JP2004140267A5 - - Google Patents

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Publication number
JP2004140267A5
JP2004140267A5 JP2002305084A JP2002305084A JP2004140267A5 JP 2004140267 A5 JP2004140267 A5 JP 2004140267A5 JP 2002305084 A JP2002305084 A JP 2002305084A JP 2002305084 A JP2002305084 A JP 2002305084A JP 2004140267 A5 JP2004140267 A5 JP 2004140267A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP2002305084A
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JP2004140267A (ja
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Priority claimed from JP2002305084A external-priority patent/JP2004140267A/ja
Priority to JP2002305084A priority Critical patent/JP2004140267A/ja
Application filed filed Critical
Priority to AU2003269499A priority patent/AU2003269499A1/en
Priority to KR1020107021492A priority patent/KR101101338B1/ko
Priority to CN2009101454388A priority patent/CN101562190B/zh
Priority to KR1020057006680A priority patent/KR101028393B1/ko
Priority to CNB2003801016204A priority patent/CN100511686C/zh
Priority to PCT/JP2003/013068 priority patent/WO2004036652A1/en
Priority to EP03751459A priority patent/EP1554757B1/en
Priority to CN2009101454405A priority patent/CN101562150B/zh
Priority to US10/685,398 priority patent/US7067392B2/en
Priority to TW092128739A priority patent/TWI330862B/zh
Publication of JP2004140267A publication Critical patent/JP2004140267A/ja
Priority to US11/206,000 priority patent/US7495256B2/en
Publication of JP2004140267A5 publication Critical patent/JP2004140267A5/ja
Priority to US12/370,767 priority patent/US8013335B2/en
Priority to US13/010,962 priority patent/US8134153B2/en
Priority to US13/364,361 priority patent/US8525171B2/en
Priority to US14/010,735 priority patent/US9093324B2/en
Withdrawn legal-status Critical Current

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JP2002305084A 2002-10-18 2002-10-18 半導体装置およびその作製方法 Withdrawn JP2004140267A (ja)

Priority Applications (16)

Application Number Priority Date Filing Date Title
JP2002305084A JP2004140267A (ja) 2002-10-18 2002-10-18 半導体装置およびその作製方法
AU2003269499A AU2003269499A1 (en) 2002-10-18 2003-10-10 Semiconductor apparatus and fabrication method of the same
KR1020107021492A KR101101338B1 (ko) 2002-10-18 2003-10-10 반도체 장치의 제조방법
CN2009101454388A CN101562190B (zh) 2002-10-18 2003-10-10 半导体设备及其制作方法
KR1020057006680A KR101028393B1 (ko) 2002-10-18 2003-10-10 반도체 장치
CNB2003801016204A CN100511686C (zh) 2002-10-18 2003-10-10 半导体设备及其制作方法
PCT/JP2003/013068 WO2004036652A1 (en) 2002-10-18 2003-10-10 Semiconductor apparatus and fabrication method of the same
EP03751459A EP1554757B1 (en) 2002-10-18 2003-10-10 Semiconductor apparatus and fabrication method of the same
CN2009101454405A CN101562150B (zh) 2002-10-18 2003-10-10 半导体设备及其制作方法
US10/685,398 US7067392B2 (en) 2002-10-18 2003-10-16 Semiconductor apparatus and fabrication method of the same
TW092128739A TWI330862B (en) 2002-10-18 2003-10-16 Semiconductor apparatus and fabrication method of the same
US11/206,000 US7495256B2 (en) 2002-10-18 2005-08-18 Semiconductor apparatus and fabrication method of the same
US12/370,767 US8013335B2 (en) 2002-10-18 2009-02-13 Semiconductor apparatus and fabrication method of the same
US13/010,962 US8134153B2 (en) 2002-10-18 2011-01-21 Semiconductor apparatus and fabrication method of the same
US13/364,361 US8525171B2 (en) 2002-10-18 2012-02-02 Semiconductor apparatus and fabrication method of the same
US14/010,735 US9093324B2 (en) 2002-10-18 2013-08-27 Semiconductor apparatus and fabrication method of the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002305084A JP2004140267A (ja) 2002-10-18 2002-10-18 半導体装置およびその作製方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005308636A Division JP4781082B2 (ja) 2005-10-24 2005-10-24 半導体装置の作製方法

Publications (2)

Publication Number Publication Date
JP2004140267A JP2004140267A (ja) 2004-05-13
JP2004140267A5 true JP2004140267A5 (ja) 2005-12-08

Family

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Family Applications (1)

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JP2002305084A Withdrawn JP2004140267A (ja) 2002-10-18 2002-10-18 半導体装置およびその作製方法

Country Status (8)

Country Link
US (6) US7067392B2 (ja)
EP (1) EP1554757B1 (ja)
JP (1) JP2004140267A (ja)
KR (2) KR101028393B1 (ja)
CN (3) CN100511686C (ja)
AU (1) AU2003269499A1 (ja)
TW (1) TWI330862B (ja)
WO (1) WO2004036652A1 (ja)

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* Cited by examiner, † Cited by third party
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