JPS5732115A - Forming method for electrode of tuning fork type quartz oscillator - Google Patents
Forming method for electrode of tuning fork type quartz oscillatorInfo
- Publication number
- JPS5732115A JPS5732115A JP10735980A JP10735980A JPS5732115A JP S5732115 A JPS5732115 A JP S5732115A JP 10735980 A JP10735980 A JP 10735980A JP 10735980 A JP10735980 A JP 10735980A JP S5732115 A JPS5732115 A JP S5732115A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- films
- forming method
- oscillating arms
- flanks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title abstract 3
- 239000010453 quartz Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract 2
- 229910052709 silver Inorganic materials 0.000 abstract 2
- 239000004332 silver Substances 0.000 abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 239000011651 chromium Substances 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
- 239000002904 solvent Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To form an energizing electrode easily in an accurate pattern by employing an electrode forming method by which the formation of an electrode pattern on the main surfaces of oscillating arms, the coating of photoresist except at flank parts, and the bonding and peeling of metallic films to and from the main surfaces and flanks are performed. CONSTITUTION:Chromium films and metallic films are vapor-deposited on oscillating arms 1 and 2 successively and then patterned by the conventional photoetching method to form energizing electrodes 5 on their main surfaces. Photoresist patterns 6a are formed around the energizing electrodes 5 and silver films 8 are then vapor- deposited on the top and reverse surfaces and flanks of the oscillating arms 1 and 2. The photoresist patterns 6 are removed by being dissolved in a solvent. At this time, the silver films 8 vapor-deposited on top surfaces of the photoresist patterns 6a are also removed to form the energizing electrodes on the flanks of the oscillating arms 1 and 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10735980A JPS5732115A (en) | 1980-08-05 | 1980-08-05 | Forming method for electrode of tuning fork type quartz oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10735980A JPS5732115A (en) | 1980-08-05 | 1980-08-05 | Forming method for electrode of tuning fork type quartz oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5732115A true JPS5732115A (en) | 1982-02-20 |
Family
ID=14457067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10735980A Pending JPS5732115A (en) | 1980-08-05 | 1980-08-05 | Forming method for electrode of tuning fork type quartz oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5732115A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0233211A (en) * | 1988-07-22 | 1990-02-02 | Fujitsu Ltd | Manufacture of piezoelectric vibrator |
| EP0459631A2 (en) * | 1990-04-27 | 1991-12-04 | Seiko Epson Corporation | At-cut crystal oscillating element and method of making the same |
| WO2000005812A1 (en) * | 1998-07-24 | 2000-02-03 | Seiko Epson Corporation | Piezo-oscillator and production method thereof |
-
1980
- 1980-08-05 JP JP10735980A patent/JPS5732115A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0233211A (en) * | 1988-07-22 | 1990-02-02 | Fujitsu Ltd | Manufacture of piezoelectric vibrator |
| US5314577A (en) * | 1990-04-26 | 1994-05-24 | Seiko Epson Corporation | At-cut crystal oscillating reed and method of etching the same |
| EP0459631A2 (en) * | 1990-04-27 | 1991-12-04 | Seiko Epson Corporation | At-cut crystal oscillating element and method of making the same |
| US5304459A (en) * | 1990-04-27 | 1994-04-19 | Seiko Epson Corporation | At-cut crystal oscillating reed and method of etching the same |
| US5376861A (en) * | 1990-04-27 | 1994-12-27 | Seiko Epson Corporation | At-cut crystal oscillating reed and method of etching the same |
| WO2000005812A1 (en) * | 1998-07-24 | 2000-02-03 | Seiko Epson Corporation | Piezo-oscillator and production method thereof |
| US6661162B1 (en) | 1998-07-24 | 2003-12-09 | Seiko Epson Corporation | Piezoelectric resonator and method of producing the same |
| US6961981B2 (en) | 1998-07-24 | 2005-11-08 | Seiko Epson Corporation | Method of producing a piezoelectric resonator |
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