JP2005210114A5 - - Google Patents
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- Publication number
- JP2005210114A5 JP2005210114A5 JP2005006181A JP2005006181A JP2005210114A5 JP 2005210114 A5 JP2005210114 A5 JP 2005210114A5 JP 2005006181 A JP2005006181 A JP 2005006181A JP 2005006181 A JP2005006181 A JP 2005006181A JP 2005210114 A5 JP2005210114 A5 JP 2005210114A5
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- transistors
- contact portion
- planar metal
- power transmission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 claims 31
- 239000002184 metal Substances 0.000 claims 31
- 239000000758 substrate Substances 0.000 claims 4
- 239000011810 insulating material Substances 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/765,474 US7265448B2 (en) | 2004-01-26 | 2004-01-26 | Interconnect structure for power transistors |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005276912A Division JP2006093712A (ja) | 2004-01-26 | 2005-09-22 | アルミニウム・コアを有する相互接続構造 |
| JP2005276911A Division JP5502255B2 (ja) | 2004-01-26 | 2005-09-22 | 集積回路を接続するための相互接続構造 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005210114A JP2005210114A (ja) | 2005-08-04 |
| JP2005210114A5 true JP2005210114A5 (enExample) | 2005-11-17 |
| JP4596925B2 JP4596925B2 (ja) | 2010-12-15 |
Family
ID=34750426
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005006181A Expired - Fee Related JP4596925B2 (ja) | 2004-01-26 | 2005-01-13 | 集積回路および集積回路用の相互接続構造 |
| JP2005276912A Pending JP2006093712A (ja) | 2004-01-26 | 2005-09-22 | アルミニウム・コアを有する相互接続構造 |
| JP2005276911A Expired - Lifetime JP5502255B2 (ja) | 2004-01-26 | 2005-09-22 | 集積回路を接続するための相互接続構造 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005276912A Pending JP2006093712A (ja) | 2004-01-26 | 2005-09-22 | アルミニウム・コアを有する相互接続構造 |
| JP2005276911A Expired - Lifetime JP5502255B2 (ja) | 2004-01-26 | 2005-09-22 | 集積回路を接続するための相互接続構造 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US7265448B2 (enExample) |
| EP (3) | EP1727200B1 (enExample) |
| JP (3) | JP4596925B2 (enExample) |
| CN (3) | CN1805137A (enExample) |
| TW (3) | TWI354368B (enExample) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7960833B2 (en) | 2003-10-22 | 2011-06-14 | Marvell World Trade Ltd. | Integrated circuits and interconnect structure for integrated circuits |
| US7851872B2 (en) | 2003-10-22 | 2010-12-14 | Marvell World Trade Ltd. | Efficient transistor structure |
| US7414275B2 (en) * | 2005-06-24 | 2008-08-19 | International Business Machines Corporation | Multi-level interconnections for an integrated circuit chip |
| JP4424331B2 (ja) * | 2005-08-01 | 2010-03-03 | セイコーエプソン株式会社 | 静電アクチュエータ、液滴吐出ヘッド、液滴吐出ヘッドの駆動方法及び静電アクチュエータの製造方法 |
| WO2007050990A2 (en) * | 2005-10-27 | 2007-05-03 | Rosetta Inpharmatics Llc | Nucleic acid amplification using non-random primers |
| US8786072B2 (en) * | 2007-02-27 | 2014-07-22 | International Rectifier Corporation | Semiconductor package |
| US9147644B2 (en) | 2008-02-26 | 2015-09-29 | International Rectifier Corporation | Semiconductor device and passive component integration in a semiconductor package |
| WO2008115468A2 (en) * | 2007-03-15 | 2008-09-25 | Marvell World Trade Ltd. | Integrated circuits and interconnect structure for integrated circuits |
| KR100851065B1 (ko) * | 2007-04-30 | 2008-08-12 | 삼성전기주식회사 | 전자기 밴드갭 구조물 및 인쇄회로기판 |
| JP2009111110A (ja) * | 2007-10-30 | 2009-05-21 | Nec Electronics Corp | 半導体装置 |
| JP4945619B2 (ja) * | 2009-09-24 | 2012-06-06 | 株式会社東芝 | 半導体記憶装置 |
| US8018027B2 (en) * | 2009-10-30 | 2011-09-13 | Murata Manufacturing Co., Ltd. | Flip-bonded dual-substrate inductor, flip-bonded dual-substrate inductor, and integrated passive device including a flip-bonded dual-substrate inductor |
