CN1858911B - Tft阵列面板、包含它的液晶显示器及tft阵列面板制造方法 - Google Patents
Tft阵列面板、包含它的液晶显示器及tft阵列面板制造方法 Download PDFInfo
- Publication number
- CN1858911B CN1858911B CN2006100794529A CN200610079452A CN1858911B CN 1858911 B CN1858911 B CN 1858911B CN 2006100794529 A CN2006100794529 A CN 2006100794529A CN 200610079452 A CN200610079452 A CN 200610079452A CN 1858911 B CN1858911 B CN 1858911B
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- CN
- China
- Prior art keywords
- electrode
- photoresist layer
- gate
- gate electrode
- tft array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136209—Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
- H10D30/6723—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device having light shields
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2005-0036798 | 2005-05-02 | ||
| KR1020050036798 | 2005-05-02 | ||
| KR1020050036798A KR101216688B1 (ko) | 2005-05-02 | 2005-05-02 | 박막 트랜지스터 기판 및 이를 포함하는 액정 표시 장치 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1858911A CN1858911A (zh) | 2006-11-08 |
| CN1858911B true CN1858911B (zh) | 2012-05-30 |
Family
ID=37233587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006100794529A Active CN1858911B (zh) | 2005-05-02 | 2006-04-29 | Tft阵列面板、包含它的液晶显示器及tft阵列面板制造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7646023B2 (enExample) |
| JP (1) | JP2006313906A (enExample) |
| KR (1) | KR101216688B1 (enExample) |
| CN (1) | CN1858911B (enExample) |
| TW (1) | TWI420669B (enExample) |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5303119B2 (ja) * | 2007-06-05 | 2013-10-02 | 株式会社ジャパンディスプレイ | 半導体装置 |
| US7738050B2 (en) * | 2007-07-06 | 2010-06-15 | Semiconductor Energy Laboratory Co., Ltd | Liquid crystal display device |
| TWI464510B (zh) * | 2007-07-20 | 2014-12-11 | Semiconductor Energy Lab | 液晶顯示裝置 |
| JP2009049058A (ja) * | 2007-08-14 | 2009-03-05 | Hitachi Displays Ltd | 半導体装置および表示装置 |
| JP5377940B2 (ja) * | 2007-12-03 | 2013-12-25 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| KR101499229B1 (ko) | 2008-04-07 | 2015-03-05 | 삼성디스플레이 주식회사 | 색필터를 포함하는 표시 장치 |
| KR101536194B1 (ko) * | 2008-05-19 | 2015-07-13 | 삼성디스플레이 주식회사 | 액정 표시 장치와 그 구동 방법 |
| KR101889287B1 (ko) * | 2008-09-19 | 2018-08-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치 |
| TWI483038B (zh) | 2008-11-28 | 2015-05-01 | Semiconductor Energy Lab | 液晶顯示裝置 |
| TWI613489B (zh) | 2008-12-03 | 2018-02-01 | 半導體能源研究所股份有限公司 | 液晶顯示裝置 |
| KR101719350B1 (ko) * | 2008-12-25 | 2017-03-23 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
| JP2010206154A (ja) * | 2009-02-09 | 2010-09-16 | Hitachi Displays Ltd | 表示装置 |
| KR101100959B1 (ko) * | 2010-03-10 | 2011-12-29 | 삼성모바일디스플레이주식회사 | 박막 트랜지스터, 그의 제조 방법 및 박막 트랜지스터를 구비하는 표시 장치 |
| TWI464508B (zh) * | 2010-11-22 | 2014-12-11 | Au Optronics Corp | 畫素陣列基板以及顯示面板 |
| US9568794B2 (en) | 2010-12-20 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
| KR20130092848A (ko) * | 2012-02-13 | 2013-08-21 | 삼성전자주식회사 | 박막 트랜지스터 및 이를 채용한 디스플레이 패널 |
| KR101923717B1 (ko) * | 2012-05-24 | 2018-11-30 | 엘지디스플레이 주식회사 | 액정표시장치 어레이 기판 및 그 제조방법 |
| KR102276146B1 (ko) | 2013-09-10 | 2021-07-13 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판 및 이의 제조 방법 |
| KR102254619B1 (ko) | 2013-11-15 | 2021-05-24 | 삼성디스플레이 주식회사 | 표시 기판 및 그의 제조 방법 |
| KR101682079B1 (ko) * | 2013-12-30 | 2016-12-05 | 삼성디스플레이 주식회사 | 표시 장치 및 그 제조 방법 |
| CN104979364B (zh) * | 2014-04-01 | 2018-11-13 | 鸿富锦精密工业(深圳)有限公司 | 显示阵列基板及显示阵列基板的制造方法 |
| TWI582967B (zh) | 2014-04-01 | 2017-05-11 | 鴻海精密工業股份有限公司 | 顯示陣列基板及顯示陣列基板的製造方法 |
| TWI686899B (zh) * | 2014-05-02 | 2020-03-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置、觸控感測器、顯示裝置 |
| JP2016048706A (ja) * | 2014-08-27 | 2016-04-07 | 三菱電機株式会社 | アレイ基板およびその製造方法 |
| US10539839B2 (en) | 2015-02-12 | 2020-01-21 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
| CN104716197B (zh) * | 2015-03-25 | 2019-06-07 | 京东方科技集团股份有限公司 | 一种氧化物薄膜晶体管及制作方法和阵列基板、显示装置 |
