JP2007239103A - 処理システムのためのシーリングのデバイスおよび方法 - Google Patents
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
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Abstract
【解決手段】 処理システムの移送空間から真空分離された処理システムの処理空間内で基板を処理するための方法、コンピュータ読み取り可能なメディアおよびシステムが示される。シーリングデバイスは、処理空間を規定するように構成された第1のチャンバアセンブリと、移送空間を規定するように構成された第2のチャンバアセンブリとの間に配置される。シーリングデバイスが係合するときに、真空アイソレーションは、処理空間と、移送空間との間に提供される。シーリングデバイスは、2つ以上の接触突起を備え、その接触突起は、その間に形成される1つ以上のポケットを有している。シーリングデバイスが、第1のチャンバアセンブリと、第2のチャンバアセンブリとの間に係合するとき、ガスは、1つ以上のポケット内に閉じ込められる。
【選択図】 図1A
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Claims (24)
- 基板を処理するための真空処理システムであって、
第1のシール面を有する第1のチャンバアセンブリと、
第2のシール面を有する第2のチャンバーアセンブリと、
前記第1のシール面または前記第2のシール面の1つに組み合わせられ、この1つのシール面によって保持され、2つ以上の接触突起およびその間に配置されている1つ以上のポケットを含んでいるシーリングデバイスとを具備し、
前記第1のチャンバアセンブリと、前記第2のチャンバーアセンブリとの間のシールは、前記2つ以上の接触突起の間のガスを前記ポケット内に閉じ込める一方、前記第2のシール面で前記シーリングデバイスの前記2つ以上の接触突起の接触を容易にするために、前記第2のチャンバーアセンブリに前記第1のチャンバアセンブリを組み合わせることによって形成される真空処理システム。 - 前記第1のチャンバアセンブリは、材料堆積を容易にするように構成された処理空間を備え、
前記第2のチャンバーアセンブリは、前記真空処理システムとの間で前記基板の移送を容易にするための移送空間を備えている請求項1の真空処理システム。 - 前記第2のチャンバーアセンブリに接続され、前記処理空間の第1の位置と、前記移送空間の第2の位置との間で前記基板を支持し、移動するように構成された基板ステージを更に具備する請求項2の真空処理システム。
- 前記シーリングデバイスは、2つの接触突起と、その間に形成されたポケットとを備えている請求項3の真空処理システム。
- 前記シーリングデバイスは、3つの接触突起と、その間に形成された2つのポケットとを備えている請求項3の真空処理システム。
- 前記シーリングデバイスは、前記第1の位置から前記第2の位置への前記基板ステージの移動の間、前記シールを外すように構成されている請求項4の真空処理システム。
- 前記シーリングデバイスは、前記移送空間から前記処理空間を真空分離するように構成されている請求項4の真空処理システム。
- 前記シーリングデバイスは、前記処理空間から前記移送空間までのガスリークを10−3Torr−l/s未満に減少するように構成されている請求項4の真空処理システム。
- 前記シーリングデバイスは、前記処理空間から前記移送空間までのガスリークを10−4Torr−l/s未満に減少するように構成されている請求項4の真空処理システム。
- 前記処理空間と流体が通じ、前記処理空間の減少した汚染物質環境を提供するように構成された第1の真空排気システムと、
前記移送空間と流体を通じ、前記移送空間の減少した汚染物質環境を提供するように構成された第2の真空排気システムと、
前記第1のチャンバアセンブリに接続され、前記材料堆積の間、前記処理空間にプロセス組成を導入するように構成されたガス注入システムと、
前記基板ステージに組み合わされ、前記基板の温度を制御するように構成された温度制御システムとを、更に具備する請求項3の真空処理システム。 - 前記第1のチャンバアセンブリが、前記第2のチャンバアセンブリに組み合わせられるとき、前記シーリングデバイスは、前記ポケット内に閉じ込められたガスを圧縮するように構成されている請求項2の真空処理システム。
- 前記第1のチャンバアセンブリは、前記真空処理システムの上部部分を有し、
前記第2のチャンバアセンブリは、前記真空処理システムの下部部分を有し、
前記基板ステージは、前記基板を垂直方向に移動するように構成されている請求項11の真空処理システム。 - プラズマ形成を容易にするように前記処理空間のプロセスガス組成にパワーを結合するように構成された電源を更に具備する請求項11の真空処理システム。
- 前記電源は、0.1から100MHzまでの周波数でRFエネルギを出力するように構成されたRF電源を備え、
前記基板ステージは、前記RF電源に接続され、前記処理空間に前記RFエネルギを結合させるように構成された電極を含む請求項13の真空処理システム。 - 前記第1のチャンバアセンブリは、排気マニホールドを備え、
前記排気マニホールドは、移送空間から処理空間を分離する、前記第1のチャンバアセンブリから延びている延長を有し、
前記延長は、前記基板の周囲エッジを超え、前記基板の表面の下方で前記延長の1つ以上の開口に前記真空排気システムの前記注入口を圧縮空気作用で組み合わせる内部チャネルを含む請求項10の真空処理システム。 - 前記延長は、前記基板ステージの近くの前記延長の第1の側部から、前記第1の側に対向する前記延長の端部で長手方向に配置された第2の側部まで、ガスコンダクタンスを提供している内側のチャネルを含む請求項15の真空処理システム。
- 前記延長は、前記延長の前記第1の側部に隣接した前記第1のシール面を有するシールプレートを備えている請求項16の真空処理システム。
- 前記基板ステージは、前記第1のチャンバアセンブリの方へ前記基板ステージの移動で、前記シーリングデバイスを介して前記延長の前記シールプレート上の前記第1のシール面に、シールするように構成された前記第2のシール面を有するフランジを備えている請求項17の真空処理システム。
- 前記シーリングデバイスは、エラストマー材を備えている請求項18の真空処理システム。
- 前記処理空間は、原子層堆積(ALD)および化学気相成長(CVD)の少なくとも1つのために構成されている請求項11の真空処理システム。
- 真空処理システムの第2のチャンバアセンブリで第1のチャンバアセンブリをシールする方法であって、
2つ以上の接触突起と、その間に配置された1つ以上のポケットとを含むシーリングデバイスを、前記第1のチャンバアセンブリ上の第1のシール面に配置することと、
前記2つ以上の接触突起の間の前記1つ以上のポケット内にガスを閉じ込める一方、前記第2のシール面に前記シーリングデバイスの前記2つ以上の接触突起を接触させることによって前記第2のチャンバアセンブリ上の第2のシール面で前記シーリングデバイスを係合することとを具備する方法。 - 100℃以上の温度で前記第1のチャンバアセンブリを維持することと、
100℃未満の温度で前記第2のチャンバアセンブリを維持することとを更に具備する請求項21の方法。 - 50℃以上の温度で前記第1のチャンバアセンブリを維持することと、
50℃未満の温度で前記第2のチャンバアセンブリを維持することとを更に具備する請求項21の方法。 - 基板を処理するための真空処理システムであって、
第1のシール面を有する第1のチャンバアセンブリと、
第2のシール面を有する第2のチャンバアセンブリと、
前記第2のチャンバアセンブリが前記第1のアセンブリの方へ移動するときにガスがシールするための手段に閉じ込められ、そして前記シールするための手段で閉じ込められた前記ガスが、前記シールするための手段の外部の圧力より高い圧力であるように、前記第2のチャンバアセンブリに前記第1のチャンバアセンブリをシールするための前記手段とを具備する真空処理システム。
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US20070209590A1 (en) | 2007-09-13 |
US7794546B2 (en) | 2010-09-14 |
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