JP2006322074A - シャワーヘッドを用いた化学気相蒸着方法及びその装置 - Google Patents
シャワーヘッドを用いた化学気相蒸着方法及びその装置 Download PDFInfo
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- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 44
- 238000000034 method Methods 0.000 title claims abstract description 30
- 239000007789 gas Substances 0.000 claims abstract description 247
- 238000010926 purge Methods 0.000 claims abstract description 118
- 238000006243 chemical reaction Methods 0.000 claims abstract description 95
- 239000000758 substrate Substances 0.000 claims abstract description 65
- 238000007599 discharging Methods 0.000 claims abstract description 6
- 239000012495 reaction gas Substances 0.000 claims description 206
- 238000000151 deposition Methods 0.000 claims description 31
- 238000007789 sealing Methods 0.000 claims description 31
- 239000002994 raw material Substances 0.000 claims description 18
- 238000002347 injection Methods 0.000 claims description 17
- 239000007924 injection Substances 0.000 claims description 17
- 238000001816 cooling Methods 0.000 claims description 13
- 239000006227 byproduct Substances 0.000 claims description 12
- 238000009792 diffusion process Methods 0.000 claims description 12
- 239000012159 carrier gas Substances 0.000 claims description 8
- 239000002826 coolant Substances 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 150000002902 organometallic compounds Chemical class 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 238000000926 separation method Methods 0.000 claims description 4
- 230000007423 decrease Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 150000002736 metal compounds Chemical class 0.000 claims description 2
- 239000012808 vapor phase Substances 0.000 claims description 2
- 239000007791 liquid phase Substances 0.000 claims 2
- 230000008016 vaporization Effects 0.000 claims 2
- 229910001338 liquidmetal Inorganic materials 0.000 claims 1
- 239000002245 particle Substances 0.000 abstract description 35
- 239000000463 material Substances 0.000 abstract description 7
- 230000008021 deposition Effects 0.000 description 27
- 238000011109 contamination Methods 0.000 description 14
- 230000000694 effects Effects 0.000 description 10
