CN102187442A - 半导体装置的制造方法及半导体装置 - Google Patents

半导体装置的制造方法及半导体装置 Download PDF

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Publication number
CN102187442A
CN102187442A CN2009801411978A CN200980141197A CN102187442A CN 102187442 A CN102187442 A CN 102187442A CN 2009801411978 A CN2009801411978 A CN 2009801411978A CN 200980141197 A CN200980141197 A CN 200980141197A CN 102187442 A CN102187442 A CN 102187442A
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adhesive film
semiconductor device
semiconductor element
semiconductor
manufacturing
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Chinese (zh)
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佐佐木晓嗣
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Sumitomo Bakelite Co Ltd
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Sumitomo Bakelite Co Ltd
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    • C08L33/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
    • C08L33/04—Homopolymers or copolymers of esters
    • C08L33/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, which oxygen atoms are present only as part of the carboxyl radical
    • C08L33/10—Homopolymers or copolymers of methacrylic acid esters
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    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L33/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
    • C08L33/04—Homopolymers or copolymers of esters
    • C08L33/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, which oxygen atoms are present only as part of the carboxyl radical
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    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/10—Adhesives in the form of films or foils without carriers
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    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
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    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • H10P72/7416—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
    • H10P72/742—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support used during dicing or grinding involving stretching of the auxiliary support post dicing
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    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/013—Manufacture or treatment of die-attach connectors
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    • H10W72/07337—Connecting techniques using a polymer adhesive, e.g. an adhesive based on silicone or epoxy
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    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07351—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting
    • H10W72/07353—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting changes in shapes
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    • H10W72/00—Interconnections or connectors in packages
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    • H10W72/321—Structures or relative sizes of die-attach connectors
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    • H10W72/00—Interconnections or connectors in packages
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    • H10W72/351—Materials of die-attach connectors
    • H10W72/352—Materials of die-attach connectors comprising metals or metalloids, e.g. solders
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    • H10W72/00—Interconnections or connectors in packages
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    • H10W72/351—Materials of die-attach connectors
    • H10W72/353—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
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    • H10W72/351—Materials of die-attach connectors
    • H10W72/353—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
    • H10W72/354—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics comprising polymers
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    • H10W72/00—Interconnections or connectors in packages
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    • H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
    • H10W76/40—Fillings or auxiliary members in containers, e.g. centering rings
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    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
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    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Die Bonding (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Dicing (AREA)
  • Adhesive Tapes (AREA)
CN2009801411978A 2008-10-16 2009-07-16 半导体装置的制造方法及半导体装置 Pending CN102187442A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2008-267030 2008-10-16
JP2008267030 2008-10-16
JP2009-105605 2009-04-23
JP2009105605A JP4360446B1 (ja) 2008-10-16 2009-04-23 半導体装置の製造方法及び半導体装置
PCT/JP2009/003359 WO2010044179A1 (ja) 2008-10-16 2009-07-16 半導体装置の製造方法及び半導体装置

Publications (1)

Publication Number Publication Date
CN102187442A true CN102187442A (zh) 2011-09-14

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Application Number Title Priority Date Filing Date
CN2009801411978A Pending CN102187442A (zh) 2008-10-16 2009-07-16 半导体装置的制造方法及半导体装置

Country Status (7)

Country Link
US (1) US8436479B2 (https=)
EP (1) EP2341529A4 (https=)
JP (2) JP4360446B1 (https=)
KR (1) KR101225306B1 (https=)
CN (1) CN102187442A (https=)
TW (2) TW201421553A (https=)
WO (1) WO2010044179A1 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103165478A (zh) * 2011-12-19 2013-06-19 日东电工株式会社 半导体装置的制造方法
CN104851849A (zh) * 2014-02-18 2015-08-19 纬创资通股份有限公司 电子元件封装体及其制作方法
CN108699402A (zh) * 2016-02-26 2018-10-23 日立化成株式会社 粘接膜和划片膜-芯片接合膜

