CN105990309B - 封装基板及应用其的封装结构 - Google Patents

封装基板及应用其的封装结构 Download PDF

Info

Publication number
CN105990309B
CN105990309B CN201610157140.9A CN201610157140A CN105990309B CN 105990309 B CN105990309 B CN 105990309B CN 201610157140 A CN201610157140 A CN 201610157140A CN 105990309 B CN105990309 B CN 105990309B
Authority
CN
China
Prior art keywords
metal layer
layer
region
chip
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201610157140.9A
Other languages
English (en)
Other versions
CN105990309A (zh
Inventor
李皓钧
林育锋
詹勋贤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nichia Corp
Original Assignee
Genesis Photonics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Genesis Photonics Inc filed Critical Genesis Photonics Inc
Publication of CN105990309A publication Critical patent/CN105990309A/zh
Application granted granted Critical
Publication of CN105990309B publication Critical patent/CN105990309B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49838Geometry or layout
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0655Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next to each other
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/1336Illuminating devices
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/1336Illuminating devices
    • G02F1/133602Direct backlight
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/1336Illuminating devices
    • G02F1/133602Direct backlight
    • G02F1/133603Direct backlight with LEDs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/562Protection against mechanical damage
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/58Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/60Protection against electrostatic charges or discharges, e.g. Faraday shields
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0657Stacked arrangements of devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/07Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/075Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
    • H01L25/0756Stacked arrangements of devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/0203Particular design considerations for integrated circuits
    • H01L27/0248Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/861Diodes
    • H01L29/866Zener diodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/08Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/10Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a light reflecting structure, e.g. semiconductor Bragg reflector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/483Containers
    • H01L33/486Containers adapted for surface mounting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/50Wavelength conversion elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/50Wavelength conversion elements
    • H01L33/501Wavelength conversion elements characterised by the materials, e.g. binder
    • H01L33/502Wavelength conversion materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/52Encapsulations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/58Optical field-shaping elements
    • H01L33/60Reflective elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/62Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/64Heat extraction or cooling elements
    • H01L33/642Heat extraction or cooling elements characterized by the shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/64Heat extraction or cooling elements
    • H01L33/647Heat extraction or cooling elements the elements conducting electric current to or from the semiconductor body
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/1336Illuminating devices
    • G02F1/133602Direct backlight
    • G02F1/133612Electrical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/49105Connecting at different heights
    • H01L2224/49107Connecting at different heights on the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/075Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
    • H01L25/0753Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • H01L2924/1815Shape
    • H01L2924/1816Exposing the passive side of the semiconductor or solid-state body
    • H01L2924/18161Exposing the passive side of the semiconductor or solid-state body of a flip chip
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0025Processes relating to coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0033Processes relating to semiconductor body packages
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0033Processes relating to semiconductor body packages
    • H01L2933/0041Processes relating to semiconductor body packages relating to wavelength conversion elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0033Processes relating to semiconductor body packages
    • H01L2933/0058Processes relating to semiconductor body packages relating to optical field-shaping elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/50Wavelength conversion elements
    • H01L33/508Wavelength conversion elements having a non-uniform spatial arrangement or non-uniform concentration, e.g. patterned wavelength conversion layer, wavelength conversion layer with a concentration gradient of the wavelength conversion material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/52Encapsulations
    • H01L33/56Materials, e.g. epoxy or silicone resin

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Ceramic Engineering (AREA)
  • Geometry (AREA)
  • Materials Engineering (AREA)
  • Led Device Packages (AREA)
  • Planar Illumination Modules (AREA)

Abstract

本发明提供一种封装基板及应用其的封装结构。其中封装基板,包括一基底层、多个贯孔、一第一金属层以及一第二金属层。基底层具有相对的一第一表面与一第二表面。贯孔穿过基底层。第一金属层设置于第一表面上,且包括一封闭沟槽。第二金属层设置于第二表面上,且通过贯孔与第一金属层电性连接。贯孔位于封闭沟槽的内侧。一种应用其的封装结构亦被提出。本发明藉由在封装基板正面形成沟槽并在封装基板背面形成特定散热结构,能有效防止胶材外流并提升焊接质量。

