JP2010239153A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
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- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
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- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
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- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
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- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
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- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/0781—Adhesive characteristics other than chemical being an ohmic electrical conductor
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- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
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Abstract
【解決手段】配線基板に仮貼りされる異方性導電フィルム10は、剥離フィルム1の幅をW1、絶縁性接着層2の幅をW2、そして異方性導電接着層3の幅をW3としたとき、絶縁性接着層の幅及び異方性導電接着層の幅の相互関係は、剥離フィルム1の幅W1>絶縁性接着層2の幅W2>異方性導電接着層3の幅W3、を満足する。
【選択図】図3
Description
を見出し、本発明を完成させるに至った。
剥離フィルム上に絶縁性接着層及び異方性導電接着層がこの順で積層されてなる異方性導電フィルムを、その異方性導電接着層側から配線基板の電極上に載置し、ボンダーで押圧して仮貼りする工程、
配線基板に仮貼りされた異方性導電フィルムから剥離フィルムを剥離し、絶縁性接着層を露出させる工程、及び
露出した絶縁性接着層上から、半導体チップの表面に形成されたバンプを、配線基板の電極に対して位置合わせし、加熱しながら、半導体チップの裏面側からボンダーで押圧して異方性導電接続する工程
を有し、該異方性導電フィルムの剥離フィルムの幅、絶縁性接着層の幅及び異方性導電接着層の幅の相互関係が以下の式(1)を満足することを特徴とする製造方法、並びにこの製造方法で得られた半導体装置を提供する。
本発明の半導体装置の製造方法は、図1に示すように、まず、剥離フィルム1上に絶縁性接着層2及び異方性導電接着層3がこの順で積層されている異方性導電フィルム10を、その異方性導電接着層3側から配線基板20の電極21上に載置し、図2に示すように、必要に応じて加熱しながらボンダー30で押圧して仮貼りする。加熱は、ボンダー30自体で行うこともでき、あるいは配線基板20を支持する加熱ステージ(図示せず)から加熱してもよい。
次に、図6に示すように、配線基板20に仮貼りされた異方性導電フィルム10から剥離フィルム1を公知の手法により剥離し、絶縁性接着層2を露出させる。
次に、図7に示すように、露出した絶縁性接着層2上から、半導体チップ40の表面に形成されたバンプ41を、配線基板20の電極21に対して位置合わせし、図8に示すように、加熱しながら、半導体チップ40の裏面側からボンダー30で押圧して異方性導電接続する。これにより図9に示す半導体装置100が得られる。この半導体装置も本願発明の一つの態様である。
2 絶縁性接着層
2a 第1の絶縁性接着層
2b 第2の絶縁性接着層
3 異方性導電接着層
10 異方性導電フィルム
20 配線基板
21 電極
30 ボンダー
40 半導体チップ
41 バンプ
100 半導体装置
Claims (4)
- 配線基板の電極と半導体チップのバンプとが異方性導電接続されてなる半導体装置の製造方法であって、
剥離フィルム上に絶縁性接着層及び異方性導電接着層がこの順で積層されてなる異方性導電フィルムを、その異方性導電接着層側から配線基板の電極上に載置し、ボンダーで押圧して仮貼りする工程、
配線基板に仮貼りされた異方性導電フィルムから剥離フィルムを剥離し、絶縁性接着層を露出させる工程、及び
露出した絶縁性接着層上から、半導体チップの表面に形成されたバンプを、配線基板の電極に対して位置合わせし、加熱しながら、半導体チップの裏面側からボンダーで押圧して異方性導電接続する工程
を有し、該異方性導電フィルムの剥離フィルムの幅、絶縁性接着層の幅及び異方性導電接着層の幅の相互関係が以下の式(1)
- 異方性導電フィルムの絶縁性接着層が、剥離フィルム側に配置された第1の絶縁性接着層と、異方性導電接着層側に配置された第2の絶縁性接着層とが積層されたものであり、第1の絶縁性接着層の30℃での溶融粘度が第2の絶縁性接着層の30℃での溶融粘度よりも低く、且つ第1の絶縁性接着層の幅が第2の絶縁性接着層の幅以上の大きさである請求項1記載の製造方法。
- 異方性導電フィルムの絶縁性接着層が、剥離フィルム平面上で、第2の絶縁性接着層とその両端部に配置された第1の絶縁性接着層とを有し、第1の絶縁性接着層の30℃での溶融粘度が第2の絶縁性接着層の30℃での溶融粘度よりも低い請求項1記載の製造方法。
- 請求項1〜3のいずれかの製造方法により製造された半導体装置。
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2016052130A1 (ja) * | 2014-09-30 | 2016-04-07 | デクセリアルズ株式会社 | 異方性導電フィルム、及び接続方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1197487A (ja) * | 1997-09-25 | 1999-04-09 | Toshiba Corp | 実装方法及びその装置及び異方性導電シート |
JP2006339160A (ja) * | 2006-06-02 | 2006-12-14 | Hitachi Chem Co Ltd | 熱硬化性回路接続部材及びそれを用いた電極の接続構造、電極の接続方法 |
JP2007027483A (ja) * | 2005-07-19 | 2007-02-01 | Seiko Instruments Inc | 回路装置および表示装置および異方性導電膜 |
WO2008029580A1 (fr) * | 2006-08-29 | 2008-03-13 | Hitachi Chemical Company, Ltd. | Ruban conducteur anisotrope et procédé de fabrication correspondant, structure connectée et procédé de connexion de membre de circuit en utilisant le ruban |
JP2008293751A (ja) * | 2007-05-23 | 2008-12-04 | Hitachi Chem Co Ltd | 異方導電接続用フィルム及びリール体 |
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2010
- 2010-06-24 JP JP2010143627A patent/JP5459099B2/ja not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1197487A (ja) * | 1997-09-25 | 1999-04-09 | Toshiba Corp | 実装方法及びその装置及び異方性導電シート |
JP2007027483A (ja) * | 2005-07-19 | 2007-02-01 | Seiko Instruments Inc | 回路装置および表示装置および異方性導電膜 |
JP2006339160A (ja) * | 2006-06-02 | 2006-12-14 | Hitachi Chem Co Ltd | 熱硬化性回路接続部材及びそれを用いた電極の接続構造、電極の接続方法 |
WO2008029580A1 (fr) * | 2006-08-29 | 2008-03-13 | Hitachi Chemical Company, Ltd. | Ruban conducteur anisotrope et procédé de fabrication correspondant, structure connectée et procédé de connexion de membre de circuit en utilisant le ruban |
JP2008293751A (ja) * | 2007-05-23 | 2008-12-04 | Hitachi Chem Co Ltd | 異方導電接続用フィルム及びリール体 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016052130A1 (ja) * | 2014-09-30 | 2016-04-07 | デクセリアルズ株式会社 | 異方性導電フィルム、及び接続方法 |
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