CN1199285C - 半导体装置 - Google Patents
半导体装置 Download PDFInfo
- Publication number
- CN1199285C CN1199285C CNB011174986A CN01117498A CN1199285C CN 1199285 C CN1199285 C CN 1199285C CN B011174986 A CNB011174986 A CN B011174986A CN 01117498 A CN01117498 A CN 01117498A CN 1199285 C CN1199285 C CN 1199285C
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- CN
- China
- Prior art keywords
- mentioned
- gate electrode
- semiconductor device
- transistor formation
- formation region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/118—Masterslice integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/118—Masterslice integrated circuits
- H01L27/11803—Masterslice integrated circuits using field effect technology
- H01L27/11807—CMOS gate arrays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
Abstract
Description
Claims (13)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000207911A JP4794030B2 (ja) | 2000-07-10 | 2000-07-10 | 半導体装置 |
JP207911/2000 | 2000-07-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1333567A CN1333567A (zh) | 2002-01-30 |
CN1199285C true CN1199285C (zh) | 2005-04-27 |
Family
ID=18704594
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB011174986A Expired - Fee Related CN1199285C (zh) | 2000-07-10 | 2001-05-10 | 半导体装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US6635935B2 (zh) |
JP (1) | JP4794030B2 (zh) |
KR (1) | KR100392715B1 (zh) |
CN (1) | CN1199285C (zh) |
TW (1) | TW490807B (zh) |
Families Citing this family (59)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7053424B2 (en) * | 2002-10-31 | 2006-05-30 | Yamaha Corporation | Semiconductor integrated circuit device and its manufacture using automatic layout |
KR100577610B1 (ko) | 2003-07-15 | 2006-05-10 | 삼성전자주식회사 | 반도체 장치, 반도체 장치의 제조 방법 및 에스램 장치,에스램 장치 제조 방법. |
JP4620942B2 (ja) * | 2003-08-21 | 2011-01-26 | 川崎マイクロエレクトロニクス株式会社 | 半導体集積回路のレイアウト方法、そのレイアウト構造、およびフォトマスク |
JP4599048B2 (ja) * | 2003-10-02 | 2010-12-15 | 川崎マイクロエレクトロニクス株式会社 | 半導体集積回路のレイアウト構造、半導体集積回路のレイアウト方法、およびフォトマスク |
JP2005243928A (ja) * | 2004-02-26 | 2005-09-08 | Fujitsu Ltd | トレンチアイソレーションで分離されたトランジスタ対を有する半導体装置 |
JP2005268610A (ja) * | 2004-03-19 | 2005-09-29 | Matsushita Electric Ind Co Ltd | スタンダードセルの設計方法及び半導体集積回路 |
JP4248451B2 (ja) | 2004-06-11 | 2009-04-02 | パナソニック株式会社 | 半導体装置およびそのレイアウト設計方法 |
JP4778689B2 (ja) * | 2004-06-16 | 2011-09-21 | パナソニック株式会社 | 標準セル、標準セルライブラリおよび半導体集積回路 |
JP4175649B2 (ja) | 2004-07-22 | 2008-11-05 | 松下電器産業株式会社 | 半導体装置 |
JP2007043049A (ja) | 2004-12-20 | 2007-02-15 | Matsushita Electric Ind Co Ltd | セル、スタンダードセル、スタンダードセル配置方法、スタンダードセルライブラリ、ならびに半導体集積回路 |
KR100610022B1 (ko) * | 2005-01-18 | 2006-08-08 | 삼성전자주식회사 | 반도체 메모리 장치 |
JP2007012855A (ja) * | 2005-06-30 | 2007-01-18 | Matsushita Electric Ind Co Ltd | 半導体集積回路、標準セル、標準セルライブラリ、半導体集積回路の設計方法および半導体集積回路の設計装置 |
JP4832823B2 (ja) * | 2005-07-21 | 2011-12-07 | パナソニック株式会社 | 半導体記憶装置およびromデータパターンの発生方法 |
JP4796817B2 (ja) * | 2005-10-31 | 2011-10-19 | エルピーダメモリ株式会社 | 基本セル設計方法、レイアウト設計方法、設計装置およびプログラム |