Description

封装基板及应用其的封装结构
技术领域
本发明涉及一种封装基板及应用其的封装结构,尤其涉及一种具有沟槽的封装基板及应用其的封装结构。
背景技术
在一般封装结构中,可使用胶材固定芯片并防止芯片发出的光线自侧向射出。然而,在封装结构的制造过程中,不易控制胶材,常发生胶材外流。此外,制程中在封装基板上涂上含助焊剂的锡膏时,常会产生气泡,降低焊接质量。
因此,需要提供一种可有效解决上述问题发生的封装基板。
发明内容
本发明提供一种具有沟槽的封装基板及应用其的封装结构,藉由在封装基板正面形成沟槽并在封装基板背面形成特定散热结构,能有效防止胶材外流并提升焊接质量。
根据本发明的一方面,提出一种封装基板,包括一基底层、多个贯孔、一第一金属层以及一第二金属层。基底层具有相对的一第一表面与一第二表面。贯孔穿过基底层。第一金属层设置于第一表面上,且包括一封闭沟槽。第二金属层设置于第二表面上,且通过贯孔与第一金属层电性连接。贯孔位于封闭沟槽的内侧。
根据本发明的另一方面,提出一种封装结构,包括一封装基板、一芯片组与一胶体层。封装基板包括一基底层、多个贯孔、一第一金属层及一第二金属层。基底层具有相对的一第一表面与一第二表面。贯孔穿过基底层。第一金属层设置于第一表面上,且包括一封闭沟槽。第二金属层设置于第二表面上,且通过贯孔与第一金属层电性连接。芯片组与胶体层设置于第一金属层上,且位于封闭沟槽的内侧。
根据本发明的又一方面,提出一种封装结构的制造方法,包括以下步骤。提供一封装基板,其中封装基板包括一基底层、一第一金属层及一第二金属层,基底层具有相对的一第一表面与一第二表面,第一金属层设置于第一表面上且包括一封闭沟槽,第二金属层设置于该第二表面上。提供一芯片组于第一金属层上。提供一胶体层于第一金属层上。芯片组与胶体层位于封闭沟槽的内侧。
为了对本发明的上述及其他方面有更佳的了解,下文特举实施例,并配合附图,作详细说明如下。
附图说明
图1显示本发明一实施例的封装结构的俯视图;
图2A显示本发明一实施例的封装结构沿着图1的A-A’线段所切的剖面图;
图2B显示本发明另一实施例的封装结构沿着图1的A-A’线段所切的剖面图;
图3A显示本发明一实施例的封装结构的仰视图;
图3B显示本发明另一实施例的封装结构的仰视图;
图4A至图4C显示本发明的封装结构的一制造实施例;
图4D至图4E显示本发明的封装结构的另一制造实施例。
附图标记:
100:封装结构
10:封装基板
11:基底层
111:第一表面
112:第二表面
13:第一金属层
14:第二金属层
141:正极区
142:负极区
21:分隔结构
23:封闭沟槽
231:封闭沟槽的内侧壁
232:封闭沟槽的外侧壁
31:贯孔
50、50’:胶体层
80:芯片组
81:芯片
85:静电保护元件
90:散热区
91:沟槽
93、93’:波长转换层
A-A’:剖面线
B-B’:剖面线
W:封闭沟槽的宽度
D:封闭沟槽的深度
S1:封闭沟槽与芯片组的最短距离
S2:正极区与负极区之间的间距
X、Y、Z:坐标轴
具体实施方式
以下参照附图详细叙述本发明的实施方式。需注意的是,实施例所提出的结构和内容仅为举例说明之用,本揭示欲保护的范围并非仅限于所述的实施例。实施例中相同或类似的标号用以标示相同或类似的部分。需注意的是,本发明并非显示出所有可能的实施例。可在不脱离本发明的精神和范围内对结构加以变化与修饰,以符合实际应用所需。因此,未于本发明提出的其他实施例也可能可以应用。再者,附图已简化以利清楚说明实施例的内容,附图的尺寸比例并非按照实际产品等比例绘制。因此,说明书和附图内容仅作叙述实施例之用,而非作为限缩本发明保护范围之用。
图1显示本发明一实施例的封装结构100的俯视图。图2A显示本发明一实施例的封装结构100沿着图1的A-A’线段所切的剖面图。图2B显示本发明另一实施例的封装结构100沿着图1的A-A’线段所切的剖面图。要注意的是,为了更清楚显示位于封装基板10上的元件的关系,图1省略了部分元件。
如图1、图2A所示,本发明实施例的封装结构100包括一封装基板10、一芯片组80以及一胶体层50。在本实施例中,封装基板10可包括一基底层11、多个贯孔(via hole)31、一第一金属层13及一第二金属层14。基底层11具有相对的一第一表面111与一第二表面112。贯孔31穿过基底层11。第一金属层13设置于基底层11的第一表面111上。第二金属层14设置于基底层11的第二表面112上,且通过贯孔31与第一金属层13电性连接。芯片组80与胶体层50设置于第一金属层13上。
如图1所示,第一金属层13藉由一封闭沟槽23来区分内外部分。在本实施例中,贯孔31、芯片组80与胶体层50位于封闭沟槽23的内侧。在此,封闭沟槽23的内侧定义为封闭沟槽23的外侧壁232内的空间。也就是说,胶体层50可填满封闭沟槽23,但不会超过封闭沟槽23的外侧壁232。此外,位于封闭沟槽23内的第一金属层13,可藉由该封闭沟槽23,将第一金属层13内外部分绝缘,即位于封闭沟槽23内部的第一金属层13与封闭沟槽23外的第一金属层13绝缘,避免发生短路。
在一实施例中,基底层11可例如由陶瓷材料所形成,陶瓷材料可例如包括氮化铝、氧化铝。第一金属层13与第二金属层14可例如为铜层。在某些实施例中,封装基板10可进一步包括一镀层(未显示),例如为金、或银。镀层可形成于第一金属层13与第二金属层14上,以防止第一金属层13与第二金属层14硫化。
如图1、图2A所示,封装基板10可设有多个分隔结构21,分隔结构21设置于基底层11的第一表面111上。举例来说,可藉由蚀刻第一金属层13并裸露部分基底层11的第一表面111,以形成分隔结构21。在本发明实施例中,分隔结构21连接封闭沟槽23。此外,芯片组80设置于分隔结构21上。
在本实施例中,芯片组80包括多个芯片81。多个芯片81之间的间距可例如为50μm。此外,芯片81可为发光二极管(light-emitting diode)芯片,并以覆晶芯片(flip chip)、水平式芯片(lateral chip)、垂直芯片(vertical chip)的形式形成于第一金属层13上。
要注意的是,虽然图1、图2A显示芯片组80包括五个芯片81,且芯片81为正方形,但本揭示并未限定于此。在某些实施例中,芯片组80可仅包括单一芯片,且此单一芯片为矩形。若芯片组中仅包括单一芯片,由于单一芯片中没有间距,搭配其他反射元件、透镜组并发射光线时不会形成暗区。也就是说,芯片组中芯片的数量、形状可视设计需求而改变。
