DE19702102A1 - Halbleitervorrichtung und Verfahren zur Herstellung der Halbleitervorrichtung - Google Patents
Halbleitervorrichtung und Verfahren zur Herstellung der HalbleitervorrichtungInfo
- Publication number
- DE19702102A1 DE19702102A1 DE19702102A DE19702102A DE19702102A1 DE 19702102 A1 DE19702102 A1 DE 19702102A1 DE 19702102 A DE19702102 A DE 19702102A DE 19702102 A DE19702102 A DE 19702102A DE 19702102 A1 DE19702102 A1 DE 19702102A1
- Authority
- DE
- Germany
- Prior art keywords
- region
- drift
- conduction type
- type
- regions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 140
- 238000004519 manufacturing process Methods 0.000 title claims description 28
- 239000010410 layer Substances 0.000 claims description 151
- 238000009792 diffusion process Methods 0.000 claims description 62
- 229910052710 silicon Inorganic materials 0.000 claims description 18
- 239000010703 silicon Substances 0.000 claims description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 17
- -1 phosphorus ions Chemical class 0.000 claims description 11
- 229910052796 boron Inorganic materials 0.000 claims description 10
- 238000005468 ion implantation Methods 0.000 claims description 10
- 239000002344 surface layer Substances 0.000 claims description 10
- 229910052698 phosphorus Inorganic materials 0.000 claims description 6
- 239000011574 phosphorus Substances 0.000 claims description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 2
- 238000009826 distribution Methods 0.000 claims description 2
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 108091006146 Channels Proteins 0.000 description 54
- 230000015556 catabolic process Effects 0.000 description 46
- 239000010408 film Substances 0.000 description 32
- 238000000034 method Methods 0.000 description 17
- 239000012535 impurity Substances 0.000 description 12
- 230000009467 reduction Effects 0.000 description 10
- 230000005684 electric field Effects 0.000 description 6
- 238000010276 construction Methods 0.000 description 5
- 230000005669 field effect Effects 0.000 description 5
- 238000001451 molecular beam epitaxy Methods 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 239000002800 charge carrier Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005459 micromachining Methods 0.000 description 3
- 125000002524 organometallic group Chemical group 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 2
- 230000008094 contradictory effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000009828 non-uniform distribution Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000003252 repetitive effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000009415 formwork Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7816—Lateral DMOS transistors, i.e. LDMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
- H01L29/0634—Multiple reduced surface field (multi-RESURF) structures, e.g. double RESURF, charge compensation, cool, superjunction (SJ), 3D-RESURF, composite buffer (CB) structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1012—Base regions of thyristors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
- H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
- H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7809—Vertical DMOS transistors, i.e. VDMOS transistors having both source and drain contacts on the same surface, i.e. Up-Drain VDMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7816—Lateral DMOS transistors, i.e. LDMOS transistors
- H01L29/7824—Lateral DMOS transistors, i.e. LDMOS transistors with a substrate comprising an insulating layer, e.g. SOI-LDMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7816—Lateral DMOS transistors, i.e. LDMOS transistors
- H01L29/7825—Lateral DMOS transistors, i.e. LDMOS transistors with trench gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
- H01L29/7835—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's with asymmetrical source and drain regions, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
- H01L29/78621—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile
- H01L29/78624—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile the source and the drain regions being asymmetrical
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/808—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a PN junction gate, e.g. PN homojunction gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/812—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a Schottky gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Description
ε₀ die Elektrizitätskonstante von Vakuum,
εSi die relative Dielektrizitätskonstante von Silizium,
q eine Einheitsladung,
ND die Verunreinigungskonzentration der schwach dotierten Region, und
α einen Faktor (0 < α < 1).
µ den Wert µ (ND), der die Beweglichkeit von Elektronen bei der Dotierungskonzentration von ND darstellt, und
W einen Wert, der gleich EC ε₀ εSi/q ND ist.
eine unterteilte Driftregion des ersten Leitungstyps, die auf der Halbleiter schicht des zweiten Leitungstyps ausgebildet ist,
eine senkenförmige Abteilregion des zweiten Leitungstyps, die auf der unter teilten Driftregion bzw. Driftpfadregion des ersten Leitungstyps ausgebildet ist, und
eine sekundäre, unterteilte Driftpfadregion des ersten Leitungstyps aufweist, die auf einer Oberflächenschicht der senkenförmigen Abteilregion des zweiten Leitungstyps ausgebildet ist und mit der unterteilten Driftpfadregion des ersten Leitungstyps parallel verbunden ist.
wobei die Driftregion eine Mehrzahl von unterteilten Driftregionen eines ersten Leitungstyps, von denen jede einen Schichtenaufbau entlang der vertikalen Richtung besitzt und eine Mehrzahl von Abteilregionen des ersten Leitungstyps enthält, von denen jede einen Schichtaufbau entlang der vertikalen Richtung aufweist, und
die Mehrzahl von unterteilten Driftregionen des ersten Leitungstyps und die Mehrzahl von Abteilregionen des ersten Leitungstyps parallel jeweils einzeln nacheinander in einer Richtung, die rechtwinklig zu der vertikalen Richtung verläuft, gestapelt sind, um hierdurch eine seitlich gestapelte parallele Struktur zu bilden.
Ausbilden einer unterteilten Driftpfadregion des ersten Leitungstyps auf einer aus Silizium bestehenden Halbleiterschicht des zweiten Leitungstyps mit Hilfe einer thermischen Diffusion nach Ausführung einer Phosphorionen-Implantation,
Ausbilden einer senkenförmigen Abteilregion des zweiten Leitungstyps auf der unterteilten Driftregion des ersten Leitungstyps mit Hilfe einer thermischen Diffusion nach Ausführung einer selektiven Borionen-Implantation, und
thermisches Oxidieren einer durch die selektive Borionen-Implantierung erhaltenen Struktur, um hierdurch eine sekundäre, unterteilte Driftpfadregion des ersten Leitungstyps auf einer Oberfläche derselben unter Ausnutzung der Konzentration der Phosphorionen, die auf der Oberfläche des Siliziums ungleichförmig verteilt sind, und einer Auflösung bzw. Verteilung von Borionen, die in einem oxidierten Film ungleichför mig verteilt sind, zu bilden.
