JP2003100894A - 集積回路チップ及びマルチチップパッケージ - Google Patents
集積回路チップ及びマルチチップパッケージInfo
- Publication number
- JP2003100894A JP2003100894A JP2002201571A JP2002201571A JP2003100894A JP 2003100894 A JP2003100894 A JP 2003100894A JP 2002201571 A JP2002201571 A JP 2002201571A JP 2002201571 A JP2002201571 A JP 2002201571A JP 2003100894 A JP2003100894 A JP 2003100894A
- Authority
- JP
- Japan
- Prior art keywords
- chip
- pad
- integrated circuit
- insulating film
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H10W20/49—
-
- H10W70/415—
-
- H10W72/019—
-
- H10W72/90—
-
- H10W74/117—
-
- H10W90/00—
-
- H10W90/811—
-
- H10W70/05—
-
- H10W70/614—
-
- H10W72/01—
-
- H10W72/07551—
-
- H10W72/29—
-
- H10W72/50—
-
- H10W72/536—
-
- H10W72/5363—
-
- H10W72/5366—
-
- H10W72/5473—
-
- H10W72/59—
-
- H10W72/865—
-
- H10W72/884—
-
- H10W72/923—
-
- H10W72/932—
-
- H10W72/934—
-
- H10W72/952—
-
- H10W72/983—
-
- H10W74/00—
-
- H10W90/20—
-
- H10W90/231—
-
- H10W90/271—
-
- H10W90/291—
-
- H10W90/732—
-
- H10W90/734—
-
- H10W90/736—
-
- H10W90/754—
-
- H10W90/756—
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20010041154 | 2001-07-10 | ||
| KR2001-41154 | 2001-07-10 | ||
| KR2002-3030 | 2002-01-18 | ||
| KR1020020003030A KR100567225B1 (ko) | 2001-07-10 | 2002-01-18 | 칩 패드가 셀 영역 위에 형성된 집적회로 칩과 그 제조방법 및 멀티 칩 패키지 |
Related Child Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008096255A Division JP2008219028A (ja) | 2001-07-10 | 2008-04-02 | 集積回路チップ及びマルチチップパッケージ |
| JP2008096267A Division JP2008235914A (ja) | 2001-07-10 | 2008-04-02 | 半導体パッケージおよびその製造方法 |
| JP2008096281A Division JP4945501B2 (ja) | 2001-07-10 | 2008-04-02 | 半導体パッケージ、マルチチップパッケージ及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003100894A true JP2003100894A (ja) | 2003-04-04 |
| JP2003100894A5 JP2003100894A5 (enExample) | 2007-05-31 |
Family
ID=26639226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002201571A Pending JP2003100894A (ja) | 2001-07-10 | 2002-07-10 | 集積回路チップ及びマルチチップパッケージ |
Country Status (3)
| Country | Link |
|---|---|
| US (7) | US6642627B2 (enExample) |
| JP (1) | JP2003100894A (enExample) |
| DE (1) | DE10231385B4 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006286688A (ja) * | 2005-03-31 | 2006-10-19 | Elpida Memory Inc | 半導体装置 |
| JP2006318987A (ja) * | 2005-05-10 | 2006-11-24 | Rohm Co Ltd | 半導体チップの電極構造およびその形成方法ならびに半導体チップ |
| US7843089B2 (en) | 2006-07-19 | 2010-11-30 | Kabushiki Kaisha Toshiba | Semiconductor device |
Families Citing this family (48)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10231385B4 (de) * | 2001-07-10 | 2007-02-22 | Samsung Electronics Co., Ltd., Suwon | Halbleiterchip mit Bondkontaktstellen und zugehörige Mehrchippackung |
| KR100475740B1 (ko) * | 2003-02-25 | 2005-03-10 | 삼성전자주식회사 | 신호 완결성 개선 및 칩 사이즈 감소를 위한 패드배치구조를 갖는 반도체 집적 회로장치 |
| US6984881B2 (en) * | 2003-06-16 | 2006-01-10 | Sandisk Corporation | Stackable integrated circuit package and method therefor |
| US7309923B2 (en) * | 2003-06-16 | 2007-12-18 | Sandisk Corporation | Integrated circuit package having stacked integrated circuits and method therefor |
