JPS5656633A - Manufacture of semiconductor element - Google Patents
Manufacture of semiconductor elementInfo
- Publication number
- JPS5656633A JPS5656633A JP13273279A JP13273279A JPS5656633A JP S5656633 A JPS5656633 A JP S5656633A JP 13273279 A JP13273279 A JP 13273279A JP 13273279 A JP13273279 A JP 13273279A JP S5656633 A JPS5656633 A JP S5656633A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- pattern
- contacted
- constitution
- periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 6
- 238000000034 method Methods 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE:To prevent damage and also to improve yield by a method wherein an identifying mark is formed in an untouched manner on a part of semiconductor substrate through photoengraving, and then a desired treatment is applied on the substrate. CONSTITUTION:At a position 2 notches 4 of the substrate 1 are contacted to pins 3, 3', a pin 3'' is contacted to a periphery of the substrate to rough locating, and then it is brought to an exposure position 2'. There arises a dead domain 7 of a pattern 6 of a photomask 5 on the periphery of the substrate. Therefore an indication 8 is exposed in the dead domain at the position 2 by controlling 12 a projector 11. Next, a precise locating is made at the position 2', and the pattern 6 of the mask 5 is exposed. Processes of development, etching and resist removal follow thereafter. According to this constitution, a mark can be formed together with a given pattern without damaging the surface of the substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13273279A JPS5656633A (en) | 1979-10-15 | 1979-10-15 | Manufacture of semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13273279A JPS5656633A (en) | 1979-10-15 | 1979-10-15 | Manufacture of semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5656633A true JPS5656633A (en) | 1981-05-18 |
Family
ID=15088290
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13273279A Pending JPS5656633A (en) | 1979-10-15 | 1979-10-15 | Manufacture of semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5656633A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58138025A (en) * | 1982-02-10 | 1983-08-16 | Jeol Ltd | Identification mark reading method |
JPS6092606A (en) * | 1983-10-26 | 1985-05-24 | Nec Corp | Manufacture of semiconductor device |
-
1979
- 1979-10-15 JP JP13273279A patent/JPS5656633A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58138025A (en) * | 1982-02-10 | 1983-08-16 | Jeol Ltd | Identification mark reading method |
JPS6092606A (en) * | 1983-10-26 | 1985-05-24 | Nec Corp | Manufacture of semiconductor device |
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