- (1) Die Verarmungsregion kann von den beiden Längsseiten der Zwischenregion des zweiten Leitungstyps jeweils in die benachbarten Regionen verbreitert werden. Die sich verbreiternden Enden der Verarmungsregion wirken effektiv auf die jeweiligen, unter teilten Driftpfadregionen ein, so daß die gesamte Breite der Zwischenregion des zweiten Leitungstyps, die zur Ausbildung der Verarmungsschicht erforderlich ist, verringert werden kann, während die Querschnittsfläche der unterteilten Driftpfadregion des ersten Leitungstyps ungefähr in dem gleichen Ausmaß vergrößert werden kann, was zu einem Absenken des Einschaltwiderstands, verglichen mit dem herkömmlichen Bauelement, führt. Demgemäß kann die gegenläufige Beziehung zwischen dem Einschaltwiderstand und der Durchbruchspannung entschärft werden, falls die Anzahl der unterteilten Driftpfadregionen des ersten Leitungstyps je Flächeneinheit (das heißt die Anzahl von unterteilten Regionen je Flächeneinheit) vergrößert wird.
- (2) Die Driftregion kann in streifenförmigem Aufbau hergestellt werden, indem die jeweili gen unterteilten Driftpfadregionen des ersten Leitungstyps in der Form von Streifen, und die jeweiligen Zwischenregionen des zweiten Leitungstyps in der Form von Streifen abwechselnd in einer Ebene angeordnet werden. Die sich wiederholende Struktur aus streifenförmigen pn-Übergängen in der Ebene kann durch Ausführung eines photolitogra phischen Prozesses zu einem Zeitpunkt bzw. zur gleichen Zeit ausgebildet werden, was zu einem einfachen Herstellungsprozeß und zu niedrigen Produktionskosten für die Halbleiter vorrichtung führt.
- (3) Die Driftregion, die in dem Halbleiterbauelement (Halbleitervorrichtung) des lateralen Typs vorzusehen ist, kann eine überlagerte parallele Struktur sein, bei der die jeweiligen unterteilten Driftpfadregionen des ersten Leitungstyps in der Form einer flachen Schicht und die jeweilige Zwischenregion des zweiten Leitungstyps in der Form einer flachen Schicht abwechselnd laminiert bzw. geschichtet werden. Die Dicke jeder Schicht kann exakt so weit wie möglich verringert werden, wobei ein metallorganisches, chemisches Dampfphasenabscheidungsverfahren (MOCVD-Verfahren) oder ein Molekularstrahl-Epi taxieverfahren (MBE-Verfahren) eingesetzt wird, so daß die gegenläufige Beziehung zwi schen dem Einschaltwiderstand und der Durchbruchsspannung erheblich verringert werden kann.
- (4) Die einfachste Driftregion bei einer Halbleitervorrichtung des lateralen Typs weist eine unterteilte Driftregion eines ersten Leitungstyps, die auf einer Halbleiterschicht eines zweiten Leitungstyps ausgebildet ist, eine senkenförmig ausgestaltete Zwischenregion des zweiten Leitungstyps, die auf der unterteilten Driftpfadregion des ersten Leitungstyps ausgebildet ist, und eine weitere, zweite unterteilte Driftpfadregion des ersten Leitungstyps auf, die auf einer Oberflächenschicht der Zwischenregion des zweiten Leitungstyps ausgebildet ist und mit der unterteilten Driftpfadregion des ersten Leitungstyps verbunden ist. Der Einschaltwiderstand der Halbleitervorrichtung kann dadurch verringert werden, daß die weitere unterteilte (zweite) Driftpfadregion des ersten Leitungstyps parallel mit der unterteilten Driftpfadregion des ersten Leitungstyps verbunden wird. Bei diesem Aufbau gibt es keine Schicht des umgekehrten Leitungstyps benachbart zu der oberen Schicht der zweiten, unterteilten Driftpfadregion des ersten Leitungstyps, so daß die Verarmung leicht durch die Verringerung der Dicke der Schicht erhalten werden kann.
- (5) Das Herstellungsverfahren gemäß der vorliegenden Erfindung erfordert keinen Schritt der Dotierung von Verunreinigungen und kann die zweite unterteilte Driftregion des Leitungstyps n lediglich bzw. allein durch den Schritt der thermischen Oxidation erzeugen, was zu der Verringerung der Kosten und zu einer Verringerung der Anzahl der Schritte beiträgt, so daß sich eine Methode zur praktischen Massenherstellung von Halbleiterbau elementen ergibt.
- (6) Die Driftregion der Halbleitervorrichtung des vertikalen Typs weist eine Mehrzahl von unterteilten Driftregionen des ersten Leitungstyps und eine Mehrzahl von Zwischenregio nen des zweiten Leitungstyps auf, wobei jede Region in der Form einer Schicht in der vertikalen Richtung vorliegt. Die jeweiligen unterteilten Driftregionen des ersten Leitungs typs und die jeweiligen Zwischenregionen des zweiten Leitungstyps sind alternierend in paralleler Form in der seitlichen Richtung gestapelt. Bei dem Prozeß zur Herstellung dieses Aufbaus kann ein Ätzschritt zur Ausbildung einer tiefen Rille erforderlich sein. In diesem Fall ist es jedoch ebenfalls möglich, die gegenläufige Beziehung zwischen dem Einschaltwiderstand und der Durchbruchsspannung der Halbleitervorrichtung des vertikalen Typs erheblich zu verringern.
Claims (7)
wobei die Driftregion als eine Gestaltung mit parallelen Streifen ausgebildet ist, bei der eine Mehrzahl von streifenförmigen, unterteilten Driftpfadregionen eines ersten Leitungstyps und eine Mehrzahl von streifenförmigen Zwischenregionen eines zweiten Leitungstyps in einer Ebene jeweils eine nach der anderen abwechselnd parallel angeordnet sind.
wobei die Driftregion als parallele, gestapelte Struktur ausgebildet ist, bei der eine Mehrzahl von schichtförmigen, unterteilten Driftpfadregionen eines ersten Leitungs typs und eine Mehrzahl von schichtförmigen Zwischenregionen eines zweiten Leitungstyps in einer Ebene eine nach der anderen parallel zueinander abwechselnd gestapelt sind.
eine unterteilte Driftregion eines ersten Leitungstyps, die auf dem schicht förmigen Halbleiter des zweiten Leitungstyps ausgebildet ist,
eine senkenförmige Zwischenregion des zweiten Leitungstyps, die auf der unterteilten Driftpfadregion des ersten Leitungstyps ausgebildet ist, und
eine weitere, unterteilte Driftpfadregion des ersten Leitungstyps, die auf einer Oberflächenschicht der senkenförmigen Zwischenregion des zweiten Leitungstyps ausgebil det ist und die mit der unterteilten Driftpfadregion des ersten Leitungstyps parallel geschal tet bzw. verbunden ist.
