JPS5718113A - Manufacture of elastic surface wave lattice type transducer - Google Patents

Abstract

PURPOSE:To obtain a tiny lattice type transducer, by putting in order an electrode material, an auxiliary layer and a resist mask on a piezoelectric substrate, executing an oblique vapor deposition of an inorganic material, and after that, etching the auxiliary layer, and subsequently etching the electrode material. CONSTITUTION:An Al film 30, an organic auxiliary layer 31, and a resist 32 are put on a piezoelectric substrate 21, electronic beam exposure and development are executed, and after that, the upper part of the resist is covered with Ti 37 by means of an oblique vapor deposition 36. Subsequently, an opening 39 is made on the auxiliary layer 31 vertically by an O2 ion beam 38 by a mask of Ti 37. An electrode pattern 40 is made by etch-removing the electrode material 30 of the opening part, and peeling off the layers 32, 31. An unnecessary electrode material on a scribe line 44 is removed by putting a resist mask 41 and etch-removing an electrode of an opening part 43. According to such a constitution, even if a resist oozes out at the opening part of a resist pattern, it does not exert influence on the following process, therefore, an elastic surface wave lattice type trasducer having an electrode of a very small size is obtained easily.