JP2005200521A - 接着フィルム、接着フィルムの製造方法 - Google Patents
接着フィルム、接着フィルムの製造方法 Download PDFInfo
- Publication number
- JP2005200521A JP2005200521A JP2004007492A JP2004007492A JP2005200521A JP 2005200521 A JP2005200521 A JP 2005200521A JP 2004007492 A JP2004007492 A JP 2004007492A JP 2004007492 A JP2004007492 A JP 2004007492A JP 2005200521 A JP2005200521 A JP 2005200521A
- Authority
- JP
- Japan
- Prior art keywords
- resin layer
- resin
- adhesive film
- film
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002313 adhesive film Substances 0.000 title claims abstract description 100
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 229920005989 resin Polymers 0.000 claims abstract description 326
- 239000011347 resin Substances 0.000 claims abstract description 326
- 239000002245 particle Substances 0.000 claims abstract description 115
- 239000000853 adhesive Substances 0.000 claims description 50
- 230000001070 adhesive effect Effects 0.000 claims description 48
- 229920001187 thermosetting polymer Polymers 0.000 claims description 47
- 239000003795 chemical substances by application Substances 0.000 claims description 31
- 239000011230 binding agent Substances 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 11
- 238000001035 drying Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 description 27
- 230000000052 comparative effect Effects 0.000 description 25
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 21
- 239000000945 filler Substances 0.000 description 12
- 238000003825 pressing Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 229920000647 polyepoxide Polymers 0.000 description 8
- 238000009413 insulation Methods 0.000 description 7
- 238000002156 mixing Methods 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 239000004848 polyfunctional curative Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- CHRJZRDFSQHIFI-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;styrene Chemical compound C=CC1=CC=CC=C1.C=CC1=CC=CC=C1C=C CHRJZRDFSQHIFI-UHFFFAOYSA-N 0.000 description 1