wobei die Driftregion eine Mehrzahl von unterteilten Driftregionen eines ersten Leitungstyps aufweist, von denen jede eine schichtförmige Gestaltung entlang der ver tikalen Richtung besitzt, und eine Mehrzahl von Zwischenregionen des ersten Leitungstyps enthält, von denen jede einen schichtförmigen Aufbau entlang der vertikalen Richtung aufweist, und
wobei die Mehrzahl von unterteilten Driftregionen des ersten Leitungstyps und die Mehrzahl von Zwischenregionen des ersten Leitungstyps eine nach der anderen parallel in einer Richtung gestapelt sind, die rechtwinklig zu der vertikalen Richtung verläuft, um eine in seitlicher Richtung gestapelte parallele Struktur zu bilden.
Ausbilden einer unterteilten Driftpfadregion eines ersten Leitungstyps auf einer aus Silizium bestehenden Halbleiterschicht eines zweiten Leitungstyps durch thermische Diffusion, nachdem eine Phosphorionen-Implantation durchgeführt worden ist;
Ausbilden einer senkenförmigen Zwischenregion des zweiten Leitungstyps auf der unterteilten Driftregion des ersten Leitungstyps durch thermische Diffusion nach der Ausführung einer selektiven Borionen-Implantation; und
thermisches Oxidieren eines Aufbaus, der durch die selektive Borionen-Im plantation erhalten worden ist, um hierdurch eine weitere, unterteilte Driftpfadregion des ersten Leitungstyps auf einer Oberfläche derselben unter Ausnutzung der Konzentration von Phosphorionen, die ungleichförmig an einer Oberfläche des Siliziums verteilt sind, und einer Verteilung bzw. Lösung von Borionen, die in einem oxidierten Film ungleichförmig verteilt sind, auszubilden.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP007935/96 | 1996-01-22 | ||
JP793596 | 1996-01-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE19702102A1 true DE19702102A1 (de) | 1997-07-24 |
DE19702102B4 DE19702102B4 (de) | 2008-12-11 |
Family
ID=11679382
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19702102A Expired - Lifetime DE19702102B4 (de) | 1996-01-22 | 1997-01-22 | Halbleitervorrichtung |
Country Status (3)
Country | Link |
---|---|
US (3) | US6097063A (de) |
DE (1) | DE19702102B4 (de) |
GB (1) | GB2309336B (de) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000016407A2 (de) * | 1998-09-11 | 2000-03-23 | Infineon Technologies Ag | Geschaltetes netzteil mit reduzierten schaltverlusten |
WO2000033386A2 (en) * | 1998-11-28 | 2000-06-08 | Koninklijke Philips Electronics N.V. | Trench-gate semiconductor devices and their manufacture |
DE10106073A1 (de) * | 2001-02-09 | 2002-08-29 | Infineon Technologies Ag | SOI-Bauelement |
WO2006015822A2 (de) * | 2004-08-06 | 2006-02-16 | Austriamicrosystems Ag | Hochvolt-nmos-transistor und herstellungsverfahren |
DE102004047772A1 (de) * | 2004-09-30 | 2006-04-13 | Infineon Technologies Ag | Lateraler Halbleitertransistor |
DE102004056772A1 (de) * | 2004-11-24 | 2006-06-01 | Infineon Technologies Austria Ag | Laterale Halbleiterbauelemente mit hoher Spannungsfestigkeit und Verfahren zur Herstellung derselben |
DE102005003127B3 (de) * | 2005-01-21 | 2006-06-14 | Infineon Technologies Ag | Laterales Halbleiterbauelement mit hoher Spannungsfestigkeit und Verfahren zur Herstellung desselben |
DE19953348B4 (de) * | 1999-11-05 | 2012-03-15 | Infineon Technologies Ag | MOS-Halbleitervorrichtung ohne Latchup eines parasitären Bipolartransistors |
DE10303232B4 (de) * | 2002-01-31 | 2015-04-02 | Infineon Technologies Ag | Hochvolt-MOS-Feldeffekttransistor |
Families Citing this family (146)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6720615B2 (en) * | 1996-01-22 | 2004-04-13 | Fuji Electric Co., Ltd. | Vertical-type MIS semiconductor device |
US6207994B1 (en) * | 1996-11-05 | 2001-03-27 | Power Integrations, Inc. | High-voltage transistor with multi-layer conduction region |
US6168983B1 (en) * | 1996-11-05 | 2001-01-02 | Power Integrations, Inc. | Method of making a high-voltage transistor with multiple lateral conduction layers |
US6081009A (en) * | 1997-11-10 | 2000-06-27 | Intersil Corporation | High voltage mosfet structure |
DE19818299B4 (de) * | 1998-04-23 | 2006-10-12 | Infineon Technologies Ag | Niederohmiger Hochvolt-Feldeffekttransistor |
DE19818300C1 (de) * | 1998-04-23 | 1999-07-22 | Siemens Ag | Lateraler Hochvolt-Seitenwandtransistor |
DE19819590C1 (de) * | 1998-04-30 | 1999-06-24 | Siemens Ag | MOS-Leistungstransistor |
DE19840032C1 (de) * | 1998-09-02 | 1999-11-18 | Siemens Ag | Halbleiterbauelement und Herstellungsverfahren dazu |
JP3382163B2 (ja) * | 1998-10-07 | 2003-03-04 | 株式会社東芝 | 電力用半導体装置 |
WO2000024061A1 (de) * | 1998-10-16 | 2000-04-27 | Siemens Aktiengesellschaft | Leistungshalbleiterbauelement, betriebsverfahren und verwendung als schalter |
DE19849902A1 (de) * | 1998-10-29 | 2000-05-11 | Roland Sittig | Halbleiterbauelement |
US6028337A (en) * | 1998-11-06 | 2000-02-22 | Philips North America Corporation | Lateral thin-film silicon-on-insulator (SOI) device having lateral depletion means for depleting a portion of drift region |