| US9583478B1 (en) * | 2010-04-16 | 2017-02-28 | Silego Technology, Inc. | Lateral power MOSFET |
| JP2012019063A (ja) * | 2010-07-08 | 2012-01-26 | Renesas Electronics Corp | 半導体装置 |
| TWI470769B (zh) * | 2010-12-08 | 2015-01-21 | 精材科技股份有限公司 | 晶片封裝體及其形成方法 |
| CN102543190B (zh) * | 2010-12-28 | 2015-05-27 | 炬芯(珠海)科技有限公司 | 半导体装置、芯片及修改比特数据的方法 |
| TWI469311B (zh) * | 2011-04-29 | 2015-01-11 | 萬國半導體股份有限公司 | 聯合封裝的功率半導體元件 |
| TWI469292B (zh) * | 2011-07-26 | 2015-01-11 | 萬國半導體股份有限公司 | 應用雙層引線框架的堆疊式功率半導體裝置及其製備方法 |
| US8853860B2 (en) * | 2012-03-23 | 2014-10-07 | Teledyne Scientific & Imaging, Llc | Method and apparatus for reduced parasitics and improved multi-finger transistor thermal impedance |
| US8759956B2 (en) * | 2012-07-05 | 2014-06-24 | Infineon Technologies Ag | Chip package and method of manufacturing the same |
| KR101420536B1 (ko) * | 2012-12-14 | 2014-07-17 | 삼성전기주식회사 | 전력 모듈 패키지 |
| US8884420B1 (en) * | 2013-07-12 | 2014-11-11 | Infineon Technologies Austria Ag | Multichip device |
| DE102016203906A1 (de) * | 2016-03-10 | 2017-09-28 | Robert Bosch Gmbh | Halbleiterbauelement, insbesondere Leistungstransistor |
| US9960231B2 (en) * | 2016-06-17 | 2018-05-01 | Qualcomm Incorporated | Standard cell architecture for parasitic resistance reduction |
| JP6658441B2 (ja) * | 2016-10-06 | 2020-03-04 | 三菱電機株式会社 | 半導体装置 |
| US10283526B2 (en) * | 2016-12-21 | 2019-05-07 | Qualcomm Incorporated | Standard cell circuits employing voltage rails electrically coupled to metal shunts for reducing or avoiding increases in voltage drop |
| US10236886B2 (en) | 2016-12-28 | 2019-03-19 | Qualcomm Incorporated | Multiple via structure for high performance standard cells |
| US10249711B2 (en) * | 2017-06-29 | 2019-04-02 | Teledyne Scientific & Imaging, Llc | FET with micro-scale device array |
| US11276624B2 (en) * | 2019-12-17 | 2022-03-15 | Infineon Technologies Austria Ag | Semiconductor device power metallization layer with stress-relieving heat sink structure |
| US11508659B2 (en) * | 2020-09-10 | 2022-11-22 | Taiwan Semiconductor Manufacturing Company Ltd. | Interconnect structure in semiconductor device and method of forming the same |
| US20240204005A1 (en) * | 2022-12-14 | 2024-06-20 | International Business Machines Corporation | Transistors with dielectric stack isolating backside power rail |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03248528A (ja) * | 1990-02-27 | 1991-11-06 | Nec Kansai Ltd | 半導体装置の製造方法 |
| US5323036A (en) * | 1992-01-21 | 1994-06-21 | Harris Corporation | Power FET with gate segments covering drain regions disposed in a hexagonal pattern |
| JP3378334B2 (ja) * | 1994-01-26 | 2003-02-17 | 株式会社東芝 | 半導体装置実装構造体 |
| FR2748601B1 (fr) | 1996-05-07 | 1998-07-24 | Sgs Thomson Microelectronics | Procede de formation d'interconnexions dans un circuit integre |
| IL120514A (en) | 1997-03-25 | 2000-08-31 | P C B Ltd | Electronic interconnect structure and method for manufacturing it |
| IL120866A0 (en) | 1997-05-20 | 1997-09-30 | Micro Components Systems Ltd | Process for producing an aluminum substrate |
| US6057171A (en) * | 1997-09-25 | 2000-05-02 | Frequency Technology, Inc. | Methods for determining on-chip interconnect process parameters |
| JPH11111860A (ja) * | 1997-10-06 | 1999-04-23 | Mitsubishi Electric Corp | 半導体装置 |
| JP4015746B2 (ja) * | 1997-10-30 | 2007-11-28 | 松下電器産業株式会社 | 半導体装置 |
| US6178082B1 (en) | 1998-02-26 | 2001-01-23 | International Business Machines Corporation | High temperature, conductive thin film diffusion barrier for ceramic/metal systems |
| JP3671999B2 (ja) * | 1998-02-27 | 2005-07-13 | 富士ゼロックス株式会社 | 半導体装置およびその製造方法ならびに半導体実装装置 |
| JP3407020B2 (ja) | 1998-05-25 | 2003-05-19 | Necエレクトロニクス株式会社 | 半導体装置 |