在一实施例中,封闭沟槽23的宽度W可例如为80至300μm,封闭沟槽的深度D可依据第一金属层13的厚度进行调整,举例来说,封闭沟槽的深度D可例如为40至80μm。在此,封闭沟槽23的宽度W可定义为封闭沟槽23的内侧壁231与外侧壁232之间的距离,封闭沟槽23的深度D可定义为封闭沟槽23在垂直基底层11的第一表面111的方向(Z方向)的深度。再者,封闭沟槽23与芯片组80的最短距离S1可例如为500至2000μm。
由于封闭沟槽23的设计以及胶体层50的表面张力,胶体层50可受到控制,在制程中填满封闭沟槽23,但不会超过封闭沟槽23的外侧壁232,因而能有效防止胶体层50外流及溢流至封闭沟槽23所环绕外的区域。此外,由于本发明实施例的分隔结构21连接封闭沟槽23,因此胶体层50也会填满分隔结构21。
在一实施例中,胶体层50可为透明硅胶,或者胶体层50可包括硅胶与荧光粉。如图2A所示,胶体层50可覆盖芯片组80。然而,本发明并未限定于此。
如第2B图所示,在本发明另一实施例中,胶体层50’并未覆盖芯片组80。也就是说,胶体层50’可位于芯片组80的侧表面,并裸露出芯片组80的顶表面。在此实施例中,可形成一波长转换层93于芯片组80的顶表面。举例来说,可以喷涂或表面贴合荧光胶片的方式形成波长转换层93于芯片组80的顶表面。利用喷涂的方式可形成较薄的波长转换层93,并均匀形成于芯片组80的顶表面,因而也可薄化胶体层50’。
此外,位于芯片组80的侧表面的胶体层50’可例如包括硅胶与二氧化钛(TiO2),胶体层50’的黏度可例如为1000~20000mPa·s,反射率可为90%~99%,例如95%。
在一实施例中,封装结构100可包括一静电保护元件85。保护元件85设置于基底层11的第一表面111上,可用以保护芯片组80,免于受到损害。
图3A显示本发明一实施例的封装结构100的仰视图。图3B显示本发明另一实施例的封装结构100的仰视图。也就是说,图1可表示本发明实施例的封装结构100的正面结构,图3A、图3B可表示本发明实施例的封装结构100的背面结构。
在本实施例中,封装基板10的第二金属层14可包括一散热区90、一正极区141与一负极区142,散热区90、正极区141与负极区142设置于基底层10的第二表面122。散热区90对应于芯片组80的位置,且正极区141与负极区142与散热区90分隔。散热区90可用以传导芯片组80所发出的热量至芯片组80外来散热,且散热区90并未电性连接至任何元件。
散热区90由多个沟槽91所形成,这些沟槽91排列为多边形或弧形数组,且沟槽91可与散热区90的外部连通。举例来说,沟槽91可形成由三边形、四边形、五边形、六边形(如图3A所示)等多边形所组成的数组图案,或者,前述多边形组成的数组图案可由具有弧形所组成的数组图案取代。
如图3A所示,由于多个沟槽91的设计,散热区90可被分割为类似蜂巢图案,有助于芯片组80的散热。在后续制程中,封装结构100可涂上含助焊剂的锡膏并连接至一电路板,在加热并连接电路板得过程中,含助焊剂的锡膏可能会产生气体,而形成焊接部位的气泡,导致焊接质量降低。藉由对外连接的多个沟槽91的设计,能将产生的气泡排出,有效提升焊接质量。
封装基板10的正极区141与负极区142为第二金属层14的两个部分。因此,封装基板10的正极区141与负极区142可通过贯孔31与第一金属层13电性连接。
再者,封装基板10的正极区141与负极区142之间的间距、正极区141与散热区90之间的间距、负极区142与散热区90之间的间距至少为400μm。举例来说,如图3A所示,封装基板10的正极区141与负极区142之间的间距S2可例如为400μm。
本发明并未限定于图3A所示的结构。图3B可表示本发明另一实施例的封装结构100的背面结构。图3B所示的结构相较于图3A所示的结构具有更大面积的散热区90。须注意的是,虽然图3A、图3B皆显示沟槽91排列为六边形数组,但本发明并未限定于此。沟槽91的形状与数量可视设计需求而改变。
图4A至图4C显示本发明的封装结构100的一制造实施例,其中图4C可例如为本发明的封装结构100沿着图1的B-B’线所切的剖面图。要注意的是,为了更清楚显示封装结构100的制造步骤,以下附图可能省略部分元件。
如图4A所示,提供一封装基板10。类似地,封装基板10可例如具有图2B所显示的结构,包括一基底层11、一第一金属层13及一第二金属层14,基底层11具有相对的一第一表面111与一第二表面112,第一金属层13设置于第一表面111上且包括一封闭沟槽23,第二金属层14设置于第二表面112上。接着,提供一芯片组80于封装基板10(第一金属层13)上。
如图4B所示,形成一波长转换层93于芯片组80的表面。在本实施例中,波长转换层93可覆盖芯片组80。波长转换层93可以喷涂的方式形成于芯片组80的表面。
最后,形成一胶体层50于封装基板10(第一金属层13)上。如图4C所示,芯片组80与胶体层50皆位于封闭沟槽23的内侧,且胶体层50仅位于波长转换层93与芯片组80的侧表面,并裸露出部分波长转换层93的顶表面。
然而,本发明并未限定于此。图4D至图4E显示本揭示的封装结构100的另一制造实施例,其中图4E可例如为本揭示的封装结构100沿着图1的B-B’线所切的剖面图。类似地,为了更清楚显示封装结构100的制造步骤,以下附图可能省略部分元件。
图4D的步骤可接续图4A的步骤。如图4D所示,形成一波长转换层93’于芯片组80裸露的顶表面。举例来说,波长转换层93’可以贴合的方式形成于芯片组80的顶表面。
最后,如图4E所示,提供一胶体层50于芯片组80与波长转换层93’的侧表面,胶体层50位于封闭沟槽23的内侧,并裸露出波长转换层93’的顶表面。
承上述实施例,本发明藉由在封装基板10的正面形成封闭沟槽23,在封装基板10的背面形成散热区90,能有效防止胶材外流并提升焊接质量。
综上所述,虽然本发明已以实施例揭示如上,然其并非用以限定本发明。本发明所属技术领域中普通技术人员,在不脱离本发明的精神和范围内,当可作各种的改动与润饰。因此,本发明的保护范围当视所附权利要求界定范围为准。