- GZVHEAJQGPRDLQ-UHFFFAOYSA-N 6-phenyl-1,3,5-triazine-2,4-diamine Chemical compound NC1=NC(N)=NC(C=2C=CC=CC=2)=N1 GZVHEAJQGPRDLQ-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000003712 anti-aging effect Effects 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229920006026 co-polymeric resin Polymers 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- 150000002513 isocyanates Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 238000007645 offset printing Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 239000012766 organic filler Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920000768 polyamine Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/29—Laminated material
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
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- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/321—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
- H05K3/323—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives by applying an anisotropic conductive adhesive layer over an array of pads
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/40—Additional features of adhesives in the form of films or foils characterized by the presence of essential components
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- H01L2224/161—Disposition
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Abstract
【解決手段】本発明の接着フィルム4は、第一の樹脂層10の表面に第二の樹脂層20が形成され、第一の樹脂層10の裏面に第三の樹脂層15が形成されており、第一の樹脂層10の接続温度よりも低い温度範囲での最低粘度は、第二、第三の樹脂層20、25の接続温度よりも低い温度範囲での最低粘度よりも高くなっている。従って、第一、第二の被着体40、50で接着フィルム4を挟みこみ、加熱押圧をすると、第二の樹脂層20は被着体50の外側に向けて流れ出すが、導電性粒子12を有する第一の樹脂層10は流れ出さずに被着体40、50の間に留まるので、第一、第二の接続端子42、52の間に挟み込まれる導電性粒子12の数が多くなる。
【選択図】図5
Description
請求項2記載の発明は、請求項1記載の接着フィルムであって、前記第二の樹脂層は、前記接続温度よりも低い温度範囲での最低粘度が、前記第一の樹脂層の前記接続温度よりも低い温度範囲での最低粘度の1/10以下にされた接着フィルムである。
請求項3記載の発明は、請求項1又は請求項2のいずれか1項記載の接着フィルムであって、前記第一の樹脂層の膜厚は、前記導電性粒子の平均粒径の1/2倍以上2倍以下にされた接着フィルムである。
請求項4記載の発明は、請求項1乃至請求項3のいずれか1項記載の接着フィルムであって、前記第一の樹脂層の導電性粒子密度は、前記第二の樹脂層の導電性粒子密度よりも大きくされた接着フィルムである。
請求項5記載の発明は、請求項1乃至請求項4のいずれか1項記載の接着フィルムであって、前記第二の樹脂層の膜厚は、前記第一、第二の被着体のうち、前記第二の樹脂層側に密着して接続される被着体の、前記接続端子の膜厚よりも大きくされた接着フィルムである。
請求項6記載の発明は、請求項1乃至請求項5のいずれか1項記載の接着フィルムであって、前記第三の樹脂層の前記接続温度よりも低い温度範囲での最低粘度は、前記第一の樹脂層の前記接続温度よりも低い温度範囲での最低粘度よりも低くされた接着フィルムである。
請求項7記載の発明は、請求項6記載の接着フィルムであって、前記第三の樹脂層は、前記接続温度よりも低い温度範囲での最低粘度が、前記第一の樹脂層の前記接続温度よりも低い温度範囲での最低粘度の1/10以下にされた接着フィルムである。
請求項8記載の発明は、請求項1乃至請求項7のいずれか1項記載の接着フィルムであって、前記第三の樹脂層の膜厚は、前記第一の樹脂層の膜厚よりも薄くされた接着フィルムである。
