JPS5470791A - Thin plate piezoelectric oscillator - Google Patents

Thin plate piezoelectric oscillator

Info

Publication number
JPS5470791A
JPS5470791A JP13813077A JP13813077A JPS5470791A JP S5470791 A JPS5470791 A JP S5470791A JP 13813077 A JP13813077 A JP 13813077A JP 13813077 A JP13813077 A JP 13813077A JP S5470791 A JPS5470791 A JP S5470791A
Authority
JP
Japan
Prior art keywords
etching
oscillator
bridge
area
thinned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13813077A
Other languages
Japanese (ja)
Inventor
Shigeru Kizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP13813077A priority Critical patent/JPS5470791A/en
Publication of JPS5470791A publication Critical patent/JPS5470791A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To secure a uniform shape for the fracture surface as well as to realize an ultra-miniature size for the oscillator by forming the thin-thinkness part by giving the half-etching from the single surface of the bridge part of the oscillator bar which is supported and fixed to the piezoelectric substrate. CONSTITUTION:The oscillator is taken out of the etching solution in the course of the etching for its external shape processing, and an etching is given to at least single surface of the thin film which is the masking component at the area of bridge 4. Then the piezoelectric substrate is put into the etching solution again to carry out the U-shaped half-etching. Thus, the area of bridge 4 is thinned. In such way, the fracture becomes easy since the piezoelectric component is thinned in terms of the oross-section slthough the area of bridge 4 features the same shape as conventional. As a result, a uniform shape is ensured for the fracture surface, and also an ultra-miniature size can be obtained for the oscillator as a whole.
JP13813077A 1977-11-17 1977-11-17 Thin plate piezoelectric oscillator Pending JPS5470791A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13813077A JPS5470791A (en) 1977-11-17 1977-11-17 Thin plate piezoelectric oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13813077A JPS5470791A (en) 1977-11-17 1977-11-17 Thin plate piezoelectric oscillator

Publications (1)

Publication Number Publication Date
JPS5470791A true JPS5470791A (en) 1979-06-06

Family

ID=15214674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13813077A Pending JPS5470791A (en) 1977-11-17 1977-11-17 Thin plate piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JPS5470791A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0092515A1 (en) * 1982-04-14 1983-10-26 Asulab S.A. Piezoelectric resonator element and process for producing it
JP2002299978A (en) * 2001-03-30 2002-10-11 Toyo Commun Equip Co Ltd Structure of piezoelectric wafer, piezoelectric vibrating element and method of manufacturing piezoelectric device
JP2008060744A (en) * 2006-08-29 2008-03-13 Nippon Dempa Kogyo Co Ltd Method for manufacturing oscillating piece, crystal oscillating device, manufacturing method therefor, and crystal oscillating piece
JP2008199485A (en) * 2007-02-15 2008-08-28 Seiko Instruments Inc Manufacturing apparatus for tuning fork crystal oscillator
JP2008199294A (en) * 2007-02-13 2008-08-28 Seiko Instruments Inc Manufacturing apparatus for tuning fork crystal oscillator
JP2008205523A (en) * 2007-02-16 2008-09-04 Seiko Instruments Inc Apparatus for manufacturing tuning fork crystal oscillator

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0092515A1 (en) * 1982-04-14 1983-10-26 Asulab S.A. Piezoelectric resonator element and process for producing it
JP2002299978A (en) * 2001-03-30 2002-10-11 Toyo Commun Equip Co Ltd Structure of piezoelectric wafer, piezoelectric vibrating element and method of manufacturing piezoelectric device
JP2008060744A (en) * 2006-08-29 2008-03-13 Nippon Dempa Kogyo Co Ltd Method for manufacturing oscillating piece, crystal oscillating device, manufacturing method therefor, and crystal oscillating piece
JP2008199294A (en) * 2007-02-13 2008-08-28 Seiko Instruments Inc Manufacturing apparatus for tuning fork crystal oscillator
JP2008199485A (en) * 2007-02-15 2008-08-28 Seiko Instruments Inc Manufacturing apparatus for tuning fork crystal oscillator
JP2008205523A (en) * 2007-02-16 2008-09-04 Seiko Instruments Inc Apparatus for manufacturing tuning fork crystal oscillator

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