Claims (18)

1.一种封装基板,其特征在于,包括:
一基底层,具有相对的一第一表面与一第二表面;
多个贯孔,穿过所述基底层;
一第一金属层,设置于所述第一表面上,且包括一环绕部和多个分离排列的上垫部,其中所述环绕部包围所述上垫部而在所述环绕部与所述上垫部之间形成一封闭沟槽,且所述上垫部之间的间隙与所述封闭沟槽相连通;以及
一第二金属层,设置于所述第二表面上,且包括分离排列的下垫部,其中所述下垫部分别通过所述多个贯孔与所述上垫部电性连接;
其中所述多个贯孔位于所述上垫部的下方,且所述第一金属层的所述环绕部是电性浮置。
2.根据权利要求1所述的封装基板,其特征在于,该第二金属层还包括:
一散热区,包括被多个沟槽所分隔的多个散热垫。
3.根据权利要求1所述的封装基板,其特征在于,该封闭沟槽的宽度为80至300μm。
4.根据权利要求1所述的封装基板,其特征在于,该封闭沟槽的深度为40至80μm。
5.根据权利要求1所述的封装基板,其特征在于,该基底层由陶瓷材料所形成。
6.根据权利要求1所述的封装基板,其特征在于,还包括一镀层,形成于所述第一金属层与所述第二金属层上,其中所述镀层为金或银所形成。
7.根据权利要求2所述的封装基板,其特征在于,所述散热垫是电性浮置。
8.根据权利要求2所述的封装基板,其特征在于,所述第二金属层的所述下垫部被分成一正极区与一负极区,与所述散热区分隔且包围所述散热区。
9.一种封装结构,其特征在于,包括:
一封装基板,包括:
一基底层,具有相对的一第一表面与一第二表面;
多个贯孔,穿过所述基底层;
一第一金属层,设置于所述第一表面上,且包括一环绕部和多个分离排列的上垫部,其中所述环绕部包围所述上垫部而在所述环绕部与所述上垫部之间形成一封闭沟槽,且所述上垫部之间的间隙与所述封闭沟槽相连通;及
一第二金属层,设置于所述第二表面上,且包括分离排列的下垫部,其中所述下垫部分别通过所述多个贯孔与所述上垫部电性连接,且所述第一金属层的所述环绕部是电性浮置;以及
至少一芯片,设置于所述上垫部且与其电性连接;以及
一胶体层,设置于所述封装基板上,并覆盖所述芯片及所述上垫部、或者覆盖所述芯片的外侧表面及覆盖所述上垫部的位于所述芯片外侧的部分且裸露出所述芯片的顶表面,其中所述胶体层未延伸超过所述封闭沟槽的一外侧壁。
10.根据权利要求9所述的封装结构,其特征在于,所述第二金属层还包括:
一散热区,对应所述芯片的位置设置,包括被多个沟槽所分隔的多个散热垫。
11.根据权利要求10所述的封装结构,其特征在于,所述第二金属层的所述下垫部被分成:
一正极区与一负极区,与所述散热区分隔且包围所述散热区。
12.根据权利要求9所述的封装结构,其特征在于,所述芯片包括一覆晶芯片。
13.根据权利要求9所述的封装结构,其特征在于,当所述芯片的数量为多个时,所述芯片之间的间距为50μm。
14.根据权利要求9所述的封装结构,其特征在于,所述封闭沟槽与所述芯片间的距离为500至2000μm。
15.根据权利要求9所述的封装结构,其特征在于,所述胶体层包括硅胶与荧光粉。
16.根据权利要求9所述的封装结构,其特征在于,所述封装基板还包括:
一镀层,形成于所述第一金属层与所述第二金属层上;
其中所述镀层为金或银所形成。
17.根据权利要求10所述的封装结构,其特征在于,所述散热垫是电性浮置。
18.一种封装结构,其特征在于,包括:
一封装基板,包括:
一基底层,具有相对的一第一表面与一第二表面;
多个贯孔,穿过所述基底层;
一第一金属层,设置于所述第一表面上,且包括一封闭沟槽;及
一第二金属层,设置于所述第二表面上,其中所述第二金属层通过所述多个贯孔与所述第一金属层电性连接;以及
一芯片组及一胶体层,设置于所述第一金属层上且位于所述封闭沟槽的内部,
其中所述第二金属层还包括对应所述芯片组的一散热区,且所述散热区是由多个沟槽排列在一垫部阵列中,
其中所述第二金属层还包括与该散热区分隔的一正极区与一负极区,其中该正极区与该负极区之间的间距、该正极区与该散热区之间的间距、该负极区与该散热区之间的间距至少为400μm。
CN201610157140.9A 2015-03-18 2016-03-18 封装基板及应用其的封装结构 Active CN105990309B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201562134577P 2015-03-18 2015-03-18
US62/134,577 2015-03-18