US6291856B1 (en) | 1998-11-12 | 2001-09-18 | Fuji Electric Co., Ltd. | Semiconductor device with alternating conductivity type layer and method of manufacturing the same |
WO2000035020A1 (de) * | 1998-12-07 | 2000-06-15 | Infineon Technologies Ag | Laterales hochvolt-halbleiterbaulement mit reduziertem spezifischem einschaltwiderstand |
US6023090A (en) * | 1998-12-07 | 2000-02-08 | Philips Electronics North America, Corporation | Lateral thin-film Silicon-On-Insulator (SOI) device having multiple zones in the drift region |
JP4447065B2 (ja) | 1999-01-11 | 2010-04-07 | 富士電機システムズ株式会社 | 超接合半導体素子の製造方法 |
JP2000228521A (ja) * | 1999-02-05 | 2000-08-15 | Fuji Electric Co Ltd | 半導体装置 |
GB9916370D0 (en) * | 1999-07-14 | 1999-09-15 | Koninkl Philips Electronics Nv | Manufacture of semiconductor devices and material |
JP4774580B2 (ja) * | 1999-08-23 | 2011-09-14 | 富士電機株式会社 | 超接合半導体素子 |
JP4192353B2 (ja) * | 1999-09-21 | 2008-12-10 | 株式会社デンソー | 炭化珪素半導体装置及びその製造方法 |
JP2001119022A (ja) * | 1999-10-20 | 2001-04-27 | Fuji Electric Co Ltd | 半導体装置及びその製造方法 |
US7470960B1 (en) * | 1999-10-27 | 2008-12-30 | Kansai Electric Power Company, Inc | High-voltage power semiconductor device with body regions of alternating conductivity and decreasing thickness |
JP3804375B2 (ja) | 1999-12-09 | 2006-08-02 | 株式会社日立製作所 | 半導体装置とそれを用いたパワースイッチング駆動システム |
JP4765012B2 (ja) * | 2000-02-09 | 2011-09-07 | 富士電機株式会社 | 半導体装置及びその製造方法 |
DE10012610C2 (de) * | 2000-03-15 | 2003-06-18 | Infineon Technologies Ag | Vertikales Hochvolt-Halbleiterbauelement |
JP4534303B2 (ja) * | 2000-04-27 | 2010-09-01 | 富士電機システムズ株式会社 | 横型超接合半導体素子 |
GB0012137D0 (en) * | 2000-05-20 | 2000-07-12 | Koninkl Philips Electronics Nv | A semiconductor device |
DE10026924A1 (de) * | 2000-05-30 | 2001-12-20 | Infineon Technologies Ag | Kompensationsbauelement |
EP1162664A1 (de) * | 2000-06-09 | 2001-12-12 | Motorola, Inc. | Laterale Halbleiteranordnung mit niedrigem Einschaltwiderstand und Verfahren zu deren Herstellung |
US7745289B2 (en) | 2000-08-16 | 2010-06-29 | Fairchild Semiconductor Corporation | Method of forming a FET having ultra-low on-resistance and low gate charge |
US6528849B1 (en) * | 2000-08-31 | 2003-03-04 | Motorola, Inc. | Dual-gate resurf superjunction lateral DMOSFET |
US6768171B2 (en) | 2000-11-27 | 2004-07-27 | Power Integrations, Inc. | High-voltage transistor with JFET conduction channels |
US6424007B1 (en) | 2001-01-24 | 2002-07-23 | Power Integrations, Inc. | High-voltage transistor with buried conduction layer |
US6818513B2 (en) * | 2001-01-30 | 2004-11-16 | Fairchild Semiconductor Corporation | Method of forming a field effect transistor having a lateral depletion structure |
US6803626B2 (en) | 2002-07-18 | 2004-10-12 | Fairchild Semiconductor Corporation | Vertical charge control semiconductor device |
US6710403B2 (en) | 2002-07-30 | 2004-03-23 | Fairchild Semiconductor Corporation | Dual trench power MOSFET |
US6916745B2 (en) | 2003-05-20 | 2005-07-12 | Fairchild Semiconductor Corporation | Structure and method for forming a trench MOSFET having self-aligned features |
US6713813B2 (en) | 2001-01-30 | 2004-03-30 | Fairchild Semiconductor Corporation | Field effect transistor having a lateral depletion structure |
KR100393201B1 (ko) * | 2001-04-16 | 2003-07-31 | 페어차일드코리아반도체 주식회사 | 낮은 온 저항과 높은 브레이크다운 전압을 갖는 고전압수평형 디모스 트랜지스터 |
GB2380056B (en) * | 2001-05-11 | 2005-06-15 | Fuji Electric Co Ltd | Lateral semiconductor device |
GB0119215D0 (en) * | 2001-08-07 | 2001-09-26 | Koninkl Philips Electronics Nv | Trench bipolar transistor |
US7221011B2 (en) * | 2001-09-07 | 2007-05-22 | Power Integrations, Inc. | High-voltage vertical transistor with a multi-gradient drain doping profile |
US6635544B2 (en) | 2001-09-07 | 2003-10-21 | Power Intergrations, Inc. | Method of fabricating a high-voltage transistor with a multi-layered extended drain structure |
US7786533B2 (en) * | 2001-09-07 | 2010-08-31 | Power Integrations, Inc. | High-voltage vertical transistor with edge termination structure |
US6555873B2 (en) | 2001-09-07 | 2003-04-29 | Power Integrations, Inc. | High-voltage lateral transistor with a multi-layered extended drain structure |
US6573558B2 (en) | 2001-09-07 | 2003-06-03 | Power Integrations, Inc. | High-voltage vertical transistor with a multi-layered extended drain structure |
US6600182B2 (en) * | 2001-09-26 | 2003-07-29 | Vladimir Rumennik | High current field-effect transistor |
US6555883B1 (en) | 2001-10-29 | 2003-04-29 | Power Integrations, Inc. | Lateral power MOSFET for high switching speeds |
US6777746B2 (en) * | 2002-03-27 | 2004-08-17 | Kabushiki Kaisha Toshiba | Field effect transistor and application device thereof |
JP3944461B2 (ja) * | 2002-03-27 | 2007-07-11 | 株式会社東芝 | 電界効果型トランジスタおよびその応用装置 |
US6768180B2 (en) * | 2002-04-04 | 2004-07-27 | C. Andre T. Salama | Superjunction LDMOST using an insulator substrate for power integrated circuits |
AU2003258948A1 (en) * | 2002-06-19 | 2004-01-06 | The Board Of Trustees Of The Leland Stanford Junior University | Insulated-gate semiconductor device and approach involving junction-induced intermediate region |
