これらの基板は、300mmのp型(ボロンがドープされた)シリコンウェハで、その抵抗率は15−20Ω−cmであった。これらの基板は、前ゲート洗浄に露出した後、急速加熱酸化プロセスに露出した。SiO2膜を約20Åの厚みで形成した。このSiO2膜を減結合プラズマ窒化処理によりプラズマ窒化処理し、約1x1015原子/cm2の窒素密度にした。全ての基板を窒化処理後アニールに露出して、窒素を酸化シリコンに更に完全に結合させると共に、表面界面を改善した。
Claims (33)
- 基板上のドープされた層をアニールするための方法において、
ゲート酸化物層に多結晶層を堆積するステップと、
上記多結晶層にドーパントを注入して、ドープされた多結晶層を形成するステップと、
上記ドープされた多結晶層を急速加熱アニールに曝すステップと、
上記ドープされた多結晶層をレーザアニールに曝すステップと、
を備えた方法。 - 上記多結晶層は、シリコン、ゲルマニウム、炭素、及びその組合せより成るグループから選択された少なくとも1つの元素を備えた、請求項1に記載の方法。
- 上記ドーパントは、ボロン、燐、砒素、及びその組合せより成るグループから選択される、請求項2に記載の方法。
- 上記ドープされた多結晶層は、ドーパント密度が約1x1019原子/cm3乃至約1x1021原子/cm3の範囲である、請求項3に記載の方法。
- 上記急速加熱アニールは、約900℃乃至約1200℃の範囲の温度であり且つ約2秒乃至約20秒の範囲の時間周期中続けられる、請求項4に記載の方法。
- 上記レーザアニールは、約1000℃乃至約1415℃の範囲の温度で行われる、請求項4に記載の方法。
- 上記レーザアニールは、約500ミリ秒以内の間、続けられる、請求項6に記載の方法。
- 上記ドープされた多結晶層は、電気抵抗率が400オーム/cm2未満である、請求項7に記載の方法。
- 基板上の層をアニールするための方法において、
格子を含む多結晶層を上記基板に堆積するステップと、
上記多結晶層に少なくとも1つのドーパント元素をドープして、ドープされた多結晶層を形成するステップと、
上記ドープされた多結晶層をレーザでアニールして、上記少なくとも1つのドーパント元素を上記格子に合体させるステップと、
を備えた方法。 - 上記多結晶層は、シリコン、ゲルマニウム、炭素、及びその組合せより成るグループから選択された少なくとも1つの元素を備えた、請求項9に記載の方法。
- 上記少なくとも1つのドーパント元素は、ボロン、燐、砒素、及びその組合せより成るグループから選択される、請求項10に記載の方法。
- 上記ドープされた多結晶層は、ドーパント密度が約1x1019原子/cm3乃至約1x1021原子/cm3の範囲である、請求項11に記載の方法。
- 上記ドープされた多結晶層は、レーザアニールの前に急速加熱アニールに曝される、請求項12に記載の方法。
- 上記急速加熱アニールは、約800℃乃至約1400℃の範囲の温度において約2秒乃至約20秒の範囲の時間周期で行われる、請求項13に記載の方法。
- 上記レーザアニールは、約1000℃乃至約1415℃の範囲の温度で行われる、請求項12に記載の方法。
- 上記レーザアニールは約500ミリ秒以内の間、続けられる、請求項15に記載の方法。
- 上記ドープされた多結晶層は、電気抵抗率が400オーム/cm2未満である、請求項16に記載の方法。
- 基板上のドープされたシリコン層をアニールするための方法において、
上記基板に多結晶層を堆積するステップと、
上記多結晶層に少なくとも1つのドーパント元素をドープして、ドープされた多結晶層を形成するステップと、
上記ドープされた多結晶層を第1温度で急速加熱アニールに露出させるステップと、
上記ドープされた多結晶層を約1000℃乃至約1415℃の範囲の第2温度でレーザアニールに曝されるステップと、
を備えた方法。 - 上記多結晶層は、シリコン、ゲルマニウム、炭素、及びその組合せより成るグループから選択された少なくとも1つの元素を備えた、請求項18に記載の方法。
- 上記ドーパントは、ボロン、燐、砒素、及びその組合せより成るグループから選択される、請求項19に記載の方法。
- 上記ドープされた多結晶層は、ドーパント密度が約1x1019原子/cm3乃至約1x1021原子/cm3の範囲である、請求項20に記載の方法。
- 上記第1温度は、約2秒乃至約20秒の範囲の時間周期中で約800℃乃至約1400℃の範囲にある、請求項21に記載の方法。
- 上記レーザアニールは、約500ミリ秒以内の間続けられる、請求項22に記載の方法。
- 上記ドープされた多結晶層は、電気抵抗率が400オーム/cm2未満である、請求項23に記載の方法。
- 基板に層を形成する方法において、
基板に多結晶層を堆積するステップであって、その多結晶層がドーパント元素及び格子構造体を含むようなステップと、
上記多結晶層をレーザでアニールして、上記ドーパント元素を上記格子構造体に合体し、ドープされた多結晶層を形成するステップと、
を備えた方法。 - 上記多結晶層は、シリコン、ゲルマニウム、炭素、及びその組合せより成るグループから選択された少なくとも1つの元素を備えた、請求項25に記載の方法。
- 上記ドーパント元素は、ボロン、燐、砒素、及びその組合せより成るグループから選択される、請求項26に記載の方法。
- 上記ドープされた多結晶層は、密度が約1x1019原子/cm3乃至約1x1021原子/cm3の範囲のドーパント元素を含む、請求項27に記載の方法。
- 上記多結晶層は、レーザアニールの前に急速加熱アニールに曝される、請求項28に記載の方法。
- 上記急速加熱アニールは、約800℃乃至約1400℃の範囲の温度において約2秒乃至約20秒の範囲の時間周期中行われる、請求項29に記載の方法。
- 上記レーザアニールは、約1000℃乃至約1415℃の範囲の温度で行われる、請求項30に記載の方法。
- 上記レーザアニールは、約100ミリ秒以内の間、続けられる、請求項31に記載の方法。
- 上記ドープされた多結晶層は、電気抵抗率が400オーム/cm2未満である、請求項32に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/784,904 | 2004-02-23 | ||
US10/784,904 US7078302B2 (en) | 2004-02-23 | 2004-02-23 | Gate electrode dopant activation method for semiconductor manufacturing including a laser anneal |
PCT/US2005/004318 WO2005083762A1 (en) | 2004-02-23 | 2005-02-10 | Gate electrode dopant activation method for semiconductor manufacturing |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007523491A true JP2007523491A (ja) | 2007-08-16 |
