CN1312591A - 半导体装置、液晶显示装置及其制造方法 - Google Patents
半导体装置、液晶显示装置及其制造方法 Download PDFInfo
- Publication number
- CN1312591A CN1312591A CN01110951A CN01110951A CN1312591A CN 1312591 A CN1312591 A CN 1312591A CN 01110951 A CN01110951 A CN 01110951A CN 01110951 A CN01110951 A CN 01110951A CN 1312591 A CN1312591 A CN 1312591A
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- film
- semiconductor film
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- manufacture method
- semiconductor device
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 275
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 91
- 238000000034 method Methods 0.000 title claims description 88
- 239000010408 film Substances 0.000 claims abstract description 628
- 239000000758 substrate Substances 0.000 claims abstract description 81
- 239000010409 thin film Substances 0.000 claims abstract description 67
- 239000002344 surface layer Substances 0.000 claims abstract description 30
- 239000012535 impurity Substances 0.000 claims description 171
- 239000010410 layer Substances 0.000 claims description 78
- 238000004519 manufacturing process Methods 0.000 claims description 77
- 230000005684 electric field Effects 0.000 claims description 26
- 238000010438 heat treatment Methods 0.000 claims description 26
- 238000005530 etching Methods 0.000 claims description 22
- 238000000746 purification Methods 0.000 claims description 19
- 230000015572 biosynthetic process Effects 0.000 claims description 10
- 230000005669 field effect Effects 0.000 abstract 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 137
- 229920005591 polysilicon Polymers 0.000 description 137
- 229920002120 photoresistant polymer Polymers 0.000 description 100
- 238000005224 laser annealing Methods 0.000 description 38
- 238000005204 segregation Methods 0.000 description 38
- 229910021417 amorphous silicon Inorganic materials 0.000 description 34
- 150000002500 ions Chemical class 0.000 description 34
- 239000011521 glass Substances 0.000 description 29
- 239000012141 concentrate Substances 0.000 description 28
- 238000001312 dry etching Methods 0.000 description 22
- 238000000137 annealing Methods 0.000 description 21
- 239000011229 interlayer Substances 0.000 description 20
- 229910052751 metal Inorganic materials 0.000 description 20
- 239000002184 metal Substances 0.000 description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 18
- 229910052710 silicon Inorganic materials 0.000 description 18
- 239000010703 silicon Substances 0.000 description 18
- 230000000694 effects Effects 0.000 description 14
- 238000002425 crystallisation Methods 0.000 description 13
- 230000008025 crystallization Effects 0.000 description 13
- 238000010586 diagram Methods 0.000 description 13
- -1 phosphonium ion Chemical class 0.000 description 9
- 238000011282 treatment Methods 0.000 description 9
- 239000013078 crystal Substances 0.000 description 8
- 230000004927 fusion Effects 0.000 description 8
- 229910052796 boron Inorganic materials 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 238000004380 ashing Methods 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 238000010276 construction Methods 0.000 description 6
- 238000009413 insulation Methods 0.000 description 6
- 230000001678 irradiating effect Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000003746 surface roughness Effects 0.000 description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 5
- 229910052785 arsenic Inorganic materials 0.000 description 5
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 238000001039 wet etching Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 4