US6589845B1 (en) | 2002-07-16 | 2003-07-08 | Semiconductor Components Industries Llc | Method of forming a semiconductor device and structure therefor |
US7719054B2 (en) * | 2006-05-31 | 2010-05-18 | Advanced Analogic Technologies, Inc. | High-voltage lateral DMOS device |
DE10245550B4 (de) * | 2002-09-30 | 2007-08-16 | Infineon Technologies Ag | Kompensationsbauelement und Verfahren zu dessen Herstellung |
US7576388B1 (en) | 2002-10-03 | 2009-08-18 | Fairchild Semiconductor Corporation | Trench-gate LDMOS structures |
US6710418B1 (en) | 2002-10-11 | 2004-03-23 | Fairchild Semiconductor Corporation | Schottky rectifier with insulation-filled trenches and method of forming the same |
DE10309400B4 (de) * | 2003-03-04 | 2009-07-30 | Infineon Technologies Ag | Halbleiterbauelement mit erhöhter Spannungsfestigkeit und/oder verringertem Einschaltwiderstand |
US7638841B2 (en) | 2003-05-20 | 2009-12-29 | Fairchild Semiconductor Corporation | Power semiconductor devices and methods of manufacture |
DE10325748B4 (de) * | 2003-06-06 | 2008-10-02 | Infineon Technologies Ag | Sperrschicht-Feldeffekttransistor (JFET) mit Kompensationsstruktur und Feldstoppzone |
JP4194890B2 (ja) | 2003-06-24 | 2008-12-10 | 株式会社豊田中央研究所 | 半導体装置とその製造方法 |
DE10337457B3 (de) * | 2003-08-14 | 2005-01-20 | Infineon Technologies Ag | Transistorbauelement mit verbessertem Rückstromverhalten |
KR100994719B1 (ko) | 2003-11-28 | 2010-11-16 | 페어차일드코리아반도체 주식회사 | 슈퍼정션 반도체장치 |
US7368777B2 (en) | 2003-12-30 | 2008-05-06 | Fairchild Semiconductor Corporation | Accumulation device with charge balance structure and method of forming the same |
DE102004009521B4 (de) * | 2004-02-27 | 2020-06-10 | Austriamicrosystems Ag | Hochvolt-PMOS-Transistor, Maske zur Herstellung einer Wanne und Verfahren zur Herstellung eines Hochvolt-PMOS-Transistors |
US7126166B2 (en) * | 2004-03-11 | 2006-10-24 | Semiconductor Components Industries, L.L.C. | High voltage lateral FET structure with improved on resistance performance |
US7352036B2 (en) | 2004-08-03 | 2008-04-01 | Fairchild Semiconductor Corporation | Semiconductor power device having a top-side drain using a sinker trench |
JP4967236B2 (ja) * | 2004-08-04 | 2012-07-04 | 富士電機株式会社 | 半導体素子 |
WO2006082568A2 (en) * | 2005-02-07 | 2006-08-10 | Nxp B.V. | Method of manufacturing a lateral semiconductor device |
JP4923416B2 (ja) * | 2005-03-08 | 2012-04-25 | 富士電機株式会社 | 超接合半導体装置 |
CN101882583A (zh) | 2005-04-06 | 2010-11-10 | 飞兆半导体公司 | 沟栅场效应晶体管及其形成方法 |
US7489018B2 (en) * | 2005-04-19 | 2009-02-10 | Kabushiki Kaisha Toshiba | Transistor |
US7276766B2 (en) * | 2005-08-01 | 2007-10-02 | Semiconductor Components Industries, L.L.C. | Semiconductor structure with improved on resistance and breakdown voltage performance |
US7381603B2 (en) * | 2005-08-01 | 2008-06-03 | Semiconductor Components Industries, L.L.C. | Semiconductor structure with improved on resistance and breakdown voltage performance |
JP4534041B2 (ja) * | 2005-08-02 | 2010-09-01 | 株式会社デンソー | 半導体装置の製造方法 |
CN100369264C (zh) * | 2005-08-26 | 2008-02-13 | 东南大学 | 三维多栅高压n型横向双扩散金属氧化物半导体管 |
CN100369265C (zh) * | 2005-08-26 | 2008-02-13 | 东南大学 | 三维多栅高压p型横向双扩散金属氧化物半导体管 |
KR100628250B1 (ko) * | 2005-09-28 | 2006-09-27 | 동부일렉트로닉스 주식회사 | 전력용 반도체 소자 및 그의 제조방법 |
DE102006045912B4 (de) * | 2005-09-29 | 2011-07-21 | Sumco Corp. | Verfahren zur Fertigung einer Halbleitervorrichtung und Epitaxialwachstumseinrichtung |
KR101111720B1 (ko) * | 2005-10-12 | 2012-02-15 | 삼성엘이디 주식회사 | 활성층 상에 유전체층이 형성된 측면 발광형 반도체 레이저다이오드 |
US7378317B2 (en) * | 2005-12-14 | 2008-05-27 | Freescale Semiconductor, Inc. | Superjunction power MOSFET |
US7473976B2 (en) * | 2006-02-16 | 2009-01-06 | Fairchild Semiconductor Corporation | Lateral power transistor with self-biasing electrodes |
US7446374B2 (en) | 2006-03-24 | 2008-11-04 | Fairchild Semiconductor Corporation | High density trench FET with integrated Schottky diode and method of manufacture |
US7355224B2 (en) * | 2006-06-16 | 2008-04-08 | Fairchild Semiconductor Corporation | High voltage LDMOS |
US7319256B1 (en) | 2006-06-19 | 2008-01-15 | Fairchild Semiconductor Corporation | Shielded gate trench FET with the shield and gate electrodes being connected together |
US7651918B2 (en) * | 2006-08-25 | 2010-01-26 | Freescale Semiconductor, Inc. | Strained semiconductor power device and method |
US7510938B2 (en) * | 2006-08-25 | 2009-03-31 | Freescale Semiconductor, Inc. | Semiconductor superjunction structure |
US7598517B2 (en) * | 2006-08-25 | 2009-10-06 | Freescale Semiconductor, Inc. | Superjunction trench device and method |
US7531888B2 (en) * | 2006-11-30 | 2009-05-12 | Fairchild Semiconductor Corporation | Integrated latch-up free insulated gate bipolar transistor |
US7795671B2 (en) * | 2007-01-04 | 2010-09-14 | Fairchild Semiconductor Corporation | PN junction and MOS capacitor hybrid RESURF transistor |
US8653583B2 (en) | 2007-02-16 | 2014-02-18 | Power Integrations, Inc. | Sensing FET integrated with a high-voltage transistor |