| DE10333465B4 (de) * | 2003-07-22 | 2008-07-24 | Infineon Technologies Ag | Elektronisches Bauteil mit Halbleiterchip, Verfahren zur Herstellung desselben sowie Verfahren zur Herstellung eines Halbleiterwafers mit Kontaktflecken |
| KR100547354B1 (ko) * | 2003-09-04 | 2006-01-26 | 삼성전기주식회사 | 에지 본딩용 메탈 패턴이 형성된 반도체 칩을 구비한bga 패키지 및 그 제조 방법 |
| US7422930B2 (en) * | 2004-03-02 | 2008-09-09 | Infineon Technologies Ag | Integrated circuit with re-route layer and stacked die assembly |
| KR100583966B1 (ko) * | 2004-06-08 | 2006-05-26 | 삼성전자주식회사 | 재배치된 금속 배선들을 갖는 집적회로 패키지들 및 그제조방법들 |
| WO2006016198A1 (en) * | 2004-08-02 | 2006-02-16 | Infineon Technologies Ag | Electronic component with stacked semiconductor chips and heat dissipating means |
| US7348210B2 (en) * | 2005-04-27 | 2008-03-25 | International Business Machines Corporation | Post bump passivation for soft error protection |
| US20060267173A1 (en) * | 2005-05-26 | 2006-11-30 | Sandisk Corporation | Integrated circuit package having stacked integrated circuits and method therefor |
| US7466013B2 (en) * | 2005-12-15 | 2008-12-16 | Etron Technology, Inc. | Semiconductor die structure featuring a triple pad organization |
| KR100780691B1 (ko) * | 2006-03-29 | 2007-11-30 | 주식회사 하이닉스반도체 | 폴딩 칩 플래나 스택 패키지 |
| KR100713931B1 (ko) * | 2006-03-29 | 2007-05-07 | 주식회사 하이닉스반도체 | 고속 및 고성능의 반도체 패키지 |
| US9202776B2 (en) * | 2006-06-01 | 2015-12-01 | Stats Chippac Ltd. | Stackable multi-chip package system |
| TWI301663B (en) * | 2006-08-02 | 2008-10-01 | Phoenix Prec Technology Corp | Circuit board structure with embedded semiconductor chip and fabrication method thereof |
| US7719122B2 (en) * | 2007-01-11 | 2010-05-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | System-in-package packaging for minimizing bond wire contamination and yield loss |
| US8174127B2 (en) * | 2007-06-21 | 2012-05-08 | Stats Chippac Ltd. | Integrated circuit package system employing device stacking |
| US7830020B2 (en) * | 2007-06-21 | 2010-11-09 | Stats Chippac Ltd. | Integrated circuit package system employing device stacking |
| US7972902B2 (en) * | 2007-07-23 | 2011-07-05 | Samsung Electronics Co., Ltd. | Method of manufacturing a wafer including providing electrical conductors isolated from circuitry |
| KR101185886B1 (ko) | 2007-07-23 | 2012-09-25 | 삼성전자주식회사 | 유니버설 배선 라인들을 포함하는 반도체 칩, 반도체패키지, 카드 및 시스템 |
| CN101933047B (zh) * | 2008-02-01 | 2012-09-05 | 惠普开发有限公司 | 数字图像中的牙齿定位与白化 |
| US9059074B2 (en) * | 2008-03-26 | 2015-06-16 | Stats Chippac Ltd. | Integrated circuit package system with planar interconnect |
| US7786557B2 (en) * | 2008-05-19 | 2010-08-31 | Mediatek Inc. | QFN Semiconductor package |
| US20110042794A1 (en) * | 2008-05-19 | 2011-02-24 | Tung-Hsien Hsieh | Qfn semiconductor package and circuit board structure adapted for the same |
| TWI372453B (en) * | 2008-09-01 | 2012-09-11 | Advanced Semiconductor Eng | Copper bonding wire, wire bonding structure and method for processing and bonding a wire |
| US8043894B2 (en) * | 2008-08-26 | 2011-10-25 | Stats Chippac Ltd. | Integrated circuit package system with redistribution layer |
| US8115286B2 (en) * | 2008-10-22 | 2012-02-14 | Honeywell International Inc. | Integrated sensor including sensing and processing die mounted on opposite sides of package substrate |
