ATE554417T1 - Vorrichtung mit einer leitfähigen lichtabsorbierenden maske und verfahren zu ihrer herstellung - Google Patents

Vorrichtung mit einer leitfähigen lichtabsorbierenden maske und verfahren zu ihrer herstellung

Info

Publication number
ATE554417T1
ATE554417T1 AT05255663T AT05255663T ATE554417T1 AT E554417 T1 ATE554417 T1 AT E554417T1 AT 05255663 T AT05255663 T AT 05255663T AT 05255663 T AT05255663 T AT 05255663T AT E554417 T1 ATE554417 T1 AT E554417T1
Authority
AT
Austria
Prior art keywords
optical
optical elements
mask
substrate
electrically
Prior art date
Application number
AT05255663T
Other languages
English (en)
Inventor
Manish Kothari
Original Assignee
Qualcomm Mems Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Mems Technologies Inc filed Critical Qualcomm Mems Technologies Inc
Application granted granted Critical
Publication of ATE554417T1 publication Critical patent/ATE554417T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
AT05255663T 2004-09-27 2005-09-14 Vorrichtung mit einer leitfähigen lichtabsorbierenden maske und verfahren zu ihrer herstellung ATE554417T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61348004P 2004-09-27 2004-09-27
US11/119,432 US7420725B2 (en) 2004-09-27 2005-04-29 Device having a conductive light absorbing mask and method for fabricating same

Publications (1)

Publication Number Publication Date
ATE554417T1 true ATE554417T1 (de) 2012-05-15

Family

ID=35478385

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05255663T ATE554417T1 (de) 2004-09-27 2005-09-14 Vorrichtung mit einer leitfähigen lichtabsorbierenden maske und verfahren zu ihrer herstellung

Country Status (14)

Country Link
US (7) US7420725B2 (de)
EP (2) EP2426541A3 (de)
JP (1) JP4414387B2 (de)
KR (2) KR101168646B1 (de)
CN (1) CN1755492B (de)
AT (1) ATE554417T1 (de)
AU (1) AU2005205782A1 (de)
BR (1) BRPI0503895A (de)
CA (1) CA2519983A1 (de)
ES (1) ES2383996T3 (de)
MY (1) MY140270A (de)
RU (1) RU2389051C2 (de)
SG (1) SG121149A1 (de)
TW (3) TWI408411B (de)

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