US7595523B2 (en) | 2007-02-16 | 2009-09-29 | Power Integrations, Inc. | Gate pullback at ends of high-voltage vertical transistor structure |
US7468536B2 (en) | 2007-02-16 | 2008-12-23 | Power Integrations, Inc. | Gate metal routing for transistor with checkerboarded layout |
US7859037B2 (en) | 2007-02-16 | 2010-12-28 | Power Integrations, Inc. | Checkerboarded high-voltage vertical transistor layout |
US7557406B2 (en) | 2007-02-16 | 2009-07-07 | Power Integrations, Inc. | Segmented pillar layout for a high-voltage vertical transistor |
US8587055B2 (en) * | 2007-02-23 | 2013-11-19 | Infineon Technologies Ag | Integrated circuit using a superjunction semiconductor device |
DE102007034802B8 (de) * | 2007-03-26 | 2012-11-29 | X-Fab Semiconductor Foundries Ag | Lateraler Hochvolt-MOS-Transistor mit RESURF-Struktur |
JP4416007B2 (ja) * | 2007-05-17 | 2010-02-17 | 株式会社デンソー | 半導体装置 |
JP5217257B2 (ja) | 2007-06-06 | 2013-06-19 | 株式会社デンソー | 半導体装置およびその製造方法 |
CN101868856B (zh) | 2007-09-21 | 2014-03-12 | 飞兆半导体公司 | 用于功率器件的超结结构及制造方法 |
JP5298488B2 (ja) | 2007-09-28 | 2013-09-25 | 富士電機株式会社 | 半導体装置 |
EP2058862B1 (de) * | 2007-11-09 | 2018-09-19 | ams AG | Feldeffekttransistor und Verfahren zur Herstellung eines Feldeffekttransistors |
US7772668B2 (en) * | 2007-12-26 | 2010-08-10 | Fairchild Semiconductor Corporation | Shielded gate trench FET with multiple channels |
US20120273916A1 (en) | 2011-04-27 | 2012-11-01 | Yedinak Joseph A | Superjunction Structures for Power Devices and Methods of Manufacture |
US8174067B2 (en) | 2008-12-08 | 2012-05-08 | Fairchild Semiconductor Corporation | Trench-based power semiconductor devices with increased breakdown voltage characteristics |
US9508805B2 (en) | 2008-12-31 | 2016-11-29 | Alpha And Omega Semiconductor Incorporated | Termination design for nanotube MOSFET |
US8299494B2 (en) | 2009-06-12 | 2012-10-30 | Alpha & Omega Semiconductor, Inc. | Nanotube semiconductor devices |
US7910486B2 (en) * | 2009-06-12 | 2011-03-22 | Alpha & Omega Semiconductor, Inc. | Method for forming nanotube semiconductor devices |
WO2011023922A1 (en) * | 2009-08-28 | 2011-03-03 | X-Fab Semiconductor Foundries Ag | Improved pn junctions and methods |
GB0915501D0 (en) * | 2009-09-04 | 2009-10-07 | Univ Warwick | Organic photosensitive optoelectronic devices |
US8492233B2 (en) * | 2009-09-16 | 2013-07-23 | Texas Instruments Incorporated | Configurable NP channel lateral drain extended MOS-based transistor |
CN102804386B (zh) | 2010-01-29 | 2016-07-06 | 富士电机株式会社 | 半导体器件 |
WO2011107141A1 (en) * | 2010-03-01 | 2011-09-09 | X-Fab Semiconductor Foundries Ag | High voltage mos transistor |
JP2011233701A (ja) | 2010-04-27 | 2011-11-17 | Toshiba Corp | 電力用半導体素子 |
US8299527B2 (en) * | 2010-05-06 | 2012-10-30 | International Rectifier Corporation | Vertical LDMOS device and method for fabricating same |
US8432000B2 (en) | 2010-06-18 | 2013-04-30 | Fairchild Semiconductor Corporation | Trench MOS barrier schottky rectifier with a planar surface using CMP techniques |
CN101916780A (zh) * | 2010-07-22 | 2010-12-15 | 中国科学院上海微系统与信息技术研究所 | 一种具有多层超结结构的ldmos器件 |
US8878295B2 (en) * | 2011-04-13 | 2014-11-04 | National Semiconductor Corporation | DMOS transistor with a slanted super junction drift structure |
US8772868B2 (en) | 2011-04-27 | 2014-07-08 | Fairchild Semiconductor Corporation | Superjunction structures for power devices and methods of manufacture |
US8786010B2 (en) | 2011-04-27 | 2014-07-22 | Fairchild Semiconductor Corporation | Superjunction structures for power devices and methods of manufacture |
US8836028B2 (en) | 2011-04-27 | 2014-09-16 | Fairchild Semiconductor Corporation | Superjunction structures for power devices and methods of manufacture |
US8673700B2 (en) | 2011-04-27 | 2014-03-18 | Fairchild Semiconductor Corporation | Superjunction structures for power devices and methods of manufacture |
JP5692616B2 (ja) | 2011-05-17 | 2015-04-01 | トヨタ自動車株式会社 | 半導体装置 |
JP5915076B2 (ja) | 2011-10-21 | 2016-05-11 | 富士電機株式会社 | 超接合半導体装置 |
JP5920970B2 (ja) | 2011-11-30 | 2016-05-24 | ローム株式会社 | 半導体装置 |
US8836029B2 (en) * | 2012-02-29 | 2014-09-16 | Smsc Holdings S.A.R.L. | Transistor with minimized resistance |
CN104254920B (zh) | 2012-07-19 | 2017-03-08 | 富士电机株式会社 | 半导体装置及半导体装置的制造方法 |
JPWO2014112239A1 (ja) | 2013-01-16 | 2017-01-19 | 富士電機株式会社 | 半導体素子 |
EP3024018B1 (de) * | 2013-07-19 | 2018-08-08 | Nissan Motor Co., Ltd | Halbleiterbauelement |
US20150137229A1 (en) * | 2013-11-15 | 2015-05-21 | Vanguard International Semiconductor Corporation | Semiconductor device and method for fabricating the same |
US9543396B2 (en) | 2013-12-13 | 2017-01-10 | Power Integrations, Inc. | Vertical transistor device structure with cylindrically-shaped regions |
US10325988B2 (en) | 2013-12-13 | 2019-06-18 | Power Integrations, Inc. | Vertical transistor device structure with cylindrically-shaped field plates |
US10566192B2 (en) * | 2014-05-07 | 2020-02-18 | Cambridge Electronics, Inc. | Transistor structure having buried island regions |