Publications (2)

Publication Number Publication Date
CN105990309A CN105990309A (zh) 2016-10-05
CN105990309B true CN105990309B (zh) 2019-12-10

Family

ID=56923785

Family Applications (4)

Application Number Title Priority Date Filing Date
CN201610157182.2A Pending CN105990505A (zh) 2015-03-18 2016-03-18 半导体发光元件及其制作方法
CN201610157456.8A Pending CN105990508A (zh) 2015-03-18 2016-03-18 发光装置及应用其的背光模块
CN201610157175.2A Pending CN105990499A (zh) 2015-03-18 2016-03-18 发光二极管封装结构及其制作方法
CN201610157140.9A Active CN105990309B (zh) 2015-03-18 2016-03-18 封装基板及应用其的封装结构

Family Applications Before (3)

Application Number Title Priority Date Filing Date
CN201610157182.2A Pending CN105990505A (zh) 2015-03-18 2016-03-18 半导体发光元件及其制作方法
CN201610157456.8A Pending CN105990508A (zh) 2015-03-18 2016-03-18 发光装置及应用其的背光模块
CN201610157175.2A Pending CN105990499A (zh) 2015-03-18 2016-03-18 发光二极管封装结构及其制作方法

Country Status (3)

Country Link
US (7) US9978718B2 (zh)
CN (4) CN105990505A (zh)
TW (5) TWI657597B (zh)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI557952B (zh) 2014-06-12 2016-11-11 新世紀光電股份有限公司 發光元件
USD761214S1 (en) * 2015-04-02 2016-07-12 Genesis Photonics Inc. Light emitting diode package
JP2017130633A (ja) * 2016-01-22 2017-07-27 豊田合成株式会社 発光装置
KR102503215B1 (ko) * 2016-03-28 2023-02-24 삼성전자 주식회사 발광 소자 패키지
US9978674B2 (en) * 2016-04-05 2018-05-22 Samsung Electronics Co., Ltd. Chip-on-film semiconductor packages and display apparatus including the same
KR20170121777A (ko) * 2016-04-25 2017-11-03 삼성전자주식회사 반도체 발광장치
CN106439563B (zh) * 2016-08-31 2019-01-25 友达光电(苏州)有限公司 发光条结构
TWD188043S (zh) * 2016-09-29 2018-01-21 新世紀光電股份有限公司 發光二極體封裝
TWD186014S (zh) 2016-09-29 2017-10-11 新世紀光電股份有限公司 發光二極體模組之部分
JP6652025B2 (ja) * 2016-09-29 2020-02-19 豊田合成株式会社 発光装置及びその製造方法
TWD188042S (zh) 2016-09-29 2018-01-21 新世紀光電股份有限公司 發光二極體封裝體之部分
US10580932B2 (en) 2016-12-21 2020-03-03 Nichia Corporation Method for manufacturing light-emitting device
JP6823262B2 (ja) * 2017-03-15 2021-02-03 ミツミ電機株式会社 光学モジュールの製造方法及び光学モジュール
CN109217100B (zh) * 2017-07-05 2021-03-05 深圳光峰科技股份有限公司 荧光芯片及其制造方法
JP6699634B2 (ja) * 2017-07-28 2020-05-27 日亜化学工業株式会社 発光装置の製造方法
US10784423B2 (en) 2017-11-05 2020-09-22 Genesis Photonics Inc. Light emitting device
TW201939768A (zh) * 2018-03-16 2019-10-01 聯京光電股份有限公司 光電封裝體
CN108550679A (zh) * 2018-04-16 2018-09-18 绍兴职业技术学院 一种白光数码管显示器件及其封装工艺
TWI802708B (zh) * 2018-06-08 2023-05-21 日商日機裝股份有限公司 半導體發光裝置
TWI661251B (zh) * 2018-06-12 2019-06-01 友達光電股份有限公司 背光模組
TWI682695B (zh) * 2018-07-05 2020-01-11 同泰電子科技股份有限公司 利用防焊限定開窗形成連接端子之電路板結構
CN108828841B (zh) * 2018-07-26 2021-01-15 武汉华星光电技术有限公司 Led背光装置及led显示装置
TW202010150A (zh) * 2018-08-17 2020-03-01 新世紀光電股份有限公司 發光裝置及其製作方法
CN113130461B (zh) * 2018-10-22 2023-01-10 海信视像科技股份有限公司 发光二极管灯板、其防护封装方法、背光模组及显示装置
US11476236B2 (en) * 2018-11-07 2022-10-18 Seoul Viosys Co., Ltd. Display apparatus
KR102555412B1 (ko) * 2018-12-14 2023-07-13 엘지디스플레이 주식회사 발광 소자를 포함하는 디스플레이 장치
KR20200140654A (ko) * 2019-06-07 2020-12-16 삼성전자주식회사 반도체 패키지 및 그 제조 방법
JP7321832B2 (ja) * 2019-08-23 2023-08-07 株式会社ジャパンディスプレイ 照明装置及び表示装置
TWI723855B (zh) * 2020-04-28 2021-04-01 友達光電股份有限公司 發光二極體顯示裝置及其製造方法
CN115083258A (zh) * 2021-03-10 2022-09-20 群创光电股份有限公司 发光模块及包含发光模块的显示设备
TWI826913B (zh) * 2021-03-10 2023-12-21 群創光電股份有限公司 發光模組及包含其之顯示裝置
CN114935853B (zh) * 2022-06-30 2023-12-29 苏州华星光电技术有限公司 背光模组及其制备方法和显示装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103137571A (zh) * 2013-01-22 2013-06-05 日月光半导体制造股份有限公司 半导体封装构造及其制造方法
CN103531725A (zh) * 2013-10-16 2014-01-22 上海和辉光电有限公司 电激发光组件及其封装方法

