DE602005013685D1 - Piezoelektrisches filter - Google Patents
Piezoelektrisches filterInfo
- Publication number
- DE602005013685D1 DE602005013685D1 DE200560013685 DE602005013685T DE602005013685D1 DE 602005013685 D1 DE602005013685 D1 DE 602005013685D1 DE 200560013685 DE200560013685 DE 200560013685 DE 602005013685 T DE602005013685 T DE 602005013685T DE 602005013685 D1 DE602005013685 D1 DE 602005013685D1
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- piezoelectric resonator
- main surface
- disposed
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 abstract 10
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
- H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/587—Air-gaps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
- B81C1/00238—Joining a substrate with an electronic processing unit and a substrate with a micromechanical structure
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
- H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/105—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a cover cap mounted on an element forming part of the BAW device
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
- H03H9/1092—Mounting in enclosures for surface acoustic wave [SAW] devices the enclosure being defined by a cover cap mounted on an element forming part of the surface acoustic wave [SAW] device on the side of the IDT's
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/564—Monolithic crystal filters implemented with thin-film techniques
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0271—Resonators; ultrasonic resonators
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Electrophonic Musical Instruments (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Dry Shavers And Clippers (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004212350 | 2004-07-20 | ||
PCT/JP2005/012198 WO2006008940A1 (ja) | 2004-07-20 | 2005-07-01 | 圧電フィルタ |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005013685D1 true DE602005013685D1 (de) | 2009-05-14 |
Family
ID=35785060
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE200560013685 Active DE602005013685D1 (de) | 2004-07-20 | 2005-07-01 | Piezoelektrisches filter |
Country Status (7)
Country | Link |
---|---|
US (1) | US7378922B2 (de) |
EP (1) | EP1804376B1 (de) |
JP (1) | JP4375399B2 (de) |
CN (1) | CN1977450B (de) |
AT (1) | ATE427582T1 (de) |
DE (1) | DE602005013685D1 (de) |
WO (1) | WO2006008940A1 (de) |
Families Citing this family (99)
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JP2007281920A (ja) * | 2006-04-07 | 2007-10-25 | Murata Mfg Co Ltd | 電子部品およびその製造方法 |
KR100719123B1 (ko) * | 2006-07-27 | 2007-05-18 | 삼성전자주식회사 | 멀피 밴드 필터모듈 및 그 제조방법 |
JP2008113178A (ja) * | 2006-10-30 | 2008-05-15 | Hitachi Media Electoronics Co Ltd | 中空封止素子およびその製造方法 |
JP4798496B2 (ja) * | 2006-11-09 | 2011-10-19 | 宇部興産株式会社 | 薄膜圧電デバイス及びその製造方法 |
WO2008120511A1 (ja) * | 2007-03-29 | 2008-10-09 | Murata Manufacturing Co., Ltd. | 液中物質検出センサー |
JP2009124640A (ja) * | 2007-11-19 | 2009-06-04 | Hitachi Media Electoronics Co Ltd | 薄膜圧電バルク波共振器およびその製造方法、並びに薄膜圧電バルク波共振器を用いた薄膜圧電バルク波共振器フィルタ |
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US10944379B2 (en) * | 2016-12-14 | 2021-03-09 | Qualcomm Incorporated | Hybrid passive-on-glass (POG) acoustic filter |
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JP4766831B2 (ja) * | 2002-11-26 | 2011-09-07 | 株式会社村田製作所 | 電子部品の製造方法 |
US20040140475A1 (en) * | 2003-01-21 | 2004-07-22 | United Test & Assembly Center Limited | 3D MEMS/MOEMS package |
FR2853473B1 (fr) * | 2003-04-01 | 2005-07-01 | St Microelectronics Sa | Composant electronique comprenant un resonateur et procede de fabrication |
US7183622B2 (en) * | 2004-06-30 | 2007-02-27 | Intel Corporation | Module integrating MEMS and passive components |
-
2005
- 2005-07-01 DE DE200560013685 patent/DE602005013685D1/de active Active
- 2005-07-01 CN CN200580021979XA patent/CN1977450B/zh active Active
- 2005-07-01 JP JP2006528848A patent/JP4375399B2/ja active Active
- 2005-07-01 EP EP20050755248 patent/EP1804376B1/de active Active
- 2005-07-01 WO PCT/JP2005/012198 patent/WO2006008940A1/ja active Application Filing
- 2005-07-01 AT AT05755248T patent/ATE427582T1/de not_active IP Right Cessation
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2007
- 2007-01-19 US US11/655,129 patent/US7378922B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP1804376A1 (de) | 2007-07-04 |
US20070115079A1 (en) | 2007-05-24 |
JP4375399B2 (ja) | 2009-12-02 |
US7378922B2 (en) | 2008-05-27 |
CN1977450B (zh) | 2011-12-14 |
JPWO2006008940A1 (ja) | 2008-05-01 |
WO2006008940A1 (ja) | 2006-01-26 |
CN1977450A (zh) | 2007-06-06 |
EP1804376A4 (de) | 2008-05-14 |
ATE427582T1 (de) | 2009-04-15 |
EP1804376B1 (de) | 2009-04-01 |
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