JP5028093B2 JP5028093B2 (ja) | 2012-09-19 |
Family
ID=34861538
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006554137A Expired - Fee Related JP5028093B2 (ja) | 2004-02-23 | 2005-02-10 | 半導体製造用のゲート電極ドーパント活性化方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US7078302B2 (ja) |
EP (1) | EP1719158A1 (ja) |
JP (1) | JP5028093B2 (ja) |
KR (1) | KR101118330B1 (ja) |
CN (1) | CN100524630C (ja) |
WO (1) | WO2005083762A1 (ja) |
Families Citing this family (60)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7812423B2 (en) * | 2003-08-12 | 2010-10-12 | Massachusetts Institute Of Technology | Optical device comprising crystalline semiconductor layer and reflective element |
US7166528B2 (en) | 2003-10-10 | 2007-01-23 | Applied Materials, Inc. | Methods of selective deposition of heavily doped epitaxial SiGe |
US8536492B2 (en) * | 2003-10-27 | 2013-09-17 | Applied Materials, Inc. | Processing multilayer semiconductors with multiple heat sources |
US20080090309A1 (en) | 2003-10-27 | 2008-04-17 | Ranish Joseph M | Controlled annealing method |
US8119210B2 (en) | 2004-05-21 | 2012-02-21 | Applied Materials, Inc. | Formation of a silicon oxynitride layer on a high-k dielectric material |
DE102005010080B4 (de) * | 2005-03-03 | 2008-04-03 | Qimonda Ag | Verfahren zum Herstellen einer Dünnschicht-Struktur |
US7550381B2 (en) * | 2005-07-18 | 2009-06-23 | Applied Materials, Inc. | Contact clean by remote plasma and repair of silicide surface |
WO2007035660A1 (en) * | 2005-09-20 | 2007-03-29 | Applied Materials, Inc. | Method to form a device on a soi substrate |
KR100716904B1 (ko) * | 2005-12-28 | 2007-05-10 | 동부일렉트로닉스 주식회사 | 반도체 장치의 보호막 및 그 제조 방법 |
US7678710B2 (en) | 2006-03-09 | 2010-03-16 | Applied Materials, Inc. | Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system |
US7645710B2 (en) | 2006-03-09 | 2010-01-12 | Applied Materials, Inc. | Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system |
US7837838B2 (en) | 2006-03-09 | 2010-11-23 | Applied Materials, Inc. | Method of fabricating a high dielectric constant transistor gate using a low energy plasma apparatus |
JP2007243003A (ja) * | 2006-03-10 | 2007-09-20 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
US7795124B2 (en) | 2006-06-23 | 2010-09-14 | Applied Materials, Inc. | Methods for contact resistance reduction of advanced CMOS devices |
US7522968B2 (en) * | 2006-07-10 | 2009-04-21 | Applied Materials, Inc. | Scheduling method for processing equipment |
US20080051930A1 (en) * | 2006-07-10 | 2008-02-28 | Oh Hilario L | Scheduling method for processing equipment |
WO2008008727A2 (en) * | 2006-07-10 | 2008-01-17 | Applied Materials, Inc. | Scheduling method for processing equipment |
US20080023732A1 (en) * | 2006-07-28 | 2008-01-31 | Felch Susan B | Use of carbon co-implantation with millisecond anneal to produce ultra-shallow junctions |