| KR102322015B1 (ko) * | 2015-04-07 | 2021-11-05 | 삼성디스플레이 주식회사 | 박막트랜지스터 어레이 기판의 제조 방법 및 그에 따라 제조된 박막 트랜지스터 어레이 기판 |
| TWI576646B (zh) | 2015-04-30 | 2017-04-01 | 群創光電股份有限公司 | 顯示裝置 |
| CN104992948B (zh) * | 2015-06-03 | 2018-07-06 | 京东方科技集团股份有限公司 | 一种薄膜晶体管、阵列基板及其制作方法 |
| JP2017028165A (ja) * | 2015-07-24 | 2017-02-02 | ソニー株式会社 | 表示装置および撮像装置 |
| CN105470268A (zh) | 2016-01-11 | 2016-04-06 | 京东方科技集团股份有限公司 | 一种阵列基板及其制作方法、显示装置 |
| JP6255452B2 (ja) * | 2016-08-08 | 2017-12-27 | 株式会社ジャパンディスプレイ | 表示装置及びその製造方法 |
| KR102621447B1 (ko) * | 2016-08-31 | 2024-01-08 | 엘지디스플레이 주식회사 | 액정 표시장치 |
| CN106449656A (zh) * | 2016-10-26 | 2017-02-22 | 京东方科技集团股份有限公司 | 阵列基板及其制作方法、显示面板和显示装置 |
| KR102263122B1 (ko) | 2017-10-19 | 2021-06-09 | 삼성디스플레이 주식회사 | 트랜지스터 표시판 |
| JP6901382B2 (ja) | 2017-11-29 | 2021-07-14 | パナソニック液晶ディスプレイ株式会社 | 液晶表示パネル |
| CN108598118A (zh) | 2018-04-26 | 2018-09-28 | 京东方科技集团股份有限公司 | 一种显示面板及显示装置 |
| JP7237633B2 (ja) * | 2019-02-14 | 2023-03-13 | 株式会社ジャパンディスプレイ | 表示装置 |
| US11113095B2 (en) | 2019-04-30 | 2021-09-07 | Automation Anywhere, Inc. | Robotic process automation system with separate platform, bot and command class loaders |
| KR20210100795A (ko) * | 2020-02-06 | 2021-08-18 | 삼성디스플레이 주식회사 | 표시 장치 |
| JP7646412B2 (ja) * | 2021-03-26 | 2025-03-17 | 株式会社ジャパンディスプレイ | 表示装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6452129A (en) * | 1987-08-24 | 1989-02-28 | Toshiba Corp | Thin film transistor |
| JPH0449674A (ja) * | 1990-06-19 | 1992-02-19 | Nec Corp | 薄膜トランジスタ |
| JP3264995B2 (ja) * | 1991-09-26 | 2002-03-11 | 株式会社東芝 | 液晶表示装置 |
| JPH09329808A (ja) | 1996-06-13 | 1997-12-22 | Toshiba Corp | 液晶表示装置 |
| JP2000122093A (ja) | 1998-10-20 | 2000-04-28 | Sharp Corp | 反射型液晶表示装置 |
| KR100309209B1 (ko) * | 1999-07-31 | 2001-09-29 | 구본준, 론 위라하디락사 | 액정 표시장치 제조방법 및 그 제조방법에 따른 액정표시장치 |
| JP2002141509A (ja) * | 2000-11-01 | 2002-05-17 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタ及び液晶表示装置 |
| JP2002250913A (ja) | 2001-02-27 | 2002-09-06 | Matsushita Electric Ind Co Ltd | 液晶表示装置とその製造方法 |
| KR100820647B1 (ko) * | 2001-10-29 | 2008-04-08 | 엘지.필립스 엘시디 주식회사 | 반투과 액정 표시 장치용 어레이기판 및 이의 제조방법 |
| TWI261135B (en) * | 2002-05-28 | 2006-09-01 | Chi Mei Optoelectronics Corp | Method for fabricating thin film transistors of a TFT-LCD |
| US7372528B2 (en) * | 2003-06-09 | 2008-05-13 | Samsung Electronics Co., Ltd. | Array substrate, method of manufacturing the same and liquid crystal display apparatus having the same |
| CN100504553C (zh) * | 2004-02-06 | 2009-06-24 | 三星电子株式会社 | 薄膜晶体管阵列面板及包括该薄膜晶体管阵列面板的液晶显示器 |
-
2005
- 2005-05-02 KR KR1020050036798A patent/KR101216688B1/ko not_active Expired - Lifetime
-
2006
- 2006-04-26 TW TW095114885A patent/TWI420669B/zh active
- 2006-04-28 JP JP2006126558A patent/JP2006313906A/ja active Pending
- 2006-04-29 CN CN2006100794529A patent/CN1858911B/zh active Active
- 2006-05-02 US US11/416,934 patent/US7646023B2/en not_active Expired - Fee Related
Non-Patent Citations (1)
| Title |
|---|
| JP特开平5-196950A 1993.08.06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006313906A (ja) | 2006-11-16 |
| KR20060114744A (ko) | 2006-11-08 |
| KR101216688B1 (ko) | 2012-12-31 |
| US20060243979A1 (en) | 2006-11-02 |
| TWI420669B (zh) | 2013-12-21 |
| TW200703660A (en) | 2007-01-16 |
| CN1858911A (zh) | 2006-11-08 |
| US7646023B2 (en) | 2010-01-12 |
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| Date | Code | Title | Description |
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| C06 | Publication | ||
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| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SAMSUNG DISPLAY CO., LTD. Free format text: FORMER OWNER: SAMSUNG ELECTRONICS CO., LTD. Effective date: 20121128 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20121128 Address after: Gyeonggi Do, South Korea Patentee after: Samsung Display Co., Ltd. Address before: Gyeonggi Do, South Korea Patentee before: Samsung Electronics Co., Ltd. |