CN100423178C - 集成驱动器工艺流程 - Google Patents
集成驱动器工艺流程 Download PDFInfo
- Publication number
- CN100423178C CN100423178C CNB038180308A CN03818030A CN100423178C CN 100423178 C CN100423178 C CN 100423178C CN B038180308 A CNB038180308 A CN B038180308A CN 03818030 A CN03818030 A CN 03818030A CN 100423178 C CN100423178 C CN 100423178C
- Authority
- CN
- China
- Prior art keywords
- light modulator
- diffractive light
- fore
- transistor
- transistorized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims abstract description 57
- 230000008569 process Effects 0.000 title abstract description 41
- 230000008878 coupling Effects 0.000 claims abstract description 8
- 238000010168 coupling process Methods 0.000 claims abstract description 8
- 238000005859 coupling reaction Methods 0.000 claims abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims description 55
- 239000002184 metal Substances 0.000 claims description 55
- 238000005530 etching Methods 0.000 claims description 43
- 239000011248 coating agent Substances 0.000 claims description 42
- 238000000576 coating method Methods 0.000 claims description 42
- 239000000758 substrate Substances 0.000 claims description 18
- 238000012545 processing Methods 0.000 claims description 8
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims description 3
- 230000004044 response Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 45
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 18
- 229910052710 silicon Inorganic materials 0.000 description 18
- 239000010703 silicon Substances 0.000 description 18
- 238000000151 deposition Methods 0.000 description 15
- 229910052581 Si3N4 Inorganic materials 0.000 description 14
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 13
- 230000008021 deposition Effects 0.000 description 11
- 238000000059 patterning Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 9
- 239000010408 film Substances 0.000 description 7
- 238000001465 metallisation Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 6
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000000137 annealing Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 238000010276 construction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000007521 mechanical polishing technique Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000009401 outcrossing Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000009279 wet oxidation reaction Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
- B81C1/00246—Monolithic integration, i.e. micromechanical structure and electronic processing unit are integrated on the same substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/045—Optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/01—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS
- B81B2207/015—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS the micromechanical device and the control or processing electronics being integrated on the same substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/07—Interconnects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/016—Passivation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/07—Integrating an electronic processing unit with a micromechanical structure
- B81C2203/0707—Monolithic integration, i.e. the electronic processing unit is formed on or in the same substrate as the micromechanical structure
- B81C2203/0735—Post-CMOS, i.e. forming the micromechanical structure after the CMOS circuit
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/07—Integrating an electronic processing unit with a micromechanical structure
- B81C2203/0707—Monolithic integration, i.e. the electronic processing unit is formed on or in the same substrate as the micromechanical structure
- B81C2203/0757—Topology for facilitating the monolithic integration
- B81C2203/0778—Topology for facilitating the monolithic integration not provided for in B81C2203/0764 - B81C2203/0771
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Power Engineering (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Liquid Crystal (AREA)
- Electrodes Of Semiconductors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Abstract
一种集成器件包括:一个或多个器件驱动器和单片地耦合到所述一个或多个驱动器电路的衍射光调制器。所述一个或多个驱动器电路被配置成用于处理接收的控制信号和将处理的控制信号传送给所述衍射光调制器。一种制造所述集成器件的方法优选地包括制造多个晶体管的每一个的前端部分;绝缘所述多个晶体管的前端部分;制造一个衍射光调制器的一前端部分;绝缘所述衍射光调制器的所述前端部分;为所述多个晶体管制造内部连线;应用一敞口阵列掩模和湿式蚀刻以达到所述衍射光调制器;和制造所述衍射光调制器的一后端部分,从而单片地耦合所述衍射光调制器和所述多个晶体管。
Description
技术领域
本发明涉及一种光调制器和器件驱动器的集成方法和装置。更加具体地说,本发明用于在相同的芯片上对一衍射光栅和相关的器件驱动器进行单片集成。
背景技术
衍射光栅用于对入射光束进行调制。一个这样的衍射光栅是光栅光阀。器件驱动器对光栅光阀提供控制信号,该控制信号指令光栅光阀对入射到其上的光束进行适当的调制。光栅光阀通过引线结合与所述器件相连接,其中每个引线结合与光栅光阀上的一个结合垫和所述器件驱动器上的一个相应结合垫相连接。如图1所示的传统光栅光阀组件包括一光栅光阀芯片10和四个单独的驱动器管芯12、14、16和18。每个驱动器管芯12、14、16和18通过多个引线结合11与光栅光阀芯片10相连接。光栅光阀按照其自身的工艺形成在硅上。光栅光阀包括可移动的元件同时每个元件与一个相应的结合垫相连接。光栅光阀本质上为无源器件,其中要向其施加电压以使所述元件移动。相反,器件驱动器是有源的。每个器件驱动器包括多个具有适当的内部连线层的晶体管。器件驱动器接收数字数据并将它转换成模拟电压形式的模拟响应。模拟电压然后被施加给适当的结合垫,然后通过光栅光阀上的相应元件接收该模拟电压。以这种方式,器件驱动器为光栅光阀提供了控制信号,从而指示各个元件移动。
在光调制器件领域,光栅光阀上的每个元件与光调制器件中的一个象素相对应。例如,在1088象素的情况下,需要1088个引线结合作为从器件驱动器到光栅光阀的输入。1088个引线结合在四个器件驱动器的每一个的输出侧需要272个结合垫。然而,可以使用标准半导体处理步骤非常容易地进行高密度布线,那么就可以进行引线结合。因为在每个器件驱动器的输入侧只需要60-70个引线垫,所以将有利地在相同的芯片上对器件驱动器和光栅光阀之间的连接进行内连线。以这种方式,将只需要具有60-70个引线结合作为对该集成芯片的输入,因此消除了传统的光栅光阀组件的附加的1088个引线结合。通过减少引线结合的数量,制造工艺变得更容易。此外,较少的引线结合降低了每个器件的封装成本。进一步,通过消除器件驱动器和光栅光阀之间的引线结合,先前其功能性和/或速度通过引线结合的寄生电容而受到限制的器件驱动器设计类型现在可被使用。
与这种大量引线结合相关联的还存在可靠性问题。因为存在与每个引线结合相关联的有限的故障率,所以引线结合越多,引线结合之一发生故障的机会就越大。减少引线结合的数量将必然减少故障引线结合的数量,并增加了器件的可靠性。
实际上,每个结合垫留有一个覆盖范围。这样,光栅光阀组件的尺寸在很大程度上就是由结合垫的总数确定的。如果减少结合垫的数量,则光栅光阀组件的尺寸也能被减小。因为所述器件受到接合垫的限制,所以有相当大量的地方浪费。因为该浪费的地方存在于可用于制造器件驱动器的硅上,所以可在当前正由接合垫所使用的地方上制造器件驱动器。
静电放电(ESD)保护通常被结合到从二极管到三级管和集成电路的有源器件中。在集成电路上制造晶体管过程中对垫片添加ESD保护结构是布局和设计的问题。该保护防止电路受到ESD损坏。然而,因为在光栅光阀芯片上没有有源器件,所以不存在ESD保护。因而,在光栅光阀制造过程中由于ESD引起的“断裂(snap-downs)”将损失大量的生产率。在断裂中,光栅光阀上的垫片用作天线和监视ESD事件。ESD事件被看作是由光栅光阀上的元件提供的电压使所述元件发生断裂由此破坏其自身。可有利的将ESD保护结合到光栅光阀的通常制造工艺中。
考虑到上述缺陷,将清楚如果通过光栅光阀将器件驱动器单片地集成到相同的硅上,那么这将产生一个很大的优点。
遗憾的是,器件驱动器和光栅光阀的制造工艺是不同的。此外,通过将器件驱动器和光栅光阀集成到相同的硅衬底上,将引入显著的制造问题。
下面说明关于图2和3的传统晶体管制造过程。图2表示在光栅光阀组件的器件驱动器中使用的典型晶体管。图2中所示的晶体管处于制造过程的初期,并且通常被称作晶体管的前端。在第一步中,在硅衬底20上生长二氧化硅膜22。接着,通过半导体制造工艺中所公知的制造工艺加入栅极24和源漏极26。下一步,如图3所示,在晶体管的前端上沉积氧化物层30。然后典型地通过化学机械抛光技术对氧化物层30进行平坦化处理。然后例如在氧化物层30中蚀刻用于达到栅极24和硅衬底20的接触孔。进行金属化过程用于对器件驱动器进行布线。金属化典型地是通过在氧化物层30上溅射一金属层进行的,对金属层进行图案化和蚀刻以形成触点。
然后另一个氧化物层36被沉积和平坦化。在氧化物层36中蚀刻用于达到触点32和34的接触孔。然后进行金属化过程以形成触点38和40。按照器件的设计考虑确定加入另外的氧化物层和金属层。典型地,存在3-5个用于形成各器件驱动器的内部连线的金属层。
下面参照图4-7说明传统的光栅光阀的制造过程。第一步,如图4所示,在硅衬底56上沉积绝缘层51之后,沉积牺牲层52和低应力氮化硅薄膜54。
在第二步,如图5所示,氮化硅薄膜54被光刻图案化成细长元件58形式的光栅元件的格栅。在此光刻图案化处理之后,外围氮化硅构架60保持在硅衬底56的上表面的整个外周边周围。在第二步的图案化处理之后,蚀刻牺牲层52,从而得到图6所示的结构。能够看出每个元件58现在形成一个独立式的氮化硅桥。如从图6还可以看出,牺牲层52在构架60下面未被整个蚀刻掉,所以构架60由该剩余部分的牺牲层52支撑在硅衬底56之上。
如图7所示,最后的制造步骤是溅射铝膜以增强元件58和衬底56的反射性,和提供一第一电极用于在所述元件和衬底之间施加电压。第二电极是通过将铝膜64溅射到硅衬底56的底部56上形成的。可选择地,所述第二电极可在沉积绝缘层51之前的步骤通过将铝膜溅射到硅衬底56的上部分上更早地引入该过程中。
在图8和9中,说明了传统的光栅光阀的一可选择实施例。在该实施例中,光栅光阀由多个等间隔的、等尺寸的、固定的元件72和多个等间隔的、等尺寸的、可移动的元件74组成,其中可移动元件74存在于固定的元件72之间的间隔中。每个固定的元件被一支撑材料体76支撑和保持在适当位置上,支撑材料体76延伸所述固定元件72的整个长度。所述材料体76是在光刻蚀刻过程中形成的,其中各支持材料体76之间的材料被除去。
问题是如何在与包括器件驱动器的晶体管相同的芯片上制造光栅光阀。使用传统的制造工艺步骤将光栅光阀和其相关的器件驱动器结合到单片集成器件中将是有利的。
发明内容
本发明包括一制造集成器件的方法的实施例。所述方法优选地包括:制造多个晶体管的每一个的前端部分;绝缘所述多个晶体管的前端部分;制造一个衍射光调制器的一前端部分;绝缘所述衍射光调制器的所述前端部分;为所述多个晶体管制造内部连线;应用一敞口阵列掩模和湿式蚀刻以达到所述衍射光调制器;制造所述衍射光调制器的一后端部分,由此单片地耦合所述衍射光调制器和所述多个晶体管。所述多个晶体管及其相关的内部连线可形成一个或多个器件驱动器,其被配置成用于处理接收的控制信号和将处理的控制信号传送给所述衍射光调制器。制造所述衍射光调制器的前端部分和为所述多个晶体管制造前端部分可使用高温处理步骤来进行。制造内部连线和制造所述衍射光调制器的后端部分可使用低温处理步骤来进行。绝缘所述多个晶体管的前端部分可包括:在所述多个晶体管的前端部分上沉积一氧化物层;和对所述氧化物层进行平坦化。绝缘所述衍射光调制器的前端部分可包括:在所述衍射光调制器的前端部分上沉积一氧化物层;和对所述氧化物层进行平坦化。
制造内部连线的步骤可包括制造一个或多个金属层。所述优选的方法还可进一步包括在每个金属层被制造之后从所述衍射光调制器的上部除去金属。通过过蚀刻从所述衍射光调制器上面除去每个金属层,并且在所述衍射光调制器的前端部分上沉积的氧化物层足够厚以便允许在没有损坏衍射光调制器的前端部分的情况下进行过蚀刻。所述多个晶体管的内部连线可包括与所述多个晶体管的每一个的触点。所述触点可包括一最大纵横比,最大纵横比限制所述多个晶体管的前端部分上的氧化物层和所述衍射光调制器的前端部分上的氧化物层的最大结合厚度。所述衍射光调制器和所述多个晶体管被单片地耦合以将控制信号从所述多个晶体管传送至所述衍射光调制器,使得所述衍射光调制器响应所述控制信号对入射光束进行调制。湿式蚀刻优选地包括大约10∶1的缓冲氧化物湿式蚀刻,以对所述衍射光调制器上方的层进行选择蚀刻。
本发明包括一集成器件的实施例。所述集成器件包括:一个或多个器件驱动器,和一与所述一个或多个驱动器电路单片地耦合的衍射光调制器。所述一个或多个驱动器电路优选地被配置成对接收的控制信号进行处理并将处理的控制信号传送给所述衍射光调制器。
附图的简略说明
图1表示一传统的部件结构,在该结构中一衍射光栅与分立的器件驱动器相连接;
图2表示一典型的没有内部连线的晶体管结构;
图3表示一典型的带有内部连线的晶体管结构;
图4-7为通过一硅衬底的剖面图,其示出了一传统的反射、可变形、衍射光栅的制造过程;
图8为与图7类似的剖面图,其示出了一传统的非衍射模式下的衍射光栅的一可选择实施例;
图9为图8中所示的衍射光栅的剖面图,其示出了衍射模式下的衍射光栅;
图10-14为通过一硅衬底的剖面图,其示出了根据本发明优选实施例的单片地集成器件的前端制造过程;
图15-20为与图10-14类似的剖面图,其示出了根据本发明优选实施例的单片地集成器件的后端制造过程。
具体实施方式
在图10-20中示出了根据本发明的生产一单片集成衍射光栅和器件驱动器所需的制造步骤。特别的,所述制造过程开始于图10-14中所示的前端制造过程。所述制造过程完成于图15-20中所示的后端制造过程。前端制造过程包括制造晶体管的前端,以及制造所述衍射光栅的前端,所述制造晶体管前端的步骤形成所述器件驱动器。晶体管前端和衍射光栅的前端的制造过程是使用高温处理步骤进行的。后端制造过程包括晶体管内部连线的金属化过程和衍射光栅的金属化过程。金属化是使用低温处理步骤进行的。与单片集成器件的制造过程相关联的总热量预算必须要考虑到与每个高温处理步骤以及每个低温处理步骤相关联的热量预算。
如图10所示,前端制造过程中的第一步是制造一传统的MOS晶体管100的前端。MOS晶体管100可以是P型晶体管或N型晶体管。晶体管100是使用与上面参照图2和3所述的那些步骤相似的传统制造步骤制造的。晶体管100包括在硅衬底102上制造的栅极98和源-漏极96。如图10-20中所示的晶体管100的结构仅仅是用于说明的目的,而不应限制本发明的范围。除了或代替晶体管100,可使用可选选择的传统晶体管结构。
在硅衬底102中制造晶体管100的前端之后的步骤是在晶体管100和硅衬底102上沉积氧化物层104。然后使氧化物层104平坦化,其中氧化物层104的厚度是足以用于适当平坦化的最小量。使氧化物层104和后来的氧化物层平坦化的优选方法是通过化学机械抛光(CMP)。可选择地,任何传统的平坦化方法都能使用。作为对氧化物层104进行沉积和平坦化的结果,晶体管100被密封在一保护氧化物层中。因为所述晶片在该步骤是平的,所以晶片将在要求的条件下开始制造光栅光阀的前端。相反,如果在首先没有用氧化物层104保护晶体管100的情况下而在晶体管布局上直接开始光栅光阀的制造,那么晶体管100将很有可能被损坏。即使晶体100未被损坏,则将出现相当大的处理难题。这些困难包括从各个晶体管元件的侧壁除去所述薄膜。从侧壁除去薄膜可导致等离子体损害、氧化物变粗糙、和其它有害影响。克服这些困难和其它困难增加了光栅光阀制造过程的复杂性。通过使保护氧化物层内的晶体管100绝缘,光栅光阀制造过程的潜在损害方面被消除了。
下一步骤是在氧化物层104上沉积掺杂多晶硅层,其后是在掺杂多晶硅上沉积绝缘层,典型的是氧化物。在图案化和蚀刻时,多晶硅层形成所述光栅光阀的一底部电极106,而绝缘层形成一蚀刻阻止层108,如图11所示。
如图12所示,下一步骤是沉积牺牲层110。然后图案化和蚀刻牺牲层,如图13所示。如图14所示,下一步骤是沉积氮化硅层112。所述氮化硅层112被光刻图案化成一光栅元件格栅,其形式取决于对入射到其上的光束进行要求的调制所需的特定光栅光阀的规格。图10-18表示光栅光阀的典型剖面图,更加具体地说,为光栅光阀的边缘部分的剖面图。应该清楚该剖面图仅仅是示例的,并用于帮助理解制造过程。在该光刻图案化处理之后,保留下来的氮化硅构架用作光栅光阀的一些或所有光栅元件的比较刚性的支撑结构。
下一步骤是沉积氧化物层114,然后其被平坦化。氧化物层114优选地通过CMP进行平坦化。作为对氧化物层114进行沉积和平坦化的结果,光栅光阀被嵌入到一保护氧化物层中。氧化物层114需要具有最小的厚度116以使得一随后的过蚀刻步骤能在没有损坏氮化硅层112的情况下得以进行。该过蚀刻步骤将在下面进行更加详细的说明。这就完成了前端制造过程。
如上所述,晶体管的前端制造过程和光栅光阀的前端制造过程是使用高温处理步骤进行的。优选地,在晶体管的前端中,在800-1200℃下生长二氧化硅,在550-650℃下进行栅的沉积,在800-1200℃下对源-漏极进行退火。退火温度是根据所述器件制造过程的总热量预算确定的。为了确定退火温度,与后端制造相关联的低温处理的热量预算和光栅光阀前端制造过程的热量预算被确定并从总热量预算中减去。其结果是前端晶体管热量预算。然后根据前端晶体管热量预算就可确定退火温度。在光栅光阀的前端中,掺杂多晶硅层的沉积是在550-650℃下进行的,并伴有800-1200℃的短退火,绝缘层的沉积是在800-1200℃下进行的,牺牲层的沉积是在550-650℃下进行的,氮化硅层的沉积是在700-900℃下进行的。前述每个温度范围都是近似值。前述每个沉积步骤优选地都是使用低压化学汽相沉积或LPCVD进行的。所述优选的温度范围是用于上述处理的推荐温度范围。应该理解也可使用其他过程来制造这种或其他种类的晶体管,其中所使用的其他过程已知能在不同的温度范围下实施。
如图15所示,后端制造过程中的第一步是图案化和蚀刻用于达到晶体管100的栅极98的接触孔118。接触孔118包括具有限定的最大值的纵横比,其是本领域公知的。最大纵横比限制了接触孔118的最大深度。当确定氧化物层104和氧化物层114的厚度时,是出于说明该最大深度的设计考虑,以使接触孔118的深度不会超过接触孔118的最大纵横比所允许的最大深度。在蚀刻接触孔118之后溅射金属层120。优选地,所述金属是铝,但也可使用其他导电金属。
如图16所示,下一步是图案化和蚀刻金属层120以形成与晶体管100互连的第一金属层。金属层120的蚀刻也需要从光栅光阀上面的区域除去金属。为了确保除去不是内部连线的所有金属层120,进行到氧化物层114中的过蚀刻。因此在光栅光阀上就需要最小氧化物厚度116的氧化物层114。氧化物厚度116用作在不损坏氮化硅层112的情况下允许对金属层120进行过蚀刻的缓冲区。应该清楚在进行了过蚀刻步骤之后,氧化物厚度116小于进行过蚀刻步骤之前的厚度。
如图17所示,下一步是沉积氧化物层122。然后对氧化物层122进行平坦化。氧化物层122优选的通过CMP进行平坦化。然后图案化和蚀刻用于达到金属内部连线120的接触孔。然后执行另一金属层的溅射,然后对该另一金属层进行图案化和过蚀刻以形成到晶体管100的内部连线的第二金属层124。如上所述,过蚀刻也从光栅光阀上的区域除去了金属层。在该第二金属层的制造步骤之后,通过重复下面的步骤来制造一第三金属层:沉积氧化物层(氧化物层126)、对所述氧化物层进行平坦化(优选地通过CMP)、图案化和蚀刻接触孔(以达到金属层124)、溅射金属层、图案化和过蚀刻所述金属层。以这种方式,第三金属层128被形成并且光栅光阀上面区域的金属被清除。金属层120、124和128在所述器件的表面和晶体管100的栅极98之间形成一内部连线。虽然图7所示的内部连线包括三个金属层,但本领域技术人员应该清楚一个内部连线根据需要可包括更多或更少的金属层。优选地,使用3-5个金属层来形成所述内部连线。这些金属化层是使用低温处理步骤制造的,其是本领域公知的。
当用于晶体管100的内部连线被完成时,光栅光阀之上的所有材料都将被除去。如图18所示,该步骤是通过应用称作敞口阵列掩模(open array mask)的掩模来实现的。在允许除去光栅光阀上面的材料的同时,所述敞口阵列掩模用于保护晶体管100和相关的内部连线。为了除去光栅光阀上面的材料,使用了湿式浸渍。优选地,湿式浸渍为缓冲氧化腐蚀剂(BOE)湿式蚀刻。更优选地,湿式浸泡为选择的10∶1BOE湿式蚀刻。可选择地,湿式浸泡可以是20∶1的BOE湿式蚀刻、50∶1的氢氟酸(HF)湿式蚀刻、垫式蚀刻或任何其他类似的基于氢氟酸的湿式氧化蚀刻化学。湿式浸渍允许进行选择蚀刻以除去光栅光阀上的区域130中的材料。当执行湿式浸渍时,区域130被清除并且所述光栅光阀是可达到的。
然后进行金属化以在光栅光阀上形成反射层以及在光栅光阀和晶体管100的内部连线之间提供金属路径。使用低温处理步骤来制造光栅光阀上的金属化层以及金属路径,所述步骤与用于形成晶体管100的金属层的低温处理步骤是一致的。在区域130被清除之后,通过在光栅光阀的的氮化硅层112上溅射、图案化和蚀刻一反射层130来进行光栅光阀的金属化过程,如图19所示。反射层130优选地为铝。然后,溅射、图案化和蚀刻一厚的金属层132以在光栅光阀的反射层和晶体管的内部连线之间形成所述金属路径。应该理解使光栅光阀和金属路径金属化的任何传统方法都能使用。
然后通过在穿过反射层130和氮化硅112的选择区域图案化和蚀刻肋口134来完成所述光栅光阀,其中XeF2被释放以除去牺牲层110。然后执行退火处理以完成本发明的单片集成器件。
在对光栅光阀进行金属化之外需要单独对晶体管进行金属化。这是由在应用敞口阵列掩模的同时使用的湿式浸渍的性质引起的。如上所述,湿式浸渍将光栅光阀之上的氧化物层向下蚀刻至一蚀刻阻止层,该蚀刻阻止层为氮化硅层112。使用上述的蚀刻化学之一,氧化物层对氮化硅的选择性是非常高的,大约为200比1。这在将氧化物层蚀刻至氮化硅层112中是非常有效的。然而,这些蚀刻化学也对金属进行很大程度的蚀刻,特别是对在光栅光阀上沉积的薄和高质量的金属。因此,有利地在对晶体管进行金属化的同时不对光栅光阀进行金属化。如果在应用敞口阵列掩模之前对光栅光阀进行金属化,那么蚀刻剂将蚀刻光栅光阀金属。相反,在形成晶体管内部连线之后,应用用于湿式浸渍的敞口阵列掩模以除去覆盖光栅光阀的前端的氧化物层,然后形成光栅光阀的反射层和金属路径。
已经对有关单个晶体管100说明了单片集成器件和与之相关的制造过程。该说明仅仅是用于说明的目的,应该清楚本发明的优选实施例包括多个晶体管和相关的内部连线。还应该清楚虽然将本发明描述为包括单个的到栅极98的内部连线,但按照器件的设计考虑的需要,也可以包括含有到所述多个晶体管的内部连线的另外的内部连线。例如,也可以包括到硅衬底的另外的内部连线。
Claims (17)
1. 一种用于制造集成器件的方法,包括下述步骤:
a.制造多个晶体管的每一个的前端部分;
b.绝缘所述多个晶体管的前端部分;
c.制造一衍射光调制器的前端部分;
d.绝缘所述衍射光调制器的所述前端部分;
e.为所述多个晶体管制造内部连线;
f.应用一敞口阵列掩模和湿式蚀刻以达到所述衍射光调制器;
g.制造所述衍射光调制器的后端部分,由此单片地耦合所述衍射光调制器和所述多个晶体管。
2. 根据权利要求1所述的方法,其中所述多个晶体管及其相关的内部连线形成一个或多个器件驱动器,该器件驱动器被配置成用于处理接收的控制信号和将处理的控制信号传送给所述衍射光调制器。
3. 根据权利要求1所述的方法,其中制造所述衍射光调制器的前端部分和为所述多个晶体管制造前端部分是在至少550℃处理温度下进行的。
4. 根据权利要求1所述的方法,其中绝缘所述多个晶体管的前端部分包括:
a.在所述多个晶体管的前端部分上沉积一氧化物层;和
b.对所述氧化物层进行平坦化。
5. 根据权利要求1所述的方法,其中绝缘所述衍射光调制器的前端部分包括:
a.在所述多个衍射光调制器的前端部分上沉积一氧化物层;和
b.对所述氧化物层进行平坦化。
6. 根据权利要求5所述的方法,其中制造内部连线的步骤包括制造一个或多个金属层。
7. 根据权利要求6所述的方法,进一步包括在每个金属层被制造之后从所述衍射光调制器的上方除去金属。
8. 根据权利要求7所述的方法,其中通过过蚀刻从所述衍射光调制器上方除去每个金属层,并且在所述衍射光调制器的前端部分上沉积的氧化物层足够厚以便允许在不损坏衍射光调制器的前端部分的情况下进行过蚀刻。
9. 根据权利要求1所述的方法,其中所述多个晶体管的内部连线包括到所述多个晶体管的每一个的触点,另外其中所述触点具有一最大纵横比,最大纵横比限制所述多个晶体管的前端部分上的氧化物层和所述衍射光调制器的前端部分上的氧化物层的最大结合厚度。
10. 根据权利要求1所述的方法,其中所述衍射光调制器和所述多个晶体管被单片地耦合以将控制信号从所述多个晶体管传送至所述衍射光调制器,使得所述衍射光调制器响应所述控制信号对一入射光束进行调制。
11. 根据权利要求1所述的方法,其中湿式蚀刻包括10∶1的缓冲氧化物湿式蚀刻,以对所述衍射光调制器上方的层进行选择蚀刻。
12. 一种集成器件,包括:
a.用于在一衬底上制造多个晶体管的每一个的前端部分的装置;
b.用于绝缘所述多个晶体管的前端部分的装置;
c.用于制造耦合到所述衬底的一个衍射光调制器的前端部分的装置;
d.用于绝缘所述衍射光调制器的所述前端部分的装置;
e.用于制造一个或多个金属层的装置,所述金属层形成所述多个晶体管的内部连线,由此形成一个或多个驱动器器件;
f.用于应用一敞口阵列掩模和湿式蚀刻以除去所述衍射光调制器之上的层的装置;和
g.用于制造所述衍射光调制器的后端部分的装置,由此单片地耦合所述衍射光调制器和所述多个晶体管。
13. 一种集成器件,包括:
a.一个或多个器件驱动器,包括多个晶体管和相关的内部连线;和
b.与所述一个或多个驱动器电路单片地耦合的衍射光调制器,其中所述一个或多个驱动器电路被配置成将控制信号传送给所述衍射光调制器;
其中所述多个晶体管中的每一个包括一前端部分,所述衍射光调制器包括一前端部分,从而通过一沉积的第一氧化物层将所述衍射光调制器的前端部分与所述多个晶体管的前端部分绝缘。
14. 根据权利要求13所述的集成器件,其中所述衍射光调制器接收所述控制信号并响应于此对入射到所述衍射光调制器的光束进行调制。
15. 根据权利要求13所述的集成器件,其中所述晶体管为MOS晶体管。
16. 根据权利要求13所述的集成器件,其中所述多个晶体管中的每一个包括一含有内部连线的后端部分,所述衍射光调制器包括一含有内部连线的后端部分,从而通过相应的内部连线将所述衍射光调制器单片地耦合到所述一个或多个驱动器电路。
17. 根据权利要求16所述的集成器件,其中所述晶体管内部连线包括一个或多个金属层,所述衍射光调制器的前端部分通过第二沉积氧化物层与所述一个或多个金属层绝缘,另外其中在制造所述晶体管内部连线的第一金属层时,通过过蚀刻从所述衍射光调制器上方的区域除去所述金属,并且所述衍射光调制器的前端部分上的第二沉积氧化物层足够厚以便允许在没有损坏所述衍射光调制器的前端部分的情况下进行过蚀刻。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/161,191 US6767751B2 (en) | 2002-05-28 | 2002-05-28 | Integrated driver process flow |
US10/161,191 | 2002-05-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1672241A CN1672241A (zh) | 2005-09-21 |
CN100423178C true CN100423178C (zh) | 2008-10-01 |
Family
ID=29709749
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB038180308A Expired - Fee Related CN100423178C (zh) | 2002-05-28 | 2003-05-14 | 集成驱动器工艺流程 |
Country Status (7)
Country | Link |
---|---|
US (3) | US6767751B2 (zh) |
EP (1) | EP1509946B1 (zh) |
JP (1) | JP4541141B2 (zh) |
KR (1) | KR101002449B1 (zh) |
CN (1) | CN100423178C (zh) |
AU (1) | AU2003253604A1 (zh) |
WO (1) | WO2003103022A1 (zh) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5834327A (en) * | 1995-03-18 | 1998-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Method for producing display device |
