JPS55109020A - Piezoelectric oscillator - Google Patents

Piezoelectric oscillator

Info

Publication number
JPS55109020A
JPS55109020A JP1559479A JP1559479A JPS55109020A JP S55109020 A JPS55109020 A JP S55109020A JP 1559479 A JP1559479 A JP 1559479A JP 1559479 A JP1559479 A JP 1559479A JP S55109020 A JPS55109020 A JP S55109020A
Authority
JP
Japan
Prior art keywords
electrode
piezoelectric
film
oscillator
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1559479A
Other languages
Japanese (ja)
Inventor
Masaaki Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1559479A priority Critical patent/JPS55109020A/en
Publication of JPS55109020A publication Critical patent/JPS55109020A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To realize an energy enclosure type thin-film piezoelectric oscillator featuring a high resonance point frequency, by forming the piezoelectric substrate existing between the electrode films as the piezoelectric film. CONSTITUTION:Electrode 7 for driving of the oscillation element is formed on the surface of supporting substrate 6 through the vacuum evaporation, the sputtering or other method. Then photo resist film is added to the evaporation film surface of the conductive layer of electrode 7, and then the exposure is given to the photo resist film via the mask pattern of the electrode form. After this, the chemical etching is given to the exposed area to obtain the electrode pattern. Then piezoelectric film 8 composed of the lithium niobate or the like is attached through the ion-sputtering or other methods. And electrode 9 for driving of the oscillation element is formed in the opposite side to electrode 7, and then the piezoelectric oscillator is formed through the etching process of substrate 6 to be packaged. Here hole 10 utilizes the vibration in the thickness direction of the oscillator and is accordingly convenient to release the oscillation energy.
JP1559479A 1979-02-13 1979-02-13 Piezoelectric oscillator Pending JPS55109020A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1559479A JPS55109020A (en) 1979-02-13 1979-02-13 Piezoelectric oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1559479A JPS55109020A (en) 1979-02-13 1979-02-13 Piezoelectric oscillator

Publications (1)

Publication Number Publication Date
JPS55109020A true JPS55109020A (en) 1980-08-21

Family

ID=11893037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1559479A Pending JPS55109020A (en) 1979-02-13 1979-02-13 Piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JPS55109020A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58137318A (en) * 1982-02-10 1983-08-15 Nec Corp Thin-film piezoelectric oscillator
JPS5923613A (en) * 1982-07-29 1984-02-07 Murata Mfg Co Ltd Piezoelectric resonator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58137318A (en) * 1982-02-10 1983-08-15 Nec Corp Thin-film piezoelectric oscillator
JPS5923613A (en) * 1982-07-29 1984-02-07 Murata Mfg Co Ltd Piezoelectric resonator

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