Family Cites Families (90)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6952079B2 (en) 2002-12-18 2005-10-04 General Electric Company Luminaire for light extraction from a flat light source
US6835960B2 (en) * 2003-03-03 2004-12-28 Opto Tech Corporation Light emitting diode package structure
US6876008B2 (en) * 2003-07-31 2005-04-05 Lumileds Lighting U.S., Llc Mount for semiconductor light emitting device
US7307287B2 (en) * 2004-09-15 2007-12-11 Yu-Nung Shen LED package and method for producing the same
CN101487951A (zh) 2005-01-31 2009-07-22 凸版印刷株式会社 光学片和使用它的背光源单元以及显示器
US9018655B2 (en) 2005-02-03 2015-04-28 Epistar Corporation Light emitting apparatus and manufacture method thereof
KR100665219B1 (ko) 2005-07-14 2007-01-09 삼성전기주식회사 파장변환형 발광다이오드 패키지
KR100640496B1 (ko) 2005-11-23 2006-11-01 삼성전기주식회사 수직구조 질화갈륨계 발광다이오드 소자
US8044412B2 (en) * 2006-01-20 2011-10-25 Taiwan Semiconductor Manufacturing Company, Ltd Package for a light emitting element
TWI309480B (en) * 2006-07-24 2009-05-01 Everlight Electronics Co Ltd Led packaging structure
JP4905009B2 (ja) 2006-09-12 2012-03-28 豊田合成株式会社 発光装置の製造方法
US20080123318A1 (en) * 2006-11-08 2008-05-29 Atmel Corporation Multi-component electronic package with planarized embedded-components substrate
US7889421B2 (en) 2006-11-17 2011-02-15 Rensselaer Polytechnic Institute High-power white LEDs and manufacturing method thereof
KR101319209B1 (ko) 2006-11-24 2013-10-16 엘지디스플레이 주식회사 액정표시장치의 백라이트 유닛
US8252615B2 (en) * 2006-12-22 2012-08-28 Stats Chippac Ltd. Integrated circuit package system employing mold flash prevention technology
CN100543986C (zh) * 2007-03-21 2009-09-23 亿光电子工业股份有限公司 Led装置
TW200841089A (en) 2007-04-09 2008-10-16 Chu-Liang Cheng Light source module and liquid crystal display
US7810956B2 (en) 2007-08-23 2010-10-12 Koninklijke Philips Electronics N.V. Light source including reflective wavelength-converting layer
CN101855735A (zh) 2007-11-19 2010-10-06 松下电器产业株式会社 半导体发光装置及半导体发光装置的制造方法
TWI361499B (en) * 2007-12-12 2012-04-01 Everlight Electronics Co Ltd Method for packaging led
GB0801509D0 (en) 2008-01-28 2008-03-05 Photonstar Led Ltd Light emitting system with optically transparent thermally conductive element
KR20100127286A (ko) * 2008-03-21 2010-12-03 코닌클리즈케 필립스 일렉트로닉스 엔.브이. 발광 장치
BRPI0822500A2 (pt) * 2008-03-28 2015-06-16 Sharp Kk Unidade de luz traseira e dispositivo de visor de cristal líquido
TWI416755B (zh) 2008-05-30 2013-11-21 Epistar Corp 光源模組、其對應之光棒及其對應之液晶顯示裝置
US7888691B2 (en) 2008-08-29 2011-02-15 Koninklijke Philips Electronics N.V. Light source including a wavelength-converted semiconductor light emitting device and a filter
US7825427B2 (en) 2008-09-12 2010-11-02 Bridgelux, Inc. Method and apparatus for generating phosphor film with textured surface
US7928655B2 (en) 2008-11-10 2011-04-19 Visera Technologies Company Limited Light-emitting diode device and method for fabricating the same
KR20100080423A (ko) * 2008-12-30 2010-07-08 삼성엘이디 주식회사 발광소자 패키지 및 그 제조방법
JP5482378B2 (ja) * 2009-04-20 2014-05-07 日亜化学工業株式会社 発光装置
KR101673913B1 (ko) * 2009-07-20 2016-11-08 삼성전자 주식회사 발광 패키지 및 그 제조 방법
JP2011114093A (ja) 2009-11-25 2011-06-09 Panasonic Electric Works Co Ltd 照明装置
CN102754229B (zh) 2010-02-09 2016-07-06 日亚化学工业株式会社 发光装置、及发光装置的制造方法
US8771577B2 (en) 2010-02-16 2014-07-08 Koninklijke Philips N.V. Light emitting device with molded wavelength converting layer
JP5759790B2 (ja) 2010-06-07 2015-08-05 株式会社東芝 半導体発光装置の製造方法
JP5414627B2 (ja) 2010-06-07 2014-02-12 株式会社東芝 半導体発光装置及びその製造方法
JP5566785B2 (ja) 2010-06-22 2014-08-06 日東電工株式会社 複合シート
JP2012033823A (ja) 2010-08-02 2012-02-16 Stanley Electric Co Ltd 発光装置およびその製造方法
US20120061700A1 (en) 2010-09-09 2012-03-15 Andreas Eder Method and system for providing a reliable light emitting diode semiconductor device
CN102412344A (zh) * 2010-09-23 2012-04-11 展晶科技(深圳)有限公司 发光二极管封装方法
TW201218428A (en) 2010-10-25 2012-05-01 Hon Hai Prec Ind Co Ltd Light emitting diode package structure
KR20120050282A (ko) 2010-11-10 2012-05-18 삼성엘이디 주식회사 발광 소자 패키지 및 그 제조 방법
KR20120072962A (ko) 2010-12-24 2012-07-04 삼성엘이디 주식회사 발광소자 패키지 및 그 제조방법
KR20120082190A (ko) * 2011-01-13 2012-07-23 삼성엘이디 주식회사 발광소자 패키지
US8581287B2 (en) 2011-01-24 2013-11-12 Stanley Electric Co., Ltd. Semiconductor light emitting device having a reflective material, wavelength converting layer and optical plate with rough and plane surface regions, and method of manufacturing