KR100550380B1 (ko) * | 2003-06-24 | 2006-02-09 | 동부아남반도체 주식회사 | 반도체 소자의 금속배선 형성 방법 |
US20050016446A1 (en) * | 2003-07-23 | 2005-01-27 | Abbott John S. | CaF2 lenses with reduced birefringence |
US7489074B2 (en) * | 2004-09-28 | 2009-02-10 | Osram Opto Semiconductors Gmbh | Reducing or eliminating color change for microcavity OLED devices |
KR100687102B1 (ko) * | 2005-03-30 | 2007-02-26 | 삼성전자주식회사 | 이미지 센서 및 그 제조 방법. |
JP4885211B2 (ja) * | 2005-05-18 | 2012-02-29 | コロ テクノロジーズ インコーポレイテッド | 微細電子機械変換器 |
EP1883956A4 (en) | 2005-05-18 | 2011-03-23 | Kolo Technologies Inc | BY-THE-WAFER CONNECTION |
WO2006134580A2 (en) * | 2005-06-17 | 2006-12-21 | Kolo Technologies, Inc. | Micro-electro-mechanical transducer having an insulation extension |
US7529017B1 (en) * | 2006-05-25 | 2009-05-05 | Silicon Light Machines Corporation | Circuit and method for snapdown prevention in voltage controlled MEMS devices |
US8704314B2 (en) * | 2007-12-06 | 2014-04-22 | Massachusetts Institute Of Technology | Mechanical memory transistor |
WO2010077998A1 (en) * | 2008-12-16 | 2010-07-08 | Silicon Light Machines Corporation | Method of fabricating an integrated device |
US8368153B2 (en) * | 2010-04-08 | 2013-02-05 | United Microelectronics Corp. | Wafer level package of MEMS microphone and manufacturing method thereof |
EP2407418A3 (en) * | 2010-07-15 | 2014-04-09 | IMEC vzw | A MEMS device comprising a hermetically sealed cavity and devices obtained thereof |
US8660164B2 (en) | 2011-03-24 | 2014-02-25 | Axsun Technologies, Inc. | Method and system for avoiding package induced failure in swept semiconductor source |
US8643140B2 (en) | 2011-07-11 | 2014-02-04 | United Microelectronics Corp. | Suspended beam for use in MEMS device |
US8525354B2 (en) | 2011-10-13 | 2013-09-03 | United Microelectronics Corporation | Bond pad structure and fabricating method thereof |
WO2013131071A1 (en) | 2012-03-02 | 2013-09-06 | Silicon Light Machines Corporation | Driver for mems spatial light modulator |
US9181086B1 (en) | 2012-10-01 | 2015-11-10 | The Research Foundation For The State University Of New York | Hinged MEMS diaphragm and method of manufacture therof |
CN104058363B (zh) * | 2013-03-22 | 2016-01-20 | 上海丽恒光微电子科技有限公司 | 基于mems透射光阀的显示装置及其形成方法 |
US8981501B2 (en) | 2013-04-25 | 2015-03-17 | United Microelectronics Corp. | Semiconductor device and method of forming the same |
US9967546B2 (en) | 2013-10-29 | 2018-05-08 | Vefxi Corporation | Method and apparatus for converting 2D-images and videos to 3D for consumer, commercial and professional applications |
US20150116458A1 (en) | 2013-10-30 | 2015-04-30 | Barkatech Consulting, LLC | Method and apparatus for generating enhanced 3d-effects for real-time and offline appplications |
KR102156764B1 (ko) * | 2013-11-13 | 2020-09-16 | 엘지디스플레이 주식회사 | 유기 발광 다이오드 표시 장치 및 이의 제조 방법 |
US10158847B2 (en) | 2014-06-19 | 2018-12-18 | Vefxi Corporation | Real—time stereo 3D and autostereoscopic 3D video and image editing |
KR102511103B1 (ko) | 2016-04-26 | 2023-03-16 | 주식회사 디비하이텍 | 멤스 마이크로폰 및 이의 제조 방법 |
KR102486586B1 (ko) * | 2016-06-13 | 2023-01-10 | 주식회사 디비하이텍 | 멤스 마이크로폰의 제조 방법 |
US10352995B1 (en) | 2018-02-28 | 2019-07-16 | Nxp Usa, Inc. | System and method of multiplexing laser triggers and optically selecting multiplexed laser pulses for laser assisted device alteration testing of semiconductor device |
US10782343B2 (en) | 2018-04-17 | 2020-09-22 | Nxp Usa, Inc. | Digital tests with radiation induced upsets |
US11428646B2 (en) * | 2020-08-28 | 2022-08-30 | Openlight Photonics, Inc. | Loss monitoring in photonic circuit fabrication |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6313901B1 (en) * | 1999-09-01 | 2001-11-06 | National Semiconductor Corporation | Liquid crystal display fabrication process using a final rapid thermal anneal |
US6346430B1 (en) * | 1999-09-30 | 2002-02-12 | Intel Corporation | Packaged integrated processor and spatial light modulator |
US6356378B1 (en) * | 1995-06-19 | 2002-03-12 | Reflectivity, Inc. | Double substrate reflective spatial light modulator |
Family Cites Families (780)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USRE16767E (en) | 1927-10-11 | Charles prancis jenkins | ||
USRE16757E (en) | 1922-10-31 | 1927-10-04 | knight | |
US1548262A (en) | 1924-07-02 | 1925-08-04 | Freedman Albert | Manufacture of bicolored spectacles |
US1814701A (en) | 1930-05-31 | 1931-07-14 | Perser Corp | Method of making viewing gratings for relief or stereoscopic pictures |
US2415226A (en) | 1943-11-29 | 1947-02-04 | Rca Corp | Method of and apparatus for producing luminous images |
US2920529A (en) | 1952-05-23 | 1960-01-12 | Blythe Richard | Electronic control of optical and near-optical radiation |
US2991690A (en) | 1953-09-04 | 1961-07-11 | Polaroid Corp | Stereoscopic lens-prism optical system |
US2783406A (en) | 1954-02-09 | 1957-02-26 | John J Vanderhooft | Stereoscopic television means |
NL197714A (zh) | 1954-06-01 | 1900-01-01 | ||
US3256465A (en) | 1962-06-08 | 1966-06-14 | Signetics Corp | Semiconductor device assembly with true metallurgical bonds |
US3388301A (en) | 1964-12-09 | 1968-06-11 | Signetics Corp | Multichip integrated circuit assembly with interconnection structure |
US3443871A (en) | 1965-12-07 | 1969-05-13 | Optomechanisms Inc | Single optical block interferometer means |
US3553364A (en) | 1968-03-15 | 1971-01-05 | Texas Instruments Inc | Electromechanical light valve |
US3576394A (en) | 1968-07-03 | 1971-04-27 | Texas Instruments Inc | Apparatus for display duration modulation |
US3792916A (en) | 1969-02-25 | 1974-02-19 | Us Army | Anti-laser optical filter assembly |
US3600798A (en) | 1969-02-25 | 1971-08-24 | Texas Instruments Inc | Process for fabricating a panel array of electromechanical light valves |
JPS4831507B1 (zh) | 1969-07-10 | 1973-09-29 | ||
US3693239A (en) | 1969-07-25 | 1972-09-26 | Sidney Dix | A method of making a micromodular package |
US3871014A (en) | 1969-08-14 | 1975-03-11 | Ibm | Flip chip module with non-uniform solder wettable areas on the substrate |
BE757764A (fr) | 1969-10-21 | 1971-04-21 | Itt | Systeme d'exploration a l'etat solide |
US3743507A (en) | 1970-10-23 | 1973-07-03 | Rca Corp | Recording of a continuous tone focused image on a diffraction grating |
US3752563A (en) | 1971-09-01 | 1973-08-14 | Sperry Rand Corp | Magnetic film stripe domain diffraction |
US3942245A (en) | 1971-11-20 | 1976-03-09 | Ferranti Limited | Related to the manufacture of lead frames and the mounting of semiconductor devices thereon |
US3781465A (en) | 1972-03-08 | 1973-12-25 | Hughes Aircraft Co | Field sequential color television systems |
US3783184A (en) | 1972-03-08 | 1974-01-01 | Hughes Aircraft Co | Electronically switched field sequential color television |
US3802769A (en) | 1972-08-28 | 1974-04-09 | Harris Intertype Corp | Method and apparatus for unaided stereo viewing |
US3811186A (en) | 1972-12-11 | 1974-05-21 | Ibm | Method of aligning and attaching circuit devices on a substrate |
DE2315658C3 (de) | 1973-03-29 | 1980-11-20 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Verfahren und Vorrichtung zur Verminderung oder Beseitigung der bei Laserstrahlprojektionen auftretenden Granulation |
US3862360A (en) | 1973-04-18 | 1975-01-21 | Hughes Aircraft Co | Liquid crystal display system with integrated signal storage circuitry |
US4103273A (en) | 1973-04-26 | 1978-07-25 | Honeywell Inc. | Method for batch fabricating semiconductor devices |
US3915548A (en) | 1973-04-30 | 1975-10-28 | Hughes Aircraft Co | Holographic lens and liquid crystal image source for head-up display |
US3861784A (en) | 1973-06-29 | 1975-01-21 | Sperry Rand Corp | Programmable diffraction grating |
US4093346A (en) | 1973-07-13 | 1978-06-06 | Minolta Camera Kabushiki Kaisha | Optical low pass filter |
US3886310A (en) | 1973-08-22 | 1975-05-27 | Westinghouse Electric Corp | Electrostatically deflectable light valve with improved diffraction properties |
US3947105A (en) | 1973-09-21 | 1976-03-30 | Technical Operations, Incorporated | Production of colored designs |
US3896338A (en) | 1973-11-01 | 1975-07-22 | Westinghouse Electric Corp | Color video display system comprising electrostatically deflectable light valves |
US3969611A (en) | 1973-12-26 | 1976-07-13 | Texas Instruments Incorporated | Thermocouple circuit |
US3943281A (en) | 1974-03-08 | 1976-03-09 | Hughes Aircraft Company | Multiple beam CRT for generating a multiple raster display |
JPS5742849B2 (zh) | 1974-06-05 | 1982-09-10 | ||
US4001663A (en) | 1974-09-03 | 1977-01-04 | Texas Instruments Incorporated | Switching regulator power supply |
US4012835A (en) | 1974-09-17 | 1977-03-22 | E. I. Du Pont De Nemours And Co. | Method of forming a dual in-line package |
US4100579A (en) | 1974-09-24 | 1978-07-11 | Hughes Aircraft Company | AC Operated flat panel liquid crystal display |
US3938881A (en) | 1974-11-25 | 1976-02-17 | Xerox Corporation | Acousto-optic modulation device |
US4090219A (en) | 1974-12-09 | 1978-05-16 | Hughes Aircraft Company | Liquid crystal sequential color display |
US3935500A (en) | 1974-12-09 | 1976-01-27 | Texas Instruments Incorporated | Flat CRT system |
US4020381A (en) | 1974-12-09 | 1977-04-26 | Texas Instruments Incorporated | Cathode structure for a multibeam cathode ray tube |
US3935499A (en) | 1975-01-03 | 1976-01-27 | Texas Instruments Incorporated | Monolythic staggered mesh deflection systems for use in flat matrix CRT's |
US3980476A (en) | 1975-01-27 | 1976-09-14 | Xerox Corporation | Imaging system |
US4017158A (en) | 1975-03-17 | 1977-04-12 | E. I. Du Pont De Nemours And Company | Spatial frequency carrier and process of preparing same |
US4006968A (en) | 1975-05-02 | 1977-02-08 | Hughes Aircraft Company | Liquid crystal dot color display |
US4011009A (en) | 1975-05-27 | 1977-03-08 | Xerox Corporation | Reflection diffraction grating having a controllable blaze angle |
US4012116A (en) | 1975-05-30 | 1977-03-15 | Personal Communications, Inc. | No glasses 3-D viewer |
US4034211A (en) | 1975-06-20 | 1977-07-05 | Ncr Corporation | System and method for providing a security check on a credit card |
US4035068A (en) | 1975-06-25 | 1977-07-12 | Xerox Corporation | Speckle minimization in projection displays by reducing spatial coherence of the image light |
US4021766A (en) | 1975-07-28 | 1977-05-03 | Aine Harry E | Solid state pressure transducer of the leaf spring type and batch method of making same |
US3991416A (en) | 1975-09-18 | 1976-11-09 | Hughes Aircraft Company | AC biased and resonated liquid crystal display |
US4084437A (en) | 1975-11-07 | 1978-04-18 | Texas Instruments Incorporated | Thermocouple circuit |
CH595664A5 (zh) | 1975-11-17 | 1978-02-15 | Landis & Gyr Ag | |
US4184700A (en) | 1975-11-17 | 1980-01-22 | Lgz Landis & Gyr Zug Ag | Documents embossed with optical markings representing genuineness information |
US4127322A (en) | 1975-12-05 | 1978-11-28 | Hughes Aircraft Company | High brightness full color image light valve projection system |
US4004849A (en) | 1975-12-08 | 1977-01-25 | International Business Machines Corporation | Display apparatus and process |
US4034399A (en) | 1976-02-27 | 1977-07-05 | Rca Corporation | Interconnection means for an array of majority carrier microwave devices |
CH594495A5 (zh) | 1976-05-04 | 1978-01-13 | Landis & Gyr Ag | |
JPS5321771A (en) | 1976-08-11 | 1978-02-28 | Sharp Kk | Electronic parts mounting structure |
US4135502A (en) | 1976-09-07 | 1979-01-23 | Donald Peck | Stereoscopic patterns and method of making same |
US4139257A (en) | 1976-09-28 | 1979-02-13 | Canon Kabushiki Kaisha | Synchronizing signal generator |
US4067129A (en) | 1976-10-28 | 1978-01-10 | Trans-World Manufacturing Corporation | Display apparatus having means for creating a spectral color effect |
CH604279A5 (zh) | 1976-12-21 | 1978-08-31 | Landis & Gyr Ag | |
US4143943A (en) | 1977-02-17 | 1979-03-13 | Xerox Corporation | Rear projection screen system |
US4093922A (en) | 1977-03-17 | 1978-06-06 | Texas Instruments Incorporated | Microcomputer processing approach for a non-volatile TV station memory tuning system |
US4093921A (en) | 1977-03-17 | 1978-06-06 | Texas Instruments Incorporated | Microcomputer processing approach for a non-volatile TV station memory tuning system |
CH616253A5 (zh) | 1977-06-21 | 1980-03-14 | Landis & Gyr Ag | |
US4126380A (en) | 1977-06-30 | 1978-11-21 | International Business Machines Corporation | Probe with contact indicating means |
US4185891A (en) | 1977-11-30 | 1980-01-29 | Grumman Aerospace Corporation | Laser diode collimation optics |
US4389096A (en) | 1977-12-27 | 1983-06-21 | Matsushita Electric Industrial Co., Ltd. | Image display apparatus of liquid crystal valve projection type |
US4205428A (en) | 1978-02-23 | 1980-06-03 | The United States Of America As Represented By The Secretary Of The Air Force | Planar liquid crystal matrix array chip |
CH622896A5 (zh) | 1978-03-20 | 1981-04-30 | Landis & Gyr Ag | |
US4256787A (en) | 1978-05-03 | 1981-03-17 | Massachusetts Institute Of Technology | Orientation of ordered liquids and their use in devices |
US4195915A (en) | 1978-05-05 | 1980-04-01 | Hughes Aircraft Company | Liquid crystal image projector system |
US4225913A (en) | 1978-09-19 | 1980-09-30 | Texas Instruments Incorporated | Self-referencing power converter |
US4331972A (en) | 1978-11-09 | 1982-05-25 | Rajchman Jan A | Light valve, light valve display, and method |
US4295145A (en) | 1978-12-29 | 1981-10-13 | International Business Machines Corporation | Acousto-optically modulated laser scanning arrangement for correcting for interference appearing therein |
US4257016A (en) | 1979-02-21 | 1981-03-17 | Xerox Corporation | Piezo-optic, total internal reflection modulator |
US4338660A (en) | 1979-04-13 | 1982-07-06 | Relational Memory Systems, Inc. | Relational break signal generating device |
US4249796A (en) | 1979-06-21 | 1981-02-10 | International Business Machines Corporation | Projection display device |
US4290672A (en) | 1979-06-29 | 1981-09-22 | International Business Machines Corporation | Plural line acousto-optically modulated laser scanning system |
US4343535A (en) | 1979-12-14 | 1982-08-10 | Hughes Aircraft Company | Liquid crystal light valve |
DE3001613C2 (de) | 1980-01-17 | 1986-04-03 | Siemens AG, 1000 Berlin und 8000 München | Befestigung eines, eine monolithisch integrierte Halbleiterschaltung enthaltenden Halbleiterkörpers aus Silicium an einer Unterlage mit einem entsprechenden Verfahren hierzu |
US4311999A (en) | 1980-02-07 | 1982-01-19 | Textron, Inc. | Vibratory scan optical display |
US4327966A (en) | 1980-02-25 | 1982-05-04 | Bell Telephone Laboratories, Incorporated | Variable attenuator for laser radiation |
US4327411A (en) | 1980-03-04 | 1982-04-27 | Bell Telephone Laboratories, Incorporated | High capacity elastic store having continuously variable delay |
US4355463A (en) | 1980-03-24 | 1982-10-26 | National Semiconductor Corporation | Process for hermetically encapsulating semiconductor devices |
