JPS56109016A - Tuning fork type piezoelectric oscillator - Google Patents
Tuning fork type piezoelectric oscillatorInfo
- Publication number
- JPS56109016A JPS56109016A JP1102280A JP1102280A JPS56109016A JP S56109016 A JPS56109016 A JP S56109016A JP 1102280 A JP1102280 A JP 1102280A JP 1102280 A JP1102280 A JP 1102280A JP S56109016 A JPS56109016 A JP S56109016A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric oscillator
- zinc oxide
- less
- oxide film
- oscillated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 abstract 6
- 230000010355 oscillation Effects 0.000 abstract 3
- 239000011787 zinc oxide Substances 0.000 abstract 3
- 238000005452 bending Methods 0.000 abstract 2
- 239000010453 quartz Substances 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000004544 sputter deposition Methods 0.000 abstract 2
- 238000007740 vapor deposition Methods 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
- H03H9/215—Crystal tuning forks consisting of quartz
Abstract
PURPOSE:To easily obtain the piezoelectric oscillator less in secular change of oscillated frequencies, by producing the distortion of elongation or shrinkage to opposite direction at two electrode parts with the piezoelectricity of zinc oxide film, and energizing the bending oscillation oscillated to parallel direction to the quartz thin plate. CONSTITUTION:A metallic film 4 is constituted on the upper surface of an oscillator 1 with vapor deposition or sputtering, and on the upper side of this metallic film 4, the zinc oxide film 5 orientating the C-axis vertically is provided in the thickness of, for example, 0.1-50mum. Further, electrodes 2, 3 are provided on the upper side of the film 5 with vapor deposition or sputtering. Thus, with the piezoelectricity of zinc oxide film, the distortion of elongation or shrinkage is produced to opposite direction at the electrodes 2, 3. Thus, the bending oscillation oscillated to parallel direction on the quartz thin surface can be energized. Thus, the piezoelectric oscillator in which the secular change of oscillation frequency is less and the equivalent resistance is less, can easily be obtained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1102280A JPS56109016A (en) | 1980-02-01 | 1980-02-01 | Tuning fork type piezoelectric oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1102280A JPS56109016A (en) | 1980-02-01 | 1980-02-01 | Tuning fork type piezoelectric oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56109016A true JPS56109016A (en) | 1981-08-29 |
Family
ID=11766471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1102280A Pending JPS56109016A (en) | 1980-02-01 | 1980-02-01 | Tuning fork type piezoelectric oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56109016A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2278709A1 (en) * | 2009-07-02 | 2011-01-26 | Micro Crystal AG | Piezoelectric thin-film tuning fork resonator |
-
1980
- 1980-02-01 JP JP1102280A patent/JPS56109016A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2278709A1 (en) * | 2009-07-02 | 2011-01-26 | Micro Crystal AG | Piezoelectric thin-film tuning fork resonator |
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