- 230000001965 increasing effect Effects 0.000 description 9
- 238000000354 decomposition reaction Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 239000012071 phase Substances 0.000 description 3
- 230000002265 prevention Effects 0.000 description 3
- 238000006557 surface reaction Methods 0.000 description 3
- 238000005979 thermal decomposition reaction Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- IVORCBKUUYGUOL-UHFFFAOYSA-N 1-ethynyl-2,4-dimethoxybenzene Chemical compound COC1=CC=C(C#C)C(OC)=C1 IVORCBKUUYGUOL-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229960005235 piperonyl butoxide Drugs 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- BGGIUGXMWNKMCP-UHFFFAOYSA-N 2-methylpropan-2-olate;zirconium(4+) Chemical compound CC(C)(C)O[Zr](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C BGGIUGXMWNKMCP-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4485—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation without using carrier gas in contact with the source material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45519—Inert gas curtains
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45574—Nozzles for more than one gas
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
【解決手段】本発明は、膜を蒸着させるために多数の原料ガスをシャワーヘッドを介して基板上に供給する化学気相蒸着方法において、シャワーヘッドの底面を基板とを所定の距離だけ離隔して配置する離隔段階;原料ガスのうち反応ガスをシャワーヘッド内に注入するとき、シャワーヘッド内の各々の隔室に互いに異なる種類の反応ガスを注入し、原料ガスの中でパージガスはシャワーヘッド内の他の隔室に充填されるように注入する注入段階;及び原料ガスをシャワーヘッドの底面に形成された多数の反応ガス噴射口及び反応ガス噴射口の個数より多いパージガス噴射口を介して排出させる排出段階;を含むことを特徴とする。
【選択図】図9
Description
5 排気口
7 反応室の内壁
9 基板
20 従来のシャワーヘッド
30 サセプター
100 シャワーヘッド
140 上部反応ガスシャワーヘッドモジュール
142 上部反応ガスシャワーヘッドモジュールの底面
143 上部反応ガスシャワーヘッドモジュールの底面における出口
144 反応ガス流路
147 上部反応ガスシャワーヘッドモジュールの上面
153 上部反応ガスシャワーヘッドモジュールにおける反応ガス流入ポート
157 流入ポートに入った反応ガスを拡散させるための拡散板
240 反応ガスシャワーヘッドモジュール
253 下部反応ガスシャワーヘッドモジュールにおける反応ガス流入ポート
275 Oリング座
276 Oリング
445 パージガスシャワーヘッド底面に形成された大きなサイズを有する反応ガス流路の出口
446 パージガスシャワーヘッド底面に形成された小さなサイズを有する出口
453 パージガスシャワーヘッドモジュールにおけるパージガス流入ポート
644 反応ガス供給通路
655 反応ガスシャワーヘッドモジュールの上面における反応ガス流入ポート
656 反応ガスシャワーヘッドモジュールを構成する個々の隔室
657 反応ガスシャワーヘッドモジュール内部の拡散板
900 反応ガス封入装置
901 反応ガス封入装置の表面に穿孔されている多数の通孔
Claims (23)
- 膜を蒸着させるために多数の原料ガスをシャワーヘッドを介して基板上に供給する化学気相蒸着方法において、
前記シャワーヘッドの底面を前記基板と対向するように所定の距離だけ離隔して配置する離隔段階;