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* Cited by examiner, † Cited by third party
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JP5680330B2 (ja) * 2010-04-23 2015-03-04 株式会社東芝 半導体装置の製造方法
JP5903779B2 (ja) * 2011-06-06 2016-04-13 日立化成株式会社 半導体装置及びその製造方法
JP2013038405A (ja) * 2011-07-08 2013-02-21 Sumitomo Bakelite Co Ltd ダイシングテープ一体型接着シート、半導体装置、多層回路基板及び電子部品
JP2013125787A (ja) * 2011-12-13 2013-06-24 Hitachi Chemical Co Ltd 半導体装置及びその製造方法
EP2800131A1 (en) * 2013-04-29 2014-11-05 ABB Technology AG Method for sinter bonding semiconductor devices
JP2014090173A (ja) * 2013-11-01 2014-05-15 Sumitomo Bakelite Co Ltd 接着フィルム、半導体装置、多層回路基板および電子部品
JP6223155B2 (ja) * 2013-11-29 2017-11-01 サムスン エスディアイ カンパニー, リミテッドSamsung Sdi Co., Ltd. 接着剤層用塗布組成物、半導体用接着フィルムおよびその製造方法、ならびに、これを用いた半導体装置の製造方法
JP2015199814A (ja) * 2014-04-08 2015-11-12 住友ベークライト株式会社 樹脂組成物、接着フィルム、接着シート、ダイシングテープ一体型接着シート、バックグラインドテープ一体型接着シート、ダイシングテープ兼バックグラインドテープ一体型接着シート、および、電子装置
EP3147340A4 (en) * 2014-05-23 2018-01-03 Dexerials Corporation Adhesive agent and connection structure
TWI546934B (zh) * 2014-10-20 2016-08-21 錼創科技股份有限公司 Led陣列擴張方法及led陣列單元
KR102012789B1 (ko) 2016-03-28 2019-08-21 주식회사 엘지화학 반도체 장치
US10253223B2 (en) 2016-03-31 2019-04-09 Lg Chem, Ltd. Semiconductor device and method for manufacturing the same using an adhesive
US10756119B2 (en) * 2016-04-20 2020-08-25 Samsung Display Co., Ltd. Display device and method for manufacturing same
JP7007827B2 (ja) * 2017-07-28 2022-01-25 日東電工株式会社 ダイボンドフィルム、ダイシングダイボンドフィルム、および半導体装置製造方法
JP7046586B2 (ja) * 2017-12-14 2022-04-04 日東電工株式会社 接着フィルムおよびダイシングテープ付き接着フィルム
KR102530763B1 (ko) 2018-09-21 2023-05-11 삼성전자주식회사 반도체 패키지의 제조방법
KR102710946B1 (ko) * 2019-01-28 2024-09-27 가부시끼가이샤 레조낙 접착제 조성물, 필름상 접착제, 접착 시트, 및 반도체 장치의 제조 방법
JP7258421B2 (ja) * 2019-02-15 2023-04-17 株式会社ディスコ ウェーハの加工方法
KR102428187B1 (ko) * 2019-07-03 2022-08-02 주식회사 엘지화학 점착 필름, 이의 제조 방법 및 이를 포함하는 플라스틱 유기 발광 디스플레이
KR102428192B1 (ko) * 2019-07-03 2022-08-02 주식회사 엘지화학 점착 필름, 이의 제조 방법 및 이를 포함하는 플라스틱 유기 발광 디스플레이
KR102428188B1 (ko) * 2019-07-03 2022-08-01 주식회사 엘지화학 점착 필름, 이의 제조 방법 및 이를 포함하는 플라스틱 유기 발광 디스플레이
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KR102428179B1 (ko) * 2019-07-03 2022-08-02 주식회사 엘지화학 점착 필름, 이의 제조 방법 및 이를 포함하는 플라스틱 유기 발광 디스플레이
KR102428193B1 (ko) * 2019-07-03 2022-08-02 주식회사 엘지화학 점착 필름, 이의 제조 방법 및 이를 포함하는 플라스틱 유기 발광 디스플레이
JP2021015823A (ja) * 2019-07-10 2021-02-12 株式会社ディスコ ウェーハの加工方法
US10991621B2 (en) * 2019-08-05 2021-04-27 Texas Instruments Incorporated Semiconductor die singulation
JP7413804B2 (ja) * 2020-02-03 2024-01-16 三菱ケミカル株式会社 粘接着剤組成物、粘接着剤、粘接着シート、及び積層体
JP2023012708A (ja) * 2021-07-14 2023-01-26 イビデン株式会社 プリント配線板の製造方法およびその方法の実施に用いられるコーティングシステム
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JP2024033695A (ja) * 2022-08-31 2024-03-13 株式会社ディスコ チップ処理方法
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