JPS5491092A - Piezoelectric vibrator - Google Patents

Piezoelectric vibrator

Info

Publication number
JPS5491092A
JPS5491092A JP15837977A JP15837977A JPS5491092A JP S5491092 A JPS5491092 A JP S5491092A JP 15837977 A JP15837977 A JP 15837977A JP 15837977 A JP15837977 A JP 15837977A JP S5491092 A JPS5491092 A JP S5491092A
Authority
JP
Japan
Prior art keywords
piq9
electrode film
impedance
manufacture
specific gravity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15837977A
Other languages
Japanese (ja)
Inventor
Yoshio Hattori
Original Assignee
Seiko Instr & Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instr & Electronics Ltd filed Critical Seiko Instr & Electronics Ltd
Priority to JP15837977A priority Critical patent/JPS5491092A/en
Publication of JPS5491092A publication Critical patent/JPS5491092A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03BASIC ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezo-electric or electrostrictive resonators or networks

Abstract

PURPOSE:To lower the impedance of an equivalent circuit, and to sumplify the manufacture of a vibrator by forming an electrode film of a light metal such as Al by using photoetching technique. CONSTITUTION:Both sides of crystal plate 9 are coated with heat-resisting resin PIQ9. Next, resin PIQ9 is removed except the part where an electrode is formed. On both the sides of crystal plate 9, metal film 8 of less than 2.69 in specific gravity such as Al is vapor-deposited. Then, the exposed crystal part is etched in plasma of freon gas. Next, Al films on PIQ9 and PIQ are removed at the same time and only the Al electrode film of the 1st layer is left. As for the piezoelectric vibrator manufactured in this way, since the specific gravity of its electrode film is small, the impedance of the equivalent circuit is low and the manufacture process is simple, so that its cost can be reduced.
JP15837977A 1977-12-28 1977-12-28 Piezoelectric vibrator Pending JPS5491092A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15837977A JPS5491092A (en) 1977-12-28 1977-12-28 Piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15837977A JPS5491092A (en) 1977-12-28 1977-12-28 Piezoelectric vibrator

Publications (1)

Publication Number Publication Date
JPS5491092A true JPS5491092A (en) 1979-07-19

Family

ID=15670409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15837977A Pending JPS5491092A (en) 1977-12-28 1977-12-28 Piezoelectric vibrator

Country Status (1)

Country Link
JP (1) JPS5491092A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6604266B1 (en) * 1997-06-24 2003-08-12 Tdk Corporation Manufacturing method for a piezoelectric component
JP2004242254A (en) * 2003-02-10 2004-08-26 River Eletec Kk Crystal vibrator and manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6604266B1 (en) * 1997-06-24 2003-08-12 Tdk Corporation Manufacturing method for a piezoelectric component
JP2004242254A (en) * 2003-02-10 2004-08-26 River Eletec Kk Crystal vibrator and manufacturing method

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