JPS5251866A - Production of metal electrode - Google Patents
Production of metal electrodeInfo
- Publication number
- JPS5251866A JPS5251866A JP12815675A JP12815675A JPS5251866A JP S5251866 A JPS5251866 A JP S5251866A JP 12815675 A JP12815675 A JP 12815675A JP 12815675 A JP12815675 A JP 12815675A JP S5251866 A JPS5251866 A JP S5251866A
- Authority
- JP
- Japan
- Prior art keywords
- production
- metal electrode
- forming
- lift
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
PURPOSE: To facilitate the formation of electrodes by a lift-off process by forming stepped patterns with photoresist layers then forming metal layers.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12815675A JPS5251866A (en) | 1975-10-23 | 1975-10-23 | Production of metal electrode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12815675A JPS5251866A (en) | 1975-10-23 | 1975-10-23 | Production of metal electrode |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5251866A true JPS5251866A (en) | 1977-04-26 |
Family
ID=14977759
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12815675A Pending JPS5251866A (en) | 1975-10-23 | 1975-10-23 | Production of metal electrode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5251866A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5623783A (en) * | 1979-08-01 | 1981-03-06 | Matsushita Electronics Corp | Formation of electrode for semiconductor device |
JPS5655055A (en) * | 1979-10-12 | 1981-05-15 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
US5246880A (en) * | 1992-04-27 | 1993-09-21 | Eastman Kodak Company | Method for creating substrate electrodes for flip chip and other applications |
-
1975
- 1975-10-23 JP JP12815675A patent/JPS5251866A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5623783A (en) * | 1979-08-01 | 1981-03-06 | Matsushita Electronics Corp | Formation of electrode for semiconductor device |
JPS6222463B2 (en) * | 1979-08-01 | 1987-05-18 | Matsushita Electronics Corp | |
JPS5655055A (en) * | 1979-10-12 | 1981-05-15 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
US5246880A (en) * | 1992-04-27 | 1993-09-21 | Eastman Kodak Company | Method for creating substrate electrodes for flip chip and other applications |
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