JP2004533726A5 - - Google Patents

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Publication number
JP2004533726A5
JP2004533726A5 JP2003509512A JP2003509512A JP2004533726A5 JP 2004533726 A5 JP2004533726 A5 JP 2004533726A5 JP 2003509512 A JP2003509512 A JP 2003509512A JP 2003509512 A JP2003509512 A JP 2003509512A JP 2004533726 A5 JP2004533726 A5 JP 2004533726A5
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JP
Japan
Prior art keywords
layer
silicon
less
semiconductor material
void
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JP2003509512A
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English (en)
Japanese (ja)
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JP2004533726A (ja
JP4331593B2 (ja
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Priority claimed from DE10131249A external-priority patent/DE10131249A1/de
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Publication of JP2004533726A publication Critical patent/JP2004533726A/ja
Publication of JP2004533726A5 publication Critical patent/JP2004533726A5/ja
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Publication of JP4331593B2 publication Critical patent/JP4331593B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2003509512A 2001-06-28 2002-06-27 半導体材料からなるフィルムまたは層およびフィルムまたは層の製造方法 Expired - Lifetime JP4331593B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10131249A DE10131249A1 (de) 2001-06-28 2001-06-28 Verfahren zur Herstellung eines Films oder einer Schicht aus halbleitendem Material
PCT/EP2002/007125 WO2003003430A2 (de) 2001-06-28 2002-06-27 Film oder schicht aus halbleitendem material und verfahren zur herstellung des films oder der schicht

Publications (3)

Publication Number Publication Date
JP2004533726A JP2004533726A (ja) 2004-11-04
JP2004533726A5 true JP2004533726A5 (enExample) 2005-09-02
JP4331593B2 JP4331593B2 (ja) 2009-09-16

Family

ID=7689811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003509512A Expired - Lifetime JP4331593B2 (ja) 2001-06-28 2002-06-27 半導体材料からなるフィルムまたは層およびフィルムまたは層の製造方法

Country Status (9)

Country Link
US (2) US7052948B2 (enExample)
EP (2) EP1626440B1 (enExample)
JP (1) JP4331593B2 (enExample)
KR (1) KR100587997B1 (enExample)
CN (1) CN100372060C (enExample)
AT (1) ATE324670T1 (enExample)
DE (3) DE10131249A1 (enExample)
TW (1) TW575910B (enExample)
WO (1) WO2003003430A2 (enExample)

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