前記原料ガスのうち反応ガスを前記シャワーヘッド内に注入するとき、前記シャワーヘッド内の各々の隔室に前記反応ガスのうち一種だけが充填されるように前記シャワーヘッド内の各々の隔室に互いに異なる種類の前記反応ガスを注入し、前記原料ガスの中でパージガスは前記シャワーヘッド内の他の隔室に充填されるように注入する注入段階;及び
前記反応ガス及び前記パージガスを前記シャワーヘッドの底面に形成された多数の反応ガス噴射口及び前記反応ガス噴射口の個数より多いパージガス噴射口を介して排出させる排出段階;を含むことを特徴とする
シャワーヘッドを用いた化学気相蒸着方法。 - 前記反応ガスは、相異なる前記反応ガス噴射口を介して抜け、前記反応ガス噴射口はそれぞれ前記パージガス噴射口の一部に含まれて前記反応ガスを排出することを特徴とする
請求項1に記載の化学気相蒸着方法。 - 前記排出段階において、前記反応ガス噴射口から噴射される前記反応ガスの流れが前記パージガス噴射口から噴射される前記パージガスの流れによって取り囲まれた状態で噴出され、前記反応ガス噴射口を含まない前記パージガス噴射口を介しては前記パージガスだけを排出することを特徴とする
請求項1又は2に記載の化学気相蒸着方法。 - 前記パージガスは、Ar、N2、He、H2及びO2からなる群より選択されるいずれか1つ以上のガスであることを特徴とする
請求項1から3のいずれか一項に記載の化学気相蒸着方法。 - 前記反応ガスは、液相の金属有機化合物を加熱して純粋な蒸気に変換されたガスであることを特徴とする
請求項1から4のいずれか一項に記載の化学気相蒸着方法。 - 前記反応ガスは、運搬ガスを用いて液相の原料物を蒸発器から気化させて前記運搬ガスと混合されたガスであることを特徴とする
請求項1から4のいずれか一項に記載の化学気相蒸着方法。 - 前記シャワーヘッドを取り囲む冷却ジャケットに冷却剤を注入して前記シャワーヘッドを冷却する冷却段階を更に含むことを特徴とする
請求項1から6のいずれか一項に記載の化学気相蒸着方法。 - 膜を蒸着させるための原料ガスをシャワーヘッドを介して基板上に供給する化学気相蒸着装置において、
前記シャワーヘッドは、前記原料ガスのうち反応ガスと同数であり、互いに隔離される内部空間を有し、前記夫々の反応ガスが反応ガス流入ポートを介して内部に流入して前記基板へ供給するための多数の反応ガス流路を底面に備えた多数の反応ガスシャワーヘッドモジュール;及び
前記反応ガスシャワーヘッドモジュールの下方に設けられ、前記原料ガスのうちパージガスがパージガス流入ポートを介して内部に流入して前記パージガスのみが充填され、前記反応ガスとは隔離された内部空間を有し、上面にはシール部材を用いて前記反応ガス流路を取り囲んで貫通させる多数の流入口が具備され、下面には多数の反応ガス流路の出口と前記反応ガス流路の出口より小さな直径を有する多数のパージガス出口とが更に形成されるパージガスシャワーヘッドモジュール;を含み、
前記各々の反応ガスシャワーヘッドモジュールに具備された各々の反応ガス流路は前記反応ガスシャワーヘッドモジュールより下方にある反応ガスシャワーヘッドモジュールの内部及び前記パージガスシャワーヘッドの内部を貫通することを特徴とする
シャワーヘッドを用いた化学気相蒸着装置。 - 前記反応ガスシャワーヘッドモジュールの各々の内部には多孔性の拡散板を更に備えることを特徴とする
請求項8に記載の化学気相蒸着装置。 - 膜を蒸着させるための原料ガスをシャワーヘッドを介して基板上に供給する化学気相蒸着装置において、
前記シャワーヘッドは、内部空間が多数個の隔室に互いに隔離されて多数の反応ガスが個別的に夫々の隔室ごとに備えられた反応ガス流入ポートを介して流入し、前記夫々の隔室の底面に多数個の反応ガス出口が形成され、前記反応ガス出口に連結されて前記反応ガスを前記基板上に供給するための反応ガス流路を備えた1つの反応ガスシャワーヘッドモジュール;及び
前記反応ガスシャワーヘッドモジュールの下方に設けられ、前記原料ガスのうちパージガスがパージガス流入ポートを介して内部に流入して前記パージガスだけが充填され、前記反応ガスとは隔離された内部空間を有し、上面には前記反応ガス流路を密封しながら貫通させる多数の流入口が具備され、下面には多数の反応ガス流路の出口と前記反応ガス流路の出口より小さな直径を有する多数のパージガス出口とが更に形成されるパージガスシャワーヘッドモジュール;を含み、
前記反応ガスシャワーヘッドモジュールに具備された夫々の反応ガス流路は前記反応ガスシャワーヘッドモジュールより下方にある前記パージガスシャワーヘッドモジュールの内部を貫通することを特徴とする
シャワーヘッドを備えた化学気相蒸着装置。 - 前記隔室の内部には多孔性の拡散板を更に備えることを特徴とする
請求項10に記載の化学気相蒸着装置。 - 前記隔室は、前記反応気体シャワーヘッドモジュールの内部において円周方向に多数配列され、前記それぞれの隔室は、扇状、すなわち配列の中心に行くほどその幅が狭まる形状を呈し、前記反応ガス供給通路は、前記隔室の半径方向に所定距離毎、ずれるように備えられる(offset)ことを特徴とする