JP6323556B2 (ja) | 2014-07-04 | 2018-05-16 | 富士電機株式会社 | 半導体装置 |
US9171949B1 (en) | 2014-09-24 | 2015-10-27 | Alpha And Omega Semiconductor Incorporated | Semiconductor device including superjunction structure formed using angled implant process |
US9450045B1 (en) | 2015-06-23 | 2016-09-20 | Alpha And Omega Semiconductor Incorporated | Method for forming lateral super-junction structure |
US9312381B1 (en) | 2015-06-23 | 2016-04-12 | Alpha And Omega Semiconductor Incorporated | Lateral super-junction MOSFET device and termination structure |
US10186573B2 (en) * | 2015-09-14 | 2019-01-22 | Maxpower Semiconductor, Inc. | Lateral power MOSFET with non-horizontal RESURF structure |
JP6747195B2 (ja) | 2016-09-08 | 2020-08-26 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
DE102017131274B3 (de) * | 2017-12-22 | 2019-05-09 | Infineon Technologies Dresden Gmbh | Transistoranordnung und verfahren zu deren herstellung |
US10103239B1 (en) * | 2017-12-28 | 2018-10-16 | Vanguard International Semiconductor Corporation | High electron mobility transistor structure |
US10644102B2 (en) | 2017-12-28 | 2020-05-05 | Alpha And Omega Semiconductor (Cayman) Ltd. | SGT superjunction MOSFET structure |
US10580868B2 (en) | 2018-03-27 | 2020-03-03 | Alpha And Omega Semiconductor (Cayman) Ltd. | Super-junction corner and termination structure with improved breakdown and robustness |
JP7092188B2 (ja) | 2018-04-19 | 2022-06-28 | 日産自動車株式会社 | 半導体装置及びその製造方法 |
US11552193B2 (en) | 2020-12-31 | 2023-01-10 | Semiconductor Components Industries, Llc | Semiconductor device |
US11810976B2 (en) | 2021-02-18 | 2023-11-07 | Semiconductor Components Industries, Llc | Semiconductor device |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2089119A (en) * | 1980-12-10 | 1982-06-16 | Philips Electronic Associated | High voltage semiconductor devices |
US4626879A (en) * | 1982-12-21 | 1986-12-02 | North American Philips Corporation | Lateral double-diffused MOS transistor devices suitable for source-follower applications |
US4622569A (en) * | 1984-06-08 | 1986-11-11 | Eaton Corporation | Lateral bidirectional power FET with notched multi-channel stacking and with dual gate reference terminal means |
JPH0644578B2 (ja) * | 1984-12-21 | 1994-06-08 | 三菱電機株式会社 | 電荷転送素子 |
US5264719A (en) * | 1986-01-07 | 1993-11-23 | Harris Corporation | High voltage lateral semiconductor device |
US4899201A (en) * | 1987-08-14 | 1990-02-06 | Regents Of The University Of Minnesota | Electronic and optoelectric devices utilizing light hole properties |
DE3804569C1 (de) * | 1988-02-13 | 1989-06-22 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt, De | |
CN1019720B (zh) * | 1991-03-19 | 1992-12-30 | 电子科技大学 | 半导体功率器件 |
US5294824A (en) * | 1992-07-31 | 1994-03-15 | Motorola, Inc. | High voltage transistor having reduced on-resistance |
JP3217554B2 (ja) | 1993-09-17 | 2001-10-09 | 株式会社東芝 | 高耐圧半導体装置 |
DE4309764C2 (de) * | 1993-03-25 | 1997-01-30 | Siemens Ag | Leistungs-MOSFET |
JP3332114B2 (ja) | 1994-03-08 | 2002-10-07 | 株式会社東芝 | 高耐圧電界効果トランジスタ |
WO1997049132A1 (en) * | 1996-06-20 | 1997-12-24 | Jeffrey Frey | Light-emitting semiconductor device |
-
1997
- 1997-01-21 US US08/786,473 patent/US6097063A/en not_active Expired - Lifetime
- 1997-01-21 GB GB9701204A patent/GB2309336B/en not_active Expired - Fee Related
- 1997-01-22 DE DE19702102A patent/DE19702102B4/de not_active Expired - Lifetime
-
2000
- 2000-05-30 US US09/583,016 patent/US6627948B1/en not_active Expired - Lifetime
- 2000-05-30 US US09/580,643 patent/US6294818B1/en not_active Expired - Lifetime
Cited By (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000016407A2 (de) * | 1998-09-11 | 2000-03-23 | Infineon Technologies Ag | Geschaltetes netzteil mit reduzierten schaltverlusten |
WO2000016407A3 (de) * | 1998-09-11 | 2000-11-09 | Siemens Ag | Geschaltetes netzteil mit reduzierten schaltverlusten |
US6388287B2 (en) | 1998-09-11 | 2002-05-14 | Infineon Technologies Ag | Switch mode power supply with reduced switching losses |
USRE40352E1 (en) * | 1998-09-11 | 2008-06-03 | Infineon Technologies Ag | Switch mode power supply with reduced switching losses |
WO2000033386A2 (en) * | 1998-11-28 | 2000-06-08 | Koninklijke Philips Electronics N.V. | Trench-gate semiconductor devices and their manufacture |
WO2000033386A3 (en) * | 1998-11-28 | 2000-11-16 | Koninkl Philips Electronics Nv | Trench-gate semiconductor devices and their manufacture |
DE19953348B4 (de) * | 1999-11-05 | 2012-03-15 | Infineon Technologies Ag | MOS-Halbleitervorrichtung ohne Latchup eines parasitären Bipolartransistors |
DE10106073A1 (de) * | 2001-02-09 | 2002-08-29 | Infineon Technologies Ag | SOI-Bauelement |
DE10106073C2 (de) * | 2001-02-09 | 2003-01-30 | Infineon Technologies Ag | SOI-Bauelement |
US6873012B2 (en) | 2001-02-09 | 2005-03-29 | Infineon Technologies Ag | SOI component |
DE10303232B4 (de) * | 2002-01-31 | 2015-04-02 | Infineon Technologies Ag | Hochvolt-MOS-Feldeffekttransistor |