US7601648B2 (en) * | 2006-07-31 | 2009-10-13 | Applied Materials, Inc. | Method for fabricating an integrated gate dielectric layer for field effect transistors |
WO2008039845A2 (en) | 2006-09-26 | 2008-04-03 | Applied Materials, Inc. | Fluorine plasma treatment of high-k gate stack for defect passivation |
US20080115808A1 (en) * | 2006-11-20 | 2008-05-22 | Applied Materials, Inc. | In-situ chamber cleaning for an rtp chamber |
US7804042B2 (en) * | 2007-06-18 | 2010-09-28 | Applied Materials, Inc. | Pryometer for laser annealing system compatible with amorphous carbon optical absorber layer |
US7615458B2 (en) * | 2007-06-19 | 2009-11-10 | Texas Instruments Incorporated | Activation of CMOS source/drain extensions by ultra-high temperature anneals |
US20090117701A1 (en) * | 2007-11-01 | 2009-05-07 | Meng-Yi Wu | Method for manufacturing a mos transistor |
US20090120924A1 (en) * | 2007-11-08 | 2009-05-14 | Stephen Moffatt | Pulse train annealing method and apparatus |
US7800081B2 (en) * | 2007-11-08 | 2010-09-21 | Applied Materials, Inc. | Pulse train annealing method and apparatus |
US9498845B2 (en) | 2007-11-08 | 2016-11-22 | Applied Materials, Inc. | Pulse train annealing method and apparatus |
US7635648B2 (en) * | 2008-04-10 | 2009-12-22 | Applied Materials, Inc. | Methods for fabricating dual material gate in a semiconductor device |
US7947584B2 (en) * | 2008-05-02 | 2011-05-24 | Applied Materials, Inc. | Suitably short wavelength light for laser annealing of silicon in DSA type systems |
US7638442B2 (en) * | 2008-05-09 | 2009-12-29 | Promos Technologies, Inc. | Method of forming a silicon nitride layer on a gate oxide film of a semiconductor device and annealing the nitride layer |
KR20100040455A (ko) * | 2008-10-10 | 2010-04-20 | 주식회사 동부하이텍 | 반도체 소자의 제조 방법 |
CN101783298B (zh) * | 2009-01-21 | 2012-11-14 | 中国科学院微电子研究所 | 抑制高k栅介质/金属栅结构界面层生长的方法 |
US8329525B2 (en) * | 2010-10-04 | 2012-12-11 | Stmicroelectronics, Inc. | Method for fabricating at least three metal-oxide semiconductor transistors having different threshold voltages |
US20130137244A1 (en) * | 2011-05-26 | 2013-05-30 | Solexel, Inc. | Method and apparatus for reconditioning a carrier wafer for reuse |
US9085045B2 (en) | 2011-11-04 | 2015-07-21 | Tokyo Electron Limited | Method and system for controlling a spike anneal process |
US8927423B2 (en) | 2011-12-16 | 2015-01-06 | Applied Materials, Inc. | Methods for annealing a contact metal layer to form a metal silicidation layer |
US8586479B2 (en) | 2012-01-23 | 2013-11-19 | Applied Materials, Inc. | Methods for forming a contact metal layer in semiconductor devices |
US9330939B2 (en) | 2012-03-28 | 2016-05-03 | Applied Materials, Inc. | Method of enabling seamless cobalt gap-fill |
CN102637581A (zh) * | 2012-04-06 | 2012-08-15 | 上海华力微电子有限公司 | 一种防止硼掺杂层释气的方法 |
KR102014934B1 (ko) * | 2012-12-28 | 2019-08-28 | 에스케이하이닉스 주식회사 | Cmos 회로 및 그 제조 방법 |
US9012315B2 (en) * | 2013-08-09 | 2015-04-21 | Taiwan Semiconductor Manufacturing Company Limited | Methods and systems for dopant activation using microwave radiation |
