JPS57198632A - Fine pattern formation - Google Patents
Fine pattern formationInfo
- Publication number
- JPS57198632A JPS57198632A JP8348481A JP8348481A JPS57198632A JP S57198632 A JPS57198632 A JP S57198632A JP 8348481 A JP8348481 A JP 8348481A JP 8348481 A JP8348481 A JP 8348481A JP S57198632 A JPS57198632 A JP S57198632A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- film
- resolution
- reflection factor
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
Abstract
PURPOSE:To contrive the improvement of the resolution of a resist pattern by forming an Mo film with low reflection factor under a resist film. CONSTITUTION:An Si alloy layer 2 of 1.2% Al and an Mo film 3 are stacked by evaporation on an Si substrate 1 completed element formation. With a resist pattern 5 made by applying resist 4 for exposure development, the Al alloy layer 2 with high reflection factor is covered by the Mo film 3 with low reflection factor. Therefore, resolution is improved and no residual whiskered resist exists. Next, the Mo 3 is etched by CF4+O2 by using the pattern 5 as a mask. Then, an Mo film is faithfully processed on the mask. Then, after etching the layer 2, plasma incineration is applied to the resist 4 and wiring 2 is completed by applying the removal of etching to the Mo 3 with CF4+O2. In this composition, the resolution of the resist pattern 5 is remarkably improved and fine processing can be done.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8348481A JPS57198632A (en) | 1981-05-30 | 1981-05-30 | Fine pattern formation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8348481A JPS57198632A (en) | 1981-05-30 | 1981-05-30 | Fine pattern formation |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57198632A true JPS57198632A (en) | 1982-12-06 |
Family
ID=13803741
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8348481A Pending JPS57198632A (en) | 1981-05-30 | 1981-05-30 | Fine pattern formation |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57198632A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6031229A (en) * | 1983-08-01 | 1985-02-18 | Tokyo Denshi Kagaku Kabushiki | Selective etching method of metal film |
JPS61214524A (en) * | 1985-03-18 | 1986-09-24 | エヌ・ベー・フイリツプス・フルーイランペンフアブリケン | Manufacture of semiconductor |
US5066611A (en) * | 1990-08-31 | 1991-11-19 | Micron Technology, Inc. | Method for improving step coverage of a metallization layer on an integrated circuit by use of molybdenum as an anti-reflective coating |
US5622787A (en) * | 1993-12-09 | 1997-04-22 | Mitsubishi Denki Kabushiki Kaisha | Mask for transferring a pattern for use in a semiconductor device and method of manufacturing the same |
-
1981
- 1981-05-30 JP JP8348481A patent/JPS57198632A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6031229A (en) * | 1983-08-01 | 1985-02-18 | Tokyo Denshi Kagaku Kabushiki | Selective etching method of metal film |
JPS61214524A (en) * | 1985-03-18 | 1986-09-24 | エヌ・ベー・フイリツプス・フルーイランペンフアブリケン | Manufacture of semiconductor |
US5066611A (en) * | 1990-08-31 | 1991-11-19 | Micron Technology, Inc. | Method for improving step coverage of a metallization layer on an integrated circuit by use of molybdenum as an anti-reflective coating |
US5622787A (en) * | 1993-12-09 | 1997-04-22 | Mitsubishi Denki Kabushiki Kaisha | Mask for transferring a pattern for use in a semiconductor device and method of manufacturing the same |
US5702849A (en) * | 1993-12-09 | 1997-12-30 | Mitsubishi Denki Kabushiki Kaisha | Mask for transferring a pattern for use in a semiconductor device and method of manufacturing the same |
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