US4348079A (en) | 1980-04-08 | 1982-09-07 | Xerox Corporation | Acousto-optic device utilizing Fresnel zone plate electrode array |
US4346965A (en) | 1980-05-27 | 1982-08-31 | Xerox Corporation | Light modulator/deflector using acoustic surface waves |
US4454591A (en) | 1980-05-29 | 1984-06-12 | Texas Instruments Incorporated | Interface system for bus line control |
US4447881A (en) | 1980-05-29 | 1984-05-08 | Texas Instruments Incorporated | Data processing system integrated circuit having modular memory add-on capacity |
US4430584A (en) | 1980-05-29 | 1984-02-07 | Texas Instruments Incorporated | Modular input/output system |
US4418397A (en) | 1980-05-29 | 1983-11-29 | Texas Instruments Incorporated | Address decode system |
US4503494A (en) | 1980-06-26 | 1985-03-05 | Texas Instruments Incorporated | Non-volatile memory system |
US4443845A (en) | 1980-06-26 | 1984-04-17 | Texas Instruments Incorporated | Memory system having a common interface |
US4361384A (en) | 1980-06-27 | 1982-11-30 | The United States Of America As Represented By The Secretary Of The Army | High luminance miniature display |
US4336982A (en) | 1980-08-04 | 1982-06-29 | Xerox Corporation | MgF2 Coating for promoting adherence of thin films to single crystal materials |
US4396246A (en) | 1980-10-02 | 1983-08-02 | Xerox Corporation | Integrated electro-optic wave guide modulator |
US4420717A (en) | 1980-10-06 | 1983-12-13 | Texas Instruments Incorporated | Use of motor winding as integrator to generate sawtooth for switch mode current regulator |
US4594501A (en) | 1980-10-09 | 1986-06-10 | Texas Instruments Incorporated | Pulse width modulation of printhead voltage |
US4369524A (en) | 1980-10-14 | 1983-01-18 | Xerox Corporation | Single component transceiver device for linear fiber optical network |
US4398798A (en) | 1980-12-18 | 1983-08-16 | Sperry Corporation | Image rotating diffraction grating |
JPS57122981U (zh) | 1981-01-27 | 1982-07-31 | ||
US4456338A (en) | 1981-03-05 | 1984-06-26 | Macdonald Dettwiler & Associates Ltd. | Electronically tuneable light source |
US4440839A (en) | 1981-03-18 | 1984-04-03 | United Technologies Corporation | Method of forming laser diffraction grating for beam sampling device |
US4391490A (en) | 1981-04-02 | 1983-07-05 | Xerox Corporation | Interface for proximity coupled electro-optic devices |
US4374397A (en) | 1981-06-01 | 1983-02-15 | Eastman Kodak Company | Light valve devices and electronic imaging/scan apparatus with locationally-interlaced optical addressing |
US4408884A (en) | 1981-06-29 | 1983-10-11 | Rca Corporation | Optical measurements of fine line parameters in integrated circuit processes |
US4400740A (en) | 1981-08-24 | 1983-08-23 | Xerox Corporation | Intensity control for raster output scanners |
JPS5843554A (ja) | 1981-09-08 | 1983-03-14 | Mitsubishi Electric Corp | 半導体装置 |
US4414583A (en) | 1981-11-02 | 1983-11-08 | International Business Machines Corporation | Scanned light beam imaging method and apparatus |
US4571603A (en) | 1981-11-03 | 1986-02-18 | Texas Instruments Incorporated | Deformable mirror electrostatic printer |
US4426768A (en) | 1981-12-28 | 1984-01-24 | United Technologies Corporation | Ultra-thin microelectronic pressure sensors |
US4571041A (en) | 1982-01-22 | 1986-02-18 | Gaudyn Tad J | Three dimensional projection arrangement |
US4422099A (en) | 1982-02-03 | 1983-12-20 | International Business Machines Corporation | Optical communication on variable power beam |
US4483596A (en) | 1982-03-01 | 1984-11-20 | Xerox Corporation | Interface suppression apparatus and method for a linear modulator |
JPS58158950A (ja) | 1982-03-16 | 1983-09-21 | Nec Corp | 半導体装置 |
GB2117564B (en) | 1982-03-26 | 1985-11-06 | Int Computers Ltd | Mounting one integrated circuit upon another |
FR2527385B1 (fr) | 1982-04-13 | 1987-05-22 | Suwa Seikosha Kk | Transistor a couche mince et panneau d'affichage a cristaux liquides utilisant ce type de transistor |
US4484188A (en) | 1982-04-23 | 1984-11-20 | Texas Instruments Incorporated | Graphics video resolution improvement apparatus |
US4435041A (en) | 1982-05-28 | 1984-03-06 | Sperry Corporation | Chromatic aberration correction in a multiwavelength light beam deflection system |
US4588957A (en) | 1982-06-09 | 1986-05-13 | International Business Machines Corporation | Optical pulse compression apparatus and method |
US4460907A (en) | 1982-06-15 | 1984-07-17 | Minnesota Mining And Manufacturing Company | Electrographic imaging apparatus |
US4468725A (en) | 1982-06-18 | 1984-08-28 | Texas Instruments Incorporated | Direct AC converter for converting a balanced AC polyphase input to an output voltage |
US4462046A (en) | 1982-07-02 | 1984-07-24 | Amaf Industries Incorporated | Machine vision system utilizing programmable optical parallel processing |
US4492435A (en) | 1982-07-02 | 1985-01-08 | Xerox Corporation | Multiple array full width electro mechanical modulator |
US4467342A (en) | 1982-07-15 | 1984-08-21 | Rca Corporation | Multi-chip imager |
US4511220A (en) | 1982-12-23 | 1985-04-16 | The United States Of America As Represented By The Secretary Of The Air Force | Laser target speckle eliminator |
JPS59117876A (ja) | 1982-12-24 | 1984-07-07 | Seiko Epson Corp | パ−ソナル液晶映像表示器 |
EP0124302A3 (en) | 1983-04-06 | 1986-02-19 | Texas Instruments Incorporated | A.c. supply converter |
US4724467A (en) | 1983-04-11 | 1988-02-09 | Xerox Corporation | Light blocking stop for electro-optic line printers |
US4487677A (en) | 1983-04-11 | 1984-12-11 | Metals Production Research, Inc. | Electrolytic recovery system for obtaining titanium metal from its ore |
US4655539A (en) | 1983-04-18 | 1987-04-07 | Aerodyne Products Corporation | Hologram writing apparatus and method |
US4538883A (en) | 1983-05-26 | 1985-09-03 | Xerox Corporation | Conformable electrodes for proximity coupled electro-optic devices |
JPS603164A (ja) | 1983-06-21 | 1985-01-09 | Sanyo Electric Co Ltd | 光起電力装置の製造方法 |
JPS6055655A (ja) | 1983-09-07 | 1985-03-30 | Nissan Motor Co Ltd | 梁構造体を有する半導体装置 |
CH661683A5 (de) | 1983-09-19 | 1987-08-14 | Landis & Gyr Ag | Einrichtung zum praegen von reliefmustern hoher aufloesung. |
US4561044A (en) | 1983-09-22 | 1985-12-24 | Citizen Watch Co., Ltd. | Lighting device for a display panel of an electronic device |
US4809078A (en) | 1983-10-05 | 1989-02-28 | Casio Computer Co., Ltd. | Liquid crystal television receiver |
FR2553893B1 (fr) | 1983-10-19 | 1986-02-07 | Texas Instruments France | Procede et dispositif de detection d'une transition de la composante continue d'un signal periodique, notamment pour joncteur telephonique |
US4567585A (en) | 1983-10-31 | 1986-01-28 | Daniel Gelbart | Optical tape recorder using linear scanning |
US4545610A (en) | 1983-11-25 | 1985-10-08 | International Business Machines Corporation | Method for forming elongated solder connections between a semiconductor device and a supporting substrate |
JPS60127888A (ja) | 1983-12-15 | 1985-07-08 | Citizen Watch Co Ltd | 液晶表示装置 |
US4577933A (en) | 1983-12-15 | 1986-03-25 | Xerox Corporation | Gap modulator for high speed scanners |
JPS60158780A (ja) | 1984-01-27 | 1985-08-20 | Sony Corp | 表示装置 |
JPS60185918A (ja) | 1984-03-05 | 1985-09-21 | Canon Inc | 光変調方法 |
JPS60214684A (ja) | 1984-04-10 | 1985-10-26 | Citizen Watch Co Ltd | 液晶テレビ装置 |
US4577932A (en) | 1984-05-08 | 1986-03-25 | Creo Electronics Corporation | Multi-spot modulator using a laser diode |
US4797918A (en) | 1984-05-09 | 1989-01-10 | Communications Satellite Corporation | Subscription control for television programming |
CH664030A5 (de) | 1984-07-06 | 1988-01-29 | Landis & Gyr Ag | Verfahren zur erzeugung eines makroskopischen flaechenmusters mit einer mikroskopischen struktur, insbesondere einer beugungsoptisch wirksamen struktur. |
US4566935A (en) | 1984-07-31 | 1986-01-28 | Texas Instruments Incorporated | Spatial light modulator and method |
US4710732A (en) | 1984-07-31 | 1987-12-01 | Texas Instruments Incorporated | Spatial light modulator and method |
US4709995A (en) | 1984-08-18 | 1987-12-01 | Canon Kabushiki Kaisha | Ferroelectric display panel and driving method therefor to achieve gray scale |
US4649085A (en) | 1984-08-29 | 1987-03-10 | The United States Of America As Represented By The Secretary Of The Air Force | Cryogenic glass-to-metal seal |
US4596992A (en) | 1984-08-31 | 1986-06-24 | Texas Instruments Incorporated | Linear spatial light modulator and printer |
US4662746A (en) | 1985-10-30 | 1987-05-05 | Texas Instruments Incorporated | Spatial light modulator and method |
US5096279A (en) | 1984-08-31 | 1992-03-17 | Texas Instruments Incorporated | Spatial light modulator and method |
US5061049A (en) | 1984-08-31 | 1991-10-29 | Texas Instruments Incorporated | Spatial light modulator and method |
JPS6188676A (ja) | 1984-10-05 | 1986-05-06 | Citizen Watch Co Ltd | 液晶テレビ装置 |
US4615595A (en) | 1984-10-10 | 1986-10-07 | Texas Instruments Incorporated | Frame addressed spatial light modulator |
US4558171A (en) | 1984-10-12 | 1985-12-10 | General Electric Company | Hermetic enclosure for electronic components with an optionally transparent cover and a method of making the same |
US5281957A (en) | 1984-11-14 | 1994-01-25 | Schoolman Scientific Corp. | Portable computer and head mounted display |
US4641193A (en) | 1984-12-07 | 1987-02-03 | New York Institute Of Technology | Video display apparatus and method |
JPH0752762B2 (ja) | 1985-01-07 | 1995-06-05 | 株式会社日立製作所 | 半導体樹脂パッケージ |
US4772094A (en) | 1985-02-05 | 1988-09-20 | Bright And Morning Star | Optical stereoscopic system and prism window |
DE3605516A1 (de) | 1985-02-21 | 1986-09-04 | Canon K.K., Tokio/Tokyo | Optisches funktionselement sowie optische funktionsvorrichtung |
US4660938A (en) | 1985-03-11 | 1987-04-28 | Xerox Corporation | Optical display device |
US4661828A (en) | 1985-03-20 | 1987-04-28 | Miller Jr Verelyn A | Optical imaging head |
US4866488A (en) | 1985-03-29 | 1989-09-12 | Texas Instruments Incorporated | Ballistic transport filter and device |
US4636039A (en) | 1985-04-12 | 1987-01-13 | Xerox Corporation | Nonuniformity of fringe field correction for electro-optic devices |
US4623219A (en) | 1985-04-15 | 1986-11-18 | The United States Of America As Represented By The Secretary Of The Navy | Real-time high-resolution 3-D large-screen display using laser-activated liquid crystal light valves |
US4719507A (en) | 1985-04-26 | 1988-01-12 | Tektronix, Inc. | Stereoscopic imaging system with passive viewing apparatus |
US4751509A (en) | 1985-06-04 | 1988-06-14 | Nec Corporation | Light valve for use in a color display unit with a diffraction grating assembly included in the valve |
US4728185A (en) | 1985-07-03 | 1988-03-01 | Texas Instruments Incorporated | Imaging system |
US4836649A (en) | 1985-07-12 | 1989-06-06 | Hughes Aircraft Company | Optical layout for a three light valve full-color projector employing a dual relay lens system and a single projection lens |
CA1250170A (en) | 1985-07-16 | 1989-02-21 | Jerzy A. Dobrowolski | Optical mixing/demixing device |
JPH0535388Y2 (zh) | 1985-07-29 | 1993-09-08 | ||
US5299037A (en) | 1985-08-07 | 1994-03-29 | Canon Kabushiki Kaisha | Diffraction grating type liquid crystal display device in viewfinder |
EP0220404B1 (de) | 1985-09-30 | 1991-02-06 | Siemens Aktiengesellschaft | Verfahren zur Begrenzung von Ausbrüchen beim Sägen einer Halbleiterscheibe |
US4698602A (en) | 1985-10-09 | 1987-10-06 | The United States Of America As Represented By The Secretary Of The Air Force | Micromirror spatial light modulator |
US5172262A (en) | 1985-10-30 | 1992-12-15 | Texas Instruments Incorporated | Spatial light modulator and method |
US4687326A (en) | 1985-11-12 | 1987-08-18 | General Electric Company | Integrated range and luminance camera |
JPS62119521A (ja) | 1985-11-19 | 1987-05-30 | Canon Inc | 光学変調装置 |
GB2186708B (en) | 1985-11-26 | 1990-07-11 | Sharp Kk | A variable interferometric device and a process for the production of the same |
US4811210A (en) | 1985-11-27 | 1989-03-07 | Texas Instruments Incorporated | A plurality of optical crossbar switches and exchange switches for parallel processor computer |
US4700276A (en) | 1986-01-03 | 1987-10-13 | Motorola Inc. | Ultra high density pad array chip carrier |
JPS6323105A (ja) | 1986-02-06 | 1988-01-30 | Fujitsu Ltd | 光合分波器 |
US4744633A (en) | 1986-02-18 | 1988-05-17 | Sheiman David M | Stereoscopic viewing system and glasses |
US4803560A (en) | 1986-02-21 | 1989-02-07 | Casio Computer Co., Ltd. | Liquid-crystal television receiver with cassette tape recorder |
US4717066A (en) | 1986-02-24 | 1988-01-05 | American Telephone And Telegraph Company, At&T Bell Laboratories | Method of bonding conductors to semiconductor devices |
US4829365A (en) | 1986-03-07 | 1989-05-09 | Dimension Technologies, Inc. | Autostereoscopic display with illuminating lines, light valve and mask |
US4807021A (en) | 1986-03-10 | 1989-02-21 | Kabushiki Kaisha Toshiba | Semiconductor device having stacking structure |
US4856869A (en) | 1986-04-08 | 1989-08-15 | Canon Kabushiki Kaisha | Display element and observation apparatus having the same |
US5835255A (en) | 1986-04-23 | 1998-11-10 | Etalon, Inc. | Visible spectrum modulator arrays |
US5189404A (en) | 1986-06-18 | 1993-02-23 | Hitachi, Ltd. | Display apparatus with rotatable display screen |
US4711526A (en) | 1986-07-07 | 1987-12-08 | Coherent, Inc. | Attenuating beam splitter |
US4897708A (en) | 1986-07-17 | 1990-01-30 | Laser Dynamics, Inc. | Semiconductor wafer array |
US4954875A (en) | 1986-07-17 | 1990-09-04 | Laser Dynamics, Inc. | Semiconductor wafer array with electrically conductive compliant material |
US5354416A (en) | 1986-09-05 | 1994-10-11 | Sadayuki Okudaira | Dry etching method |
GB8622717D0 (en) | 1986-09-20 | 1986-10-29 | Emi Plc Thorn | Display device |
US4743091A (en) | 1986-10-30 | 1988-05-10 | Daniel Gelbart | Two dimensional laser diode array |
US4811082A (en) | 1986-11-12 | 1989-03-07 | International Business Machines Corporation | High performance integrated circuit packaging structure |
GB2198867A (en) | 1986-12-17 | 1988-06-22 | Philips Electronic Associated | A liquid crystal display illumination system |
US4882683B1 (en) | 1987-03-16 | 1995-11-07 | Fairchild Semiconductor | Cellular addrssing permutation bit map raster graphics architecture |
US4940309A (en) | 1987-04-20 | 1990-07-10 | Baum Peter S | Tessellator |
US4763975A (en) | 1987-04-28 | 1988-08-16 | Spectra Diode Laboratories, Inc. | Optical system with bright light output |
US4765865A (en) | 1987-05-04 | 1988-08-23 | Ford Motor Company | Silicon etch rate enhancement |
US4807965A (en) | 1987-05-26 | 1989-02-28 | Garakani Reza G | Apparatus for three-dimensional viewing |
US4924413A (en) | 1987-05-29 | 1990-05-08 | Hercules Computer Technology | Color conversion apparatus and method |
KR970003915B1 (ko) | 1987-06-24 | 1997-03-22 | 미다 가쓰시게 | 반도체 기억장치 및 그것을 사용한 반도체 메모리 모듈 |
US4814759A (en) | 1987-07-08 | 1989-03-21 | Clinicom Incorporated | Flat panel display monitor apparatus |
US5003300A (en) | 1987-07-27 | 1991-03-26 | Reflection Technology, Inc. | Head mounted display for miniature video display system |
US4934773A (en) | 1987-07-27 | 1990-06-19 | Reflection Technology, Inc. | Miniature video display system |
US4859012A (en) | 1987-08-14 | 1989-08-22 | Texas Instruments Incorporated | Optical interconnection networks |
EP0304263A3 (en) | 1987-08-17 | 1990-09-12 | Lsi Logic Corporation | Semiconductor chip assembly |
US4879602A (en) | 1987-09-04 | 1989-11-07 | New York Institute Of Technology | Electrode patterns for solid state light modulator |
US5072418A (en) | 1989-05-04 | 1991-12-10 | Texas Instruments Incorporated | Series maxium/minimum function computing devices, systems and methods |
US5155812A (en) | 1989-05-04 | 1992-10-13 | Texas Instruments Incorporated | Devices and method for generating and using systems, software waitstates on address boundaries in data processing |
US5142677A (en) | 1989-05-04 | 1992-08-25 | Texas Instruments Incorporated | Context switching devices, systems and methods |
US4801194A (en) | 1987-09-23 | 1989-01-31 | Eastman Kodak Company | Multiplexed array exposing system having equi-angular scan exposure regions |
US4797694A (en) | 1987-09-23 | 1989-01-10 | Eastman Kodak Company | Scan-multiplexed light valve printer with band-reducing construction |
US5024494A (en) | 1987-10-07 | 1991-06-18 | Texas Instruments Incorporated | Focussed light source pointer for three dimensional display |
HU197469B (en) | 1987-10-23 | 1989-03-28 | Laszlo Holakovszky | Spectacle like, wearable on head stereoscopic reproductor of the image |
US5155604A (en) | 1987-10-26 | 1992-10-13 | Van Leer Metallized Products (Usa) Limited | Coated paper sheet embossed with a diffraction or holographic pattern |
US4968354A (en) | 1987-11-09 | 1990-11-06 | Fuji Electric Co., Ltd. | Thin film solar cell array |
DE3855532T2 (de) | 1987-12-24 | 1997-04-30 | Kuraray Co | Polarisierendes optisches Element und Einrichtung unter Benutzung desselben |
US5040052A (en) | 1987-12-28 | 1991-08-13 | Texas Instruments Incorporated | Compact silicon module for high density integrated circuits |
US4952925A (en) | 1988-01-25 | 1990-08-28 | Bernd Haastert | Projectable passive liquid-crystal flat screen information centers |
US5310624A (en) | 1988-01-29 | 1994-05-10 | Massachusetts Institute Of Technology | Integrated circuit micro-fabrication using dry lithographic processes |
US4956619A (en) | 1988-02-19 | 1990-09-11 | Texas Instruments Incorporated | Spatial light modulator |
US4926241A (en) | 1988-02-19 | 1990-05-15 | Microelectronics And Computer Technology Corporation | Flip substrate for chip mount |
US5039628A (en) | 1988-02-19 | 1991-08-13 | Microelectronics & Computer Technology Corporation | Flip substrate for chip mount |
US4961633A (en) | 1988-02-22 | 1990-10-09 | Xerox Corporation | VLSI optimized modulator |
DE3866230D1 (de) | 1988-03-03 | 1991-12-19 | Landis & Gyr Betriebs Ag | Dokument. |
US4817850A (en) | 1988-03-28 | 1989-04-04 | Hughes Aircraft Company | Repairable flip-chip bumping |
JPH01265293A (ja) | 1988-04-15 | 1989-10-23 | Sharp Corp | 小型表示装置 |
JPH01296214A (ja) | 1988-05-25 | 1989-11-29 | Canon Inc | 表示装置 |
US4902083A (en) | 1988-05-31 | 1990-02-20 | Reflection Technology, Inc. | Low vibration resonant scanning unit for miniature optical display apparatus |
US5009473A (en) | 1988-05-31 | 1991-04-23 | Reflection Technology, Inc. | Low vibration resonant scanning unit for miniature optical display apparatus |
US4827391A (en) | 1988-06-01 | 1989-05-02 | Texas Instruments Incorporated | Apparatus for implementing output voltage slope in current mode controlled power supplies |
JPH01306886A (ja) | 1988-06-03 | 1989-12-11 | Canon Inc | 体積位相型回折格子 |
JP2585717B2 (ja) | 1988-06-03 | 1997-02-26 | キヤノン株式会社 | 表示装置 |
US4856863A (en) | 1988-06-22 | 1989-08-15 | Texas Instruments Incorporated | Optical fiber interconnection network including spatial light modulator |
JP2612475B2 (ja) | 1988-06-24 | 1997-05-21 | 日本航空電子工業株式会社 | カラー表示パネルの表示制御装置 |
US4950890A (en) | 1988-07-13 | 1990-08-21 | Creo Electronics Corp. | Method and apparatus for correcting position errors using writable encoders |
JPH0225057A (ja) | 1988-07-13 | 1990-01-26 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
US5023905A (en) | 1988-07-25 | 1991-06-11 | Reflection Technology, Inc. | Pocket data receiver with full page visual display |
US5048077A (en) | 1988-07-25 | 1991-09-10 | Reflection Technology, Inc. | Telephone handset with full-page visual display |
US5028939A (en) | 1988-08-23 | 1991-07-02 | Texas Instruments Incorporated | Spatial light modulator system |
US4896325A (en) | 1988-08-23 | 1990-01-23 | The Regents Of The University Of California | Multi-section tunable laser with differing multi-element mirrors |
US5216544A (en) | 1988-08-26 | 1993-06-01 | Fuji Photo Film Co., Ltd. | Beam-combining laser beam source device |
US5058992A (en) | 1988-09-07 | 1991-10-22 | Toppan Printing Co., Ltd. | Method for producing a display with a diffraction grating pattern and a display produced by the method |
ATE98795T1 (de) | 1988-09-30 | 1994-01-15 | Landis & Gyr Business Support | Beugungselement. |
US4915463A (en) | 1988-10-18 | 1990-04-10 | The United States Of America As Represented By The Department Of Energy | Multilayer diffraction grating |
JPH07121097B2 (ja) | 1988-11-18 | 1995-12-20 | 株式会社日立製作所 | 液晶テレビおよびその製造方法 |
US5066614A (en) | 1988-11-21 | 1991-11-19 | Honeywell Inc. | Method of manufacturing a leadframe having conductive elements preformed with solder bumps |
US5184207A (en) | 1988-12-07 | 1993-02-02 | Tribotech | Semiconductor die packages having lead support frame |
US5191405A (en) | 1988-12-23 | 1993-03-02 | Matsushita Electric Industrial Co., Ltd. | Three-dimensional stacked lsi |
US4893509A (en) | 1988-12-27 | 1990-01-16 | General Motors Corporation | Method and product for fabricating a resonant-bridge microaccelerometer |
US4982184A (en) | 1989-01-03 | 1991-01-01 | General Electric Company | Electrocrystallochromic display and element |
US4949148A (en) | 1989-01-11 | 1990-08-14 | Bartelink Dirk J | Self-aligning integrated circuit assembly |
US4896948A (en) | 1989-02-21 | 1990-01-30 | International Business Machines Corporation | Simplified double-cavity tunable optical filter using voltage-dependent refractive index |
US5079544A (en) | 1989-02-27 | 1992-01-07 | Texas Instruments Incorporated | Standard independent digitized video system |
US5162787A (en) | 1989-02-27 | 1992-11-10 | Texas Instruments Incorporated | Apparatus and method for digitized video system utilizing a moving display surface |
US5128660A (en) | 1989-02-27 | 1992-07-07 | Texas Instruments Incorporated | Pointer for three dimensional display |
US5868854A (en) | 1989-02-27 | 1999-02-09 | Hitachi, Ltd. | Method and apparatus for processing samples |
US5170156A (en) | 1989-02-27 | 1992-12-08 | Texas Instruments Incorporated | Multi-frequency two dimensional display system |
US5446479A (en) | 1989-02-27 | 1995-08-29 | Texas Instruments Incorporated | Multi-dimensional array video processor system |
US5214419A (en) | 1989-02-27 | 1993-05-25 | Texas Instruments Incorporated | Planarized true three dimensional display |
US5192946A (en) | 1989-02-27 | 1993-03-09 | Texas Instruments Incorporated | Digitized color video display system |
US5214420A (en) | 1989-02-27 | 1993-05-25 | Texas Instruments Incorporated | Spatial light modulator projection system with random polarity light |
US5272473A (en) | 1989-02-27 | 1993-12-21 | Texas Instruments Incorporated | Reduced-speckle display system |
KR100202246B1 (ko) | 1989-02-27 | 1999-06-15 | 윌리엄 비. 켐플러 | 디지탈화 비디오 시스템을 위한 장치 및 방법 |
US5206629A (en) | 1989-02-27 | 1993-04-27 | Texas Instruments Incorporated | Spatial light modulator and memory for digitized video display |
US5287096A (en) | 1989-02-27 | 1994-02-15 | Texas Instruments Incorporated | Variable luminosity display system |
US4930043A (en) | 1989-02-28 | 1990-05-29 | United Technologies | Closed-loop capacitive accelerometer with spring constraint |
US4945773A (en) | 1989-03-06 | 1990-08-07 | Ford Motor Company | Force transducer etched from silicon |
FR2645680B1 (fr) | 1989-04-07 | 1994-04-29 | Thomson Microelectronics Sa Sg | Encapsulation de modules electroniques et procede de fabrication |
US5188280A (en) | 1989-04-28 | 1993-02-23 | Hitachi Ltd. | Method of bonding metals, and method and apparatus for producing semiconductor integrated circuit device using said method of bonding metals |
US4978202A (en) | 1989-05-12 | 1990-12-18 | Goldstar Co., Ltd. | Laser scanning system for displaying a three-dimensional color image |
US5068205A (en) | 1989-05-26 | 1991-11-26 | General Signal Corporation | Header mounted chemically sensitive ISFET and method of manufacture |
US5060058A (en) | 1989-06-07 | 1991-10-22 | U.S. Philips Corporation | Modulation system for projection display |
US5153773A (en) | 1989-06-08 | 1992-10-06 | Canon Kabushiki Kaisha | Illumination device including amplitude-division and beam movements |
US4943815A (en) | 1989-06-29 | 1990-07-24 | International Business Machines Corporation | Laser printer with light-exposure prevention |
DE69023217T2 (de) | 1989-08-03 | 1996-07-18 | Japan Broadcasting Corp | Projektionssichtgerät mit optischem schreiben. |
US5022750A (en) | 1989-08-11 | 1991-06-11 | Raf Electronics Corp. | Active matrix reflective projection system |
US5399898A (en) | 1992-07-17 | 1995-03-21 | Lsi Logic Corporation | Multi-chip semiconductor arrangements using flip chip dies |
EP0417039B1 (de) | 1989-09-04 | 1993-12-15 | GRETAG Aktiengesellschaft | Beleuchtungsvorrichtung für Projektionszwecke |
US5107372A (en) | 1989-09-06 | 1992-04-21 | Daniel Gelbart | Focus servo actuator for moving lens scanners |
JPH0343682U (zh) | 1989-09-06 | 1991-04-24 | ||
GB8921722D0 (en) | 1989-09-26 | 1989-11-08 | British Telecomm | Micromechanical switch |
US4954789A (en) | 1989-09-28 | 1990-09-04 | Texas Instruments Incorporated | Spatial light modulator |
JPH03116857A (ja) | 1989-09-29 | 1991-05-17 | Mitsui Petrochem Ind Ltd | 発光または受光装置 |
US5251058A (en) | 1989-10-13 | 1993-10-05 | Xerox Corporation | Multiple beam exposure control |
US5251057A (en) | 1989-10-13 | 1993-10-05 | Xerox Corporation | Multiple beam optical modulation system |
JP2508387B2 (ja) | 1989-10-16 | 1996-06-19 | 凸版印刷株式会社 | 回折格子パタ―ンを有するディスプレイの作製方法 |
DE3934748A1 (de) | 1989-10-18 | 1991-04-25 | Standard Elektrik Lorenz Ag | Laserwafer und verfahren zu seiner herstellung |
US5126836A (en) | 1989-11-01 | 1992-06-30 | Aura Systems, Inc. | Actuated mirror optical intensity modulation |
US5260798A (en) | 1989-11-01 | 1993-11-09 | Aura Systems, Inc. | Pixel intensity modulator |
US5150205A (en) | 1989-11-01 | 1992-09-22 | Aura Systems, Inc. | Actuated mirror optical intensity modulation |
US5185660A (en) | 1989-11-01 | 1993-02-09 | Aura Systems, Inc. | Actuated mirror optical intensity modulation |
US5077598A (en) | 1989-11-08 | 1991-12-31 | Hewlett-Packard Company | Strain relief flip-chip integrated circuit assembly with test fixturing |
US5136695A (en) | 1989-11-13 | 1992-08-04 | Reflection Technology, Inc. | Apparatus and method for updating a remote video display from a host computer |
US5037173A (en) | 1989-11-22 | 1991-08-06 | Texas Instruments Incorporated | Optical interconnection network |
US5074947A (en) | 1989-12-18 | 1991-12-24 | Epoxy Technology, Inc. | Flip chip technology using electrically conductive polymers and dielectrics |
US5101236A (en) | 1989-12-21 | 1992-03-31 | Texas Instruments Incorporated | Light energy control system and method of operation |
US5237340A (en) | 1989-12-21 | 1993-08-17 | Texas Instruments Incorporated | Replaceable elements for xerographic printing process and method of operation |
US5105369A (en) | 1989-12-21 | 1992-04-14 | Texas Instruments Incorporated | Printing system exposure module alignment method and apparatus of manufacture |
US5041851A (en) | 1989-12-21 | 1991-08-20 | Texas Instruments Incorporated | Spatial light modulator printer and method of operation |
US5142303A (en) | 1989-12-21 | 1992-08-25 | Texas Instruments Incorporated | Printing system exposure module optic structure and method of operation |
US5072239A (en) | 1989-12-21 | 1991-12-10 | Texas Instruments Incorporated | Spatial light modulator exposure unit and method of operation |
DE4000903C1 (zh) | 1990-01-15 | 1990-08-09 | Robert Bosch Gmbh, 7000 Stuttgart, De | |
DE4001448C1 (zh) | 1990-01-19 | 1991-07-11 | Mercedes-Benz Aktiengesellschaft, 7000 Stuttgart, De | |
CA2034703A1 (en) | 1990-01-23 | 1991-07-24 | Masanori Nishiguchi | Substrate for packaging a semiconductor device |
AU637874B2 (en) | 1990-01-23 | 1993-06-10 | Sumitomo Electric Industries, Ltd. | Substrate for packaging a semiconductor device |
US5260718A (en) | 1990-01-24 | 1993-11-09 | Xerox Corporation | Liquid crystal shutter xerographic printer with offset configuration lamp aperture and copier/printer with optically aligned lamps, image bars, and lenses |
JPH03217814A (ja) | 1990-01-24 | 1991-09-25 | Canon Inc | 液晶プロジェクター |
US5428259A (en) | 1990-02-02 | 1995-06-27 | Nec Corporation | Micromotion mechanical structure and a process for the production thereof |
US5113272A (en) | 1990-02-12 | 1992-05-12 | Raychem Corporation | Three dimensional semiconductor display using liquid crystal |
US5126812A (en) | 1990-02-14 | 1992-06-30 | The Charles Stark Draper Laboratory, Inc. | Monolithic micromechanical accelerometer |
US5031144A (en) | 1990-02-28 | 1991-07-09 | Hughes Aircraft Company | Ferroelectric memory with non-destructive readout including grid electrode between top and bottom electrodes |
US5085497A (en) | 1990-03-16 | 1992-02-04 | Aura Systems, Inc. | Method for fabricating mirror array for optical projection system |
GB9006471D0 (en) | 1990-03-22 | 1990-05-23 | Surface Tech Sys Ltd | Loading mechanisms |
JPH0787171B2 (ja) | 1990-04-06 | 1995-09-20 | ローム株式会社 | 固体電解コンデンサの製造方法 |
US5121231A (en) | 1990-04-06 | 1992-06-09 | University Of Southern California | Incoherent/coherent multiplexed holographic recording for photonic interconnections and holographic optical elements |
DE59105735D1 (de) | 1990-05-02 | 1995-07-20 | Fraunhofer Ges Forschung | Belichtungsvorrichtung. |
US5147815A (en) | 1990-05-14 | 1992-09-15 | Motorola, Inc. | Method for fabricating a multichip semiconductor device having two interdigitated leadframes |
US5144472A (en) | 1990-05-17 | 1992-09-01 | Xerox Corporation | Electrical contacts for an electro-optic modulator |
US5202844A (en) | 1990-05-22 | 1993-04-13 | Kabushiki Kaisha Toshiba | Computer having integral type hand writing input/display device and keyboard |
US5291473A (en) | 1990-06-06 | 1994-03-01 | Texas Instruments Incorporated | Optical storage media light beam positioning system |
US5165013A (en) | 1990-09-26 | 1992-11-17 | Faris Sadeg M | 3-D stereo pen plotter |
US5502481A (en) | 1992-11-16 | 1996-03-26 | Reveo, Inc. | Desktop-based projection display system for stereoscopic viewing of displayed imagery over a wide field of view |
JP2622185B2 (ja) | 1990-06-28 | 1997-06-18 | シャープ株式会社 | カラー液晶表示装置 |
US5083857A (en) | 1990-06-29 | 1992-01-28 | Texas Instruments Incorporated | Multi-level deformable mirror device |
DE69113150T2 (de) | 1990-06-29 | 1996-04-04 | Texas Instruments Inc | Deformierbare Spiegelvorrichtung mit aktualisiertem Raster. |
US5099353A (en) | 1990-06-29 | 1992-03-24 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
US5018256A (en) | 1990-06-29 | 1991-05-28 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
US5142405A (en) | 1990-06-29 | 1992-08-25 | Texas Instruments Incorporated | Bistable dmd addressing circuit and method |
US5216537A (en) | 1990-06-29 | 1993-06-01 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
JPH0739935B2 (ja) | 1990-07-02 | 1995-05-01 | 株式会社東芝 | 撮像素子 |
US5049901A (en) | 1990-07-02 | 1991-09-17 | Creo Products Inc. | Light modulator using large area light sources |
US5291317A (en) | 1990-07-12 | 1994-03-01 | Applied Holographics Corporation | Holographic diffraction grating patterns and methods for creating the same |
US5121343A (en) | 1990-07-19 | 1992-06-09 | Faris Sadeg M | 3-D stereo computer output printer |
GB2249450A (en) | 1990-09-05 | 1992-05-06 | Marconi Gec Ltd | A display arrangement including linear array of light emitting elements |
US5182665A (en) | 1990-09-07 | 1993-01-26 | Displaytech, Inc. | Diffractive light modulator |
US5081617A (en) | 1990-09-24 | 1992-01-14 | Creo Products Inc. | Optical system for simultaneous reading of multiple data tracks |
US5113285A (en) | 1990-09-28 | 1992-05-12 | Honeywell Inc. | Full color three-dimensional flat panel display |
US5148157A (en) | 1990-09-28 | 1992-09-15 | Texas Instruments Incorporated | Spatial light modulator with full complex light modulation capability |
USD334742S (en) | 1990-10-03 | 1993-04-13 | Reflection Technology, Inc. | Miniature video display |
USD337320S (en) | 1990-10-03 | 1993-07-13 | Reflection Technology, Inc. | Combined display and headband for miniature video display unit |
US5115344A (en) | 1990-10-03 | 1992-05-19 | Motorola, Inc. | Tunable diffraction grating |
USD334557S (en) | 1990-10-23 | 1993-04-06 | Reflection Technology, Inc. | Combined headband and attachment arm for a miniature video display box |
US5206829A (en) | 1990-10-24 | 1993-04-27 | Sarita Thakoor | Thin film ferroelectric electro-optic memory |
US5239806A (en) | 1990-11-02 | 1993-08-31 | Ak Technology, Inc. | Thermoplastic semiconductor package and method of producing it |
US5103334A (en) | 1990-11-06 | 1992-04-07 | Xerox Corporation | Resolution improvement in flying spot scanner |
US5602671A (en) | 1990-11-13 | 1997-02-11 | Texas Instruments Incorporated | Low surface energy passivation layer for micromechanical devices |
US5331454A (en) | 1990-11-13 | 1994-07-19 | Texas Instruments Incorporated | Low reset voltage process for DMD |
US5231363A (en) | 1990-11-26 | 1993-07-27 | Texas Instruments Incorporated | Pulse width modulating producing signals centered in each cycle interval |
JP2932686B2 (ja) | 1990-11-28 | 1999-08-09 | 日本電気株式会社 | プラズマディスプレイパネルの駆動方法 |
US5181231A (en) | 1990-11-30 | 1993-01-19 | Texas Instruments, Incorporated | Non-volatile counting method and apparatus |
US5493177A (en) | 1990-12-03 | 1996-02-20 | The Regents Of The University Of California | Sealed micromachined vacuum and gas filled devices |
US5220200A (en) | 1990-12-10 | 1993-06-15 | Delco Electronics Corporation | Provision of substrate pillars to maintain chip standoff |
US5221400A (en) | 1990-12-11 | 1993-06-22 | Delco Electronics Corporation | Method of making a microaccelerometer having low stress bonds and means for preventing excessive z-axis deflection |
US5185823A (en) | 1990-12-13 | 1993-02-09 | Japan Aviation Electronics Industry Limited | Waveguide type optical device |
US5157304A (en) | 1990-12-17 | 1992-10-20 | Motorola, Inc. | Field emission device display with vacuum seal |
US5112436A (en) | 1990-12-24 | 1992-05-12 | Xerox Corporation | Method of forming planar vacuum microelectronic devices with self aligned anode |
US5105299A (en) | 1990-12-31 | 1992-04-14 | Texas Instruments Incorporated | Unfolded optics for multiple row deformable mirror device |
US5151718A (en) | 1990-12-31 | 1992-09-29 | Texas Instruments Incorporated | System and method for solid state illumination for dmd devices |
US5159485A (en) | 1990-12-31 | 1992-10-27 | Texas Instruments Incorporated | System and method for uniformity of illumination for tungsten light |
US5376979A (en) | 1990-12-31 | 1994-12-27 | Kopin Corporation | Slide projector mountable light valve display |
US5105207A (en) | 1990-12-31 | 1992-04-14 | Texas Instruments Incorporated | System and method for achieving gray scale DMD operation |
US5258325A (en) | 1990-12-31 | 1993-11-02 | Kopin Corporation | Method for manufacturing a semiconductor device using a circuit transfer film |
US5172161A (en) | 1990-12-31 | 1992-12-15 | Texas Instruments Incorporated | Unibody printing system and process |
CA2060057C (en) | 1991-01-29 | 1997-12-16 | Susumu Takahashi | Display having diffraction grating pattern |
US5151724A (en) | 1991-01-30 | 1992-09-29 | Dan Kikinis | Dynamic holographic display with cantilever |
US5255358A (en) | 1991-02-14 | 1993-10-19 | International Business Machines | Action bar processing on non-programmable workstations |
JP3150351B2 (ja) | 1991-02-15 | 2001-03-26 | 株式会社東芝 | 電子装置及びその製造方法 |
US5212115A (en) | 1991-03-04 | 1993-05-18 | Motorola, Inc. | Method for microelectronic device packaging employing capacitively coupled connections |
US5219794A (en) | 1991-03-14 | 1993-06-15 | Hitachi, Ltd. | Semiconductor integrated circuit device and method of fabricating same |
US5178728A (en) | 1991-03-28 | 1993-01-12 | Texas Instruments Incorporated | Integrated-optic waveguide devices and method |
CA2063744C (en) | 1991-04-01 | 2002-10-08 | Paul M. Urbanus | Digital micromirror device architecture and timing for use in a pulse-width modulated display system |
US5347378A (en) | 1991-04-04 | 1994-09-13 | Displaytech, Inc. | Fast switching color filters for frame-sequential video using ferroelectric liquid crystal color-selective filters |
US5226099A (en) | 1991-04-26 | 1993-07-06 | Texas Instruments Incorporated | Digital micromirror shutter device |
US5148506A (en) | 1991-04-26 | 1992-09-15 | Texas Instruments Incorporated | Optical crossbar switch |
US5329289A (en) | 1991-04-26 | 1994-07-12 | Sharp Kabushiki Kaisha | Data processor with rotatable display |
US5168401A (en) | 1991-05-07 | 1992-12-01 | Spectra Diode Laboratories, Inc. | Brightness conserving optical system for modifying beam symmetry |
US5137836A (en) | 1991-05-23 | 1992-08-11 | Atmel Corporation | Method of manufacturing a repairable multi-chip module |
US5149405A (en) | 1991-05-28 | 1992-09-22 | Lehr Precision Inc. | Four-axis ECM machine and method of operation |
US5170269A (en) | 1991-05-31 | 1992-12-08 | Texas Instruments Incorporated | Programmable optical interconnect system |
US5299289A (en) | 1991-06-11 | 1994-03-29 | Matsushita Electric Industrial Co., Ltd. | Polymer dispersed liquid crystal panel with diffraction grating |
US5153770A (en) | 1991-06-27 | 1992-10-06 | Xerox Corporation | Total internal reflection electro-optic modulator |
US5155778A (en) | 1991-06-28 | 1992-10-13 | Texas Instruments Incorporated | Optical switch using spatial light modulators |
US5221982A (en) | 1991-07-05 | 1993-06-22 | Faris Sadeg M | Polarizing wavelength separator |
US5179274A (en) | 1991-07-12 | 1993-01-12 | Texas Instruments Incorporated | Method for controlling operation of optical systems and devices |
US5287215A (en) | 1991-07-17 | 1994-02-15 | Optron Systems, Inc. | Membrane light modulation systems |
US5170283A (en) | 1991-07-24 | 1992-12-08 | Northrop Corporation | Silicon spatial light modulator |
US5168406A (en) | 1991-07-31 | 1992-12-01 | Texas Instruments Incorporated | Color deformable mirror device and method for manufacture |
US5164019A (en) | 1991-07-31 | 1992-11-17 | Sunpower Corporation | Monolithic series-connected solar cells having improved cell isolation and method of making same |
US5240818A (en) | 1991-07-31 | 1993-08-31 | Texas Instruments Incorporated | Method for manufacturing a color filter for deformable mirror device |
CA2075026A1 (en) | 1991-08-08 | 1993-02-09 | William E. Nelson | Method and apparatus for patterning an imaging member |
JP2538456B2 (ja) | 1991-08-12 | 1996-09-25 | 浜松ホトニクス株式会社 | 光学的変位量測定装置 |
US5233874A (en) | 1991-08-19 | 1993-08-10 | General Motors Corporation | Active microaccelerometer |
US5418546A (en) | 1991-08-20 | 1995-05-23 | Mitsubishi Denki Kabushiki Kaisha | Visual display system and exposure control apparatus |
US5198895A (en) | 1991-08-29 | 1993-03-30 | Rockwell International Corporation | Holographic head-up display |
JPH0563029A (ja) | 1991-09-02 | 1993-03-12 | Fujitsu Ltd | 半導体素子 |
US5132723A (en) | 1991-09-05 | 1992-07-21 | Creo Products, Inc. | Method and apparatus for exposure control in light valves |
US5255100A (en) | 1991-09-06 | 1993-10-19 | Texas Instruments Incorporated | Data formatter with orthogonal input/output and spatial reordering |
US5307056A (en) | 1991-09-06 | 1994-04-26 | Texas Instruments Incorporated | Dynamic memory allocation for frame buffer for spatial light modulator |
US5254980A (en) | 1991-09-06 | 1993-10-19 | Texas Instruments Incorporated | DMD display system controller |
US5245686A (en) | 1991-09-06 | 1993-09-14 | Faris Sadeg M | Method of fabricating an image plane translator device and apparatus incorporating such device |
US5208891A (en) | 1991-10-07 | 1993-05-04 | The United State Of America As Represented By The Secretary Of The Navy | Fiber-optic viewgraph projector |
US5177724A (en) | 1991-10-08 | 1993-01-05 | Crea Products Inc. | Optical tape recorder using a resonant flexure scanner |
US5239448A (en) | 1991-10-28 | 1993-08-24 | International Business Machines Corporation | Formulation of multichip modules |
DE69221987T2 (de) | 1991-11-01 | 1998-02-05 | Sega Enterprises Kk | Am Kopf befestigte Abbildungsvorrichtung |
US5230005A (en) | 1991-11-05 | 1993-07-20 | The United States Of America As Represented By The Secretary Of The Navy | Electronic tuning of a broadband laser |
US5210637A (en) | 1991-11-12 | 1993-05-11 | International Business Machines Corp. | High speed light modulation |
CA2081753C (en) | 1991-11-22 | 2002-08-06 | Jeffrey B. Sampsell | Dmd scanner |
JPH05142490A (ja) | 1991-11-25 | 1993-06-11 | Fuji Xerox Co Ltd | 非線形周波数特性を有するレーザ走査光学系 |
US5231432A (en) | 1991-12-03 | 1993-07-27 | Florida Atlantic University | Projector utilizing liquid crystal light-valve and color selection by diffraction |
DE69231194T2 (de) | 1991-12-05 | 2001-02-15 | Texas Instruments Inc | Verfahren zur Verbesserung eines Videosignals |
US5208818A (en) | 1991-12-12 | 1993-05-04 | Creo Products Inc. | Laser system for recording data patterns on a planar substrate |
US5323051A (en) | 1991-12-16 | 1994-06-21 | Motorola, Inc. | Semiconductor wafer level package |
US5212555A (en) | 1991-12-17 | 1993-05-18 | Texas Instruments Incorporated | Image capture with spatial light modulator and single-cell photosensor |
US5231388A (en) | 1991-12-17 | 1993-07-27 | Texas Instruments Incorporated | Color display system using spatial light modulators |
US5247593A (en) | 1991-12-18 | 1993-09-21 | Texas Instruments Incorporated | Programmable optical crossbar switch |
US5311349A (en) | 1991-12-18 | 1994-05-10 | Texas Instruments Incorporated | Unfolded optics for multiple row spatial light modulators |
US5313835A (en) | 1991-12-19 | 1994-05-24 | Motorola, Inc. | Integrated monolithic gyroscopes/accelerometers with logic circuits |
CA2084923A1 (en) | 1991-12-20 | 1993-06-21 | Ronald E. Stafford | Slm spectrometer |
US5202785A (en) | 1991-12-20 | 1993-04-13 | Texas Instruments Incorporated | Method and device for steering light |
US5233456A (en) | 1991-12-20 | 1993-08-03 | Texas Instruments Incorporated | Resonant mirror and method of manufacture |
CA2085961A1 (en) | 1991-12-23 | 1993-06-24 | William E. Nelson | Method and apparatus for steering light |
US5247180A (en) | 1991-12-30 | 1993-09-21 | Texas Instruments Incorporated | Stereolithographic apparatus and method of use |
US5189548A (en) | 1991-12-31 | 1993-02-23 | Xerox Corporation | Electrooptic TIR light modulator image bar having multiple electrodes per pixel |
US5285407A (en) | 1991-12-31 | 1994-02-08 | Texas Instruments Incorporated | Memory circuit for spatial light modulator |
US5296950A (en) | 1992-01-31 | 1994-03-22 | Texas Instruments Incorporated | Optical signal free-space conversion board |
US5233460A (en) | 1992-01-31 | 1993-08-03 | Regents Of The University Of California | Method and means for reducing speckle in coherent laser pulses |
US5224088A (en) | 1992-02-10 | 1993-06-29 | Creo Products Inc. | High resolution optical scanner |
US5504514A (en) | 1992-02-13 | 1996-04-02 | Texas Instruments Incorporated | System and method for solid state illumination for spatial light modulators |
US5315423A (en) | 1992-02-18 | 1994-05-24 | Rockwell International Corporation | Wavelength multiplexed two dimensional image transmission through single mode optical fiber |
US5300813A (en) | 1992-02-26 | 1994-04-05 | International Business Machines Corporation | Refractory metal capped low resistivity metal conductor lines and vias |
US5212582A (en) | 1992-03-04 | 1993-05-18 | Texas Instruments Incorporated | Electrostatically controlled beam steering device and method |
DE69310974T2 (de) | 1992-03-25 | 1997-11-06 | Texas Instruments Inc | Eingebautes optisches Eichsystem |
US5312513A (en) | 1992-04-03 | 1994-05-17 | Texas Instruments Incorporated | Methods of forming multiple phase light modulators |
US5319214A (en) | 1992-04-06 | 1994-06-07 | The United States Of America As Represented By The Secretary Of The Army | Infrared image projector utilizing a deformable mirror device spatial light modulator |
US5357803A (en) | 1992-04-08 | 1994-10-25 | Rochester Institute Of Technology | Micromachined microaccelerometer for measuring acceleration along three axes |
GB9208705D0 (en) | 1992-04-22 | 1992-07-22 | Smiths Industries Plc | Head-mounted display assemblies |
JPH05303348A (ja) | 1992-04-24 | 1993-11-16 | Nec Eng Ltd | Lcdビデオ信号インタフェース装置 |
US5459592A (en) | 1992-04-24 | 1995-10-17 | Sharp Kabushiki Kaisha | Projection display system including a collimating tapered waveguide or lens with the normal to optical axis angle increasing toward the lens center |
US5311360A (en) | 1992-04-28 | 1994-05-10 | The Board Of Trustees Of The Leland Stanford, Junior University | Method and apparatus for modulating a light beam |
US6219015B1 (en) | 1992-04-28 | 2001-04-17 | The Board Of Directors Of The Leland Stanford, Junior University | Method and apparatus for using an array of grating light valves to produce multicolor optical images |
GB2267579A (en) | 1992-05-15 | 1993-12-08 | Sharp Kk | Optical device comprising facing lenticular or parallax screens of different pitch |
US5334991A (en) | 1992-05-15 | 1994-08-02 | Reflection Technology | Dual image head-mounted display |
US5307185A (en) | 1992-05-19 | 1994-04-26 | Raychem Corporation | Liquid crystal projection display with complementary color dye added to longest wavelength imaging element |
US5347433A (en) | 1992-06-11 | 1994-09-13 | Sedlmayr Steven R | Collimated beam of light and systems and methods for implementation thereof |
US5281887A (en) | 1992-06-15 | 1994-01-25 | Engle Craig D | Two independent spatial variable degree of freedom wavefront modulator |
US5315418A (en) | 1992-06-17 | 1994-05-24 | Xerox Corporation | Two path liquid crystal light valve color display with light coupling lens array disposed along the red-green light path |
US5486841A (en) | 1992-06-17 | 1996-01-23 | Sony Corporation | Glasses type display apparatus |
US5256869A (en) | 1992-06-30 | 1993-10-26 | Texas Instruments Incorporated | Free-space optical interconnection using deformable mirror device |
FR2693033B1 (fr) | 1992-06-30 | 1994-08-19 | Commissariat Energie Atomique | Dispositif d'imagerie de grande dimension. |
JPH0637143A (ja) | 1992-07-15 | 1994-02-10 | Toshiba Corp | 半導体装置および半導体装置の製造方法 |
US5340772A (en) | 1992-07-17 | 1994-08-23 | Lsi Logic Corporation | Method of increasing the layout efficiency of dies on a wafer and increasing the ratio of I/O area to active area per die |
US5430524A (en) | 1992-07-22 | 1995-07-04 | Texas Instruments Incorporated | Unibody printing and copying system and process |
US5321416A (en) | 1992-07-27 | 1994-06-14 | Virtual Research Systems | Head-mounted visual display apparatus |
US5313479A (en) | 1992-07-29 | 1994-05-17 | Texas Instruments Incorporated | Speckle-free display system using coherent light |
US5605406A (en) | 1992-08-24 | 1997-02-25 | Bowen; James H. | Computer input devices with light activated switches and light emitter protection |
US5327286A (en) | 1992-08-31 | 1994-07-05 | Texas Instruments Incorporated | Real time optical correlation system |
US5249245A (en) | 1992-08-31 | 1993-09-28 | Motorola, Inc. | Optoelectroinc mount including flexible substrate and method for making same |
US5303043A (en) | 1992-09-01 | 1994-04-12 | Florida Atlantic University | Projection television display utilizing Bragg diffraction cell for producing horizontal scan |
US5348619A (en) | 1992-09-03 | 1994-09-20 | Texas Instruments Incorporated | Metal selective polymer removal |
JP3105089B2 (ja) | 1992-09-11 | 2000-10-30 | 株式会社東芝 | 半導体装置 |
EP0660967B1 (en) | 1992-09-14 | 2001-04-11 | Shellcase Ltd. | Method for producing integrated circuit devices |
US5325116A (en) | 1992-09-18 | 1994-06-28 | Texas Instruments Incorporated | Device for writing to and reading from optical storage media |
GB9220412D0 (en) | 1992-09-28 | 1992-11-11 | Texas Instruments Holland | Transponder systems for automatic identification purposes |
US5493439A (en) | 1992-09-29 | 1996-02-20 | Engle; Craig D. | Enhanced surface deformation light modulator |
US5661593A (en) | 1992-10-01 | 1997-08-26 | Engle; Craig D. | Linear electrostatic modulator |
US5285196A (en) | 1992-10-15 | 1994-02-08 | Texas Instruments Incorporated | Bistable DMD addressing method |
JP2934357B2 (ja) | 1992-10-20 | 1999-08-16 | 富士通株式会社 | 半導体装置 |
US5289172A (en) | 1992-10-23 | 1994-02-22 | Texas Instruments Incorporated | Method of mitigating the effects of a defective electromechanical pixel |
GB2272555A (en) | 1992-11-11 | 1994-05-18 | Sharp Kk | Stereoscopic display using a light modulator |
EP0599375B1 (de) | 1992-11-20 | 1999-03-03 | Ascom Tech Ag | Lichtmodulator |
US5450088A (en) | 1992-11-25 | 1995-09-12 | Texas Instruments Deutschland Gmbh | Transponder arrangement |
US5410315A (en) | 1992-12-08 | 1995-04-25 | Texas Instruments Incorporated | Group-addressable transponder arrangement |
US5420655A (en) | 1992-12-16 | 1995-05-30 | North American Philips Corporation | Color projection system employing reflective display devices and prism illuminators |
JPH06260470A (ja) | 1992-12-16 | 1994-09-16 | Texas Instr Inc <Ti> | パターンに作成された金属層の清浄化法 |
EP0608440A1 (en) | 1992-12-18 | 1994-08-03 | Fujitsu Limited | Semiconductor device having a plurality of chips having identical circuit arrangements sealed in package |
US5357369A (en) | 1992-12-21 | 1994-10-18 | Geoffrey Pilling | Wide-field three-dimensional viewing system |
FR2699690B1 (fr) | 1992-12-22 | 1995-01-27 | Thomson Csf | Projecteur d'images mobiles à faible champ. |
US5296408A (en) | 1992-12-24 | 1994-03-22 | International Business Machines Corporation | Fabrication method for vacuum microelectronic devices |
US5418584A (en) | 1992-12-31 | 1995-05-23 | Honeywell Inc. | Retroreflective array virtual image projection screen |
US5352926A (en) | 1993-01-04 | 1994-10-04 | Motorola, Inc. | Flip chip package and method of making |
US5315429A (en) | 1993-01-04 | 1994-05-24 | Xerox Corporation | Micromechanical light modulator with optically interlaced output |
US5371618A (en) | 1993-01-05 | 1994-12-06 | Brite View Technologies | Color liquid crystal display employing dual cells driven with an EXCLUSIVE OR relationship |
AU5306494A (en) | 1993-01-08 | 1994-07-14 | Richard A Vasichek | Magnetic keeper accessory for wrench sockets |
CA2113213C (en) | 1993-01-11 | 2004-04-27 | Kevin L. Kornher | Pixel control circuitry for spatial light modulator |
JP3457348B2 (ja) | 1993-01-15 | 2003-10-14 | 株式会社東芝 | 半導体装置の製造方法 |
US5426072A (en) | 1993-01-21 | 1995-06-20 | Hughes Aircraft Company | Process of manufacturing a three dimensional integrated circuit from stacked SOI wafers using a temporary silicon substrate |
US5359451A (en) | 1993-01-29 | 1994-10-25 | Creo Products Inc. | High efficiency acousto-optic modulator |
JPH06244359A (ja) | 1993-02-19 | 1994-09-02 | Takashi Murai | 多層チップ |
US5371543A (en) | 1993-03-03 | 1994-12-06 | Texas Instruments Incorporated | Monolithic color wheel |
US5404485A (en) | 1993-03-08 | 1995-04-04 | M-Systems Flash Disk Pioneers Ltd. | Flash file system |
US5903098A (en) | 1993-03-11 | 1999-05-11 | Fed Corporation | Field emission display device having multiplicity of through conductive vias and a backside connector |
US5293511A (en) | 1993-03-16 | 1994-03-08 | Texas Instruments Incorporated | Package for a semiconductor device |
US5461410A (en) | 1993-03-29 | 1995-10-24 | Texas Instruments Incorporated | Gray scale printing using spatial light modulators |
US5435876A (en) | 1993-03-29 | 1995-07-25 | Texas Instruments Incorporated | Grid array masking tape process |
US5455602A (en) | 1993-03-29 | 1995-10-03 | Texas Instruments Incorporated | Combined modulation schemes for spatial light modulators |
US5461411A (en) | 1993-03-29 | 1995-10-24 | Texas Instruments Incorporated | Process and architecture for digital micromirror printer |
JPH06281988A (ja) | 1993-03-30 | 1994-10-07 | Nikon Corp | 防振光学装置 |
US5451103A (en) | 1993-04-06 | 1995-09-19 | Sony Corporation | Projector system |
US5510758A (en) | 1993-04-07 | 1996-04-23 | Matsushita Electric Industrial Co., Ltd. | Multilayer microstrip wiring board with a semiconductor device mounted thereon via bumps |
US5539422A (en) | 1993-04-12 | 1996-07-23 | Virtual Vision, Inc. | Head mounted display system |
US5427975A (en) | 1993-05-10 | 1995-06-27 | Delco Electronics Corporation | Method of micromachining an integrated sensor on the surface of a silicon wafer |
US5321450A (en) | 1993-05-11 | 1994-06-14 | Proxima Corporation | Low profile liquid crystal projector and method of using same |
US5485172A (en) | 1993-05-21 | 1996-01-16 | Sony Corporation | Automatic image regulating arrangement for head-mounted image display apparatus |
KR970003007B1 (ko) | 1993-05-21 | 1997-03-13 | 대우전자 주식회사 | 투사형 화상표시장치용 광로조절장치 및 그 구동방법 |
JPH06331928A (ja) | 1993-05-24 | 1994-12-02 | Sony Corp | 眼鏡型ディスプレイ装置 |
DE69429209T2 (de) | 1993-06-01 | 2002-06-27 | Sharp Kk | Bildanzeigevorrichtung mit rückseitiger Beleuchtung |
US5445559A (en) | 1993-06-24 | 1995-08-29 | Texas Instruments Incorporated | Wafer-like processing after sawing DMDs |
US5453747A (en) | 1993-06-28 | 1995-09-26 | Texas Instruments Deutschland Gmbh | Transponder systems for automatic identification purposes |
US5491715A (en) | 1993-06-28 | 1996-02-13 | Texas Instruments Deutschland Gmbh | Automatic antenna tuning method and circuit |
US5345521A (en) | 1993-07-12 | 1994-09-06 | Texas Instrument Incorporated | Architecture for optical switch |
US5513198A (en) | 1993-07-14 | 1996-04-30 | Corning Incorporated | Packaging of high power semiconductor lasers |
US5489952A (en) | 1993-07-14 | 1996-02-06 | Texas Instruments Incorporated | Method and device for multi-format television |
US5365283A (en) | 1993-07-19 | 1994-11-15 | Texas Instruments Incorporated | Color phase control for projection display using spatial light modulator |
US5673139A (en) | 1993-07-19 | 1997-09-30 | Medcom, Inc. | Microelectromechanical television scanning device and method for making the same |
US5461547A (en) | 1993-07-20 | 1995-10-24 | Precision Lamp, Inc. | Flat panel display lighting system |
US5510824A (en) | 1993-07-26 | 1996-04-23 | Texas Instruments, Inc. | Spatial light modulator array |
JP3185831B2 (ja) | 1993-07-30 | 2001-07-11 | 富士写真フイルム株式会社 | 偏光コヒーレント合波レーザ |
US5453778A (en) | 1993-07-30 | 1995-09-26 | Texas Instruments Incorporated | Method and apparatus for spatial modulation in the cross-process direction |
US5389182A (en) | 1993-08-02 | 1995-02-14 | Texas Instruments Incorporated | Use of a saw frame with tape as a substrate carrier for wafer level backend processing |
US5438477A (en) | 1993-08-12 | 1995-08-01 | Lsi Logic Corporation | Die-attach technique for flip-chip style mounting of semiconductor dies |
US5581272A (en) | 1993-08-25 | 1996-12-03 | Texas Instruments Incorporated | Signal generator for controlling a spatial light modulator |
US5459492A (en) | 1993-08-30 | 1995-10-17 | Texas Instruments Incorporated | Method and apparatus for printing stroke and contone data together |
US5485354A (en) | 1993-09-09 | 1996-01-16 | Precision Lamp, Inc. | Flat panel display lighting system |
JP3322283B2 (ja) | 1993-09-14 | 2002-09-09 | ソニー株式会社 | 画像表示装置 |
EP0657760A1 (en) | 1993-09-15 | 1995-06-14 | Texas Instruments Incorporated | Image simulation and projection system |
US5457493A (en) | 1993-09-15 | 1995-10-10 | Texas Instruments Incorporated | Digital micro-mirror based image simulation system |
KR970003466B1 (ko) | 1993-09-28 | 1997-03-18 | 대우전자 주식회사 | 투사형 화상 표시 장치의 광로 조절 장치 제조 방법 |
US5347321A (en) | 1993-09-30 | 1994-09-13 | Texas Instruments Incorporated | Color separator for digital television |
US5815126A (en) | 1993-10-22 | 1998-09-29 | Kopin Corporation | Monocular portable communication and display system |
US5420722A (en) | 1993-10-25 | 1995-05-30 | Creo Products Inc. | Self-registering microlens for laser diodes |
US5497197A (en) | 1993-11-04 | 1996-03-05 | Texas Instruments Incorporated | System and method for packaging data into video processor |
US5367585A (en) | 1993-10-27 | 1994-11-22 | General Electric Company | Integrated microelectromechanical polymeric photonic switch |
US5508558A (en) | 1993-10-28 | 1996-04-16 | Digital Equipment Corporation | High density, high speed, semiconductor interconnect using-multilayer flexible substrate with unsupported central portion |
US5734224A (en) | 1993-11-01 | 1998-03-31 | Canon Kabushiki Kaisha | Image forming apparatus and method of manufacturing the same |
US5452024A (en) | 1993-11-01 | 1995-09-19 | Texas Instruments Incorporated | DMD display system |
US5398071A (en) | 1993-11-02 | 1995-03-14 | Texas Instruments Incorporated | Film-to-video format detection for digital television |
US5523619A (en) | 1993-11-03 | 1996-06-04 | International Business Machines Corporation | High density memory structure |
CA2134370A1 (en) | 1993-11-04 | 1995-05-05 | Robert J. Gove | Video data formatter for a digital television system |
US5508561A (en) | 1993-11-15 | 1996-04-16 | Nec Corporation | Apparatus for forming a double-bump structure used for flip-chip mounting |
US5412501A (en) | 1993-11-17 | 1995-05-02 | Xerox Corporation | System for controlling spot power in a raster output scanner |
US5450219A (en) | 1993-11-17 | 1995-09-12 | Hughes Aircraft Company | Raster following telecentric illumination scanning system for enhancing light throughout in light valve projection systems |
US6362835B1 (en) | 1993-11-23 | 2002-03-26 | Texas Instruments Incorporated | Brightness and contrast control for a digital pulse-width modulated display system |
US5517347A (en) | 1993-12-01 | 1996-05-14 | Texas Instruments Incorporated | Direct view deformable mirror device |
GB2294350A (en) | 1994-10-21 | 1996-04-24 | Sharp Kk | Light source and display |
US5491510A (en) | 1993-12-03 | 1996-02-13 | Texas Instruments Incorporated | System and method for simultaneously viewing a scene and an obscured object |
US5454160A (en) | 1993-12-03 | 1995-10-03 | Ncr Corporation | Apparatus and method for stacking integrated circuit devices |
CA2179052C (en) | 1993-12-13 | 2001-02-13 | Robert E. Higashi | Integrated silicon vacuum micropackage for infrared devices |
US5473512A (en) | 1993-12-16 | 1995-12-05 | At&T Corp. | Electronic device package having electronic device boonded, at a localized region thereof, to circuit board |
EP1001323A3 (en) | 1993-12-17 | 2005-10-12 | Denso Corporation | Data backup apparatus utilized in an electronic control system and data backup method performed in the data backup apparatus |
JP2722314B2 (ja) | 1993-12-20 | 1998-03-04 | 日本信号株式会社 | プレーナー型ガルバノミラー及びその製造方法 |
US5442411A (en) | 1994-01-03 | 1995-08-15 | Texas Instruments Incorporated | Displaying video data on a spatial light modulator with line doubling |
US5523920A (en) | 1994-01-03 | 1996-06-04 | Motorola, Inc. | Printed circuit board comprising elevated bond pads |
US5499060A (en) | 1994-01-04 | 1996-03-12 | Texas Instruments Incorporated | System and method for processing video data |
US5448314A (en) | 1994-01-07 | 1995-09-05 | Texas Instruments | Method and apparatus for sequential color imaging |
CA2139794C (en) | 1994-01-18 | 2006-11-07 | Robert John Gove | Frame pixel data generation |
US5455445A (en) | 1994-01-21 | 1995-10-03 | Kulite Semiconductor Products, Inc. | Multi-level semiconductor structures having environmentally isolated elements |
US5500761A (en) | 1994-01-27 | 1996-03-19 | At&T Corp. | Micromechanical modulator |
US5658698A (en) | 1994-01-31 | 1997-08-19 | Canon Kabushiki Kaisha | Microstructure, process for manufacturing thereof and devices incorporating the same |
US5467106A (en) | 1994-02-10 | 1995-11-14 | Hughes-Avicom International, Inc. | Retractable face-up LCD monitor with off-monitor power supply and back-EMF braking |
US5412186A (en) | 1994-02-23 | 1995-05-02 | Texas Instruments Incorporated | Elimination of sticking of micro-mechanical devices |
US5444566A (en) | 1994-03-07 | 1995-08-22 | Texas Instruments Incorporated | Optimized electronic operation of digital micromirror devices |
US5439731A (en) | 1994-03-11 | 1995-08-08 | Cornell Research Goundation, Inc. | Interconnect structures containing blocked segments to minimize stress migration and electromigration damage |
US5447600A (en) | 1994-03-21 | 1995-09-05 | Texas Instruments | Polymeric coatings for micromechanical devices |
US5380681A (en) | 1994-03-21 | 1995-01-10 | United Microelectronics Corporation | Three-dimensional multichip package and methods of fabricating |
US6097352A (en) | 1994-03-23 | 2000-08-01 | Kopin Corporation | Color sequential display panels |
JP3537881B2 (ja) | 1994-03-29 | 2004-06-14 | 株式会社リコー | Ledアレイヘッド |
US5576878A (en) | 1994-03-30 | 1996-11-19 | Texas Instruments Incorporated | Use of incompatible materials to eliminate sticking of micro-mechanical devices |
US5467146A (en) | 1994-03-31 | 1995-11-14 | Texas Instruments Incorporated | Illumination control unit for display system with spatial light modulator |
US5459528A (en) | 1994-03-31 | 1995-10-17 | Texas Instruments Incorporated | Video signal processor and method for secondary images |
US5640216A (en) | 1994-04-13 | 1997-06-17 | Hitachi, Ltd. | Liquid crystal display device having video signal driving circuit mounted on one side and housing |
US5486698A (en) | 1994-04-19 | 1996-01-23 | Texas Instruments Incorporated | Thermal imaging system with integrated thermal chopper |
US5544306A (en) | 1994-05-03 | 1996-08-06 | Sun Microsystems, Inc. | Flexible dram access in a frame buffer memory and system |
US6040937A (en) | 1994-05-05 | 2000-03-21 | Etalon, Inc. | Interferometric modulation |
US5512374A (en) | 1994-05-09 | 1996-04-30 | Texas Instruments Incorporated | PFPE coatings for micro-mechanical devices |
US5458716A (en) | 1994-05-25 | 1995-10-17 | Texas Instruments Incorporated | Methods for manufacturing a thermally enhanced molded cavity package having a parallel lid |
US5497172A (en) | 1994-06-13 | 1996-03-05 | Texas Instruments Incorporated | Pulse width modulation for spatial light modulator with split reset addressing |
US5534107A (en) | 1994-06-14 | 1996-07-09 | Fsi International | UV-enhanced dry stripping of silicon nitride films |
US5521748A (en) | 1994-06-16 | 1996-05-28 | Eastman Kodak Company | Light modulator with a laser or laser array for exposing image data |
US5454906A (en) | 1994-06-21 | 1995-10-03 | Texas Instruments Inc. | Method of providing sacrificial spacer for micro-mechanical devices |
US5482564A (en) | 1994-06-21 | 1996-01-09 | Texas Instruments Incorporated | Method of unsticking components of micro-mechanical devices |
US5920418A (en) | 1994-06-21 | 1999-07-06 | Matsushita Electric Industrial Co., Ltd. | Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator |
US5499062A (en) | 1994-06-23 | 1996-03-12 | Texas Instruments Incorporated | Multiplexed memory timing with block reset and secondary memory |
US5523878A (en) | 1994-06-30 | 1996-06-04 | Texas Instruments Incorporated | Self-assembled monolayer coating for micro-mechanical devices |
US5504504A (en) | 1994-07-13 | 1996-04-02 | Texas Instruments Incorporated | Method of reducing the visual impact of defects present in a spatial light modulator display |
US5704700A (en) | 1994-07-25 | 1998-01-06 | Proxima Corporation | Laser illuminated image projection system and method of using same |
US5696560A (en) | 1994-07-25 | 1997-12-09 | Magma, Inc. | Motion picture distribution system |
US5512748A (en) | 1994-07-26 | 1996-04-30 | Texas Instruments Incorporated | Thermal imaging system with a monolithic focal plane array and method |
US5485304A (en) | 1994-07-29 | 1996-01-16 | Texas Instruments, Inc. | Support posts for micro-mechanical devices |
US5523628A (en) | 1994-08-05 | 1996-06-04 | Hughes Aircraft Company | Apparatus and method for protecting metal bumped integrated circuit chips during processing and for providing mechanical support to interconnected chips |
JP3233535B2 (ja) | 1994-08-15 | 2001-11-26 | 株式会社東芝 | 半導体装置及びその製造方法 |
US5903395A (en) | 1994-08-31 | 1999-05-11 | I-O Display Systems Llc | Personal visual display system |
US5483307A (en) | 1994-09-29 | 1996-01-09 | Texas Instruments, Inc. | Wide field of view head-mounted display |
US5995303A (en) | 1994-09-30 | 1999-11-30 | Kabushiki Kaisha Toshiba | Optical element and optical device |
JP3707084B2 (ja) | 1994-10-31 | 2005-10-19 | ソニー株式会社 | 表示装置及び表示方法 |
US5490009A (en) | 1994-10-31 | 1996-02-06 | Texas Instruments Incorporated | Enhanced resolution for digital micro-mirror displays |
US5519450A (en) | 1994-11-14 | 1996-05-21 | Texas Instruments Incorporated | Graphics subsystem for digital television |
DE69514343T2 (de) * | 1994-11-23 | 2000-08-10 | Koninkl Philips Electronics Nv | Halbleitereinrichtung mit einer mikrokomponente, die eine starre und eine bewegliche elektrode aufweist |
US5516125A (en) | 1994-11-30 | 1996-05-14 | Texas Instruments Incorporated | Baffled collet for vacuum pick-up of a semiconductor die |
US5463347A (en) | 1994-12-12 | 1995-10-31 | Texas Instruments Incorporated | MOS uni-directional, differential voltage amplifier capable of amplifying signals having input common-mode voltage beneath voltage of lower supply and integrated circuit substrate |
GB2296152B (en) | 1994-12-13 | 1999-07-07 | Gec Marconi Avionics Holdings | An autostereoscopic display |
US5668611A (en) | 1994-12-21 | 1997-09-16 | Hughes Electronics | Full color sequential image projection system incorporating pulse rate modulated illumination |
US5486946A (en) | 1994-12-21 | 1996-01-23 | Motorola | Integrated electro-optic package for reflective spatial light modulators |
US5524155A (en) | 1995-01-06 | 1996-06-04 | Texas Instruments Incorporated | Demultiplexer for wavelength-multiplexed optical signal |
US5623361A (en) | 1995-01-09 | 1997-04-22 | Engle; Craig D. | Enhanced wavefront phase modulator device |
US5517359A (en) | 1995-01-23 | 1996-05-14 | Gelbart; Daniel | Apparatus for imaging light from a laser diode onto a multi-channel linear light valve |
US5726480A (en) | 1995-01-27 | 1998-03-10 | The Regents Of The University Of California | Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same |
US5517340A (en) | 1995-01-30 | 1996-05-14 | International Business Machines Corporation | High performance projection display with two light valves |
JPH08201757A (ja) | 1995-01-30 | 1996-08-09 | A G Technol Kk | 投射型カラー表示装置 |
US5504614A (en) | 1995-01-31 | 1996-04-02 | Texas Instruments Incorporated | Method for fabricating a DMD spatial light modulator with a hardened hinge |
US5508750A (en) | 1995-02-03 | 1996-04-16 | Texas Instruments Incorporated | Encoding data converted from film format for progressive display |
DE19549395A1 (de) | 1995-02-07 | 1996-10-31 | Ldt Gmbh & Co | Bilderzeugungssysteme zur Bestimmung von Sehfehlern an Probanden und für deren Therapie |
US5491612A (en) | 1995-02-21 | 1996-02-13 | Fairchild Space And Defense Corporation | Three-dimensional modular assembly of integrated circuits |
US5610438A (en) | 1995-03-08 | 1997-03-11 | Texas Instruments Incorporated | Micro-mechanical device with non-evaporable getter |
DE19511593C2 (de) | 1995-03-29 | 1997-02-13 | Siemens Ag | Mikrooptische Vorrichtung |
JP3209877B2 (ja) | 1995-03-31 | 2001-09-17 | アルプス電気株式会社 | 光学読み取り装置 |
JP2987750B2 (ja) | 1995-05-26 | 1999-12-06 | 日本信号株式会社 | プレーナ型電磁アクチュエータ |
US5744752A (en) | 1995-06-05 | 1998-04-28 | International Business Machines Corporation | Hermetic thin film metallized sealband for SCM and MCM-D modules |
US5661592A (en) * | 1995-06-07 | 1997-08-26 | Silicon Light Machines | Method of making and an apparatus for a flat diffraction grating light valve |
US5841579A (en) | 1995-06-07 | 1998-11-24 | Silicon Light Machines | Flat diffraction grating light valve |
US5798743A (en) | 1995-06-07 | 1998-08-25 | Silicon Light Machines | Clear-behind matrix addressing for display systems |
US5629801A (en) | 1995-06-07 | 1997-05-13 | Silicon Light Machines | Diffraction grating light doubling collection system |
US5835256A (en) | 1995-06-19 | 1998-11-10 | Reflectivity, Inc. | Reflective spatial light modulator with encapsulated micro-mechanical elements |
US5949570A (en) | 1995-06-20 | 1999-09-07 | Matsushita Electric Industrial Co., Ltd. | Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator |
JP3135107B2 (ja) | 1995-06-27 | 2001-02-13 | シャープ株式会社 | 3次元ディスプレイ装置 |
US5886675A (en) | 1995-07-05 | 1999-03-23 | Physical Optics Corporation | Autostereoscopic display system with fan-out multiplexer |
US5837562A (en) | 1995-07-07 | 1998-11-17 | The Charles Stark Draper Laboratory, Inc. | Process for bonding a shell to a substrate for packaging a semiconductor |
US5691836A (en) | 1995-07-11 | 1997-11-25 | Sy Technology, Inc. | Optically addressed spatial light modulator and method |
US5742373A (en) | 1995-10-13 | 1998-04-21 | Massachusetts Institute Of Technology | Color microdisplays and methods of manufacturing same |
JP3435925B2 (ja) | 1995-08-25 | 2003-08-11 | ソニー株式会社 | 半導体装置 |
US5757536A (en) | 1995-08-30 | 1998-05-26 | Sandia Corporation | Electrically-programmable diffraction grating |
US5963788A (en) | 1995-09-06 | 1999-10-05 | Sandia Corporation | Method for integrating microelectromechanical devices with electronic circuitry |
DE69636941T2 (de) | 1995-11-01 | 2008-01-10 | Matsushita Electric Industrial Co., Ltd., Kadoma | Vorrichtung zur Kontrolle der Ausgangsleistung, Projektionsanzeigevorrichtung, Infrarotsensor und berührungsloses Thermometer |
US5907425A (en) | 1995-12-19 | 1999-05-25 | The Board Of Trustees Of The Leland Stanford Junior University | Miniature scanning confocal microscope |
US6025859A (en) | 1995-12-27 | 2000-02-15 | Sharp Kabushiki Kaisha | Electrostatic printer having an array of optical modulating grating valves |
US5689361A (en) | 1996-01-22 | 1997-11-18 | Lucent Technologies Inc. | Apparatus and method for femtosecond pulse compression based on selective attenuation of a portion of an input power spectrum |
JPH09230321A (ja) | 1996-02-20 | 1997-09-05 | Denso Corp | カラー液晶表示装置 |
US5801074A (en) | 1996-02-20 | 1998-09-01 | Kim; Jong Tae | Method of making an air tight cavity in an assembly package |
US5942791A (en) | 1996-03-06 | 1999-08-24 | Gec-Marconi Limited | Micromachined devices having microbridge structure |
US5694740A (en) | 1996-03-15 | 1997-12-09 | Analog Devices, Inc. | Micromachined device packaged to reduce stiction |
US6090717A (en) | 1996-03-26 | 2000-07-18 | Lam Research Corporation | High density plasma etching of metallization layer using chlorine and nitrogen |
US5731802A (en) | 1996-04-22 | 1998-03-24 | Silicon Light Machines | Time-interleaved bit-plane, pulse-width-modulation digital display system |
JP2896886B2 (ja) | 1996-06-05 | 1999-05-31 | クレオ プロダクツ インコーポレイテッド | フレキソ印刷版の露光用マスク |
US5699740A (en) | 1996-06-17 | 1997-12-23 | Creo Products Inc. | Method of loading metal printing plates on a vacuum drum |
US5862164A (en) | 1996-07-26 | 1999-01-19 | Zygo Corporation | Apparatus to transform with high efficiency a single frequency, linearly polarized laser beam into beams with two orthogonally polarized frequency components orthogonally polarized |
US5745271A (en) | 1996-07-31 | 1998-04-28 | Lucent Technologies, Inc. | Attenuation device for wavelength multiplexed optical fiber communications |
US5798557A (en) | 1996-08-29 | 1998-08-25 | Harris Corporation | Lid wafer bond packaging and micromachining |
US5914801A (en) | 1996-09-27 | 1999-06-22 | Mcnc | Microelectromechanical devices including rotating plates and related methods |
US5919548A (en) | 1996-10-11 | 1999-07-06 | Sandia Corporation | Chemical-mechanical polishing of recessed microelectromechanical devices |
US6064404A (en) | 1996-11-05 | 2000-05-16 | Silicon Light Machines | Bandwidth and frame buffer size reduction in a digital pulse-width-modulated display system |
US5808802A (en) | 1996-11-15 | 1998-09-15 | Daewoo Electronics Co. Ltd. | Head-mounted display apparatus with a single image display device |
US5793519A (en) | 1996-11-15 | 1998-08-11 | Eastman Kodak Company | Micromolded integrated ceramic light reflector |
JP3604844B2 (ja) | 1996-11-20 | 2004-12-22 | キヤノン株式会社 | カラー画像読取装置 |
US5898515A (en) | 1996-11-21 | 1999-04-27 | Eastman Kodak Company | Light reflecting micromachined cantilever |
DE19751716C2 (de) | 1996-11-25 | 2002-06-20 | Fraunhofer Ges Forschung | Anordnung zur Formung und Führung von Strahlung |
US6154259A (en) | 1996-11-27 | 2000-11-28 | Photera Technologies, Inc. | Multi-beam laser scanning display system with speckle elimination |
US5923475A (en) | 1996-11-27 | 1999-07-13 | Eastman Kodak Company | Laser printer using a fly's eye integrator |
EP0851492A3 (en) | 1996-12-06 | 1998-12-16 | Texas Instruments Incorporated | Surface-mounted substrate structure and method |
US5986634A (en) | 1996-12-11 | 1999-11-16 | Silicon Light Machines | Display/monitor with orientation dependent rotatable image |
US5844711A (en) | 1997-01-10 | 1998-12-01 | Northrop Grumman Corporation | Tunable spatial light modulator |
US5920411A (en) | 1997-02-14 | 1999-07-06 | Duck; Gary S. | Optical multiplexing/demultiplexing device |
US6177980B1 (en) | 1997-02-20 | 2001-01-23 | Kenneth C. Johnson | High-throughput, maskless lithography system |
US5892505A (en) | 1997-03-17 | 1999-04-06 | Tropper Technologies, Inc. | Image viewing apparatus and method |
US5982553A (en) | 1997-03-20 | 1999-11-09 | Silicon Light Machines | Display device incorporating one-dimensional grating light-valve array |
US5764280A (en) | 1997-03-20 | 1998-06-09 | Silicon Light Machines Inc. | Display system including an image generator and movable scanner for same |
US6071652A (en) | 1997-03-21 | 2000-06-06 | Digital Optics Corporation | Fabricating optical elements using a photoresist formed from contact printing of a gray level mask |
EP0867701A1 (en) * | 1997-03-28 | 1998-09-30 | Interuniversitair Microelektronica Centrum Vzw | Method of fabrication of an infrared radiation detector and more particularly an infrared sensitive bolometer |
US6069392A (en) | 1997-04-11 | 2000-05-30 | California Institute Of Technology | Microbellows actuator |
US5768009A (en) | 1997-04-18 | 1998-06-16 | E-Beam | Light valve target comprising electrostatically-repelled micro-mirrors |
CH691559A5 (fr) | 1997-04-21 | 2001-08-15 | Asulab Sa | Micro-contacteur magnétique et son procédé de fabrication. |
US6421179B1 (en) | 1997-05-02 | 2002-07-16 | Interscience, Inc. | Wavelength division multiplexing system and method using a reconfigurable diffraction grating |
US5999319A (en) | 1997-05-02 | 1999-12-07 | Interscience, Inc. | Reconfigurable compound diffraction grating |
US5912094A (en) | 1997-05-15 | 1999-06-15 | Lucent Technologies, Inc. | Method and apparatus for making a micro device |
US6096576A (en) | 1997-09-02 | 2000-08-01 | Silicon Light Machines | Method of producing an electrical interface to an integrated circuit device having high density I/O count |
US5978127A (en) | 1997-09-09 | 1999-11-02 | Zilog, Inc. | Light phase grating device |
US6088102A (en) | 1997-10-31 | 2000-07-11 | Silicon Light Machines | Display apparatus including grating light-valve array and interferometric optical system |