KR100825466B1 (ko) | 2004-08-06 | 2008-04-28 | 오스트리아마이크로시스템즈 아게 | 고전압 nmos 트랜지스터 및 그것의 제조 방법 |
WO2006015822A3 (de) * | 2004-08-06 | 2006-07-27 | Austriamicrosystems Ag | Hochvolt-nmos-transistor und herstellungsverfahren |
US7898030B2 (en) | 2004-08-06 | 2011-03-01 | Austriamicrosystems Ag | High-voltage NMOS-transistor and associated production method |
DE102004038369A1 (de) | 2004-08-06 | 2006-03-16 | Austriamicrosystems Ag | Hochvolt-NMOS-Transistor |
WO2006015822A2 (de) * | 2004-08-06 | 2006-02-16 | Austriamicrosystems Ag | Hochvolt-nmos-transistor und herstellungsverfahren |
DE102004038369B4 (de) | 2004-08-06 | 2018-04-05 | Austriamicrosystems Ag | Hochvolt-NMOS-Transistor und Herstellungsverfahren |
DE102004047772A1 (de) * | 2004-09-30 | 2006-04-13 | Infineon Technologies Ag | Lateraler Halbleitertransistor |
DE102004047772B4 (de) * | 2004-09-30 | 2018-12-13 | Infineon Technologies Ag | Lateraler Halbleitertransistor |
DE102004056772B4 (de) * | 2004-11-24 | 2007-01-11 | Infineon Technologies Austria Ag | Laterale Halbleiterbauelemente mit hoher Spannungsfestigkeit und Verfahren zur Herstellung derselben |
DE102004056772A1 (de) * | 2004-11-24 | 2006-06-01 | Infineon Technologies Austria Ag | Laterale Halbleiterbauelemente mit hoher Spannungsfestigkeit und Verfahren zur Herstellung derselben |
DE102005003127B3 (de) * | 2005-01-21 | 2006-06-14 | Infineon Technologies Ag | Laterales Halbleiterbauelement mit hoher Spannungsfestigkeit und Verfahren zur Herstellung desselben |
Also Published As
Publication number | Publication date |
---|---|
DE19702102B4 (de) | 2008-12-11 |
GB2309336B (en) | 2001-05-23 |
GB9701204D0 (en) | 1997-03-12 |
US6294818B1 (en) | 2001-09-25 |
US6097063A (en) | 2000-08-01 |
GB2309336A (en) | 1997-07-23 |
US6627948B1 (en) | 2003-09-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE19702102B4 (de) | Halbleitervorrichtung | |
DE112016003510B4 (de) | HALBLEITERVORRlCHTUNG UND VERFAHREN ZUR HERSTELLUNG EINER HALBLEITERVORRICHTUNG | |
DE19539541B4 (de) | Lateraler Trench-MISFET und Verfahren zu seiner Herstellung | |
DE102007030755B3 (de) | Halbleiterbauelement mit einem einen Graben aufweisenden Randabschluss und Verfahren zur Herstellung eines Randabschlusses | |
DE102008039845B4 (de) | IGBT mit einem Halbleiterkörper | |
DE112014000679B4 (de) | Isolierschichtsiliciumcarbidhalbleiterbauteil und Verfahren zu dessen Herstellung | |
DE60035144T2 (de) | MOS-Gate-Leistungsbauelement hoher Dichte und dessen Herstellungsverfahren | |
DE69628633T2 (de) | Halbleiteranordnung mit isoliertem Gate und Verfahren zur Herstellung | |
DE19848828C2 (de) | Halbleiterbauelement mit kleiner Durchlaßspannung und hoher Sperrfähigkeit | |
DE10216633B4 (de) | Halbleiteranordnung und Verfahren zur Herstellung der Halbleiteranordnung | |
DE4111046C2 (de) | MOS-Einrichtung mit einer als Kanal arbeitenden Anreicherungsschicht | |
DE4405682C2 (de) | Struktur einer Halbleiteranordnung | |
DE102005041838B3 (de) | Halbleiterbauelement mit platzsparendem Randabschluss und Verfahren zur Herstellung eines solchen Bauelements | |
DE10133543A1 (de) | Bidirektionales Halbleiterbauelement und Verfahren zu dessen Herstellung | |
DE10041344A1 (de) | SJ-Halbleitervorrichtung | |
EP0888639A1 (de) | Durch feldeffekt steuerbares halbleiterbauelement | |
DE102011079747A1 (de) | Halbleitervorrichtung mit Schaltelement und Freilaufdiode, sowie Steuerverfahren hierfür | |
DE112016006380B4 (de) | Halbleiterbauelement | |
DE102012206605A1 (de) | Transistoranordnung mit einem mosfet und herstellungsverfahren | |
DE112011100533T5 (de) | Halbleitervorrichtung | |
WO1999056321A1 (de) | Lateraler hochvolt-seitenwandtransistor | |
DE102014119395A1 (de) | Transistorbauelement mit Feldelektrode | |
DE102018100237B4 (de) | Leistungshalbleiterbauelement mit dU/dt Steuerbarkeit und Verfahren zum Herstellen eines Leistungshalbleiterbauelements | |
DE10012610C2 (de) | Vertikales Hochvolt-Halbleiterbauelement | |
DE19641838A1 (de) | Abschlußstruktur für Halbleiterbauteile sowie Verfahren zur Herstellung derartiger Abschlußstrukturen |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8110 | Request for examination paragraph 44 | ||
8128 | New person/name/address of the agent |
Representative=s name: KRAMER - BARSKE - SCHMIDTCHEN, 81245 MUENCHEN |
|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: FUJI ELECTRIC SYSTEMS CO., LTD., TOKYO/TOKIO, JP |
|
R081 | Change of applicant/patentee |
Owner name: FUJI ELECTRIC CO., LTD., KAWASAKI-SHI, JP Free format text: FORMER OWNER: FUJI ELECTRIC SYSTEMS CO., LTD., TOKYO/TOKIO, JP Effective date: 20110826 Owner name: FUJI ELECTRIC CO., LTD., JP Free format text: FORMER OWNER: FUJI ELECTRIC SYSTEMS CO., LTD., TOKYO/TOKIO, JP Effective date: 20110826 |
|
R082 | Change of representative |
Representative=s name: KRAMER BARSKE SCHMIDTCHEN PATENTANWAELTE PARTG, DE Effective date: 20110826 Representative=s name: KRAMER - BARSKE - SCHMIDTCHEN, DE Effective date: 20110826 |
|
R071 | Expiry of right |