JP2007129094A (ja) * | 2005-11-04 | 2007-05-24 | Rohm Co Ltd | 半導体装置 |
JP5091462B2 (ja) * | 2006-01-19 | 2012-12-05 | パナソニック株式会社 | セルおよび半導体装置 |
US7763534B2 (en) | 2007-10-26 | 2010-07-27 | Tela Innovations, Inc. | Methods, structures and designs for self-aligning local interconnects used in integrated circuits |
US8245180B2 (en) | 2006-03-09 | 2012-08-14 | Tela Innovations, Inc. | Methods for defining and using co-optimized nanopatterns for integrated circuit design and apparatus implementing same |
US8247846B2 (en) | 2006-03-09 | 2012-08-21 | Tela Innovations, Inc. | Oversized contacts and vias in semiconductor chip defined by linearly constrained topology |
US8658542B2 (en) | 2006-03-09 | 2014-02-25 | Tela Innovations, Inc. | Coarse grid design methods and structures |
US9563733B2 (en) | 2009-05-06 | 2017-02-07 | Tela Innovations, Inc. | Cell circuit and layout with linear finfet structures |
US8653857B2 (en) | 2006-03-09 | 2014-02-18 | Tela Innovations, Inc. | Circuitry and layouts for XOR and XNOR logic |
US9009641B2 (en) | 2006-03-09 | 2015-04-14 | Tela Innovations, Inc. | Circuits with linear finfet structures |
US8839175B2 (en) * | 2006-03-09 | 2014-09-16 | Tela Innovations, Inc. | Scalable meta-data objects |
US8541879B2 (en) | 2007-12-13 | 2013-09-24 | Tela Innovations, Inc. | Super-self-aligned contacts and method for making the same |
US8225239B2 (en) | 2006-03-09 | 2012-07-17 | Tela Innovations, Inc. | Methods for defining and utilizing sub-resolution features in linear topology |
US8448102B2 (en) | 2006-03-09 | 2013-05-21 | Tela Innovations, Inc. | Optimizing layout of irregular structures in regular layout context |
US8225261B2 (en) | 2006-03-09 | 2012-07-17 | Tela Innovations, Inc. | Methods for defining contact grid in dynamic array architecture |
US7956421B2 (en) | 2008-03-13 | 2011-06-07 | Tela Innovations, Inc. | Cross-coupled transistor layouts in restricted gate level layout architecture |
US7446352B2 (en) | 2006-03-09 | 2008-11-04 | Tela Innovations, Inc. | Dynamic array architecture |
US9230910B2 (en) | 2006-03-09 | 2016-01-05 | Tela Innovations, Inc. | Oversized contacts and vias in layout defined by linearly constrained topology |
US9035359B2 (en) | 2006-03-09 | 2015-05-19 | Tela Innovations, Inc. | Semiconductor chip including region including linear-shaped conductive structures forming gate electrodes and having electrical connection areas arranged relative to inner region between transistors of different types and associated methods |
US7321139B2 (en) * | 2006-05-26 | 2008-01-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Transistor layout for standard cell with optimized mechanical stress effect |
US7873929B2 (en) * | 2006-08-14 | 2011-01-18 | The Regents Of The University Of California | Method, apparatus and system for designing an integrated circuit including generating at least one auxiliary pattern for cell-based optical proximity correction |
US8286107B2 (en) | 2007-02-20 | 2012-10-09 | Tela Innovations, Inc. | Methods and systems for process compensation technique acceleration |
