DE69129957T2 - In AT-Richtung geschnittenes Kristalloszillatorelement und sein Herstellungsverfahren - Google Patents

In AT-Richtung geschnittenes Kristalloszillatorelement und sein Herstellungsverfahren

Info

Publication number
DE69129957T2
DE69129957T2 DE69129957T DE69129957T DE69129957T2 DE 69129957 T2 DE69129957 T2 DE 69129957T2 DE 69129957 T DE69129957 T DE 69129957T DE 69129957 T DE69129957 T DE 69129957T DE 69129957 T2 DE69129957 T2 DE 69129957T2
Authority
DE
Germany
Prior art keywords
production method
crystal oscillator
oscillator element
element cut
cut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69129957T
Other languages
English (en)
Other versions
DE69129957D1 (de
Inventor
Hideaki Nakamura
Eiji Karaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP24965290A external-priority patent/JPH04127709A/ja
Priority claimed from JP24964990A external-priority patent/JPH04127705A/ja
Priority claimed from JP24965090A external-priority patent/JP3159982B2/ja
Priority claimed from JP24965190A external-priority patent/JPH04127708A/ja
Priority claimed from JP25226190A external-priority patent/JPH04130810A/ja
Priority claimed from JP25226090A external-priority patent/JPH04130812A/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69129957D1 publication Critical patent/DE69129957D1/de
Publication of DE69129957T2 publication Critical patent/DE69129957T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
DE69129957T 1990-04-27 1991-04-29 In AT-Richtung geschnittenes Kristalloszillatorelement und sein Herstellungsverfahren Expired - Fee Related DE69129957T2 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP11468690 1990-04-27
JP24965290A JPH04127709A (ja) 1990-09-19 1990-09-19 Ａｔカット水晶振動子
JP24964990A JPH04127705A (ja) 1990-09-19 1990-09-19 Ａｔカット水晶振動子
JP24965090A JP3159982B2 (ja) 1990-09-19 1990-09-19 矩形状ａｔカット水晶振動子
JP24965190A JPH04127708A (ja) 1990-09-19 1990-09-19 矩形状ａｔカット水晶振動子
JP25226190A JPH04130810A (ja) 1990-09-21 1990-09-21 Ａｔカット水晶振動片の製造方法
JP25226090A JPH04130812A (ja) 1990-09-21 1990-09-21 Ａｔカット水晶振動片

Publications (2)

Publication Number Publication Date
DE69129957D1 DE69129957D1 (de) 1998-09-17
DE69129957T2 true DE69129957T2 (de) 1998-12-24

Family

ID=27565818

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69129957T Expired - Fee Related DE69129957T2 (de) 1990-04-27 1991-04-29 In AT-Richtung geschnittenes Kristalloszillatorelement und sein Herstellungsverfahren

Country Status (3)

Country Link
US (3) US5376861A (de)
EP (1) EP0459631B1 (de)
DE (1) DE69129957T2 (de)

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KR0158469B1 (ko) * 1992-10-15 1999-03-20 모리시타 요이찌 발진자
US5650075A (en) * 1995-05-30 1997-07-22 Motorola, Inc. Method for etching photolithographically produced quartz crystal blanks for singulation
US5955825A (en) * 1996-04-26 1999-09-21 Mitsubishi Materials Corporation Crystal oscillator and manufacturing method thereof
US6114801A (en) * 1997-04-14 2000-09-05 Toyo Communication Equipment Co., Ltd. At-cut crystal resonator
US6383720B1 (en) * 1998-08-18 2002-05-07 Matsushita Electric Industrial Co., Ltd. Method of manufacturing fine pattern and printed circuit board manufactured with this method
JP4087186B2 (ja) * 2002-06-25 2008-05-21 日本電波工業株式会社 水晶振動子の保持構造
JP5891935B2 (ja) * 2011-07-04 2016-03-23 株式会社大真空 水晶振動板および当該水晶振動板を用いた水晶振動子
JP2013165404A (ja) * 2012-02-10 2013-08-22 Seiko Instruments Inc 振動デバイス及び発振器
JP6108955B2 (ja) * 2013-05-22 2017-04-05 京セラクリスタルデバイス株式会社 水晶振動素子

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JPS5634216A (en) * 1979-08-29 1981-04-06 Seiko Epson Corp Composite oscillation quartz oscillator
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DE3004331C2 (de) * 1980-02-06 1983-06-23 Siemens AG, 1000 Berlin und 8000 München Zu Dickenscherungsschwingungen anregbare Resonatorplatte
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JPS5732115A (en) * 1980-08-05 1982-02-20 Nippon Dempa Kogyo Co Ltd Forming method for electrode of tuning fork type quartz oscillator
JPS58141021A (ja) * 1982-02-16 1983-08-22 Matsushita Electric Ind Co Ltd 厚みすべり水晶振動子
JPS58141022A (ja) * 1982-02-16 1983-08-22 Matsushita Electric Ind Co Ltd 厚みすべり水晶振動子
EP0092427B1 (de) * 1982-04-20 1989-04-05 Fujitsu Limited Piezoelektrischer Resonator und Verfahren zur Abstimmung seiner Resonanzfrequenz
JPS5915318A (ja) * 1982-07-16 1984-01-26 Matsushita Electric Ind Co Ltd 水晶振動子の製造方法
JPS59128813A (ja) * 1983-01-13 1984-07-25 Nippon Dempa Kogyo Co Ltd 圧電振動子
JPS59174010A (ja) * 1983-03-23 1984-10-02 Miyota Seimitsu Kk 矩形状ａｔカツト水晶振動子
JPS59182615A (ja) * 1983-03-31 1984-10-17 Miyota Seimitsu Kk 矩形状ａｔカツト水晶振動子
US4499395A (en) * 1983-05-26 1985-02-12 The United States Of America As Represented By The Secretary Of The Air Force Cut angles for quartz crystal resonators
JPS60194607A (ja) * 1984-03-15 1985-10-03 Toukiyouto 圧電振動子
CH655224GA3 (de) * 1984-04-06 1986-04-15
US4631437A (en) * 1985-01-10 1986-12-23 The United States Of America As Represented By The Secretary Of The Army Stress compensated piezoelectric crystal device
US4596739A (en) * 1985-02-11 1986-06-24 International Business Machines Corporation Rigid magnetic recording media
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JPH0640612B2 (ja) * 1986-03-31 1994-05-25 朝日電波株式会社 圧電振動子
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JPS63285013A (ja) * 1987-05-18 1988-11-22 Matsushima Kogyo Co Ltd オ−バ−ト−ン用矩形状ａｔ振動子
JPH01179513A (ja) * 1988-01-09 1989-07-17 Kinseki Ltd 水晶振動子のエッチング加工方法
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JPH0344979A (ja) * 1989-07-13 1991-02-26 Murata Mfg Co Ltd チップ状圧電部品

Also Published As

Publication number Publication date
EP0459631A2 (de) 1991-12-04
EP0459631B1 (de) 1998-08-12
EP0459631A3 (en) 1992-04-01
US5304459A (en) 1994-04-19
DE69129957D1 (de) 1998-09-17
US5376861A (en) 1994-12-27
US5314577A (en) 1994-05-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee