CN100544030C - 沟道蚀刻薄膜晶体管 - Google Patents
沟道蚀刻薄膜晶体管 Download PDFInfo
- Publication number
- CN100544030C CN100544030C CNB2005100927494A CN200510092749A CN100544030C CN 100544030 C CN100544030 C CN 100544030C CN B2005100927494 A CNB2005100927494 A CN B2005100927494A CN 200510092749 A CN200510092749 A CN 200510092749A CN 100544030 C CN100544030 C CN 100544030C
- Authority
- CN
- China
- Prior art keywords
- electrode
- drain
- source electrode
- principal part
- active layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 112
- 239000010408 film Substances 0.000 claims abstract description 72
- 239000012212 insulator Substances 0.000 claims abstract description 66
- 239000000758 substrate Substances 0.000 claims abstract description 39
- 239000011521 glass Substances 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 239000004020 conductor Substances 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 288
- 229910021417 amorphous silicon Inorganic materials 0.000 description 47
- 238000005286 illumination Methods 0.000 description 43
- 230000004048 modification Effects 0.000 description 34
- 238000012986 modification Methods 0.000 description 34
- 239000011651 chromium Substances 0.000 description 25
- 238000004519 manufacturing process Methods 0.000 description 25
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 21
- 229910052698 phosphorus Inorganic materials 0.000 description 21
- 239000011574 phosphorus Substances 0.000 description 21
- 238000000034 method Methods 0.000 description 20
- 230000008569 process Effects 0.000 description 19
- 229910052804 chromium Inorganic materials 0.000 description 17
- 239000000203 mixture Substances 0.000 description 16
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 15
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 15
- 238000005530 etching Methods 0.000 description 13
- 229910052581 Si3N4 Inorganic materials 0.000 description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 239000004973 liquid crystal related substance Substances 0.000 description 9
- 238000005229 chemical vapour deposition Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 239000011159 matrix material Substances 0.000 description 6
- 239000007769 metal material Substances 0.000 description 6
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000003071 parasitic effect Effects 0.000 description 5
- 239000012780 transparent material Substances 0.000 description 5
- 238000011282 treatment Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- 239000002305 electric material Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 210000002858 crystal cell Anatomy 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- NJWNEWQMQCGRDO-UHFFFAOYSA-N indium zinc Chemical compound [Zn].[In] NJWNEWQMQCGRDO-UHFFFAOYSA-N 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001844 chromium Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66765—Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41733—Source or drain electrodes for field effect devices for thin film transistors with insulated gate
Abstract
Description
Claims (13)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP045686/2002 | 2002-02-22 | ||
JP2002045686A JP4604440B2 (ja) | 2002-02-22 | 2002-02-22 | チャネルエッチ型薄膜トランジスタ |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB031037984A Division CN1244162C (zh) | 2002-02-22 | 2003-02-24 | 沟道蚀刻薄膜晶体管 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1734791A CN1734791A (zh) | 2006-02-15 |
CN100544030C true CN100544030C (zh) | 2009-09-23 |
Family
ID=27750591
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100927494A Expired - Lifetime CN100544030C (zh) | 2002-02-22 | 2003-02-24 | 沟道蚀刻薄膜晶体管 |
CNB031037984A Expired - Lifetime CN1244162C (zh) | 2002-02-22 | 2003-02-24 | 沟道蚀刻薄膜晶体管 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB031037984A Expired - Lifetime CN1244162C (zh) | 2002-02-22 | 2003-02-24 | 沟道蚀刻薄膜晶体管 |
Country Status (5)
Country | Link |
---|---|
US (2) | US6858867B2 (zh) |
JP (1) | JP4604440B2 (zh) |
KR (1) | KR100510935B1 (zh) |
CN (2) | CN100544030C (zh) |
TW (1) | TW587339B (zh) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101152528B1 (ko) * | 2005-06-27 | 2012-06-01 | 엘지디스플레이 주식회사 | 누설전류를 줄일 수 있는 액정표시소자 및 그 제조방법 |
KR101350609B1 (ko) * | 2005-12-30 | 2014-01-10 | 엘지디스플레이 주식회사 | 박막 트랜지스터 어레이 기판 및 그 제조 방법 |
KR101232061B1 (ko) * | 2006-04-24 | 2013-02-12 | 삼성디스플레이 주식회사 | 금속 배선의 제조 방법 및 표시 기판의 제조 방법 |
CN101382728B (zh) * | 2007-09-07 | 2010-07-28 | 北京京东方光电科技有限公司 | 灰阶掩膜版结构 |
JP2009087996A (ja) * | 2007-09-27 | 2009-04-23 | Dainippon Printing Co Ltd | 有機半導体素子、有機半導体素子の製造方法、有機トランジスタアレイ、およびディスプレイ |
US9269573B2 (en) * | 2008-09-17 | 2016-02-23 | Idemitsu Kosan Co., Ltd. | Thin film transistor having crystalline indium oxide semiconductor film |
KR101540341B1 (ko) * | 2008-10-17 | 2015-07-30 | 삼성전자주식회사 | 패널 구조체, 패널 구조체를 포함하는 표시장치 및 이들의 제조방법 |
JPWO2010070944A1 (ja) * | 2008-12-15 | 2012-05-24 | 出光興産株式会社 | 酸化インジウム系焼結体及びスパッタリングターゲット |
US8278657B2 (en) * | 2009-02-13 | 2012-10-02 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, semiconductor device including the transistor, and manufacturing method of the transistor and the semiconductor device |
US9312156B2 (en) | 2009-03-27 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor |
KR101836067B1 (ko) * | 2009-12-21 | 2018-03-08 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 박막 트랜지스터와 그 제작 방법 |
JP2011175032A (ja) * | 2010-02-23 | 2011-09-08 | Hitachi Displays Ltd | 表示装置 |
JP5615605B2 (ja) * | 2010-07-05 | 2014-10-29 | 三菱電機株式会社 | Ffsモード液晶装置 |
JP2012053372A (ja) * | 2010-09-03 | 2012-03-15 | Hitachi Displays Ltd | 液晶表示装置 |
JP5977523B2 (ja) | 2011-01-12 | 2016-08-24 | 株式会社半導体エネルギー研究所 | トランジスタの作製方法 |
US8536571B2 (en) * | 2011-01-12 | 2013-09-17 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
WO2012147950A1 (ja) * | 2011-04-28 | 2012-11-01 | シャープ株式会社 | 液晶パネル、液晶表示装置、テレビジョン受像機 |
KR20130092848A (ko) * | 2012-02-13 | 2013-08-21 | 삼성전자주식회사 | 박막 트랜지스터 및 이를 채용한 디스플레이 패널 |
CN102544000A (zh) * | 2012-03-13 | 2012-07-04 | 深圳市华星光电技术有限公司 | 阵列基板及相应的显示面板 |
JP6110693B2 (ja) * | 2012-03-14 | 2017-04-05 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR101388655B1 (ko) | 2012-05-29 | 2014-04-25 | 한국전기연구원 | 반응도 향상을 위해 비대칭 구조를 적용한 전계효과트랜지스터 테라헤르츠 검출기 |
JP2014038911A (ja) * | 2012-08-13 | 2014-02-27 | Sony Corp | 薄膜トランジスタおよびその製造方法、並びに表示装置および電子機器 |
CN103035653A (zh) * | 2012-10-10 | 2013-04-10 | 深圳市华星光电技术有限公司 | 薄膜晶体管像素结构及其制作方法 |
KR102130110B1 (ko) * | 2013-10-21 | 2020-07-06 | 삼성디스플레이 주식회사 | 표시 패널 및 이의 제조 방법 |
CN103681696A (zh) | 2013-12-24 | 2014-03-26 | 京东方科技集团股份有限公司 | 一种电极引出结构、阵列基板以及显示装置 |
CN103715095B (zh) * | 2013-12-27 | 2016-01-20 | 北京京东方光电科技有限公司 | 掩膜版组、薄膜晶体管及制作方法、阵列基板、显示装置 |
CN105993077B (zh) | 2014-02-14 | 2019-12-06 | 夏普株式会社 | 有源矩阵基板 |
CN103915509B (zh) * | 2014-03-25 | 2017-07-18 | 京东方科技集团股份有限公司 | 一种薄膜晶体管、阵列基板及显示装置 |
TWI571687B (zh) | 2014-05-16 | 2017-02-21 | 友達光電股份有限公司 | 顯示面板及其陣列基板 |
CN105789316A (zh) * | 2014-12-25 | 2016-07-20 | 业鑫科技顾问股份有限公司 | 薄膜晶体管及其制作方法 |
KR102103986B1 (ko) * | 2019-03-14 | 2020-04-24 | 삼성전자주식회사 | 박막 트랜지스터 및 이를 채용한 디스플레이 패널 |
Family Cites Families (19)
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JPS61259565A (ja) | 1985-05-13 | 1986-11-17 | Fuji Xerox Co Ltd | 薄膜トランジスタおよびその製造方法 |
JPH03278480A (ja) * | 1990-03-27 | 1991-12-10 | Canon Inc | 薄膜半導体装置 |
JP2625585B2 (ja) * | 1991-03-08 | 1997-07-02 | 沖電気工業株式会社 | 薄膜トランジスタアレイ基板及びその製造方法 |
JPH04360583A (ja) | 1991-06-07 | 1992-12-14 | Nippon Steel Corp | 薄膜トランジスタ |
JPH07273333A (ja) | 1994-03-28 | 1995-10-20 | Sanyo Electric Co Ltd | 薄膜トランジスタ及びその製造方法 |
JP3002099B2 (ja) * | 1994-10-13 | 2000-01-24 | 株式会社フロンテック | 薄膜トランジスタおよびそれを用いた液晶表示装置 |
KR0166894B1 (ko) * | 1995-02-20 | 1999-03-30 | 구자홍 | 액정표시장치 |
JP2780681B2 (ja) * | 1995-08-11 | 1998-07-30 | 日本電気株式会社 | アクティブマトリクス液晶表示パネル及びその製造方法 |
KR100338480B1 (ko) * | 1995-08-19 | 2003-01-24 | 엘지.필립스 엘시디 주식회사 | 액정표시장치및그제조방법 |
JP3622934B2 (ja) * | 1996-07-31 | 2005-02-23 | エルジー フィリップス エルシーディー カンパニー リミテッド | 薄膜トランジスタ型液晶表示装置 |
JP3223805B2 (ja) * | 1996-08-26 | 2001-10-29 | 日本電気株式会社 | 順スタガード型薄膜トランジスタ |
JPH10133227A (ja) * | 1996-10-28 | 1998-05-22 | Hitachi Ltd | 液晶表示装置およびその製造方法 |
JPH1116188A (ja) | 1997-06-26 | 1999-01-22 | Victor Co Of Japan Ltd | 半導体レーザ及び光ピックアップ |
JP3767100B2 (ja) | 1997-07-10 | 2006-04-19 | 三菱電機株式会社 | 配電システム |
JPH1187717A (ja) * | 1997-09-04 | 1999-03-30 | Hitachi Ltd | 半導体装置とアクティブマトリックス基板および液晶表示装置 |
JPH1185789A (ja) | 1997-09-10 | 1999-03-30 | Nippon Telegr & Teleph Corp <Ntt> | 分散検索装置 |
JP4100646B2 (ja) * | 1998-12-28 | 2008-06-11 | エルジー.フィリップス エルシーデー カンパニー,リミテッド | 薄膜トランジスタおよびそれを備えた液晶表示装置 |
JP2001308333A (ja) | 2000-04-21 | 2001-11-02 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタ |
JP3415602B2 (ja) * | 2000-06-26 | 2003-06-09 | 鹿児島日本電気株式会社 | パターン形成方法 |
-
2002
- 2002-02-22 JP JP2002045686A patent/JP4604440B2/ja not_active Expired - Lifetime
-
2003
- 2003-02-21 TW TW092103739A patent/TW587339B/zh not_active IP Right Cessation
- 2003-02-21 US US10/369,756 patent/US6858867B2/en not_active Expired - Lifetime
- 2003-02-21 KR KR10-2003-0010984A patent/KR100510935B1/ko active IP Right Grant
- 2003-02-24 CN CNB2005100927494A patent/CN100544030C/zh not_active Expired - Lifetime
- 2003-02-24 CN CNB031037984A patent/CN1244162C/zh not_active Expired - Lifetime
-
2004
- 2004-12-21 US US11/017,075 patent/US7038241B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20050104128A1 (en) | 2005-05-19 |
CN1244162C (zh) | 2006-03-01 |
JP4604440B2 (ja) | 2011-01-05 |
KR100510935B1 (ko) | 2005-08-30 |
CN1734791A (zh) | 2006-02-15 |
TW200303616A (en) | 2003-09-01 |
US7038241B2 (en) | 2006-05-02 |
CN1440080A (zh) | 2003-09-03 |
KR20030069889A (ko) | 2003-08-27 |
TW587339B (en) | 2004-05-11 |
US6858867B2 (en) | 2005-02-22 |
US20030160240A1 (en) | 2003-08-28 |
JP2003249655A (ja) | 2003-09-05 |
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