請求項9記載の発明は、少なくとも片面に剥離フィルムが貼付された接着フィルムを製造する接着フィルムの製造方法であって、第一の剥離フィルムと、前記第一の剥離フィルムの表面に配置された第一の樹脂層と、前記第一の樹脂層の表面に配置された第二の樹脂層と、前記第二の樹脂層の表面に配置された第二の剥離フィルムとを有し、前記第一の樹脂層の接続温度よりも低い温度範囲での最低粘度が、前記第二の樹脂層の接続温度よりも低い温度範囲での最低粘度よりも大きくされた積層体の、前記第一の剥離フィルムを前記第一の樹脂層から剥離して前記第一の樹脂層表面を露出させ、露出した前記第一の樹脂層表面に、液状の接着剤を塗布、乾燥し、第三の樹脂層を形成する接着フィルムの製造方法である。
請求項10記載の発明は、請求項9記載の接着フィルムの製造方法であって、前記積層体の作製は、前記第一の剥離フィルム表面に液状の接着剤を塗布、乾燥して前記第一の樹脂層を形成し、前記第一の樹脂層の表面に液状の接着剤を塗布、乾燥して前記第二の樹脂層を形成した後、前記第二の樹脂層の表面に前記第二の剥離フィルムを貼付する接着フィルムの製造方法である。
請求項11記載の発明は、請求項9記載の接着フィルムの製造方法であって、前記積層体の作製は、前記第一、第二の剥離フィルムの表面に、それぞれ液状の接着剤を塗布、乾燥して前記第一、第二の樹脂層を形成した後、前記第一の樹脂層の表面と前記第二の樹脂層の表面とを互いに密着させる接着フィルムの製造方法である。
粒径4.0μmのベンゾグアナミン樹脂粒子の表面に、膜厚0.08μmのニッケル層と、膜厚0.04μmの金層とを順次積層して導電性粒子12を製造し、更にこの導電性粒子12の表面にアクリル/スチレン/ジビニルベンゼンの共重合体樹脂からなり、膜厚が0.1μm以上0.5μm以下の絶縁性樹脂膜を形成し、絶縁被膜付き導電性粒子12を得た。
<実施例2>
第一の接着剤を、最低粘度の高い熱硬化性樹脂(商品名「エピコート4007P」、ジャパンエポキシレジン(株)社製)80重量%と、イミダゾール系硬化剤(商品名「2MZ」、四国化成工業(株)社製)20重量%とからなる接着剤に変えた以外は実施例1と同じ条件で実施例2の接着フィルム4を作製した。
第一の接着剤を、最低粘度の低い熱硬化性樹脂(商品名「エピコート4007」、ジャパンエポキシレジン(株)社製)80重量%と、イミダゾール系硬化剤(商品名「2E4MZ」、四国化成工業(株)社製)20重量%とからなる接着剤に変えた以外は実施例1と同じ条件で実施例3の接着フィルム4を作製した。
第一の樹脂層に分散させた絶縁被膜付き導電粒子の数を増やした以外は上記実施例1と同じ条件で実施例4の接着フィルム4を作製した。
第一の樹脂層に分散させた絶縁被膜付き導電粒子の数を減らした以外は上記実施例1と同じ条件で実施例5の接着フィルム4を作製した。
第一の樹脂層に分散させた絶縁被膜付き導電粒子の数を、実施例4よりも増やした以外は上記実施例4と同じ条件で実施例6の接着フィルム4を作製した。
第一の接着剤に絶縁性のフィラーである二酸化ケイ素粒子(平均粒径0.5μm)を添加し、該フィラーを40重量%含有する第一の樹脂層10を形成した以外は実施例1と同じ条件で実施例7の接着フィルム4を作製した。
第二、第三の接着剤を、最低粘度の高い熱硬化性樹脂(商品名「エピコート1007」、ジャパンエポキシレジン(株)社製)80重量%と、イミダゾール系硬化剤(商品名「2MZ」、四国化成工業(株)社製)20重量%とからなる接着剤に変えた以外は、実施例2と同じ条件で実施例8の接着フィルム4を作製した。
第二、第三の接着剤を、最低粘度の高い熱硬化性樹脂(商品名「エピコート4007P」、ジャパンエポキシレジン(株)社製)80重量%と、イミダゾール系硬化剤(商品名「2MZ]、四国化成工業(株)社製)20重量%とからなる接着剤に変えた以外は、実施例7と同じ条件で実施例9の接着フィルム4を作製した。
第一の樹脂層の膜厚を10μm、第二の樹脂層の膜厚を10μmとした以外は実施例1と同じ条件で比較例1の接着フィルムを作製した。
第二の樹脂層の膜厚を10μm、第三の樹脂層の膜厚を10μmとした以外は、実施例1と同じ条件で比較例2の接着フィルムを作製した。
第二の樹脂層の膜厚を5μm、第三の樹脂層の膜厚を15μmとした以外は実施例1と同じ条件で比較例3の接着フィルムを作製した。
第一の接着剤を、実施例1で用いた第二の接着剤に変えた以外は、実施例8と同じ条件で比較例4の接着フィルムを作製した。
第一の樹脂層に分散させた絶縁被膜付き導電粒子の数を、比較例4より増やした以外は、比較例4と同じ条件で比較例5の接着フィルムを作製した。
第一の接着剤から硬化剤を抜いた以外は、実施例1と同じ条件で比較例6の接着フィルムを作製した。
[導電性粒子の数]
各電気装置1の200箇所のバンプを回路基板40側から光学顕微鏡(倍率340倍)を用いて観察し、バンプに捕捉された導電性粒子12の数を数えた。200箇所のバンプのうち、導電性粒子の補足数が最も少ない箇所の数を上記表1、2に記載した。
各電気装置1について、プレッシャークッカーテスター(タバイエスペック(株)社製の商品名「EHS−411」)を用いて、互いに対向する第一、第二の接続端子42、52間の導通抵抗を測定した。導通抵抗が30Ω以下の場合を「○」、30Ωを超える場合を「×」として評価した。