- 230000002950 deficient Effects 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 244000287680 Garcinia dulcis Species 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 244000082204 Phyllostachys viridis Species 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- FKNQFGJONOIPTF-UHFFFAOYSA-N Sodium cation Chemical compound [Na+] FKNQFGJONOIPTF-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- 229910001413 alkali metal ion Inorganic materials 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011403 purification operation Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 235000019592 roughness Nutrition 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66757—Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78636—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with supplementary region or layer for improving the flatness of the device
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Thin Film Transistor (AREA)
- Recrystallisation Techniques (AREA)
- Liquid Crystal (AREA)
Abstract
Description
Claims (15)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP062066/2000 | 2000-03-07 | ||
JP2000062066A JP4057215B2 (ja) | 2000-03-07 | 2000-03-07 | 半導体装置の製造方法および液晶表示装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1312591A true CN1312591A (zh) | 2001-09-12 |
CN1196200C CN1196200C (zh) | 2005-04-06 |
Family
ID=18582125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB011109513A Expired - Fee Related CN1196200C (zh) | 2000-03-07 | 2001-03-07 | 半导体装置的制造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US6812071B2 (zh) |
JP (1) | JP4057215B2 (zh) |
KR (1) | KR100411321B1 (zh) |
CN (1) | CN1196200C (zh) |
TW (1) | TW499763B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100397660C (zh) * | 2001-12-17 | 2008-06-25 | 三星电子株式会社 | 利用多晶硅的薄膜晶体管制造方法 |
CN105097667A (zh) * | 2015-06-24 | 2015-11-25 | 深圳市华星光电技术有限公司 | 低温多晶硅tft基板结构的制作方法及低温多晶硅tft基板结构 |
CN111584362A (zh) * | 2020-05-14 | 2020-08-25 | Tcl华星光电技术有限公司 | 一种半导体器件制程方法、半导体器件及显示面板 |
CN111696851A (zh) * | 2019-03-13 | 2020-09-22 | 东京毅力科创株式会社 | 成膜方法和热处理装置 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4831885B2 (ja) | 2001-04-27 | 2011-12-07 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US7067849B2 (en) | 2001-07-17 | 2006-06-27 | Lg Electronics Inc. | Diode having high brightness and method thereof |
US6949395B2 (en) | 2001-10-22 | 2005-09-27 | Oriol, Inc. | Method of making diode having reflective layer |
US7148520B2 (en) | 2001-10-26 | 2006-12-12 | Lg Electronics Inc. | Diode having vertical structure and method of manufacturing the same |
JP4271413B2 (ja) | 2002-06-28 | 2009-06-03 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2005276944A (ja) * | 2004-03-23 | 2005-10-06 | Sharp Corp | 半導体デバイス、その製造方法および製造装置 |
US20080237593A1 (en) * | 2005-01-07 | 2008-10-02 | Junichiro Nakayama | Semiconductor Device, Method of Fabricating the Same, and Apparatus for Fabricating the Same |
JP2006190897A (ja) * | 2005-01-07 | 2006-07-20 | Sharp Corp | 半導体デバイス、その製造方法および製造装置 |
KR100959579B1 (ko) * | 2005-04-26 | 2010-05-27 | 미쓰이 긴조꾸 고교 가부시키가이샤 | Al-Ni-B 합금 배선 재료 및 그것을 사용한 소자 구조 |
JP4732219B2 (ja) * | 2006-04-03 | 2011-07-27 | 相模サーボ株式会社 | 高純度シリコン製造方法及び高純度シリコン製造装置 |
JP4656441B2 (ja) * | 2007-03-29 | 2011-03-23 | 株式会社日本製鋼所 | 薄膜の結晶化方法および結晶化装置 |
US7781076B2 (en) * | 2007-06-26 | 2010-08-24 | Eastman Kodak Company | Heteropyrene-based semiconductor materials for electronic devices and methods of making the same |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6046022A (ja) * | 1983-08-23 | 1985-03-12 | Sumitomo Electric Ind Ltd | イオン注入用基板の前処理方法 |
JPS62262431A (ja) * | 1986-05-08 | 1987-11-14 | Fujitsu Ltd | 半導体装置の製造方法 |
