JP2004526331A5 - - Google Patents

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Publication number
JP2004526331A5
JP2004526331A5 JP2002589833A JP2002589833A JP2004526331A5 JP 2004526331 A5 JP2004526331 A5 JP 2004526331A5 JP 2002589833 A JP2002589833 A JP 2002589833A JP 2002589833 A JP2002589833 A JP 2002589833A JP 2004526331 A5 JP2004526331 A5 JP 2004526331A5
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JP
Japan
Prior art keywords
lens
lenses
crystal direction
objective
lens axis
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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JP2002589833A
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English (en)
Japanese (ja)
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JP2004526331A (ja
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Priority claimed from DE2001123727 external-priority patent/DE10123727A1/de
Priority claimed from DE10123725A external-priority patent/DE10123725A1/de
Priority claimed from DE2001125487 external-priority patent/DE10125487A1/de
Priority claimed from DE2001127320 external-priority patent/DE10127320A1/de
Priority claimed from DE2002110782 external-priority patent/DE10210782A1/de
Application filed filed Critical
Priority claimed from PCT/EP2002/005050 external-priority patent/WO2002093209A2/de
Publication of JP2004526331A publication Critical patent/JP2004526331A/ja
Publication of JP2004526331A5 publication Critical patent/JP2004526331A5/ja
Pending legal-status Critical Current

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JP2002589833A 2001-05-15 2002-05-08 フッ化物結晶レンズを含む対物レンズ Pending JP2004526331A (ja)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
DE2001123727 DE10123727A1 (de) 2001-05-15 2001-05-15 Optisches Element, Projektionsobjektiv und Mikrolithographie-Projektionsbelichtungsanlage mit Fluoridkristall-Linsen
DE10123725A DE10123725A1 (de) 2001-05-15 2001-05-15 Projektionsbelichtungsanlage der Mikrolithographie, Optisches System und Herstellverfahren
DE2001125487 DE10125487A1 (de) 2001-05-23 2001-05-23 Optisches Element, Projektionsobjektiv und Mikrolithographic-Projektionsbelichtungsanlage mit Fluoridkristall-Linsen
DE2001127320 DE10127320A1 (de) 2001-06-06 2001-06-06 Objektiv mit Fluorid-Kristall-Linsen
DE2002110782 DE10210782A1 (de) 2002-03-12 2002-03-12 Objektiv mit Kristall-Linsen
PCT/EP2002/005050 WO2002093209A2 (de) 2001-05-15 2002-05-08 Objektiv mit fluorid-kristall-linsen

Publications (2)

Publication Number Publication Date
JP2004526331A JP2004526331A (ja) 2004-08-26
JP2004526331A5 true JP2004526331A5 (enExample) 2005-12-22

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002589833A Pending JP2004526331A (ja) 2001-05-15 2002-05-08 フッ化物結晶レンズを含む対物レンズ

Country Status (6)

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US (4) US7145720B2 (enExample)
EP (1) EP1390783A2 (enExample)
JP (1) JP2004526331A (enExample)
KR (1) KR20040015251A (enExample)
TW (1) TW591242B (enExample)
WO (1) WO2002093209A2 (enExample)

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KR101094114B1 (ko) 2003-08-26 2011-12-15 가부시키가이샤 니콘 광학소자 및 노광장치
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TWI511179B (zh) 2003-10-28 2015-12-01 尼康股份有限公司 照明光學裝置、曝光裝置、曝光方法以及元件製造方法
TWI512335B (zh) 2003-11-20 2015-12-11 尼康股份有限公司 光束變換元件、光學照明裝置、曝光裝置、以及曝光方法
DE10355725A1 (de) 2003-11-28 2005-06-30 Carl Zeiss Smt Ag Optisches System sowie Verfahren zur mikrolithographischen Herstellung mikrostrukturierter Bauteile
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