JP2004297070A5 - - Google Patents

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Publication number
JP2004297070A5
JP2004297070A5 JP2004092271A JP2004092271A JP2004297070A5 JP 2004297070 A5 JP2004297070 A5 JP 2004297070A5 JP 2004092271 A JP2004092271 A JP 2004092271A JP 2004092271 A JP2004092271 A JP 2004092271A JP 2004297070 A5 JP2004297070 A5 JP 2004297070A5
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JP
Japan
Prior art keywords
layer
group iii
nitride
substrate
disposed
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Granted
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JP2004092271A
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English (en)
Japanese (ja)
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JP2004297070A (ja
JP4790226B2 (ja
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Priority claimed from US10/397,799 external-priority patent/US6986693B2/en
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Publication of JP2004297070A publication Critical patent/JP2004297070A/ja
Publication of JP2004297070A5 publication Critical patent/JP2004297070A5/ja
Application granted granted Critical
Publication of JP4790226B2 publication Critical patent/JP4790226B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004092271A 2003-03-26 2004-03-26 Ｉｉｉ族窒化物を有する装置及びｉｉｉ族窒化物を有する装置の製造方法 Expired - Fee Related JP4790226B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/397,799 US6986693B2 (en) 2003-03-26 2003-03-26 Group III-nitride layers with patterned surfaces
US10/397799 2003-03-26

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011127281A Division JP5721545B2 (ja) 2003-03-26 2011-06-07 Ｉｉｉ族窒化物を有する装置及びｉｉｉ族窒化物を有する装置の製造方法

Publications (3)

Publication Number Publication Date
JP2004297070A JP2004297070A (ja) 2004-10-21
JP2004297070A5 true JP2004297070A5 (https=) 2007-03-01
JP4790226B2 JP4790226B2 (ja) 2011-10-12

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ID=32869148

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2004092271A Expired - Fee Related JP4790226B2 (ja) 2003-03-26 2004-03-26 Ｉｉｉ族窒化物を有する装置及びｉｉｉ族窒化物を有する装置の製造方法
JP2011127281A Expired - Fee Related JP5721545B2 (ja) 2003-03-26 2011-06-07 Ｉｉｉ族窒化物を有する装置及びｉｉｉ族窒化物を有する装置の製造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2011127281A Expired - Fee Related JP5721545B2 (ja) 2003-03-26 2011-06-07 Ｉｉｉ族窒化物を有する装置及びｉｉｉ族窒化物を有する装置の製造方法

Country Status (6)

Country Link
US (6) US6986693B2 (https=)
EP (3) EP3035372A1 (https=)
JP (2) JP4790226B2 (https=)
KR (1) KR101050676B1 (https=)
CN (2) CN100397559C (https=)
DE (1) DE602004006043T2 (https=)

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