JPS5445590A - Subminiature crystal oscillator and its manufacture - Google Patents

Subminiature crystal oscillator and its manufacture

Info

Publication number
JPS5445590A
JPS5445590A JP11198677A JP11198677A JPS5445590A JP S5445590 A JPS5445590 A JP S5445590A JP 11198677 A JP11198677 A JP 11198677A JP 11198677 A JP11198677 A JP 11198677A JP S5445590 A JPS5445590 A JP S5445590A
Authority
JP
Japan
Prior art keywords
photo resist
thin film
sides
plane
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11198677A
Other languages
Japanese (ja)
Other versions
JPS6038891B2 (en
Inventor
Shigeru Kizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP11198677A priority Critical patent/JPS6038891B2/en
Priority to GB19770/78A priority patent/GB1600706A/en
Priority to US05/925,936 priority patent/US4253036A/en
Publication of JPS5445590A publication Critical patent/JPS5445590A/en
Publication of JPS6038891B2 publication Critical patent/JPS6038891B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks

Abstract

PURPOSE:To establish small size, thin type and low cost, by forming the plane and side electrode with the photolithography techonlogy. CONSTITUTION:The +5 deg. x cut crystal substrate 11 is polished for the both sides by 50 to 200mu thick, coating is made for the both sides for the metal thin film 12 in common use for the fluorine proof mask and the flat electrode in processing of etching in diapason shape, the plane electrode patern 13 is formed for the both sides by using the negative type photo resist, patterning of the diapason 14 is made by using the positive type photo resist, etching is made for the thin film 12 and the substrate 11, side electrode film 15 is formed, the photo resist 14 for the thin film 15 formed on the plane part and the photo resist 14 at background are removed, the thin film 12 is etched by taking the negatibe type photo resist 13 as a mask, and the resist 13 is stripped. Further, the crystal plate is cut by revolving the X plate around the X axis by 0 to 10 deg. and around Y' axis by 70 to 90 deg..
JP11198677A 1977-09-17 1977-09-17 Manufacturing method of ultra-small crystal unit Expired JPS6038891B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP11198677A JPS6038891B2 (en) 1977-09-17 1977-09-17 Manufacturing method of ultra-small crystal unit
GB19770/78A GB1600706A (en) 1977-09-17 1978-05-16 Subminiature quartz crystal vibrator and method for manufacturing the same
US05/925,936 US4253036A (en) 1977-09-17 1978-07-19 Subminiature tuning fork quartz crystal vibrator with nicrome and palladium electrode layers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11198677A JPS6038891B2 (en) 1977-09-17 1977-09-17 Manufacturing method of ultra-small crystal unit

Publications (2)

Publication Number Publication Date
JPS5445590A true JPS5445590A (en) 1979-04-10
JPS6038891B2 JPS6038891B2 (en) 1985-09-03

Family

ID=14575075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11198677A Expired JPS6038891B2 (en) 1977-09-17 1977-09-17 Manufacturing method of ultra-small crystal unit

Country Status (1)

Country Link
JP (1) JPS6038891B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5736019U (en) * 1980-08-05 1982-02-25
JP2008042794A (en) * 2006-08-10 2008-02-21 Citizen Holdings Co Ltd Piezoelectric device and its manufacturing method
US10438814B2 (en) 2015-06-17 2019-10-08 Nikon Corporation Method for manufacturing wiring pattern, method for manufacturing transistor, and member for transfer

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0291092U (en) * 1988-12-30 1990-07-19

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5736019U (en) * 1980-08-05 1982-02-25
JP2008042794A (en) * 2006-08-10 2008-02-21 Citizen Holdings Co Ltd Piezoelectric device and its manufacturing method
US10438814B2 (en) 2015-06-17 2019-10-08 Nikon Corporation Method for manufacturing wiring pattern, method for manufacturing transistor, and member for transfer

Also Published As

Publication number Publication date
JPS6038891B2 (en) 1985-09-03

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