US9401274B2 (en) | 2013-08-09 | 2016-07-26 | Taiwan Semiconductor Manufacturing Company Limited | Methods and systems for dopant activation using microwave radiation |
CN105518827B (zh) | 2013-09-27 | 2019-06-14 | 应用材料公司 | 实现无缝钴间隙填充的方法 |
CN105762067A (zh) * | 2014-12-16 | 2016-07-13 | 中芯国际集成电路制造(上海)有限公司 | 栅极的制作方法及半导体器件 |
US9859121B2 (en) | 2015-06-29 | 2018-01-02 | International Business Machines Corporation | Multiple nanosecond laser pulse anneal processes and resultant semiconductor structure |
KR102427152B1 (ko) | 2016-12-12 | 2022-07-28 | 어플라이드 머티어리얼스, 인코포레이티드 | 핀 전계 효과 트랜지스터(finfet) 디바이스 위에 등각성의 에피택셜 반도체 클래딩 재료를 형성하는 방법 |
US10622214B2 (en) | 2017-05-25 | 2020-04-14 | Applied Materials, Inc. | Tungsten defluorination by high pressure treatment |
JP6947914B2 (ja) | 2017-08-18 | 2021-10-13 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 高圧高温下のアニールチャンバ |
US10276411B2 (en) | 2017-08-18 | 2019-04-30 | Applied Materials, Inc. | High pressure and high temperature anneal chamber |
KR102396319B1 (ko) | 2017-11-11 | 2022-05-09 | 마이크로머티어리얼즈 엘엘씨 | 고압 프로세싱 챔버를 위한 가스 전달 시스템 |
KR20200075892A (ko) | 2017-11-17 | 2020-06-26 | 어플라이드 머티어리얼스, 인코포레이티드 | 고압 처리 시스템을 위한 컨덴서 시스템 |
JP7239598B2 (ja) | 2018-03-09 | 2023-03-14 | アプライド マテリアルズ インコーポレイテッド | 金属含有材料の高圧アニーリングプロセス |
US10950429B2 (en) | 2018-05-08 | 2021-03-16 | Applied Materials, Inc. | Methods of forming amorphous carbon hard mask layers and hard mask layers formed therefrom |
CN108922921B (zh) * | 2018-07-23 | 2020-06-19 | 长江存储科技有限责任公司 | 三维存储器、mos场效应晶体管及其制作方法 |
US10748783B2 (en) | 2018-07-25 | 2020-08-18 | Applied Materials, Inc. | Gas delivery module |
WO2020117462A1 (en) | 2018-12-07 | 2020-06-11 | Applied Materials, Inc. | Semiconductor processing system |
JP7294858B2 (ja) * | 2019-04-09 | 2023-06-20 | 株式会社Screenホールディングス | 熱処理方法および熱処理装置 |
KR20200121941A (ko) | 2019-04-16 | 2020-10-27 | 삼성디스플레이 주식회사 | 표시 패널 및 표시 패널의 제조 방법 |
US11901222B2 (en) | 2020-02-17 | 2024-02-13 | Applied Materials, Inc. | Multi-step process for flowable gap-fill film |
CN111933696B (zh) * | 2020-10-14 | 2020-12-25 | 南京晶驱集成电路有限公司 | 半导体器件的制备方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0294519A (ja) * | 1988-09-30 | 1990-04-05 | Sony Corp | 半導体装置の製造方法 |
US5966605A (en) * | 1997-11-07 | 1999-10-12 | Advanced Micro Devices, Inc. | Reduction of poly depletion in semiconductor integrated circuits |
US6100171A (en) * | 1998-03-03 | 2000-08-08 | Advanced Micro Devices, Inc. | Reduction of boron penetration by laser anneal removal of fluorine |
JP2003110103A (ja) * | 2001-07-31 | 2003-04-11 | Internatl Business Mach Corp <Ibm> | 高誘電率材料上のその場でドープされたゲートの活性化 |
JP2003528462A (ja) * | 2000-03-17 | 2003-09-24 | バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド | レーザーアニーリングおよび急速熱アニーリングにより極めて浅い接合を形成する方法 |
Family Cites Families (67)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5898917A (ja) | 1981-12-09 | 1983-06-13 | Seiko Epson Corp | 原子層エビタキシヤル装置 |
US5693139A (en) | 1984-07-26 | 1997-12-02 | Research Development Corporation Of Japan | Growth of doped semiconductor monolayers |