各電気装置1について、同じ被着体の互いに隣接する接続端子52間の絶縁抵抗を測定した。絶縁抵抗が1×108Ω以上の場合を「○」、1×108Ω未満の場合を「×」として評価した。
Claims (11)
- 第一の樹脂層と、前記第一の樹脂層上に配置された第二の樹脂層と、前記第一の樹脂層の前記第二の樹脂層とは反対側の面に配置された第三の樹脂層とを有し、
前記第一の樹脂層は絶縁性のバインダーと、前記バインダー中に分散された導電性粒子とを有し、前記絶縁性のバインダーは第一の熱硬化性樹脂と、加熱により前記第一の熱硬化性樹脂と反応し、前記第一の熱硬化性樹脂を硬化させる第一の硬化剤を有し、
前記第二の樹脂層は絶縁性の第二の熱硬化性樹脂と、加熱により前記第二の熱硬化性樹脂と反応し、前記第二の熱硬化性樹脂を硬化させる第二の硬化剤を有し、
前記第三の樹脂層は第三の熱硬化性樹脂と、加熱により前記第三の熱硬化性樹脂と反応し、前記第三の熱硬化性樹脂を硬化させる第三の硬化剤とを有し、
第一の接続端子を有する第一の被着体と、第二の接続端子を有する第二の被着体との間に配置された状態で加熱押圧され、前記第一〜第三の樹脂層が所定の接続温度以上に昇温すると、前記第一、第二の接続端子の間に前記導電性粒子が挟まれた状態で前記第一〜第三の熱硬化性樹脂が前記第一〜第三の硬化剤とそれぞれ反応して硬化し、前記第一、第二の被着体が接続されるように構成された接着フィルムであって、
前記第一の樹脂層は、前記接続温度よりも低い温度範囲での最低粘度が1000Pa・s以上1000000Pa・s以下にされ、
前記第二の樹脂層は前記接続温度よりも低い温度範囲での最低粘度が、前記第一の樹脂層の前記接続温度よりも低い温度範囲での最低粘度よりも低くされ、
前記第二の樹脂層の膜厚は、前記第一、第三の樹脂層の膜厚よりも大きくされた接着フィルム。 - 前記第二の樹脂層は、前記接続温度よりも低い温度範囲での最低粘度が、前記第一の樹脂層の前記接続温度よりも低い温度範囲での最低粘度の1/10以下にされた請求項1記載の接着フィルム。
- 前記第一の樹脂層の膜厚は、前記導電性粒子の平均粒径の1/2倍以上2倍以下にされた請求項1又は請求項2のいずれか1項記載の接着フィルム。
- 前記第一の樹脂層の導電性粒子密度は、前記第二の樹脂層の導電性粒子密度よりも大きくされた請求項1乃至請求項3のいずれか1項記載の接着フィルム。
- 前記第二の樹脂層の膜厚は、前記第一、第二の被着体のうち、前記第二の樹脂層側に密着して接続される被着体の、前記接続端子の膜厚よりも大きくされた請求項1乃至請求項4のいずれか1項記載の接着フィルム。
- 前記第三の樹脂層の前記接続温度よりも低い温度範囲での最低粘度は、前記第一の樹脂層の前記接続温度よりも低い温度範囲での最低粘度よりも低くされた請求項1乃至請求項5のいずれか1項記載の接着フィルム。
- 前記第三の樹脂層は、前記接続温度よりも低い温度範囲での最低粘度が、前記第一の樹脂層の前記接続温度よりも低い温度範囲での最低粘度の1/10以下にされた請求項6記載の接着フィルム。
- 前記第三の樹脂層の膜厚は、前記第一の樹脂層の膜厚よりも薄くされた請求項1乃至請求項7のいずれか1項記載の接着フィルム。
- 少なくとも片面に剥離フィルムが貼付された接着フィルムを製造する接着フィルムの製造方法であって、
第一の剥離フィルムと、前記第一の剥離フィルムの表面に配置された第一の樹脂層と、前記第一の樹脂層の表面に配置された第二の樹脂層と、前記第二の樹脂層の表面に配置された第二の剥離フィルムとを有し、前記第一の樹脂層の接続温度よりも低い温度範囲での最低粘度が、前記第二の樹脂層の接続温度よりも低い温度範囲での最低粘度よりも大きくされた積層体の、
前記第一の剥離フィルムを前記第一の樹脂層から剥離して前記第一の樹脂層表面を露出させ、
露出した前記第一の樹脂層表面に、液状の接着剤を塗布、乾燥し、第三の樹脂層を形成する接着フィルムの製造方法。 - 前記積層体の作製は、前記第一の剥離フィルム表面に液状の接着剤を塗布、乾燥して前記第一の樹脂層を形成し、
前記第一の樹脂層の表面に液状の接着剤を塗布、乾燥して前記第二の樹脂層を形成した後、前記第二の樹脂層の表面に前記第二の剥離フィルムを貼付する請求項9記載の接着フィルムの製造方法。 - 前記積層体の作製は、前記第一、第二の剥離フィルムの表面に、それぞれ液状の接着剤を塗布、乾燥して前記第一、第二の樹脂層を形成した後、前記第一の樹脂層の表面と前記第二の樹脂層の表面とを互いに密着させる請求項9記載の接着フィルムの製造方法。
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KR101151133B1 (ko) | 2012-06-01 |
KR20060123491A (ko) | 2006-12-01 |
TW200525004A (en) | 2005-08-01 |
JP5196703B2 (ja) | 2013-05-15 |
TWI265188B (en) | 2006-11-01 |
WO2005068573A1 (ja) | 2005-07-28 |
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