US8941137B2 (en) 2011-03-06 2015-01-27 Mordehai MARGALIT Light emitting diode package and method of manufacture
US9041046B2 (en) * 2011-03-15 2015-05-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method and apparatus for a light source
KR20120106568A (ko) 2011-03-18 2012-09-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 장치 및 발광 장치의 제작 방법
US20120250320A1 (en) 2011-03-31 2012-10-04 Xicato, Inc. Color conversion cavities for led-based illumination modules
JP5670249B2 (ja) 2011-04-14 2015-02-18 日東電工株式会社 発光素子転写シートの製造方法、発光装置の製造方法、発光素子転写シートおよび発光装置
EP2701214A4 (en) * 2011-04-20 2014-11-26 Elm Inc LIGHT-EMITTING DEVICE AND METHOD FOR THE PRODUCTION THEREOF
JP5680472B2 (ja) 2011-04-22 2015-03-04 シチズンホールディングス株式会社 半導体発光装置の製造方法
CN107768502B (zh) * 2011-05-16 2019-07-05 日亚化学工业株式会社 发光装置及其制造方法
DE102011050450A1 (de) 2011-05-18 2012-11-22 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip, optoelektronisches Halbleiterbauelement und Verfahren zur Herstellung eines optoelektronischen Halbleiterbauelements
JP5840388B2 (ja) 2011-06-01 2016-01-06 日東電工株式会社 発光ダイオード装置
JP2013016588A (ja) 2011-07-01 2013-01-24 Citizen Electronics Co Ltd Led発光装置
TWM421712U (en) * 2011-07-07 2012-02-01 Sin Young Hong Ltd Adjustable shaping bra
JP2013021175A (ja) 2011-07-12 2013-01-31 Toshiba Corp 半導体発光素子
KR20130013245A (ko) * 2011-07-27 2013-02-06 한국과학기술연구원 태양전지용 광흡수층 제조 방법, 이를 이용한 박막형 태양전지의 제조 방법 및 이를 이용한 박막형 태양전지
US20130094177A1 (en) 2011-10-13 2013-04-18 Intematix Corporation Wavelength conversion component with improved thermal conductive characteristics for remote wavelength conversion
JP5893888B2 (ja) * 2011-10-13 2016-03-23 シチズン電子株式会社 半導体発光装置
TW201318221A (zh) 2011-10-26 2013-05-01 Episil Technologies Inc 發光二極體之矽支架及其製造方法
TW201332138A (zh) * 2012-01-17 2013-08-01 Advanced Semiconductor Eng 半導體光源模組及其製造方法
JP5956167B2 (ja) 2012-01-23 2016-07-27 スタンレー電気株式会社 発光装置、車両用灯具及び発光装置の製造方法
WO2013112435A1 (en) * 2012-01-24 2013-08-01 Cooledge Lighting Inc. Light - emitting devices having discrete phosphor chips and fabrication methods
KR101957700B1 (ko) 2012-02-01 2019-03-14 삼성전자주식회사 발광 장치
US9240530B2 (en) * 2012-02-13 2016-01-19 Cree, Inc. Light emitter devices having improved chemical and physical resistance and related methods
US8946747B2 (en) 2012-02-13 2015-02-03 Cree, Inc. Lighting device including multiple encapsulant material layers
CN102623593A (zh) * 2012-04-19 2012-08-01 日月光半导体制造股份有限公司 半导体光源模块、其制造方法及其基板结构
JP5962285B2 (ja) * 2012-07-19 2016-08-03 日亜化学工業株式会社 発光装置およびその製造方法
US9287475B2 (en) 2012-07-20 2016-03-15 Cree, Inc. Solid state lighting component package with reflective polymer matrix layer
JP6099901B2 (ja) * 2012-08-23 2017-03-22 スタンレー電気株式会社 発光装置
US9005030B2 (en) * 2012-11-30 2015-04-14 Applifier Oy System and method for sharing score experiences
CN103855142B (zh) 2012-12-04 2017-12-29 东芝照明技术株式会社 发光装置及照明装置
KR20140094752A (ko) * 2013-01-22 2014-07-31 삼성전자주식회사 전자소자 패키지 및 이에 사용되는 패키지 기판
KR101958418B1 (ko) 2013-02-22 2019-03-14 삼성전자 주식회사 발광 소자 패키지
JP2014170902A (ja) 2013-03-05 2014-09-18 Toshiba Corp 半導体発光装置及びその製造方法
WO2014136958A1 (ja) * 2013-03-08 2014-09-12 国立大学法人九州大学 ハンドエグゾスケルトン装置
TW201507209A (zh) 2013-08-01 2015-02-16 Genesis Photonics Inc 發光二極體封裝結構及其製造方法
KR20150042362A (ko) 2013-10-10 2015-04-21 삼성전자주식회사 발광다이오드 패키지 및 그 제조방법
TWI533478B (zh) 2013-10-14 2016-05-11 新世紀光電股份有限公司 覆晶式發光二極體封裝結構
JP6182050B2 (ja) 2013-10-28 2017-08-16 株式会社東芝 半導体発光装置
US9419189B1 (en) 2013-11-04 2016-08-16 Soraa, Inc. Small LED source with high brightness and high efficiency
KR102075993B1 (ko) 2013-12-23 2020-02-11 삼성전자주식회사 백색 led 소자들을 제조하는 방법
TWI542047B (zh) 2014-01-13 2016-07-11 邱羅利士公司 發光二極體封裝結構之製法
KR101584201B1 (ko) 2014-01-13 2016-01-13 삼성전자주식회사 반도체 발광소자 및 이의 제조방법
KR20150096198A (ko) * 2014-02-14 2015-08-24 삼성전자주식회사 발광 소자 패키지 및 그 제조 방법
JP2015173142A (ja) 2014-03-11 2015-10-01 株式会社東芝 半導体発光装置
US20150280078A1 (en) 2014-03-31 2015-10-01 SemiLEDs Optoelectronics Co., Ltd. White flip chip light emitting diode (fc led) and fabrication method
US9601670B2 (en) 2014-07-11 2017-03-21 Cree, Inc. Method to form primary optic with variable shapes and/or geometries without a substrate
US20160181476A1 (en) 2014-12-17 2016-06-23 Apple Inc. Micro led with dielectric side mirror