US5294286A (en) | 1984-07-26 | 1994-03-15 | Research Development Corporation Of Japan | Process for forming a thin film of silicon |
JPS62171999A (ja) | 1986-01-27 | 1987-07-28 | Nippon Telegr & Teleph Corp <Ntt> | 3−v族化合物半導体のエピタキシヤル結晶成長方法 |
JPS6362313A (ja) | 1986-09-03 | 1988-03-18 | Fujitsu Ltd | 半導体装置の製造方法 |
JPH0639357B2 (ja) | 1986-09-08 | 1994-05-25 | 新技術開発事業団 | 元素半導体単結晶薄膜の成長方法 |
US5607511A (en) | 1992-02-21 | 1997-03-04 | International Business Machines Corporation | Method and apparatus for low temperature, low pressure chemical vapor deposition of epitaxial silicon layers |
JPH01270593A (ja) | 1988-04-21 | 1989-10-27 | Fujitsu Ltd | 化合物半導体層形成方法 |
US5112439A (en) | 1988-11-30 | 1992-05-12 | Mcnc | Method for selectively depositing material on substrates |
JPH02172895A (ja) | 1988-12-22 | 1990-07-04 | Nec Corp | 半導体の結晶成長方法 |
JPH0824191B2 (ja) | 1989-03-17 | 1996-03-06 | 富士通株式会社 | 薄膜トランジスタ |
EP0413982B1 (en) | 1989-07-27 | 1997-05-14 | Junichi Nishizawa | Impurity doping method with adsorbed diffusion source |
JPH03286522A (ja) | 1990-04-03 | 1991-12-17 | Nec Corp | Siの結晶成長方法 |
JPH0547665A (ja) | 1991-08-12 | 1993-02-26 | Fujitsu Ltd | 気相成長方法 |
JP2828152B2 (ja) | 1991-08-13 | 1998-11-25 | 富士通 株式会社 | 薄膜形成方法、多層構造膜及びシリコン薄膜トランジスタの形成方法 |
US5480818A (en) | 1992-02-10 | 1996-01-02 | Fujitsu Limited | Method for forming a film and method for manufacturing a thin film transistor |
JP3211394B2 (ja) | 1992-08-13 | 2001-09-25 | ソニー株式会社 | 半導体装置の製造方法 |
JPH0750690B2 (ja) | 1992-08-21 | 1995-05-31 | 日本電気株式会社 | ハロゲン化物を用いる半導体結晶のエピタキシャル成長方法とその装置 |
US5273930A (en) | 1992-09-03 | 1993-12-28 | Motorola, Inc. | Method of forming a non-selective silicon-germanium epitaxial film |
US5372860A (en) | 1993-07-06 | 1994-12-13 | Corning Incorporated | Silicon device production |
JPH07109573A (ja) | 1993-10-12 | 1995-04-25 | Semiconductor Energy Lab Co Ltd | ガラス基板および加熱処理方法 |
US5796116A (en) | 1994-07-27 | 1998-08-18 | Sharp Kabushiki Kaisha | Thin-film semiconductor device including a semiconductor film with high field-effect mobility |
AUPO347196A0 (en) | 1996-11-06 | 1996-12-05 | Pacific Solar Pty Limited | Improved method of forming polycrystalline-silicon films on glass |
US5807792A (en) | 1996-12-18 | 1998-09-15 | Siemens Aktiengesellschaft | Uniform distribution of reactants in a device layer |
US6335280B1 (en) | 1997-01-13 | 2002-01-01 | Asm America, Inc. | Tungsten silicide deposition process |
US5908307A (en) | 1997-01-31 | 1999-06-01 | Ultratech Stepper, Inc. | Fabrication method for reduced-dimension FET devices |
US6118216A (en) | 1997-06-02 | 2000-09-12 | Osram Sylvania Inc. | Lead and arsenic free borosilicate glass and lamp containing same |
US6042654A (en) | 1998-01-13 | 2000-03-28 | Applied Materials, Inc. | Method of cleaning CVD cold-wall chamber and exhaust lines |
US6514880B2 (en) | 1998-02-05 | 2003-02-04 | Asm Japan K.K. | Siloxan polymer film on semiconductor substrate and method for forming same |
TW437017B (en) | 1998-02-05 | 2001-05-28 | Asm Japan Kk | Silicone polymer insulation film on semiconductor substrate and method for formation thereof |