US6018065A (en) | 1997-11-10 | 2000-01-25 | Advanced Technology Materials, Inc. | Method of fabricating iridium-based materials and structures on substrates, iridium source reagents therefor |
US5955771A (en) | 1997-11-12 | 1999-09-21 | Kulite Semiconductor Products, Inc. | Sensors for use in high vibrational applications and methods for fabricating same |
US6075632A (en) | 1997-11-26 | 2000-06-13 | Hewlett-Packard Company | Optical noise monitor |
US6122299A (en) | 1997-12-31 | 2000-09-19 | Sdl, Inc. | Angled distributed reflector optical device with enhanced light confinement |
US6124145A (en) | 1998-01-23 | 2000-09-26 | Instrumentarium Corporation | Micromachined gas-filled chambers and method of microfabrication |
US6396789B1 (en) | 1998-02-27 | 2002-05-28 | Calimetrics, Inc. | Data storage system and methods using diffractive near-field optics |
US6195196B1 (en) | 1998-03-13 | 2001-02-27 | Fuji Photo Film Co., Ltd. | Array-type exposing device and flat type display incorporating light modulator and driving method thereof |
US6163402A (en) | 1998-06-11 | 2000-12-19 | 3M Innovative Properties Company | Rear projection screen |
US6163026A (en) | 1998-03-31 | 2000-12-19 | Intel Corporation | Chemically stabilized light selective element for imaging applications |
US6359333B1 (en) | 1998-03-31 | 2002-03-19 | Honeywell International Inc. | Wafer-pair having deposited layer sealed chambers |
US5926318A (en) | 1998-04-06 | 1999-07-20 | Optimize Incorporated | Biocular viewing system with intermediate image planes for an electronic display device |
US5910856A (en) | 1998-04-16 | 1999-06-08 | Eastman Kodak Company | Integrated hybrid silicon-based micro-reflector |
US6084626A (en) | 1998-04-29 | 2000-07-04 | Eastman Kodak Company | Grating modulator array |
US6147789A (en) | 1998-05-04 | 2000-11-14 | Gelbart; Daniel | High speed deformable mirror light valve |
JPH11326826A (ja) | 1998-05-13 | 1999-11-26 | Sony Corp | 照明方法及び照明装置 |
US5953161A (en) | 1998-05-29 | 1999-09-14 | General Motors Corporation | Infra-red imaging system using a diffraction grating array |
US6062461A (en) | 1998-06-03 | 2000-05-16 | Delphi Technologies, Inc. | Process for bonding micromachined wafers using solder |
US6004912A (en) | 1998-06-05 | 1999-12-21 | Silicon Light Machines | Vapor phase low molecular weight lubricants |
US6271808B1 (en) | 1998-06-05 | 2001-08-07 | Silicon Light Machines | Stereo head mounted display using a single display device |
US6130770A (en) | 1998-06-23 | 2000-10-10 | Silicon Light Machines | Electron gun activated grating light valve |
US6101036A (en) | 1998-06-23 | 2000-08-08 | Silicon Light Machines | Embossed diffraction grating alone and in combination with changeable image display |
US6215579B1 (en) | 1998-06-24 | 2001-04-10 | Silicon Light Machines | Method and apparatus for modulating an incident light beam for forming a two-dimensional image |
DE19829609B4 (de) * | 1998-07-02 | 2008-04-30 | Robert Bosch Gmbh | Verfahren zur Herstellung eines Mikrosystems |
US6268952B1 (en) | 1998-07-14 | 2001-07-31 | Lightconnect, Inc. | Micromechanical light steering optical switch |
US6303986B1 (en) | 1998-07-29 | 2001-10-16 | Silicon Light Machines | Method of and apparatus for sealing an hermetic lid to a semiconductor die |
JP2000091818A (ja) | 1998-09-11 | 2000-03-31 | Toyota Motor Corp | フィルム型伝送線路の製造方法および該線路の接続方法 |
US6282213B1 (en) | 1998-09-14 | 2001-08-28 | Interscience, Inc. | Tunable diode laser with fast digital line selection |
US6300148B1 (en) | 1998-10-05 | 2001-10-09 | Advanced Micro Devices | Semiconductor structure with a backside protective layer and backside probes and a method for constructing the structure |
DE19846532C1 (de) | 1998-10-09 | 2000-05-31 | Dilas Diodenlaser Gmbh | Einrichtung zur Strahlformung eines Laserstrahls und Hochleistungs-Diodenlaser mit einer solchen Einrichtung |
US6061166A (en) | 1998-10-15 | 2000-05-09 | Eastman Kodak Company | Diffractive light modulator |
US6091521A (en) | 1998-10-16 | 2000-07-18 | Digilens, Inc. | Light collection from diffractive displays |
US6261494B1 (en) | 1998-10-22 | 2001-07-17 | Northeastern University | Method of forming plastically deformable microstructures |
US6220713B1 (en) | 1998-10-23 | 2001-04-24 | Compaq Computer Corporation | Projection lens and system |
US6123985A (en) | 1998-10-28 | 2000-09-26 | Solus Micro Technologies, Inc. | Method of fabricating a membrane-actuated charge controlled mirror (CCM) |
US6115168A (en) | 1998-10-29 | 2000-09-05 | Advanced Optical Technologies, Inc. | Integrated optical retroreflecting modulator |
US6605043B1 (en) | 1998-11-19 | 2003-08-12 | Acuson Corp. | Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components |
US6215547B1 (en) | 1998-11-19 | 2001-04-10 | Eastman Kodak Company | Reflective liquid crystal modulator based printing system |
US6181458B1 (en) | 1998-12-18 | 2001-01-30 | Eastman Kodak Company | Mechanical grating device with optical coating and method of making mechanical grating device with optical coating |
US6038057A (en) | 1998-12-18 | 2000-03-14 | Eastman Kodak Company | Method and system for actuating electro-mechanical ribbon elements in accordance to a data stream |
US6172796B1 (en) | 1998-12-18 | 2001-01-09 | Eastman Kodak Company | Multilevel electro-mechanical grating device and a method for operating a multilevel mechanical and electro-mechanical grating device |
US6252697B1 (en) | 1998-12-18 | 2001-06-26 | Eastman Kodak Company | Mechanical grating device |
US6335831B2 (en) | 1998-12-18 | 2002-01-01 | Eastman Kodak Company | Multilevel mechanical grating device |
US6342960B1 (en) | 1998-12-18 | 2002-01-29 | The Boeing Company | Wavelength division multiplex transmitter |
US6144481A (en) | 1998-12-18 | 2000-11-07 | Eastman Kodak Company | Method and system for actuating electro-mechanical ribbon elements in accordance to a data stream |
US6188519B1 (en) | 1999-01-05 | 2001-02-13 | Kenneth Carlisle Johnson | Bigrating light valve |
WO2000042231A2 (en) * | 1999-01-15 | 2000-07-20 | The Regents Of The University Of California | Polycrystalline silicon germanium films for forming micro-electromechanical systems |
JP3399432B2 (ja) * | 1999-02-26 | 2003-04-21 | セイコーエプソン株式会社 | 電気光学装置の製造方法及び電気光学装置 |
US6169565B1 (en) | 1999-03-31 | 2001-01-02 | Eastman Kodak Company | Laser printer utilizing a spatial light modulator |
JP4316050B2 (ja) | 1999-05-31 | 2009-08-19 | ボールセミコンダクター株式会社 | マイクロマシンの製造方法 |
US6057520A (en) | 1999-06-30 | 2000-05-02 | Mcnc | Arc resistant high voltage micromachined electrostatic switch |
US6229683B1 (en) | 1999-06-30 | 2001-05-08 | Mcnc | High voltage micromachined electrostatic switch |
US6275623B1 (en) | 1999-07-12 | 2001-08-14 | Corning Incorporated | Dynamically configurable spectral filter |
US6356577B1 (en) | 1999-07-15 | 2002-03-12 | Silicon Light Machines | Method and apparatus for combining light output from multiple laser diode bars |
US6169624B1 (en) | 1999-08-11 | 2001-01-02 | Asif A. Godil | Achromatic optical modulators |
DE19940581C2 (de) * | 1999-08-26 | 2001-07-26 | Infineon Technologies Ag | Verfahren zur Herstellung integrierter Sensoren |
US6222954B1 (en) | 1999-09-17 | 2001-04-24 | Light Bytes, Inc. | Fault-tolerant fiber-optical beam control modules |
US6430109B1 (en) * | 1999-09-30 | 2002-08-06 | The Board Of Trustees Of The Leland Stanford Junior University | Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections |
US6229650B1 (en) | 1999-10-18 | 2001-05-08 | Agfa Corporation | Optical imaging head having a multiple writing bean source |
US6290864B1 (en) | 1999-10-26 | 2001-09-18 | Reflectivity, Inc. | Fluoride gas etching of silicon with improved selectivity |
US6290859B1 (en) | 1999-11-12 | 2001-09-18 | Sandia Corporation | Tungsten coating for improved wear resistance and reliability of microelectromechanical devices |
US6798550B1 (en) * | 1999-11-18 | 2004-09-28 | Corning Applied Technologies Corporation | Spatial light modulator |
US6497490B1 (en) | 1999-12-14 | 2002-12-24 | Silicon Light Machines | Laser beam attenuator and method of attenuating a laser beam |
US6197610B1 (en) | 2000-01-14 | 2001-03-06 | Ball Semiconductor, Inc. | Method of making small gaps for small electrical/mechanical devices |
US6274469B1 (en) | 2000-01-26 | 2001-08-14 | Advanced Micro Devices, Inc. | Process using a plug as a mask for a gate |
US6956878B1 (en) | 2000-02-07 | 2005-10-18 | Silicon Light Machines Corporation | Method and apparatus for reducing laser speckle using polarization averaging |
US6418152B1 (en) | 2000-02-18 | 2002-07-09 | Trw Inc. | Multi-amplifier, high power mode locked laser |
US6525863B1 (en) | 2000-02-25 | 2003-02-25 | Nuonics, Inc. | Multi-technology multi-beam-former platform for robust fiber-optical beam control modules |
US6479811B1 (en) | 2000-03-06 | 2002-11-12 | Eastman Kodak Company | Method and system for calibrating a diffractive grating modulator |
US6356689B1 (en) | 2000-03-25 | 2002-03-12 | Lucent Technologies, Inc. | Article comprising an optical cavity |
US6310018B1 (en) | 2000-03-31 | 2001-10-30 | 3M Innovative Properties Company | Fluorinated solvent compositions containing hydrogen fluoride |
US6480634B1 (en) | 2000-05-18 | 2002-11-12 | Silicon Light Machines | Image projector including optical fiber which couples laser illumination to light modulator |
EP1172686A3 (en) | 2000-07-03 | 2004-07-14 | Creo IL. Ltd. | Controllable diffractive grating array with perpendicular diffraction |
EP1172681A3 (en) | 2000-07-13 | 2004-06-09 | Creo IL. Ltd. | Blazed micro-mechanical light modulator and array thereof |
US6943950B2 (en) | 2000-08-07 | 2005-09-13 | Texas Instruments Incorporated | Two-dimensional blazed MEMS grating |
US6323984B1 (en) | 2000-10-11 | 2001-11-27 | Silicon Light Machines | Method and apparatus for reducing laser speckle |
JP2002139680A (ja) * | 2000-10-31 | 2002-05-17 | Pioneer Electronic Corp | 空間光変復調器及びこれを用いたホログラム記録再生装置 |
NO20005980L (no) | 2000-11-27 | 2002-05-28 | Thin Film Electronics Ab | Ferroelektrisk minnekrets og fremgangsmåte ved dens fremstilling |
US20020105725A1 (en) | 2000-12-18 | 2002-08-08 | Sweatt William C. | Electrically-programmable optical processor with enhanced resolution |
US6384959B1 (en) | 2001-01-09 | 2002-05-07 | Eastman Kodak Company | Optical data modulation system with self-damped electromechanical conformal grating |
US6387723B1 (en) | 2001-01-19 | 2002-05-14 | Silicon Light Machines | Reduced surface charging in silicon-based devices |
US6445502B1 (en) | 2001-02-02 | 2002-09-03 | Celeste Optics, Inc. | Variable blazed grating |
US6613157B2 (en) | 2001-02-15 | 2003-09-02 | Micell Technologies, Inc. | Methods for removing particles from microelectronic structures |
US6597560B2 (en) | 2001-03-13 | 2003-07-22 | Rochester Institute Of Technology | Micro-electro-mechanical varactor and a method of making and using thereof |
GB0107404D0 (en) * | 2001-03-23 | 2001-05-16 | Koninkl Philips Electronics Nv | Display substrate and display device |
US7019883B2 (en) | 2001-04-03 | 2006-03-28 | Cidra Corporation | Dynamic optical filter having a spatial light modulator |
US6707591B2 (en) | 2001-04-10 | 2004-03-16 | Silicon Light Machines | Angled illumination for a single order light modulator based projection system |
US6438954B1 (en) | 2001-04-27 | 2002-08-27 | 3M Innovative Properties Company | Multi-directional thermal actuator |
US6747781B2 (en) | 2001-06-25 | 2004-06-08 | Silicon Light Machines, Inc. | Method, apparatus, and diffuser for reducing laser speckle |
US6782205B2 (en) | 2001-06-25 | 2004-08-24 | Silicon Light Machines | Method and apparatus for dynamic equalization in wavelength division multiplexing |
US6639722B2 (en) | 2001-08-15 | 2003-10-28 | Silicon Light Machines | Stress tuned blazed grating light valve |
-
2002
- 2002-05-28 US US10/161,191 patent/US6767751B2/en not_active Expired - Lifetime
-
2003
- 2003-05-14 AU AU2003253604A patent/AU2003253604A1/en not_active Abandoned
- 2003-05-14 EP EP03756181.8A patent/EP1509946B1/en not_active Expired - Lifetime
- 2003-05-14 KR KR1020047019143A patent/KR101002449B1/ko active IP Right Grant
- 2003-05-14 WO PCT/US2003/015475 patent/WO2003103022A1/en active Application Filing
- 2003-05-14 JP JP2004510011A patent/JP4541141B2/ja not_active Expired - Lifetime
- 2003-05-14 CN CNB038180308A patent/CN100423178C/zh not_active Expired - Fee Related
- 2003-11-07 US US10/703,827 patent/US6967760B2/en not_active Expired - Lifetime
- 2003-11-24 US US10/720,498 patent/US7288424B2/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6356378B1 (en) * | 1995-06-19 | 2002-03-12 | Reflectivity, Inc. | Double substrate reflective spatial light modulator |
US6313901B1 (en) * | 1999-09-01 | 2001-11-06 | National Semiconductor Corporation | Liquid crystal display fabrication process using a final rapid thermal anneal |
US6346430B1 (en) * | 1999-09-30 | 2002-02-12 | Intel Corporation | Packaged integrated processor and spatial light modulator |
Also Published As
Publication number | Publication date |
---|---|
WO2003103022A1 (en) | 2003-12-11 |
US6967760B2 (en) | 2005-11-22 |
EP1509946A4 (en) | 2010-08-18 |
AU2003253604A1 (en) | 2003-12-19 |
KR101002449B1 (ko) | 2010-12-17 |
KR20050023273A (ko) | 2005-03-09 |
EP1509946B1 (en) | 2015-09-09 |
US20030235932A1 (en) | 2003-12-25 |
US7288424B2 (en) | 2007-10-30 |
JP2005527869A (ja) | 2005-09-15 |
US6767751B2 (en) | 2004-07-27 |
JP4541141B2 (ja) | 2010-09-08 |
EP1509946A1 (en) | 2005-03-02 |
US20040106221A1 (en) | 2004-06-03 |
US20040109215A1 (en) | 2004-06-10 |
CN1672241A (zh) | 2005-09-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100423178C (zh) | 集成驱动器工艺流程 | |
US8445307B2 (en) | Monolithic IC and MEMS microfabrication process | |
EP1248287B1 (en) | Ic resistor and capacitor fabrication method | |
EP0762510B1 (en) | Method for fabricating a monolithic semiconductor device with integrated surface micromachined structures | |
US6951794B2 (en) | Semiconductor device with spiral inductor and method for fabricating semiconductor integrated circuit device | |
EP1193760B1 (en) | Semiconductor device with SOI structure and method of manufacturing the same | |
US20070172975A1 (en) | Semiconductor device and fabrication method thereof | |
CN101539586B (zh) | 元件晶片和元件晶片的制造方法 | |
US20090101994A1 (en) | Semiconductor device and method for fabricating the same | |
US6255144B1 (en) | Repairing fuse for semiconductor device and method for fabricating the same | |
KR100663288B1 (ko) | 박막 트랜지스터 액정표시장치의 제조방법 | |
JPH11135758A (ja) | 平坦化を改善するための半導体装置製造方法 | |
CN101465317A (zh) | 半导体器件及其制造方法 | |
US6908844B2 (en) | Metallization arrangement for semiconductor structure and corresponding fabrication method | |
CN102263011B (zh) | 半导体结构的制造方法 | |
KR100439835B1 (ko) | 멀티-플로빙용 패드 및 그 제조방법 | |
US5956610A (en) | Method and system for providing electrical insulation for local interconnect in a logic circuit | |
JP4648673B2 (ja) | 半導体装置の製造方法、半導体装置 | |
KR100800667B1 (ko) | 반도체 소자 제조 방법 | |
JPH0697168A (ja) | 半導体装置の製造方法 | |
JP2005175153A (ja) | 半導体装置及びその製造方法 | |
KR20050110274A (ko) | 반도체 소자의 제조방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081001 Termination date: 20100514 |