請求項10又は11に記載の化学気相蒸着装置。 - 前記隔室は、前記反応気体シャワーヘッドモジュールの内部において円周方向に多数配列され、前記それぞれの隔室は、扇状、すなわち配列の中心に行くほど円周方向に所定の長さだけ段差状に歪曲された断面を有し、前記反応ガス供給通路は、前記隔室が円周方向に繰り返されることにつれ、配列の中心方向に不規則的に備えられる(offset)ことを特徴とする
請求項10又は11に記載の化学気相蒸着装置。 - 前記パージガス出口は、直径が0.8mm〜1.4mmであり、前記反応ガス流路の出口は直径が3.5mm〜5mmであり、前記パージガス出口からはパージガスだけが噴射され、前記反応ガス流路の出口からは前記反応ガス流路の下端部を取り囲みながらパージガスが噴射されることを特徴とする
請求項8から13のいずれか一項に記載の化学気相蒸着装置。 - 前記パージガスは、Ar、N2、He、H2及びO2からなる群より選択されるいずれか1つ以上のガスであることを特徴とする
請求項8から14のいずれか一項に記載の化学気相蒸着装置。 - 前記反応ガスは、液相の金属有機化合物を加熱して純粋な蒸気に変換されたガスであることを特徴とする
請求項8から15のいずれか一項に記載の化学気相蒸着装置。 - 前記反応ガスは、運搬ガスを用いて液相の原料物を蒸発器から気化させて前記運搬ガスと混合されたガスであることを特徴とする
請求項8から15のいずれか一項に記載の化学気相蒸着装置。 - 前記基板と前記パージガスシャワーヘッドモジュールとの間の離隔距離は70〜120mmであることを特徴とする
請求項8から17のいずれか一項に記載の化学気相蒸着装置。 - 前記シャワーヘッドを取り囲みながら前記シャワーヘッドを冷却剤を用いて冷却する冷却ジャケットを更に含むことを特徴とする
請求項8から18のいずれか一項に記載の化学気相蒸着装置。 - 前記パージガスシャワーヘッドモジュールの下面において、前記反応ガス流路の出口が前記下面から10mm以内に前記基板側に延設されていることを特徴とする
請求項8から19のいずれか一項に記載の化学気相蒸着装置。 - 前記パージガスシャワーヘッドモジュールの下面において、前記反応ガス流路は前記反応ガス流路の出口の下端部に対して−3mm乃至+3mmの位置に凹設又は凸設されていることを特徴とする
請求項8から19のいずれか一項に記載の化学気相蒸着装置。 - 反応室の内壁と天井から十分な距離だけ離れて、前記反応室の内部に位置しており、前記基板をドームの形態で取り囲みながら下端部が反応室の底と当接しており、その表面に多数の微細孔が穿孔されている反応ガス封入装置;
前記パージガスが、外部から前記反応室と前記反応ガス封入装置との間の空間へ供給できるように、前記反応室に形成されるパージガス流入ポート;及び
副産物を排出するために、前記反応ガス封入装置の内部に設けられる排気口;を更に含み、
前記反応ガス封入装置に前記シャワーヘッドが設けられるが、
前記シャワーヘッドの周縁部が、前記反応ガス封入装置の上面の中心部に形成された開放領域に沿って亘るようにして、前記シャワーヘッドの底面と基板とが向かい合うように設けられることを特徴とする
請求項8〜21のいずれか一項に記載の化学気相蒸着装置。 - 反応室の内壁と天井から十分な距離だけ離れて、前記反応室の内部に位置しており、前記基板をドームの形態で取り囲みながら下端部が反応室の底と当接しており、その表面に多数の微細孔が穿孔されている円筒形ボディと、前記円筒形ボディの上端部に設けられ、周縁部が前記反応室の内壁と当接しており、中央部の開放された円板とを含んでなる反応ガス封入装置;
前記パージガスが、外部から前記反応室と前記反応ガス封入装置との間の空間へ供給できるように、前記反応室に形成されるパージガス流入ポート;及び
副産物を排出するために、前記反応ガス封入装置の内部に設けられる排気口;を更に含み、
前記反応ガス封入装置に前記シャワーヘッドが設けられるが、
前記シャワーヘッドの周縁部が、前記反応ガス封入装置の上面の中心部に形成された開放領域に沿って亘るようにして、前記シャワーヘッドの底面と基板とが向かい合うように設けられることを特徴とする
請求項8〜21のいずれか一項に記載の化学気相蒸着装置。
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KR20060120402A (ko) | 2006-11-27 |
US20090178616A1 (en) | 2009-07-16 |
US7479303B2 (en) | 2009-01-20 |
JP4630226B2 (ja) | 2011-02-09 |
US20060263522A1 (en) | 2006-11-23 |
US8298370B2 (en) | 2012-10-30 |
WO2006123870A1 (en) | 2006-11-23 |
KR100731164B1 (ko) | 2007-06-20 |
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