| KR101539402B1 (ko) * | 2008-10-23 | 2015-07-27 | 삼성전자주식회사 | 반도체 패키지 |
| US20100148218A1 (en) * | 2008-12-10 | 2010-06-17 | Panasonic Corporation | Semiconductor integrated circuit device and method for designing the same |
| TW201030916A (en) * | 2009-02-11 | 2010-08-16 | Advanced Semiconductor Eng | Pad and package structure using the same |
| US7994615B2 (en) * | 2009-08-28 | 2011-08-09 | International Rectifier Corporation | Direct contact leadless package for high current devices |
| US8093695B2 (en) * | 2009-09-04 | 2012-01-10 | International Rectifier Corporation | Direct contact leadless flip chip package for high current devices |
| US8222722B2 (en) * | 2009-09-11 | 2012-07-17 | St-Ericsson Sa | Integrated circuit package and device |
| KR101563630B1 (ko) * | 2009-09-17 | 2015-10-28 | 에스케이하이닉스 주식회사 | 반도체 패키지 |
| US8895440B2 (en) * | 2010-08-06 | 2014-11-25 | Stats Chippac, Ltd. | Semiconductor die and method of forming Fo-WLCSP vertical interconnect using TSV and TMV |
| KR20120062366A (ko) * | 2010-12-06 | 2012-06-14 | 삼성전자주식회사 | 멀티칩 패키지의 제조 방법 |
| CN103151316B (zh) * | 2011-12-06 | 2017-10-20 | 北京大学深圳研究生院 | 一种基于mcp封装形式的可重构算子阵列结构的规模扩展方法 |
| KR20130113032A (ko) * | 2012-04-05 | 2013-10-15 | 에스케이하이닉스 주식회사 | 반도체 기판, 이를 갖는 반도체 칩 및 적층 반도체 패키지 |
| US8698323B2 (en) * | 2012-06-18 | 2014-04-15 | Invensas Corporation | Microelectronic assembly tolerant to misplacement of microelectronic elements therein |
| KR102053349B1 (ko) | 2013-05-16 | 2019-12-06 | 삼성전자주식회사 | 반도체 패키지 |
| US9134193B2 (en) * | 2013-12-06 | 2015-09-15 | Freescale Semiconductor, Inc. | Stacked die sensor package |
| US9960135B2 (en) * | 2015-03-23 | 2018-05-01 | Texas Instruments Incorporated | Metal bond pad with cobalt interconnect layer and solder thereon |
| JP6672812B2 (ja) * | 2016-01-14 | 2020-03-25 | 三菱電機株式会社 | 半導体装置及びその製造方法 |
| KR101973446B1 (ko) | 2017-11-28 | 2019-04-29 | 삼성전기주식회사 | 팬-아웃 반도체 패키지 |
| KR20200047845A (ko) * | 2018-10-24 | 2020-05-08 | 삼성전자주식회사 | 반도체 패키지 |
| KR102879321B1 (ko) * | 2020-04-17 | 2025-10-31 | 에스케이하이닉스 주식회사 | 저항 소자를 구비하는 반도체 장치 |
| US11676920B2 (en) | 2021-01-26 | 2023-06-13 | United Microelectronics Corp. | Semiconductor device and method for fabricating the same |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04324958A (ja) * | 1991-04-25 | 1992-11-13 | Hitachi Ltd | 半導体装置 |
| JPH0637250A (ja) * | 1992-05-22 | 1994-02-10 | Natl Semiconductor Corp <Ns> | 積層マルチチップモジュール及び製造方法 |
| JPH09152449A (ja) * | 1995-09-20 | 1997-06-10 | Samsung Electron Co Ltd | 露出された共通パッドを有するマルチチップパッケージ |
| JPH11354563A (ja) * | 1998-06-11 | 1999-12-24 | Citizen Watch Co Ltd | 半導体配線の構造 |
| JP2000183090A (ja) * | 1998-12-10 | 2000-06-30 | Sanyo Electric Co Ltd | チップサイズパッケージ及びその製造方法 |
| JP2001060657A (ja) * | 1999-08-23 | 2001-03-06 | Matsushita Electronics Industry Corp | 半導体装置及びその製造方法 |
| JP2001085604A (ja) * | 1999-09-14 | 2001-03-30 | Toshiba Corp | 半導体装置 |
| JP2001156172A (ja) * | 1999-11-24 | 2001-06-08 | Hitachi Ltd | 半導体装置 |
Family Cites Families (53)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59181041A (ja) | 1983-03-31 | 1984-10-15 | Toshiba Corp | 半導体集積回路装置 |