US5332441A (en) * | 1991-10-31 | 1994-07-26 | International Business Machines Corporation | Apparatus for gettering of particles during plasma processing |
JP3065825B2 (ja) * | 1992-10-21 | 2000-07-17 | 株式会社半導体エネルギー研究所 | レーザー処理方法 |
US5466953A (en) * | 1993-05-28 | 1995-11-14 | Santa Barbara Research Center | Denuded zone field effect photoconductive detector |
US5587045A (en) * | 1995-04-27 | 1996-12-24 | International Business Machines Corporation | Gettering of particles from an electro-negative plasma with insulating chuck |
JP3240263B2 (ja) * | 1995-09-14 | 2001-12-17 | 株式会社東芝 | 不純物濃縮・分析方法およびこれに用いる装置 |
KR100440083B1 (ko) * | 1996-01-23 | 2004-10-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체박막제작방법 |
US6465287B1 (en) * | 1996-01-27 | 2002-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for fabricating a semiconductor device using a metal catalyst and high temperature crystallization |
JPH09213630A (ja) * | 1996-02-05 | 1997-08-15 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法 |
JP3319963B2 (ja) | 1996-11-06 | 2002-09-03 | シャープ株式会社 | 半導体装置の製造方法 |
JPH10200120A (ja) * | 1997-01-10 | 1998-07-31 | Sharp Corp | 半導体装置の製造方法 |
JP3867283B2 (ja) * | 1997-06-06 | 2007-01-10 | 日本テキサス・インスツルメンツ株式会社 | 強誘電体キャパシタの作製方法及び強誘電体メモリ装置の製造方法 |
US5950078A (en) * | 1997-09-19 | 1999-09-07 | Sharp Laboratories Of America, Inc. | Rapid thermal annealing with absorptive layers for thin film transistors on transparent substrates |
US6110649A (en) * | 1997-11-19 | 2000-08-29 | International Business Machines Corporation | Process for manufacture of integrated circuit device |
US6017805A (en) * | 1998-01-26 | 2000-01-25 | Lucent Technologies Inc. | Method of reducing mobile ion contaminants in semiconductor films |
KR100325066B1 (ko) * | 1998-06-30 | 2002-08-14 | 주식회사 현대 디스플레이 테크놀로지 | 박막트랜지스터의제조방법 |
JP2000040828A (ja) | 1998-07-24 | 2000-02-08 | Toshiba Corp | 薄膜トランジスタの製造方法 |
-
2000
- 2000-03-07 JP JP2000062066A patent/JP4057215B2/ja not_active Expired - Fee Related
-
2001
- 2001-03-06 KR KR10-2001-0011351A patent/KR100411321B1/ko not_active IP Right Cessation
- 2001-03-06 TW TW090105088A patent/TW499763B/zh not_active IP Right Cessation
- 2001-03-06 US US09/799,110 patent/US6812071B2/en not_active Expired - Fee Related
- 2001-03-07 CN CNB011109513A patent/CN1196200C/zh not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100397660C (zh) * | 2001-12-17 | 2008-06-25 | 三星电子株式会社 | 利用多晶硅的薄膜晶体管制造方法 |
CN105097667A (zh) * | 2015-06-24 | 2015-11-25 | 深圳市华星光电技术有限公司 | 低温多晶硅tft基板结构的制作方法及低温多晶硅tft基板结构 |
CN111696851A (zh) * | 2019-03-13 | 2020-09-22 | 东京毅力科创株式会社 | 成膜方法和热处理装置 |
CN111584362A (zh) * | 2020-05-14 | 2020-08-25 | Tcl华星光电技术有限公司 | 一种半导体器件制程方法、半导体器件及显示面板 |
CN111584362B (zh) * | 2020-05-14 | 2023-08-22 | Tcl华星光电技术有限公司 | 一种半导体器件制程方法、半导体器件及显示面板 |
Also Published As
Publication number | Publication date |
---|---|
US20010032980A1 (en) | 2001-10-25 |
CN1196200C (zh) | 2005-04-06 |
KR100411321B1 (ko) | 2003-12-18 |
JP4057215B2 (ja) | 2008-03-05 |
JP2001250776A (ja) | 2001-09-14 |
KR20010088393A (ko) | 2001-09-26 |
US6812071B2 (en) | 2004-11-02 |
TW499763B (en) | 2002-08-21 |
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Address after: Tokyo, Japan Co-patentee after: Seiko Epson Corp. Patentee after: Missubishi Electric Co., Ltd. Address before: Tokyo, Japan Co-patentee before: Seiko Epson Corp. Patentee before: Missubishi Electric Co., Ltd. |
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Effective date of registration: 20110117 Address after: Tokyo, Japan, Japan Patentee after: Seiko Epson Corp. Address before: Tokyo, Japan Co-patentee before: Seiko Epson Corp. Patentee before: Missubishi Electric Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |