AU2002230868A1 - Gallium nitride materials and methods for forming layers thereof - Google Patents
Gallium nitride materials and methods for forming layers thereofInfo
- Publication number
- AU2002230868A1 AU2002230868A1 AU2002230868A AU3086802A AU2002230868A1 AU 2002230868 A1 AU2002230868 A1 AU 2002230868A1 AU 2002230868 A AU2002230868 A AU 2002230868A AU 3086802 A AU3086802 A AU 3086802A AU 2002230868 A1 AU2002230868 A1 AU 2002230868A1
- Authority
- AU
- Australia
- Prior art keywords
- gallium nitride
- nitride material
- semiconductor materials
- methods
- material layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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- H10P14/32—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by intermediate layers between substrates and deposited layers
- H10P14/3242—Structure
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- H10P14/3451—Structure
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- H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
- H10D30/475—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/736,972 | 2000-12-14 | ||
| US09/736,972 US6649287B2 (en) | 2000-12-14 | 2000-12-14 | Gallium nitride materials and methods |
| PCT/US2001/048426 WO2002048434A2 (en) | 2000-12-14 | 2001-12-14 | Gallium nitride materials and methods for forming layers thereof |
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| US (17) | US6649287B2 (https=) |
| EP (1) | EP1343927B1 (https=) |
| JP (1) | JP2004524250A (https=) |
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| AU (1) | AU2002230868A1 (https=) |
| DE (1) | DE60128134T2 (https=) |
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| WO (1) | WO2002048434A2 (https=) |
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| US6596079B1 (en) * | 2000-03-13 | 2003-07-22 | Advanced Technology Materials, Inc. | III-V nitride substrate boule and method of making and using the same |
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2000
- 2000-12-14 US US09/736,972 patent/US6649287B2/en not_active Expired - Lifetime
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2001
- 2001-12-11 TW TW90130606A patent/TWI257142B/zh not_active IP Right Cessation
- 2001-12-14 JP JP2002550144A patent/JP2004524250A/ja active Pending
- 2001-12-14 EP EP01991120A patent/EP1343927B1/en not_active Expired - Lifetime
- 2001-12-14 AT AT01991120T patent/ATE360713T1/de not_active IP Right Cessation
- 2001-12-14 DE DE60128134T patent/DE60128134T2/de not_active Expired - Lifetime
- 2001-12-14 AU AU2002230868A patent/AU2002230868A1/en not_active Abandoned
- 2001-12-14 WO PCT/US2001/048426 patent/WO2002048434A2/en not_active Ceased
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2002
- 2002-07-02 US US10/188,814 patent/US6617060B2/en not_active Expired - Lifetime
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2003
- 2003-09-30 US US10/675,798 patent/US20040119067A1/en not_active Abandoned
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2008
- 2008-12-24 US US12/343,616 patent/US8105921B2/en not_active Expired - Lifetime
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2012
- 2012-01-27 US US13/359,892 patent/US8344417B2/en not_active Expired - Fee Related
- 2012-12-27 US US13/728,956 patent/US8592862B2/en not_active Expired - Fee Related
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2013
- 2013-11-19 US US14/084,251 patent/US8928034B2/en not_active Expired - Lifetime
- 2013-11-19 US US14/083,923 patent/US8937335B2/en not_active Expired - Lifetime
- 2013-11-19 US US14/084,429 patent/US8928035B2/en not_active Expired - Lifetime
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2014
- 2014-08-05 US US14/452,203 patent/US9064775B2/en not_active Expired - Lifetime
- 2014-12-22 US US14/579,738 patent/US9437686B2/en not_active Expired - Lifetime
- 2014-12-22 US US14/580,064 patent/US9461119B2/en not_active Expired - Fee Related
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2015
- 2015-06-18 US US14/743,218 patent/US9437687B2/en not_active Expired - Lifetime
- 2015-10-29 US US14/926,279 patent/US20160126315A1/en not_active Abandoned
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2016
- 2016-08-18 US US15/240,789 patent/US10177229B2/en not_active Expired - Lifetime
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2018
- 2018-12-04 US US16/209,858 patent/US20190214468A1/en not_active Abandoned
- 2018-12-21 US US16/231,225 patent/US20200243651A9/en not_active Abandoned
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