| JPS62109333A (ja) * | 1985-11-04 | 1987-05-20 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 半導体パツケ−ジ |
| US4723197A (en) * | 1985-12-16 | 1988-02-02 | National Semiconductor Corporation | Bonding pad interconnection structure |
| JPH0193136A (ja) | 1987-10-05 | 1989-04-12 | Nec Corp | 半導体装置 |
| JP2692099B2 (ja) * | 1988-01-14 | 1997-12-17 | 日本電気株式会社 | マスタースライス方式の集積回路 |
| JP3101077B2 (ja) * | 1992-06-11 | 2000-10-23 | 株式会社日立製作所 | 半導体集積回路装置 |
| JPH06275794A (ja) * | 1993-03-18 | 1994-09-30 | Matsushita Electric Ind Co Ltd | 半導体記憶装置およびその製造方法 |
| JPH0737988A (ja) * | 1993-07-20 | 1995-02-07 | Hitachi Ltd | 半導体集積回路装置の製造方法 |
| EP0637840A1 (en) * | 1993-08-05 | 1995-02-08 | AT&T Corp. | Integrated circuit with active devices under bond pads |
| JP2792532B2 (ja) * | 1994-09-30 | 1998-09-03 | 日本電気株式会社 | 半導体装置の製造方法及び半導体ウエハー |
| JP3362545B2 (ja) * | 1995-03-09 | 2003-01-07 | ソニー株式会社 | 半導体装置の製造方法 |
| JP3301894B2 (ja) | 1995-04-10 | 2002-07-15 | 新光電気工業株式会社 | 半導体装置の製造方法 |
| DE69635397T2 (de) * | 1995-03-24 | 2006-05-24 | Shinko Electric Industries Co., Ltd. | Halbleitervorrichtung mit Chipabmessungen und Herstellungsverfahren |
| KR100218996B1 (ko) * | 1995-03-24 | 1999-09-01 | 모기 쥰이찌 | 반도체장치 |
| US5723822A (en) * | 1995-03-24 | 1998-03-03 | Integrated Device Technology, Inc. | Structure for fabricating a bonding pad having improved adhesion to an underlying structure |
| JPH09107048A (ja) * | 1995-03-30 | 1997-04-22 | Mitsubishi Electric Corp | 半導体パッケージ |
| JP2763020B2 (ja) * | 1995-04-27 | 1998-06-11 | 日本電気株式会社 | 半導体パッケージ及び半導体装置 |
| US6111317A (en) * | 1996-01-18 | 2000-08-29 | Kabushiki Kaisha Toshiba | Flip-chip connection type semiconductor integrated circuit device |
| KR100274333B1 (ko) * | 1996-01-19 | 2001-01-15 | 모기 쥰이찌 | 도체층부착 이방성 도전시트 및 이를 사용한 배선기판 |
| US5969424A (en) * | 1997-03-19 | 1999-10-19 | Fujitsu Limited | Semiconductor device with pad structure |
| JP3545200B2 (ja) * | 1997-04-17 | 2004-07-21 | シャープ株式会社 | 半導体装置 |
| JPH1140624A (ja) | 1997-07-22 | 1999-02-12 | Mitsubishi Electric Corp | 半導体装置のリペア方法 |
| JP3152180B2 (ja) | 1997-10-03 | 2001-04-03 | 日本電気株式会社 | 半導体装置及びその製造方法 |
| JPH11204576A (ja) * | 1998-01-19 | 1999-07-30 | Citizen Watch Co Ltd | 半導体配線の構造 |
| US6175149B1 (en) * | 1998-02-13 | 2001-01-16 | Micron Technology, Inc. | Mounting multiple semiconductor dies in a package |
| US6429528B1 (en) * | 1998-02-27 | 2002-08-06 | Micron Technology, Inc. | Multichip semiconductor package |
| JP2000031191A (ja) | 1998-07-15 | 2000-01-28 | Mitsui High Tec Inc | 半導体装置 |
| JP3643706B2 (ja) | 1998-07-31 | 2005-04-27 | 三洋電機株式会社 | 半導体装置 |
| US6103552A (en) | 1998-08-10 | 2000-08-15 | Lin; Mou-Shiung | Wafer scale packaging scheme |
| JP3494901B2 (ja) * | 1998-09-18 | 2004-02-09 | シャープ株式会社 | 半導体集積回路装置 |
| SG93278A1 (en) | 1998-12-21 | 2002-12-17 | Mou Shiung Lin | Top layers of metal for high performance ics |
| US6383916B1 (en) | 1998-12-21 | 2002-05-07 | M. S. Lin | Top layers of metal for high performance IC's |
| US6869870B2 (en) | 1998-12-21 | 2005-03-22 | Megic Corporation | High performance system-on-chip discrete components using post passivation process |
