JPS55124282A - Method of fabricating piezoelectric acoustic converter - Google Patents

Method of fabricating piezoelectric acoustic converter

Info

Publication number
JPS55124282A
JPS55124282A JP3278979A JP3278979A JPS55124282A JP S55124282 A JPS55124282 A JP S55124282A JP 3278979 A JP3278979 A JP 3278979A JP 3278979 A JP3278979 A JP 3278979A JP S55124282 A JPS55124282 A JP S55124282A
Authority
JP
Japan
Prior art keywords
crystal film
piezoelectric crystal
high frequency
frequency sputtering
acoustic converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3278979A
Other languages
Japanese (ja)
Inventor
Kenji Senda
Kenroku Tani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3278979A priority Critical patent/JPS55124282A/en
Publication of JPS55124282A publication Critical patent/JPS55124282A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)

Abstract

PURPOSE:To reduce the thickness of a piezoelectric acoustic converter and readily fabricate even bent converter by forming a piezoelectric crystal film by a high frequency sputtering process. CONSTITUTION:A piezoelectric crystal film 7 (such as, for example, ZnO, CdS, LiNbO3, etc.) is formed on a thin metal plate 6 by a high frequency sputtering process, and an electrode 8 is formed on the film 7 by a vacuum evaporating process. Since the piezoelectric crystal film is formed by a DC diode high frequency sputtering or the like in the sputtering process, the configuration of the piezoelectric crystal film can be arbitrarily formed with mask shape similarly to the general vacuum evaporation process.
JP3278979A 1979-03-19 1979-03-19 Method of fabricating piezoelectric acoustic converter Pending JPS55124282A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3278979A JPS55124282A (en) 1979-03-19 1979-03-19 Method of fabricating piezoelectric acoustic converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3278979A JPS55124282A (en) 1979-03-19 1979-03-19 Method of fabricating piezoelectric acoustic converter

Publications (1)

Publication Number Publication Date
JPS55124282A true JPS55124282A (en) 1980-09-25

Family

ID=12368608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3278979A Pending JPS55124282A (en) 1979-03-19 1979-03-19 Method of fabricating piezoelectric acoustic converter

Country Status (1)

Country Link
JP (1) JPS55124282A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59127396U (en) * 1983-02-16 1984-08-27 ダイキン工業株式会社 electroacoustic transducer
FR2557732A1 (en) * 1983-12-28 1985-07-05 Lefevre Rene METHOD FOR PRODUCING MINIATURE PIEZOELECTRIC DEVICES USING LASER MACHINING AND DEVICES OBTAINED THEREBY
US4783821A (en) * 1987-11-25 1988-11-08 The Regents Of The University Of California IC processed piezoelectric microphone
JP2013077646A (en) * 2011-09-29 2013-04-25 Tohoku Univ Dielectric thin film device for electrostatic induction type power generation device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5083798A (en) * 1973-11-28 1975-07-07
JPS50120593A (en) * 1974-03-07 1975-09-20
JPS50139400A (en) * 1974-04-25 1975-11-07

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5083798A (en) * 1973-11-28 1975-07-07
JPS50120593A (en) * 1974-03-07 1975-09-20
JPS50139400A (en) * 1974-04-25 1975-11-07

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59127396U (en) * 1983-02-16 1984-08-27 ダイキン工業株式会社 electroacoustic transducer
FR2557732A1 (en) * 1983-12-28 1985-07-05 Lefevre Rene METHOD FOR PRODUCING MINIATURE PIEZOELECTRIC DEVICES USING LASER MACHINING AND DEVICES OBTAINED THEREBY
US4783821A (en) * 1987-11-25 1988-11-08 The Regents Of The University Of California IC processed piezoelectric microphone
JP2013077646A (en) * 2011-09-29 2013-04-25 Tohoku Univ Dielectric thin film device for electrostatic induction type power generation device

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