JPS5460883A - Manufacture of thin plate piezoelectric oscillator - Google Patents

Manufacture of thin plate piezoelectric oscillator

Info

Publication number
JPS5460883A
JPS5460883A JP12792577A JP12792577A JPS5460883A JP S5460883 A JPS5460883 A JP S5460883A JP 12792577 A JP12792577 A JP 12792577A JP 12792577 A JP12792577 A JP 12792577A JP S5460883 A JPS5460883 A JP S5460883A
Authority
JP
Japan
Prior art keywords
thin plate
film
plate piezoelectric
metal films
electrode film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12792577A
Other languages
Japanese (ja)
Other versions
JPS6127929B2 (en
Inventor
Shigeru Kizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP12792577A priority Critical patent/JPS5460883A/en
Publication of JPS5460883A publication Critical patent/JPS5460883A/en
Publication of JPS6127929B2 publication Critical patent/JPS6127929B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To obtain an ultra-miniature and high-performance thin plate piezoelectric oscillator by forming the rod-type electrode film on the plane of the thin plate piezoelectric substrate, forming a metal film on the electrode film and then forming the metal films to both surfaces and the side surface through the vacuum evaporation after etching. CONSTITUTION:Oscillator electrode film 8 in the shape of the rod, tuning fork and the like is formed on the plane of thin plate piezoelectric substrate 7, and rod-type and tuning fork type metal films 12 corresponding to each other are formed on both surfaces of substrate 7 as well as on film 8. Then the protective film is produced via photo resist 13 only at the necessary areas, and the exposed areas of the piezoelectric substrate are etched by the fluoric acid or the like. Furthermore, the metal films are formed through the vacuum evaporation or the like on both surfaces plus the side surface, and the metal films formed on the photo resist as well as the photo resist are removed. Then metal film 12 is etched, and electrode film 8 formed on the piezoelectric substrate is made to remain at the plane and the side surface areas. in such way, an ultra-miniature and high-performance thin plate piezoelectric oscillator can be obtained.
JP12792577A 1977-10-25 1977-10-25 Manufacture of thin plate piezoelectric oscillator Granted JPS5460883A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12792577A JPS5460883A (en) 1977-10-25 1977-10-25 Manufacture of thin plate piezoelectric oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12792577A JPS5460883A (en) 1977-10-25 1977-10-25 Manufacture of thin plate piezoelectric oscillator

Publications (2)

Publication Number Publication Date
JPS5460883A true JPS5460883A (en) 1979-05-16
JPS6127929B2 JPS6127929B2 (en) 1986-06-27

Family

ID=14972016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12792577A Granted JPS5460883A (en) 1977-10-25 1977-10-25 Manufacture of thin plate piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JPS5460883A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7213322B2 (en) * 2003-04-11 2007-05-08 Murata Manufacturing Co., Ltd. Method for manufacturing surface acoustic wave device
JP2008085997A (en) * 2006-08-31 2008-04-10 Seiko Instruments Inc Manufacturing method of thickness shear vibration piece, thickness shear vibration piece, thickness shear vibrator, and oscillator

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6661162B1 (en) 1998-07-24 2003-12-09 Seiko Epson Corporation Piezoelectric resonator and method of producing the same
CN112048315B (en) * 2019-06-06 2022-08-05 江苏和成显示科技有限公司 Liquid crystal composition and liquid crystal display device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7213322B2 (en) * 2003-04-11 2007-05-08 Murata Manufacturing Co., Ltd. Method for manufacturing surface acoustic wave device
JP2008085997A (en) * 2006-08-31 2008-04-10 Seiko Instruments Inc Manufacturing method of thickness shear vibration piece, thickness shear vibration piece, thickness shear vibrator, and oscillator

Also Published As

Publication number Publication date
JPS6127929B2 (en) 1986-06-27

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