| US6495442B1 (en) | 2000-10-18 | 2002-12-17 | Magic Corporation | Post passivation interconnection schemes on top of the IC chips |
| KR100301052B1 (ko) * | 1998-12-28 | 2001-11-02 | 윤종용 | 소프트에러를감소하기위한반도체소자의제조방법 |
| SG93192A1 (en) * | 1999-01-28 | 2002-12-17 | United Microelectronics Corp | Face-to-face multi chip package |
| JP2000243876A (ja) * | 1999-02-23 | 2000-09-08 | Fujitsu Ltd | 半導体装置とその製造方法 |
| JP3423245B2 (ja) | 1999-04-09 | 2003-07-07 | 沖電気工業株式会社 | 半導体装置及びその実装方法 |
| US6228687B1 (en) * | 1999-06-28 | 2001-05-08 | Micron Technology, Inc. | Wafer-level package and methods of fabricating |
| US6439370B1 (en) * | 1999-10-05 | 2002-08-27 | M&R Printing Equipment, Inc. | Method and apparatus for the automatic loading of an article onto a printing machine |
| JP3765952B2 (ja) * | 1999-10-19 | 2006-04-12 | 富士通株式会社 | 半導体装置 |
| US6344687B1 (en) * | 1999-12-22 | 2002-02-05 | Chih-Kung Huang | Dual-chip packaging |
| JP2003520444A (ja) * | 2000-01-20 | 2003-07-02 | アンバーウェーブ システムズ コーポレイション | 高温成長を不要とする低貫通転位密度格子不整合エピ層 |
| JP3798620B2 (ja) * | 2000-12-04 | 2006-07-19 | 富士通株式会社 | 半導体装置の製造方法 |
| US6503776B2 (en) * | 2001-01-05 | 2003-01-07 | Advanced Semiconductor Engineering, Inc. | Method for fabricating stacked chip package |
| US20020100600A1 (en) * | 2001-01-26 | 2002-08-01 | Albert Douglas M. | Stackable microcircuit layer formed from a plastic encapsulated microcircuit and method of making the same |
| DE10231385B4 (de) * | 2001-07-10 | 2007-02-22 | Samsung Electronics Co., Ltd., Suwon | Halbleiterchip mit Bondkontaktstellen und zugehörige Mehrchippackung |
| US6977440B2 (en) * | 2001-10-09 | 2005-12-20 | Tessera, Inc. | Stacked packages |
| US6737750B1 (en) * | 2001-12-07 | 2004-05-18 | Amkor Technology, Inc. | Structures for improving heat dissipation in stacked semiconductor packages |
| US6870276B1 (en) * | 2001-12-26 | 2005-03-22 | Micron Technology, Inc. | Apparatus for supporting microelectronic substrates |
| US7423336B2 (en) * | 2002-04-08 | 2008-09-09 | Micron Technology, Inc. | Bond pad rerouting element, rerouted semiconductor devices including the rerouting element, and assemblies including the rerouted semiconductor devices |
| KR100524974B1 (ko) * | 2003-07-01 | 2005-10-31 | 삼성전자주식회사 | 양면 스택 멀티 칩 패키징을 위한 인라인 집적회로 칩패키지 제조 장치 및 이를 이용한 집적회로 칩 패키지제조 방법 |
| US7368320B2 (en) * | 2003-08-29 | 2008-05-06 | Micron Technology, Inc. | Method of fabricating a two die semiconductor assembly |
-
2002
- 2002-07-08 DE DE10231385A patent/DE10231385B4/de not_active Expired - Lifetime
- 2002-07-09 US US10/192,800 patent/US6642627B2/en not_active Expired - Lifetime
- 2002-07-10 JP JP2002201571A patent/JP2003100894A/ja active Pending
-
2003
- 2003-08-28 US US10/651,813 patent/US7148578B2/en not_active Expired - Lifetime
-
2006
- 2006-11-02 US US11/556,156 patent/US7576440B2/en not_active Expired - Lifetime
- 2006-11-02 US US11/556,153 patent/US7541682B2/en not_active Expired - Lifetime
- 2006-12-27 US US11/616,852 patent/US7825523B2/en not_active Expired - Lifetime
- 2006-12-27 US US11/616,857 patent/US7453159B2/en not_active Expired - Lifetime
- 2006-12-27 US US11/616,850 patent/US7547977B2/en not_active Expired - Lifetime