US6383955B1 (en) | 1998-02-05 | 2002-05-07 | Asm Japan K.K. | Silicone polymer insulation film on semiconductor substrate and method for forming the film |
US6159852A (en) | 1998-02-13 | 2000-12-12 | Micron Technology, Inc. | Method of depositing polysilicon, method of fabricating a field effect transistor, method of forming a contact to a substrate, method of forming a capacitor |
US6797558B2 (en) | 2001-04-24 | 2004-09-28 | Micron Technology, Inc. | Methods of forming a capacitor with substantially selective deposite of polysilicon on a substantially crystalline capacitor dielectric layer |
US6232196B1 (en) | 1998-03-06 | 2001-05-15 | Asm America, Inc. | Method of depositing silicon with high step coverage |
JP4214585B2 (ja) | 1998-04-24 | 2009-01-28 | 富士ゼロックス株式会社 | 半導体デバイス、半導体デバイスの製造方法及び製造装置 |
US6025627A (en) | 1998-05-29 | 2000-02-15 | Micron Technology, Inc. | Alternate method and structure for improved floating gate tunneling devices |
US6037235A (en) | 1998-09-14 | 2000-03-14 | Applied Materials, Inc. | Hydrogen anneal for curing defects of silicon/nitride interfaces of semiconductor devices |
KR100287180B1 (ko) | 1998-09-17 | 2001-04-16 | 윤종용 | 계면 조절층을 이용하여 금속 배선층을 형성하는 반도체 소자의 제조 방법 |
US6305314B1 (en) | 1999-03-11 | 2001-10-23 | Genvs, Inc. | Apparatus and concept for minimizing parasitic chemical vapor deposition during atomic layer deposition |
KR20010017820A (ko) | 1999-08-14 | 2001-03-05 | 윤종용 | 반도체 소자 및 그 제조방법 |
US6489241B1 (en) | 1999-09-17 | 2002-12-03 | Applied Materials, Inc. | Apparatus and method for surface finishing a silicon film |
SG99871A1 (en) | 1999-10-25 | 2003-11-27 | Motorola Inc | Method for fabricating a semiconductor structure including a metal oxide interface with silicon |
WO2001041544A2 (en) | 1999-12-11 | 2001-06-14 | Asm America, Inc. | Deposition of gate stacks including silicon germanium layers |
US6291319B1 (en) | 1999-12-17 | 2001-09-18 | Motorola, Inc. | Method for fabricating a semiconductor structure having a stable crystalline interface with silicon |
US6348420B1 (en) | 1999-12-23 | 2002-02-19 | Asm America, Inc. | Situ dielectric stacks |
EP1123991A3 (en) | 2000-02-08 | 2002-11-13 | Asm Japan K.K. | Low dielectric constant materials and processes |
US6645838B1 (en) | 2000-04-10 | 2003-11-11 | Ultratech Stepper, Inc. | Selective absorption process for forming an activated doped region in a semiconductor |
US6458718B1 (en) | 2000-04-28 | 2002-10-01 | Asm Japan K.K. | Fluorine-containing materials and processes |
US6635588B1 (en) | 2000-06-12 | 2003-10-21 | Ultratech Stepper, Inc. | Method for laser thermal processing using thermally induced reflectivity switch |
US6303476B1 (en) | 2000-06-12 | 2001-10-16 | Ultratech Stepper, Inc. | Thermally induced reflectivity switch for laser thermal processing |
JP2002198525A (ja) * | 2000-12-27 | 2002-07-12 | Toshiba Corp | 半導体装置及びその製造方法 |
KR100393208B1 (ko) | 2001-01-15 | 2003-07-31 | 삼성전자주식회사 | 도핑된 다결정 실리콘-저매니움막을 이용한 반도체 소자및 그 제조방법 |