| IL127256A (en) | 1998-11-25 | 2002-09-12 | Micro Components Ltd | Device for electronic packaging, a process for manufacturing thereof, and a pin jig fixture for use in the process |
| JP4479015B2 (ja) * | 1999-06-10 | 2010-06-09 | パナソニック株式会社 | コンデンサ内蔵キャリア基板およびその製造方法 |
| JP4034477B2 (ja) * | 1999-07-01 | 2008-01-16 | 株式会社日立製作所 | インターポーザ及びその製造方法とそれを用いた回路モジュール |
| DE19958906A1 (de) | 1999-12-07 | 2001-07-05 | Infineon Technologies Ag | Herstellung von integrierten Schaltungen |
| US6278264B1 (en) * | 2000-02-04 | 2001-08-21 | Volterra Semiconductor Corporation | Flip-chip switching regulator |
| JP4854845B2 (ja) * | 2000-02-25 | 2012-01-18 | イビデン株式会社 | 多層プリント配線板 |
| US6486557B1 (en) | 2000-02-29 | 2002-11-26 | International Business Machines Corporation | Hybrid dielectric structure for improving the stiffness of back end of the line structures |
| JP4120133B2 (ja) * | 2000-04-28 | 2008-07-16 | 沖電気工業株式会社 | 半導体装置及びその製造方法 |
| JP2001339047A (ja) | 2000-05-29 | 2001-12-07 | Matsushita Electric Ind Co Ltd | 半導体装置 |
| AU2001273458A1 (en) * | 2000-07-13 | 2002-01-30 | Isothermal Systems Research, Inc. | Power semiconductor switching devices, power converters, integrated circuit assemblies, integrated circuitry, power current switching methods, methods of forming a power semiconductor switching device, power conversion methods, power semiconductor switching device packaging methods, and methods of forming a power transistor |
| JP2002289817A (ja) | 2001-03-27 | 2002-10-04 | Toshiba Corp | 半導体集積回路装置及びその製造方法 |
| US6426558B1 (en) * | 2001-05-14 | 2002-07-30 | International Business Machines Corporation | Metallurgy for semiconductor devices |
| JP4124981B2 (ja) | 2001-06-04 | 2008-07-23 | 株式会社ルネサステクノロジ | 電力用半導体装置および電源回路 |
| TWI312166B (en) * | 2001-09-28 | 2009-07-11 | Toppan Printing Co Ltd | Multi-layer circuit board, integrated circuit package, and manufacturing method for multi-layer circuit board |
| US6477034B1 (en) | 2001-10-03 | 2002-11-05 | Intel Corporation | Interposer substrate with low inductance capacitive paths |
| JP2003142623A (ja) * | 2001-10-31 | 2003-05-16 | Hitachi Ltd | 配線基板とその製造方法,半導体装置並びに配線基板形成用のベース基板 |
| JP3760857B2 (ja) * | 2001-12-17 | 2006-03-29 | 松下電器産業株式会社 | プリント配線板の製造方法 |
| JP2003347727A (ja) * | 2002-05-30 | 2003-12-05 | Hitachi Ltd | 配線基板および両面実装半導体製品 |
| JP3708082B2 (ja) | 2003-02-27 | 2005-10-19 | 株式会社ルネサステクノロジ | 電力半導体装置 |
| JP2006222298A (ja) * | 2005-02-10 | 2006-08-24 | Renesas Technology Corp | 半導体装置およびその製造方法 |
-
2004
- 2004-01-26 US US10/765,474 patent/US7265448B2/en not_active Expired - Lifetime
-
2005
- 2005-01-07 EP EP06011395.8A patent/EP1727200B1/en not_active Expired - Lifetime
- 2005-01-07 EP EP06011396A patent/EP1727199A3/en not_active Ceased
- 2005-01-07 EP EP05000284.9A patent/EP1571708B1/en not_active Expired - Lifetime
- 2005-01-12 CN CNA2005100026483A patent/CN1805137A/zh active Pending
- 2005-01-12 TW TW094115682A patent/TWI354368B/zh not_active IP Right Cessation
- 2005-01-12 CN CNB2005100026500A patent/CN100440501C/zh not_active Expired - Fee Related
- 2005-01-12 TW TW094115698A patent/TWI354369B/zh not_active IP Right Cessation
- 2005-01-12 TW TW094100907A patent/TWI354367B/zh not_active IP Right Cessation
- 2005-01-12 CN CNB2005100020307A patent/CN100435330C/zh not_active Expired - Lifetime
- 2005-01-13 JP JP2005006181A patent/JP4596925B2/ja not_active Expired - Fee Related
- 2005-09-22 JP JP2005276912A patent/JP2006093712A/ja active Pending
- 2005-09-22 JP JP2005276911A patent/JP5502255B2/ja not_active Expired - Lifetime
-
2006
- 2006-03-22 US US11/386,276 patent/US7459381B2/en not_active Expired - Lifetime
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