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04324958A (ja) * | 1991-04-25 | 1992-11-13 | Hitachi Ltd | 半導体装置 |
| JPH0637250A (ja) * | 1992-05-22 | 1994-02-10 | Natl Semiconductor Corp <Ns> | 積層マルチチップモジュール及び製造方法 |
| JPH09152449A (ja) * | 1995-09-20 | 1997-06-10 | Samsung Electron Co Ltd | 露出された共通パッドを有するマルチチップパッケージ |
| JPH11354563A (ja) * | 1998-06-11 | 1999-12-24 | Citizen Watch Co Ltd | 半導体配線の構造 |
| JP2000183090A (ja) * | 1998-12-10 | 2000-06-30 | Sanyo Electric Co Ltd | チップサイズパッケージ及びその製造方法 |
| JP2001060657A (ja) * | 1999-08-23 | 2001-03-06 | Matsushita Electronics Industry Corp | 半導体装置及びその製造方法 |
| JP2001085604A (ja) * | 1999-09-14 | 2001-03-30 | Toshiba Corp | 半導体装置 |
| JP2001156172A (ja) * | 1999-11-24 | 2001-06-08 | Hitachi Ltd | 半導体装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006286688A (ja) * | 2005-03-31 | 2006-10-19 | Elpida Memory Inc | 半導体装置 |
| JP2006318987A (ja) * | 2005-05-10 | 2006-11-24 | Rohm Co Ltd | 半導体チップの電極構造およびその形成方法ならびに半導体チップ |
| US7843089B2 (en) | 2006-07-19 | 2010-11-30 | Kabushiki Kaisha Toshiba | Semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| US7547977B2 (en) | 2009-06-16 |
| US20040041258A1 (en) | 2004-03-04 |
| US7148578B2 (en) | 2006-12-12 |
| US7541682B2 (en) | 2009-06-02 |
| US7453159B2 (en) | 2008-11-18 |
| DE10231385B4 (de) | 2007-02-22 |
| US20070108632A1 (en) | 2007-05-17 |
| DE10231385A1 (de) | 2003-01-30 |
| US7576440B2 (en) | 2009-08-18 |
| US20070108633A1 (en) | 2007-05-17 |
| US7825523B2 (en) | 2010-11-02 |
| US6642627B2 (en) | 2003-11-04 |
| US20030011068A1 (en) | 2003-01-16 |
| US20070057383A1 (en) | 2007-03-15 |
| US20070108562A1 (en) | 2007-05-17 |
| US20070057367A1 (en) | 2007-03-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2003100894A (ja) | 集積回路チップ及びマルチチップパッケージ | |
| JP4308671B2 (ja) | ワイヤボンドパッドを有する半導体装置とその製作方法 | |
| US7545048B2 (en) | Stacked die package | |
| US20070187823A1 (en) | Semiconductor device | |
| US9786601B2 (en) | Semiconductor device having wires | |
| JP4945501B2 (ja) | 半導体パッケージ、マルチチップパッケージ及びその製造方法 | |
| JP2008527710A (ja) | 信号導電効率を上げながら配線パッド用構造支持体を実現する方法及び装置 | |
| US6455943B1 (en) | Bonding pad structure of semiconductor device having improved bondability | |
| US6576970B2 (en) | Bonding pad structure of semiconductor device and method for fabricating the same | |
| US7501707B2 (en) | Multichip semiconductor package | |
| CN113451281B (zh) | 半导体封装件 | |
| CN119297160B (zh) | 半导体封装结构及其制备方法 | |
| JP3491606B2 (ja) | 半導体デバイスとその製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040921 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070118 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070404 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20071203 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20080229 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20080305 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080402 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20080811 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20081204 |
|
| A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20081218 |
|
| A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20090116 |