US6528374B2 (en) | 2001-02-05 | 2003-03-04 | International Business Machines Corporation | Method for forming dielectric stack without interfacial layer |
EP1421607A2 (en) | 2001-02-12 | 2004-05-26 | ASM America, Inc. | Improved process for deposition of semiconductor films |
US7026219B2 (en) | 2001-02-12 | 2006-04-11 | Asm America, Inc. | Integration of high k gate dielectric |
KR20040008193A (ko) | 2001-05-30 | 2004-01-28 | 에이에스엠 아메리카, 인코포레이티드 | 저온 로딩 및 소성 |
US6777317B2 (en) | 2001-08-29 | 2004-08-17 | Ultratech Stepper, Inc. | Method for semiconductor gate doping |
US7439191B2 (en) | 2002-04-05 | 2008-10-21 | Applied Materials, Inc. | Deposition of silicon layers for active matrix liquid crystal display (AMLCD) applications |
US6784101B1 (en) * | 2002-05-16 | 2004-08-31 | Advanced Micro Devices Inc | Formation of high-k gate dielectric layers for MOS devices fabricated on strained lattice semiconductor substrates with minimized stress relaxation |
JP3699946B2 (ja) * | 2002-07-25 | 2005-09-28 | 株式会社東芝 | 半導体装置の製造方法 |
US7186630B2 (en) | 2002-08-14 | 2007-03-06 | Asm America, Inc. | Deposition of amorphous silicon-containing films |
US6821868B2 (en) * | 2002-12-27 | 2004-11-23 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of forming nitrogen enriched gate dielectric with low effective oxide thickness |
US6998305B2 (en) * | 2003-01-24 | 2006-02-14 | Asm America, Inc. | Enhanced selectivity for epitaxial deposition |
US20040226911A1 (en) | 2003-04-24 | 2004-11-18 | David Dutton | Low-temperature etching environment |
US6982433B2 (en) | 2003-06-12 | 2006-01-03 | Intel Corporation | Gate-induced strain for MOS performance improvement |
US7166528B2 (en) | 2003-10-10 | 2007-01-23 | Applied Materials, Inc. | Methods of selective deposition of heavily doped epitaxial SiGe |
US7045432B2 (en) * | 2004-02-04 | 2006-05-16 | Freescale Semiconductor, Inc. | Method for forming a semiconductor device with local semiconductor-on-insulator (SOI) |
-
2004
- 2004-02-23 US US10/784,904 patent/US7078302B2/en not_active Expired - Lifetime
-
2005
- 2005-02-10 JP JP2006554137A patent/JP5028093B2/ja not_active Expired - Fee Related
- 2005-02-10 KR KR1020067019046A patent/KR101118330B1/ko not_active IP Right Cessation
- 2005-02-10 EP EP05722937A patent/EP1719158A1/en not_active Withdrawn
- 2005-02-10 CN CNB2005800051040A patent/CN100524630C/zh not_active Expired - Fee Related
- 2005-02-10 WO PCT/US2005/004318 patent/WO2005083762A1/en active Application Filing
-
2006
- 2006-07-05 US US11/428,758 patent/US7611976B2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0294519A (ja) * | 1988-09-30 | 1990-04-05 | Sony Corp | 半導体装置の製造方法 |
US5966605A (en) * | 1997-11-07 | 1999-10-12 | Advanced Micro Devices, Inc. | Reduction of poly depletion in semiconductor integrated circuits |
US6100171A (en) * | 1998-03-03 | 2000-08-08 | Advanced Micro Devices, Inc. | Reduction of boron penetration by laser anneal removal of fluorine |
JP2003528462A (ja) * | 2000-03-17 | 2003-09-24 | バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド | レーザーアニーリングおよび急速熱アニーリングにより極めて浅い接合を形成する方法 |
