JPS57199314A - Tuning fork type quartz oscillator - Google Patents
Tuning fork type quartz oscillatorInfo
- Publication number
- JPS57199314A JPS57199314A JP8403581A JP8403581A JPS57199314A JP S57199314 A JPS57199314 A JP S57199314A JP 8403581 A JP8403581 A JP 8403581A JP 8403581 A JP8403581 A JP 8403581A JP S57199314 A JPS57199314 A JP S57199314A
- Authority
- JP
- Japan
- Prior art keywords
- tuning fork
- base
- fork type
- type quartz
- quartz oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 title abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title abstract 3
- 230000010355 oscillation Effects 0.000 abstract 3
- 238000006073 displacement reaction Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
- H03H9/215—Crystal tuning forks consisting of quartz
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To reduce the oscillation energy leaked from th base of a tuning fork, by an asymmetrical shape of a tuning fork type quartz oscillator formed with lithographic processing. CONSTITUTION:In a tuning fork type quartz oscillator 1 formed with lithographic processing, steps 5 and 5' are provided to a base 3. Lengths l1 and l2 ranging from the tip of oscilation arms 2 and 2' to the steps 5 and 5' and lengths l3 and l4 of opposing parts of the arms 2 and 2' are different from each oscillation arm. Through the asymmetrical shape of the oscillator, an unbalance due to an etching margin 6 at the center and steps can be compensated. Thus, since the displacement of the base 3 can be made very small through the suitable value for the difference between l1 and l2 and between l3 and l4, the oscillation energy leaked from the base 3 can be made small.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8403581A JPS57199314A (en) | 1981-06-01 | 1981-06-01 | Tuning fork type quartz oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8403581A JPS57199314A (en) | 1981-06-01 | 1981-06-01 | Tuning fork type quartz oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57199314A true JPS57199314A (en) | 1982-12-07 |
Family
ID=13819263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8403581A Pending JPS57199314A (en) | 1981-06-01 | 1981-06-01 | Tuning fork type quartz oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57199314A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0575376A (en) * | 1991-09-13 | 1993-03-26 | Murata Mfg Co Ltd | Piezoelectric tuning fork resonator |
| EP0821481A2 (en) * | 1996-07-26 | 1998-01-28 | Toyota Jidosha Kabushiki Kaisha | Manufacture process of quartz vibrator |
| EP1536560A3 (en) * | 2003-11-10 | 2005-09-07 | Nihon Dempa Kogyo, Co., Ltd. | Tuning fork-type crystal vibrator |
| EP1650867A1 (en) * | 2004-10-21 | 2006-04-26 | Seiko Epson Corporation | Piezoelectric resonator element, piezoelectric device and gyro sensor |
-
1981
- 1981-06-01 JP JP8403581A patent/JPS57199314A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0575376A (en) * | 1991-09-13 | 1993-03-26 | Murata Mfg Co Ltd | Piezoelectric tuning fork resonator |
| US5434547A (en) * | 1991-09-13 | 1995-07-18 | Murata Manufacturing Co., Ltd. | Tuning fork type piezoelectric resonator having steps formed in arms of the tuning fork |
| EP0821481A2 (en) * | 1996-07-26 | 1998-01-28 | Toyota Jidosha Kabushiki Kaisha | Manufacture process of quartz vibrator |
| EP0821481A3 (en) * | 1996-07-26 | 2000-01-19 | Toyota Jidosha Kabushiki Kaisha | Manufacture process of quartz vibrator |
| EP1536560A3 (en) * | 2003-11-10 | 2005-09-07 | Nihon Dempa Kogyo, Co., Ltd. | Tuning fork-type crystal vibrator |
| EP1650867A1 (en) * | 2004-10-21 | 2006-04-26 | Seiko Epson Corporation | Piezoelectric resonator element, piezoelectric device and gyro sensor |
| US7397172B2 (en) | 2004-10-21 | 2008-07-08 | Seiko Epson Corporation | Piezoelectric resonator element, piezoelectric device and gyro sensor |
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