ATE334176T1 - Verfahren zum chemisch mechanisch polieren von materialien mit einer niedrigen dielektrizitätskonstanten - Google Patents

Verfahren zum chemisch mechanisch polieren von materialien mit einer niedrigen dielektrizitätskonstanten

Info

Publication number
ATE334176T1
ATE334176T1 AT03740859T AT03740859T ATE334176T1 AT E334176 T1 ATE334176 T1 AT E334176T1 AT 03740859 T AT03740859 T AT 03740859T AT 03740859 T AT03740859 T AT 03740859T AT E334176 T1 ATE334176 T1 AT E334176T1
Authority
AT
Austria
Prior art keywords
low
mechanically polishing
polishing materials
chemically mechanically
substrate
Prior art date
Application number
AT03740859T
Other languages
English (en)
Inventor
K J Moeggenborg
H Chou
J D Hawkins
J P Chamberlain
Original Assignee
Cabot Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cabot Microelectronics Corp filed Critical Cabot Microelectronics Corp
Application granted granted Critical
Publication of ATE334176T1 publication Critical patent/ATE334176T1/de

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • H10P52/403—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/66—Non-ionic compounds
    • H10P52/00—
    • H10P52/402—
    • H10P95/062—
    • H10P14/6922—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
AT03740859T 2002-06-07 2003-05-26 Verfahren zum chemisch mechanisch polieren von materialien mit einer niedrigen dielektrizitätskonstanten ATE334176T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/165,100 US6974777B2 (en) 2002-06-07 2002-06-07 CMP compositions for low-k dielectric materials

Publications (1)

Publication Number Publication Date
ATE334176T1 true ATE334176T1 (de) 2006-08-15

Family

ID=29710360

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03740859T ATE334176T1 (de) 2002-06-07 2003-05-26 Verfahren zum chemisch mechanisch polieren von materialien mit einer niedrigen dielektrizitätskonstanten

Country Status (11)

Country Link
US (1) US6974777B2 (de)
EP (1) EP1534795B1 (de)
JP (1) JP4773091B2 (de)
KR (1) KR100729331B1 (de)
CN (1) CN1305984C (de)
AT (1) ATE334176T1 (de)
AU (1) AU2003274812A1 (de)
DE (1) DE60307111T2 (de)
SG (1) SG108491A1 (de)
TW (1) TWI227728B (de)
WO (1) WO2003104343A2 (de)

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WO2003104343A2 (en) 2003-12-18
CN1659249A (zh) 2005-08-24
JP4773091B2 (ja) 2011-09-14
DE60307111T2 (de) 2006-11-23
JP2005529485A (ja) 2005-09-29
US6974777B2 (en) 2005-12-13
TW200401819A (en) 2004-02-01
AU2003274812A1 (en) 2003-12-22
DE60307111D1 (de) 2006-09-07
TWI227728B (en) 2005-02-11
EP1534795A2 (de) 2005-06-01
US20030228762A1 (en) 2003-12-11
KR20050005543A (ko) 2005-01-13
WO2003104343A3 (en) 2004-02-26
EP1534795B1 (de) 2006-07-26
SG108491A1 (en) 2007-01-31
KR100729331B1 (ko) 2007-06-15
CN1305984C (zh) 2007-03-21

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