US7888705B2 (en) | 2007-08-02 | 2011-02-15 | Tela Innovations, Inc. | Methods for defining dynamic array section with manufacturing assurance halo and apparatus implementing the same |
US8667443B2 (en) | 2007-03-05 | 2014-03-04 | Tela Innovations, Inc. | Integrated circuit cell library for multiple patterning |
US8053346B2 (en) * | 2007-04-30 | 2011-11-08 | Hynix Semiconductor Inc. | Semiconductor device and method of forming gate and metal line thereof with dummy pattern and auxiliary pattern |
JP2009170807A (ja) * | 2008-01-18 | 2009-07-30 | Elpida Memory Inc | ダミーゲートパターンを備える半導体装置 |
US8453094B2 (en) | 2008-01-31 | 2013-05-28 | Tela Innovations, Inc. | Enforcement of semiconductor structure regularity for localized transistors and interconnect |
US7939443B2 (en) | 2008-03-27 | 2011-05-10 | Tela Innovations, Inc. | Methods for multi-wire routing and apparatus implementing same |
US20110075387A1 (en) * | 2008-05-21 | 2011-03-31 | Homer Steven S | Strain Measurement Chips For Printed Circuit Boards |
SG10201608214SA (en) | 2008-07-16 | 2016-11-29 | Tela Innovations Inc | Methods for cell phasing and placement in dynamic array architecture and implementation of the same |
US9122832B2 (en) | 2008-08-01 | 2015-09-01 | Tela Innovations, Inc. | Methods for controlling microloading variation in semiconductor wafer layout and fabrication |
US7750400B2 (en) * | 2008-08-15 | 2010-07-06 | Texas Instruments Incorporated | Integrated circuit modeling, design, and fabrication based on degradation mechanisms |
JP5147654B2 (ja) * | 2008-11-18 | 2013-02-20 | パナソニック株式会社 | 半導体装置 |
JP4947064B2 (ja) * | 2009-01-09 | 2012-06-06 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
JP5537078B2 (ja) * | 2009-07-23 | 2014-07-02 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JPWO2011039792A1 (ja) * | 2009-09-29 | 2013-02-21 | 株式会社東芝 | 半導体装置 |
US8661392B2 (en) | 2009-10-13 | 2014-02-25 | Tela Innovations, Inc. | Methods for cell boundary encroachment and layouts implementing the Same |
US9159627B2 (en) | 2010-11-12 | 2015-10-13 | Tela Innovations, Inc. | Methods for linewidth modification and apparatus implementing the same |
US9123562B2 (en) * | 2011-09-19 | 2015-09-01 | Texas Instruments Incorporated | Layout method to minimize context effects and die area |
US20130320451A1 (en) | 2012-06-01 | 2013-12-05 | Taiwan Semiconductor Manufacturing Company, Ltd., ("Tsmc") | Semiconductor device having non-orthogonal element |
CN103633047B (zh) * | 2012-08-29 | 2016-12-21 | 瑞昱半导体股份有限公司 | 一种电子装置 |
US9123565B2 (en) | 2012-12-31 | 2015-09-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Masks formed based on integrated circuit layout design having standard cell that includes extended active region |
US9292647B2 (en) * | 2014-01-24 | 2016-03-22 | Globalfoundries Inc. | Method and apparatus for modified cell architecture and the resulting device |
CN108701653B (zh) * | 2016-02-25 | 2022-07-29 | 株式会社索思未来 | 半导体集成电路装置 |
