JPS5799012A - Manufacture for quartz oscillator - Google Patents
Manufacture for quartz oscillatorInfo
- Publication number
- JPS5799012A JPS5799012A JP17561780A JP17561780A JPS5799012A JP S5799012 A JPS5799012 A JP S5799012A JP 17561780 A JP17561780 A JP 17561780A JP 17561780 A JP17561780 A JP 17561780A JP S5799012 A JPS5799012 A JP S5799012A
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- thin film
- quartz
- etching process
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 title abstract 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title abstract 7
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 229920002120 photoresistant polymer Polymers 0.000 abstract 6
- 239000010409 thin film Substances 0.000 abstract 6
- 239000011651 chromium Substances 0.000 abstract 4
- 239000010931 gold Substances 0.000 abstract 4
- 238000000034 method Methods 0.000 abstract 4
- 238000005530 etching Methods 0.000 abstract 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 1
- 238000003486 chemical etching Methods 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To increase the accuracy of shape, by manufacturing the quartz oscillator via chromium etching process, gold etching process and quartz bar etching process, in the manufacture of a quartz oscillator with chemical etching process. CONSTITUTION:After depositing a Cr thin film 4 on both sides of a quartz thin plate 1 with sputtering or vapor deposition, a photoresist 5 is coated, the photoresist 5 is exposed and developed and the Cr thin film 4 is etched. After the photoresist 5 is removed, an Au thin film 6 is deposited and a photoresist 7 is coated. The photoresist 7 is exposed and developed and the Au thin film 6 is etched. The quartz thin plate 1 is etched to obtain the same form as the photoresist 7, Au thin film 6 and Cr thin film 4 and to form a tuning fork type quartz bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17561780A JPS5799012A (en) | 1980-12-12 | 1980-12-12 | Manufacture for quartz oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17561780A JPS5799012A (en) | 1980-12-12 | 1980-12-12 | Manufacture for quartz oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5799012A true JPS5799012A (en) | 1982-06-19 |
Family
ID=15999209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17561780A Pending JPS5799012A (en) | 1980-12-12 | 1980-12-12 | Manufacture for quartz oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5799012A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6339276B1 (en) * | 1999-11-01 | 2002-01-15 | Agere Systems Guardian Corp. | Incremental tuning process for electrical resonators based on mechanical motion |
-
1980
- 1980-12-12 JP JP17561780A patent/JPS5799012A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6339276B1 (en) * | 1999-11-01 | 2002-01-15 | Agere Systems Guardian Corp. | Incremental tuning process for electrical resonators based on mechanical motion |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5726163A (en) | Mask for forming thin film and its manufacture | |
| JPS5799012A (en) | Manufacture for quartz oscillator | |
| JPS5517152A (en) | Photo mask | |
| JPS5432143A (en) | Etching process | |
| JPS5742151A (en) | Formation of pattern | |
| JPS57176817A (en) | Manufacture of flat type crystal oscillator | |
| JPS5732115A (en) | Forming method for electrode of tuning fork type quartz oscillator | |
| JPS5375858A (en) | Vapor deposition mask and its production | |
| JPS5460883A (en) | Manufacture of thin plate piezoelectric oscillator | |
| JPS56106412A (en) | Production of tuning fork type quartz oscillator | |
| JPS55138912A (en) | Forming method of electrode of crystal resonator | |
| JPS5735860A (en) | Preparation of photomask | |
| JPS5445590A (en) | Subminiature crystal oscillator and its manufacture | |
| JPS57199314A (en) | Tuning fork type quartz oscillator | |
| JPS55163539A (en) | Photo mask | |
| JPS5612736A (en) | Formation of fine chromium pattern | |
| JPS55124282A (en) | Method of fabricating piezoelectric acoustic converter | |
| GB1527341A (en) | Process for manufacturing a ferroelectric device and devices manufactured thereby | |
| JPS57147634A (en) | Photomask blank | |
| JPS54118345A (en) | Metal lift off process | |
| JPS57186335A (en) | Forming method for pattern | |
| JPS5691434A (en) | Method for forming pattern of deposited film by lift-off method | |
| JPS57135950A (en) | Preparation of photomask | |
| JPS57112113A (en) | Production for quartz oscillator | |
| JPS5721113A (en) | Manufacture for tuning fork type quartz oscillation bar |