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103137571A (zh) * 2013-01-22 2013-06-05 日月光半导体制造股份有限公司 半导体封装构造及其制造方法
CN103531725A (zh) * 2013-10-16 2014-01-22 上海和辉光电有限公司 电激发光组件及其封装方法

Also Published As

Publication number Publication date
TW201635591A (zh) 2016-10-01
TWI688126B (zh) 2020-03-11
US20160276320A1 (en) 2016-09-22
US20180261572A1 (en) 2018-09-13
TW201705545A (zh) 2017-02-01
US20160276293A1 (en) 2016-09-22
CN105990505A (zh) 2016-10-05
TWI692122B (zh) 2020-04-21
US9953956B2 (en) 2018-04-24
US20160284666A1 (en) 2016-09-29
CN105990309A (zh) 2016-10-05
TW201707186A (zh) 2017-02-16
CN105990508A (zh) 2016-10-05
US10032747B2 (en) 2018-07-24
US9978718B2 (en) 2018-05-22
TW201637244A (zh) 2016-10-16
US20180240780A1 (en) 2018-08-23
US20180269182A1 (en) 2018-09-20
CN105990499A (zh) 2016-10-05
TWI657597B (zh) 2019-04-21
TW201707189A (zh) 2017-02-16
US20160276543A1 (en) 2016-09-22

Similar Documents

Publication Publication Date Title
CN105990309B (zh) 封装基板及应用其的封装结构
US10749079B2 (en) LED module
US9691936B2 (en) Manufacturing method of LED carrier
JP5634647B1 (ja) Ledモジュール
JP5520241B2 (ja) 電力表面取り付けの発光ダイ・パッケージ
US9512968B2 (en) LED module
US9293663B1 (en) Light-emitting unit and semiconductor light-emitting device
KR100976607B1 (ko) 씨오엠(com) 형 발광다이오드 패키지, 이를 이용한 발광다이오드 모듈 및 그 제조방법
TWI505519B (zh) 發光二極體燈條及其製造方法
US8716730B2 (en) LED module having a platform with a central recession
TWI557955B (zh) Led承載座及其製造方法
US20130161670A1 (en) Light emitting diode packages and methods of making
KR102513954B1 (ko) 박막 패드를 구비하는 발광 소자 패키지 및 그 제조 방법
TW202118093A (zh) 發光模組及其製造方法
US9537019B2 (en) Semiconductor device
US10680033B2 (en) Chip packaging method and chip package
KR20080005851A (ko) 발광 장치
US20170236984A1 (en) Semiconductor light emitting device packages
US11855244B1 (en) Light emitting device
KR101437930B1 (ko) 발광장치 및 그 제조방법
JP6543391B2 (ja) 半導体装置
JP2021190582A (ja) Led発光装置
KR20210009642A (ko) 반도체 발광소자 및 이의 제조방법
JP2019087763A (ja) 光半導体デバイスおよび光半導体デバイスの製造方法
CN110959199A (zh) 光电子半导体器件和用于形成光电子半导体器件的方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20231213

Address after: Tokushima County, Japan

Patentee after: NICHIA Corp.

Address before: Tainan, Taiwan, China Science Southern Industrial Park, No. three, Dali Road, No. 5

Patentee before: Genesis Photonics Inc.