US11094695B2 (en) * | 2019-05-17 | 2021-08-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated circuit device and method of forming the same |
CN112864162B (zh) * | 2021-03-02 | 2022-07-19 | 长江存储科技有限责任公司 | 一种页缓冲器、场效应晶体管及三维存储器 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5943824B2 (ja) * | 1982-03-03 | 1984-10-24 | 三菱電機株式会社 | 半導体集積回路装置 |
JPH0828480B2 (ja) * | 1983-09-30 | 1996-03-21 | 富士通株式会社 | 半導体集積回路装置 |
JPS63278248A (ja) * | 1987-03-13 | 1988-11-15 | Fujitsu Ltd | ゲ−トアレイの基本セル |
JPH01199451A (ja) * | 1988-02-03 | 1989-08-10 | Ricoh Co Ltd | スタンダードセル方式による半導体集積回路 |
US5079614A (en) * | 1990-09-26 | 1992-01-07 | S-Mos Systems, Inc. | Gate array architecture with basic cell interleaved gate electrodes |
JPH04340747A (ja) * | 1991-05-17 | 1992-11-27 | Fujitsu Ltd | 半導体集積回路装置 |
JP3132582B2 (ja) * | 1991-07-12 | 2001-02-05 | 日本電気株式会社 | 半導体装置 |
JPH05165061A (ja) * | 1991-12-17 | 1993-06-29 | Sony Corp | 液晶表示装置 |
DE69324637T2 (de) * | 1992-07-31 | 1999-12-30 | Hughes Electronics Corp | Sicherheitssystem für integrierte Schaltung und Verfahren mit implantierten Leitungen |
JP3257887B2 (ja) * | 1993-12-16 | 2002-02-18 | 三菱電機株式会社 | 半導体装置 |
US5847429A (en) * | 1995-07-31 | 1998-12-08 | Integrated Device Technology, Inc. | Multiple node ESD devices |
JP3072707B2 (ja) * | 1995-10-31 | 2000-08-07 | インターナショナル・ビジネス・マシーンズ・コーポレ−ション | 液晶表示装置及びその製造方法 |
JPH09289251A (ja) | 1996-04-23 | 1997-11-04 | Matsushita Electric Ind Co Ltd | 半導体集積回路のレイアウト構造およびその検証方法 |
JPH1074843A (ja) * | 1996-06-28 | 1998-03-17 | Toshiba Corp | 多電源集積回路および多電源集積回路システム |
JP3420694B2 (ja) * | 1996-12-27 | 2003-06-30 | 株式会社東芝 | スタンダードセル方式の集積回路 |
JP2000504504A (ja) * | 1997-02-12 | 2000-04-11 | ヒュンダイ エレクトロニクス アメリカ インコーポレイテッド | 不揮発性メモリ構造 |
US5889310A (en) * | 1997-04-21 | 1999-03-30 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device with high breakdown voltage island region |
JPH113943A (ja) * | 1997-06-11 | 1999-01-06 | Seiko Epson Corp | 半導体装置及び半導体設計手法 |
KR100316060B1 (ko) * | 1998-06-16 | 2002-02-19 | 박종섭 | 플래시메모리의레이아웃및그형성방법 |
JP2000112114A (ja) * | 1998-10-08 | 2000-04-21 | Hitachi Ltd | 半導体装置及び半導体装置の製造方法 |
-
2000
- 2000-07-10 JP JP2000207911A patent/JP4794030B2/ja not_active Expired - Fee Related
-
2001
- 2001-03-28 TW TW090107363A patent/TW490807B/zh not_active IP Right Cessation
- 2001-03-28 US US09/818,907 patent/US6635935B2/en not_active Expired - Lifetime
- 2001-05-10 CN CNB011174986A patent/CN1199285C/zh not_active Expired - Fee Related
- 2001-05-10 KR KR10-2001-0025384A patent/KR100392715B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR20020005956A (ko) | 2002-01-18 |
JP4794030B2 (ja) | 2011-10-12 |
US6635935B2 (en) | 2003-10-21 |
US20020003270A1 (en) | 2002-01-10 |
KR100392715B1 (ko) | 2003-07-28 |
JP2002026125A (ja) | 2002-01-25 |
CN1333567A (zh) | 2002-01-30 |
TW490807B (en) | 2002-06-11 |
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Owner name: RENESAS ELECTRONICS CORPORATION Free format text: FORMER OWNER: MISSUBISHI ELECTRIC CORP. Effective date: 20140417 |
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