JP2003110103A (ja) * | 2001-07-31 | 2003-04-11 | Internatl Business Mach Corp <Ibm> | 高誘電率材料上のその場でドープされたゲートの活性化 |
Also Published As
Publication number | Publication date |
---|---|
KR20070020426A (ko) | 2007-02-21 |
EP1719158A1 (en) | 2006-11-08 |
US7611976B2 (en) | 2009-11-03 |
KR101118330B1 (ko) | 2012-03-12 |
US20060286763A1 (en) | 2006-12-21 |
WO2005083762A1 (en) | 2005-09-09 |
US20050186765A1 (en) | 2005-08-25 |
JP5028093B2 (ja) | 2012-09-19 |
CN100524630C (zh) | 2009-08-05 |
CN1922717A (zh) | 2007-02-28 |
US7078302B2 (en) | 2006-07-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5028093B2 (ja) | 半導体製造用のゲート電極ドーパント活性化方法 | |
US7888747B2 (en) | Semiconductor device and method of fabricating the same | |
US6952040B2 (en) | Transistor structure and method of fabrication | |
JP3600399B2 (ja) | コバルトシリサイドの薄い層が形成されるデバイスの作製プロセス | |
JP2978736B2 (ja) | 半導体装置の製造方法 | |
US20080023732A1 (en) | Use of carbon co-implantation with millisecond anneal to produce ultra-shallow junctions | |
JP4796771B2 (ja) | 半導体デバイス | |
US5967794A (en) | Method for fabricating a field effect transistor having elevated source/drain regions | |
US7985985B2 (en) | Semiconductor device and method of fabricating the same | |
JP2001024194A (ja) | 半導体装置の製造方法及び半導体装置 | |
JP2877104B2 (ja) | 半導体装置の製造方法 | |
US20130032897A1 (en) | Mosfet gate electrode employing arsenic-doped silicon-germanium alloy layer | |
CN100382316C (zh) | 具有高熔点金属栅的半导体器件及其制造方法 | |
US6677201B1 (en) | Method of fabricating thermal CVD oxynitride and BTBAS nitride sidewall spacer for metal oxide semiconductor transistors | |
JP4664557B2 (ja) | 半導体装置の製造方法 | |
US7208409B2 (en) | Integrated circuit metal silicide method | |
JP2004165470A (ja) | 半導体装置及びその製造方法 | |
US20020068407A1 (en) | MOS transistor fabrication method | |
US20060197120A1 (en) | Gate electrode for semiconductor devices | |
US20080054370A1 (en) | Semiconductor device and method of fabricating the same | |
JP2001210820A (ja) | 半導体装置およびその製造方法 | |
KR20040037847A (ko) | 반도체소자의 제조방법 | |
JPH1116855A (ja) | 半導体装置及びその製造方法 | |
JPH09260658A (ja) | 半導体装置及びその製造方法 | |
KR20020045263A (ko) | 반도체 소자의 트랜지스터 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20071219 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20101130 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20101210 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110307 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110329 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20110628 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20110705 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110727 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111101 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120130 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120529 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120625 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150629 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |