WO2011129210A1 - ネガ型感光性樹脂組成物、それを用いた保護膜およびタッチパネル部材 - Google Patents
ネガ型感光性樹脂組成物、それを用いた保護膜およびタッチパネル部材 Download PDFInfo
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- WO2011129210A1 WO2011129210A1 PCT/JP2011/058494 JP2011058494W WO2011129210A1 WO 2011129210 A1 WO2011129210 A1 WO 2011129210A1 JP 2011058494 W JP2011058494 W JP 2011058494W WO 2011129210 A1 WO2011129210 A1 WO 2011129210A1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
Definitions
- the present invention relates to a negative photosensitive resin composition, a protective film using the same, and a touch panel member.
- hard coat materials are used for various purposes, and are used for improving the surface hardness of, for example, containers for automobile parts, cosmetics, sheets, films, optical disks, thin displays, and the like. Properties required for the hard coat material include heat resistance, weather resistance, adhesiveness, etc. in addition to hardness and scratch resistance.
- a representative example of the hard coat material is a radical polymerization type UV curable hard coat (see, for example, Non-Patent Document 1), and the constitution thereof is a polymerizable group-containing oligomer, monomer, photopolymerization initiator, and other additives. It is.
- the oligomer and the monomer are radically polymerized by UV irradiation to crosslink and obtain a high hardness film.
- This hard coat material has the advantage that the time required for curing is short and the productivity is improved, and a negative photosensitive material by a general radical polymerization mechanism can be used, and the production cost is low.
- the capacitive touch panel which has been attracting attention in recent years, is one of the uses of hard coat materials.
- the capacitive touch panel has a structure having a pattern made of ITO (Indium Tin Oxide) or metal (silver, molybdenum, aluminum, etc.) on glass.
- ITO Indium Tin Oxide
- metal silver, molybdenum, aluminum, etc.
- a film having high hardness, transparency, and heat-and-moisture resistance is required.
- a UV curable coating composition containing a polymerizable group-containing oligomer, monomer, photopolymerization initiator and other additives is known.
- Such a composition has pattern processability and can provide a cured film having high hardness and transparency.
- heat and humidity resistance there was a problem in heat and humidity resistance.
- Patent Document 1 As a method for improving the heat and moisture resistance, a method of adding a metal chelating agent to siloxane is known (see Patent Document 1). This is considered to be a mechanism in which titanium or zirconium chelating agent promotes cross-linking of siloxane and improves wet heat resistance.
- Patent Document 3 JP 07-331173 A Japanese Patent Laid-Open No. 2008-203605 Japanese Unexamined Patent Publication No. 2007-308688
- Non-Patent Document 1 since there are many organic components, there is a problem that hardness and scratch resistance are low compared to other hard coat materials, and cracks are caused due to volume shrinkage due to UV curing.
- the resin is limited to siloxane having a hydrophobic main chain and side chain.
- a hydrophilic resin such as a siloxane having a carboxyl group in the side chain and a carboxyl group-containing resin is not known. is not.
- an object of the present invention is (A) an alkali-soluble resin having a carboxylic acid equivalent of 200 g / mol to 1,400 g / mol, (B) a photopolymerization initiator, (C) a polyfunctional monomer, (D) zirconium. This is achieved by a negative photosensitive resin composition containing a compound.
- the object of the present invention is achieved by a touch panel protective film obtained by curing the above-mentioned negative photosensitive resin composition.
- the object of the present invention is achieved by a metal wiring protective film obtained by curing the above-mentioned negative photosensitive resin composition.
- the object of the present invention is achieved by a touch panel member that includes a cured film of the above-described negative photosensitive resin composition, and in which the molybdenum-containing metal wiring is protected by the cured film.
- the negative photosensitive resin composition of the present invention is preferably a composition for forming a cured film.
- the negative photosensitive resin composition of the present invention is preferably a composition for forming a protective film.
- the alkali-soluble resin (A) having a carboxylic acid equivalent of 200 g / mol to 1,400 g / mol is an acrylic resin having an ethylenically unsaturated bond.
- the alkali-soluble resin having a carboxylic acid equivalent of 200 g / mol to 1,400 g / mol is preferably a polysiloxane having an ethylenically unsaturated bond.
- the (D) zirconium compound is preferably zirconium oxide particles having an average particle size of 100 nm or less.
- the zirconium compound is preferably any one or more of the compounds represented by the general formula (1).
- R 1 represents hydrogen, an alkyl group, an aryl group, an alkenyl group and a substituted product thereof
- R 2 and R 3 represent hydrogen, an alkyl group, an aryl group, an alkenyl group, an alkoxy group and a substituted product thereof.
- 1 , R 2 and R 3 may be the same or different, and n represents an integer of 0 to 4.
- the negative photosensitive resin composition of the present invention is excellent in pattern processability, and can obtain a cured film having high hardness and high transparency by UV curing and thermal curing, and excellent moisture and heat resistance.
- the negative photosensitive resin composition of the present invention comprises (A) an alkali-soluble resin having a carboxylic acid equivalent of 200 g / mol to 1,400 g / mol, (B) a photopolymerization initiator, (C) a polyfunctional monomer, (D) A zirconium compound is contained.
- the negative photosensitive resin composition of the present invention is preferably a composition for forming a cured film.
- the cured film refers to a film obtained by curing with light and / or heat without passing through a step of removing all resin components by baking or stripping solution treatment.
- a protective film for touchscreens various kinds, such as a protective film for touchscreens, a hard-coat material, a flattening film for TFT, an overcoat for color filters, a passivation film, an antireflection film, a metal wiring protective film
- protective films various insulating films such as a touch panel insulating film, a TFT insulating film, and an interlayer insulating film, an optical filter, a photo spacer for a color filter, and a microlens.
- the protective film means a cured film used for the purpose of protecting various base materials.
- the negative photosensitive resin composition of the present invention contains (A) an alkali-soluble resin having a carboxylic acid equivalent of 200 g / mol or more and 1,400 g / mol or less.
- the carboxylic acid equivalent represents the weight of the resin necessary to obtain 1 mol amount of carboxyl groups, and the unit is g / mol.
- the carboxylic acid equivalent of the alkali-soluble resin exceeds 1,400 g / mol, the negative photosensitive resin composition has poor alkali solubility (developability), and a good pattern cannot be formed. Even if it is possible, there are problems that the residue after development cannot be suppressed, or that the type of developer is required to be largely restricted.
- the carboxylic acid equivalent of the alkali-soluble resin is less than 200 g / mol, it is not possible to suppress film loss in the exposed area, and in addition to poor moisture and heat resistance, the resolution is also poor. By being in this range, it becomes possible to form good patterns under various development conditions.
- the alkali-soluble resin (A) having an carboxylic acid equivalent of 200 g / mol or more and 1,400 g / mol or less used in the negative photosensitive resin composition of the present invention has an ethylenically unsaturated double bond group.
- the preferable range of the carboxylic acid equivalent is 300 g / mol or more and 1200 g / mol or less, more preferably 400 g / mol or more and 800 g / mol or less.
- alkali-soluble resin having a carboxylic acid equivalent of 200 g / mol or more and 1,400 g / mol or less examples include polysiloxane, acrylic resin, polyimide, polyamic acid, polyamide, and the like.
- alkali-soluble resin having a carboxylic acid equivalent of 200 g / mol or more and 1,400 g / mol or less at least a part of the hardness of the cured film is that an ethylenically unsaturated double bond group is introduced. Is preferable for increasing the height.
- polysiloxanes and acrylic resins are more preferred because of the ease of introduction of ethylenically unsaturated double bond groups. Moreover, you may contain 2 or more types of these polymers.
- (A) Preferred examples of the alkali-soluble resin having a carboxylic acid equivalent of 200 g / mol or more and 1,400 g / mol or less are given below, but the invention is not limited thereto.
- the polysiloxane for example, those obtained by hydrolyzing an organosilane compound having a carboxyl group and / or a dicarboxylic anhydride group and condensing the hydrolyzate are preferable. Moreover, in order to adjust a carboxylic acid equivalent, it is preferable to use another organosilane compound simultaneously. Especially, since the hardness of the obtained cured film becomes high, it is preferable to use the organosilane compound which has an ethylenically unsaturated bond.
- the conditions for the hydrolysis reaction can be appropriately set. For example, after adding an acid catalyst and water to the organosilane compound in a solvent over 1 to 180 minutes, the reaction is performed at room temperature to 110 ° C. for 1 to 180 minutes. It is preferable. By performing the hydrolysis reaction under such conditions, a rapid reaction can be suppressed.
- the reaction temperature is more preferably 30 ° C. or higher and 105 ° C. or lower.
- the hydrolysis reaction is preferably performed in the presence of an acid catalyst.
- an acid catalyst an acidic aqueous solution containing formic acid, acetic acid or phosphoric acid is preferable.
- the preferred content of these acid catalysts is preferably 0.1 parts by weight or more and 5 parts by weight or less with respect to 100 parts by weight of the total organosilane compound used in the hydrolysis reaction.
- the conditions for the condensation reaction are, for example, that the silanol compound is obtained by the hydrolysis reaction of the organosilane compound as described above, and then the reaction solution is heated as it is at 50 ° C. or higher and below the boiling point of the solvent for 1 to 100 hours to be reacted. It is preferable. In order to increase the degree of polymerization of the polysiloxane, reheating or a base catalyst may be added. Further, after hydrolysis according to the purpose, an appropriate amount of the produced alcohol may be distilled and removed under heating and / or reduced pressure, and then a suitable solvent may be added.
- Examples of the polysiloxane having a carboxylic acid equivalent of 200 g / mol to 1,400 g / mol and having an ethylenically unsaturated bond include, for example, an organosilane compound having a carboxyl group and / or a dicarboxylic anhydride group and an ethylenically unsaturated bond. What is obtained by hydrolyzing an organosilane compound having a water content and condensing the hydrolyzate is preferred.
- organosilane compound having a carboxyl group examples include 3-trimethoxysilylpropionic acid, 3-triethoxysilylpropionic acid, 3-dimethylmethoxysilylpropionic acid, 3-dimethylethoxysilylpropionic acid, 4-trimethoxysilylbutyric acid, 4-triethoxysilyl entangling acid, 4-dimethylmethoxysilyl entangling acid, 4-dimethylethoxysilyl entangling acid, 5-trimethoxysilyl valeric acid, 5-triethoxysilyl valeric acid, 5-dimethylmethoxysilyl valeric acid, 5- Examples thereof include dimethylethoxysilyl valeric acid.
- organosilane compound having a dicarboxylic anhydride group examples include 3-trimethoxysilylpropyl succinic anhydride, 3-triethoxysilylsilylpropyl succinic anhydride, 3-dimethylmethoxysilylpropyl succinic anhydride, 3- Dimethylethoxysilylpropyl succinic anhydride, 3-trimethoxysilylpropylcyclohexyl dicarboxylic acid anhydride, 3-triethoxysilylpropyl cyclohexyl dicarboxylic acid anhydride, 3-dimethylmethoxysilylpropylcyclohexyl dicarboxylic acid anhydride, 3-dimethylethoxysilyl Propylcyclohexyldicarboxylic anhydride, 3-trimethoxysilylpropylphthalic anhydride, 3-triethoxysilylpropylphthalic anhydride, 3-dimethylmethoxysilyl
- organosilane compounds include methyltrimethoxysilane, methyltriethoxysilane, ethyltrimethoxysilane, ethyltriethoxysilane, hexyltrimethoxysilane, octadecyltrimethoxysilane, octadecyltriethoxysilane, and 3-aminopropyltriethoxy.
- the carboxylic acid equivalent of the polysiloxane can be calculated by calculating the silanol group / carboxyl group ratio in the polysiloxane by 1 H-NMR and then measuring the acid value.
- the content is not particularly limited, but the double bond equivalent is preferably 150 g / mol or more and 10,000 g / mol or less. By being in the above range, both hardness and crack resistance can be achieved at a high level.
- the double bond equivalent can be calculated by measuring the iodine value.
- the weight average molecular weight (Mw) of the polysiloxane is not particularly limited, but is preferably 1,000 or more and 100,000 or less in terms of polystyrene measured by gel permeation chromatography (GPC). By setting Mw within the above range, good coating characteristics can be obtained, and the solubility in a developer during pattern formation is also good.
- acrylic resin those obtained by radical polymerization of (meth) acrylic acid and (meth) acrylic acid ester are preferable.
- radical polymerization catalyst there are no particular restrictions on the radical polymerization catalyst, and azo compounds such as azobisisobutyronitrile and organic peroxides such as benzoyl peroxide are generally used.
- the conditions for radical polymerization can be appropriately set.
- (meth) acrylic acid, (meth) acrylic acid ester and a radical polymerization catalyst are added, and the inside of the reaction vessel is sufficiently filled by bubbling or vacuum degassing. It is preferable to carry out the reaction at 60 ° C. or higher and 110 ° C. or lower for 30 to 300 minutes after the nitrogen substitution.
- chain transfer agents such as a thiol compound, as needed.
- (Meth) acrylic acid esters include methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, cyclopropyl (meth) acrylate, cyclopentyl (meth) acrylate, (meth) acrylic acid Cyclohexyl, cyclohexenyl (meth) acrylate, 4-methoxycyclohexyl (meth) acrylate, 2-cyclopropyloxycarbonylethyl (meth) acrylate, 2-cyclopentyloxycarbonylethyl (meth) acrylate, (meth) acrylic acid 2-cyclohexyloxycarbonylethyl, (meth) acrylic acid 2-cyclohexenyloxycarbonylethyl, (meth) acrylic acid 2- (4-methoxycyclohexyl) oxycarbonylethyl, (meth) acrylic acid norbornyl, (meth) acrylic Isobornyl acid
- Aromatic vinyl compounds such as styrene, p-methylstyrene, o-methylstyrene, m-methylstyrene, ⁇ -methylstyrene and the like may be copolymerized.
- an acrylic resin having an carboxylic acid equivalent of 200 g / mol to 1,400 g / mol and having an ethylenically unsaturated bond for example, (meth) acrylic acid and (meth) acrylic acid ester are subjected to radical polymerization, What is obtained by addition reaction of an epoxy compound having a saturated double bond group is preferred.
- the catalyst used for the addition reaction of the epoxy compound having an ethylenically unsaturated double bond group and a known catalyst can be used.
- Amino catalysts such as phenol and dimethylbenzylamine
- tin catalysts such as 2-ethylhexanoate tin (II) and dibutyltin laurate
- titanium catalysts such as titanium 2-ethylhexanoate (IV), triphenylphosphine, etc.
- phosphorus-based catalysts such as acetylacetonate chromium and chromium chloride.
- Examples of the epoxy compound having an ethylenically unsaturated double bond group include glycidyl (meth) acrylate, ⁇ -ethylglycidyl (meth) acrylate, ⁇ -n-propylglycidyl (meth) acrylate, and (meth) acrylic.
- the content is not particularly limited, but the double bond equivalent is preferably 150 g / mol or more and 10,000 g / mol or less. By being in the above range, both hardness and crack resistance can be achieved at a high level.
- the double bond equivalent can be calculated by measuring the iodine value.
- the weight average molecular weight (Mw) of the acrylic resin is not particularly limited, but is preferably 2,000 or more and 200,000 or less in terms of polystyrene measured by gel permeation chromatography (GPC). By setting Mw within the above range, good coating characteristics can be obtained, and the solubility in a developer during pattern formation is also good.
- the content of the alkali-soluble resin (A) having a carboxylic acid equivalent of 200 g / mol to 1,400 g / mol is not particularly limited, depending on the desired film thickness and application. Although it can choose arbitrarily, 10 wt% or more and 60 wt% or less are common in the solid content of a negative photosensitive resin composition.
- the negative photosensitive resin composition of the present invention contains (B) a photopolymerization initiator.
- the photopolymerization initiator is preferably one that decomposes and / or reacts with light (including ultraviolet rays and electron beams) to generate radicals.
- ⁇ -aminoalkylphenone compounds acylphosphine oxide compounds, oxime ester compounds, benzophenone compounds having an amino group, or benzoic acid ester compounds having an amino group are preferable.
- ⁇ -aminoalkylphenone compounds include 2-methyl- [4- (methylthio) phenyl] -2-morpholinopropan-1-one, 2-dimethylamino-2- (4-methylbenzyl) -1 -(4-morpholin-4-yl-phenyl) -butan-1-one, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1, and the like.
- acylphosphine oxide compound examples include 2,4,6-trimethylbenzoylphenylphosphine oxide, bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide, bis (2,6-dimethoxybenzoyl)-(2 , 4,4-trimethylpentyl) -phosphine oxide.
- oxime ester compound examples include 1-phenyl-1,2-propanedione-2- (o-ethoxycarbonyl) oxime, 1,2-octanedione, 1- [4- (phenylthio) -2- (O -Benzoyloxime)], 1-phenyl-1,2-butadion-2- (o-methoxycarbonyl) oxime, 1,3-diphenylpropanetrione-2- (o-ethoxycarbonyl) oxime, ethanone, 1- [9 -Ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl]-, 1- (0-acetyloxime) and the like.
- benzophenone compound having an amino group examples include 4,4-bis (dimethylamino) benzophenone and 4,4-bis (diethylamino) benzophenone.
- benzoic acid ester compound having an amino group examples include ethyl p-dimethylaminobenzoate, 2-ethylhexyl-p-dimethylaminobenzoate, ethyl p-diethylaminobenzoate and the like.
- the content of the (B) photopolymerization initiator is not particularly limited, but is 0.1 wt% or more and 20 wt% in the solid content of the negative photosensitive resin composition.
- the following is preferable. By setting it as the said range, hardening can fully be advanced and elution of the residual polymerization initiator etc. can be prevented and solvent resistance can be ensured.
- the negative photosensitive resin composition of the present invention contains (C) a polyfunctional monomer. Polymerization of the polyfunctional monomer (C) proceeds with the photopolymerization initiator (B) by light irradiation, and the exposed portion of the negative photosensitive resin composition of the present invention is insolubilized in an aqueous alkaline solution, resulting in a negative pattern. Can be formed.
- the polyfunctional monomer refers to a compound having at least two ethylenically unsaturated double bonds in the molecule, and is not particularly limited, but a polyfunctional monomer having a (meth) acryl group that is easily radically polymerized is used. preferable.
- the double bond equivalent of the (C) polyfunctional monomer is preferably 80 g / mol or more and 400 g / mol or less from the viewpoint of sensitivity and hardness.
- Examples of the polyfunctional monomer include diethylene glycol diacrylate, triethylene glycol diacrylate, tetraethylene glycol diacrylate, diethylene glycol dimethacrylate, triethylene glycol dimethacrylate, tetraethylene glycol dimethacrylate, trimethylolpropane diacrylate, and trimethylolpropane.
- Triacrylate trimethylolpropane dimethacrylate, trimethylolpropane trimethacrylate, 1,3-butanediol diacrylate, 1,3-butanediol dimethacrylate, neopentyl glycol diacrylate, 1,4-butanediol diacrylate, 1, 4-butanediol dimethacrylate, 1,6-hexanediol diacrylate, 1 9-nonanediol dimethacrylate, 1,10-decanediol dimethacrylate, dimethylol-tricyclodecane diacrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, pentaerythritol trimethacrylate, pentaerythritol tetramethacrylate, dipentaerythritol pentaacrylate, Dipentaerythritol hexa
- pentaerythritol tetraacrylate dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, tripentaerythritol heptaacrylate, tripentaerythritol octaacrylate, and the like are preferable.
- dimethylol-tricyclodecane diacrylate dimethylol-tricyclodecane dimethacrylate, ethoxylated bisphenol A diacrylate, 9,9-bis [4- (2-acryloyloxyethoxy) phenyl] fluorene Etc. are preferable.
- the content of the (C) polyfunctional monomer is not particularly limited and can be arbitrarily selected depending on the desired film thickness and application.
- the solid content is generally 10 wt% or more and 60 wt% or less.
- the negative photosensitive resin composition of the present invention contains (D) a zirconium compound.
- (D) Moisture heat resistance of the cured film obtained improves by containing a zirconium compound.
- the alkali-soluble resin having a carboxyl group is poor in wet heat resistance because it is hydrophilic derived from a carboxyl group, but the wet heat resistance of the cured film is improved by containing (D) a zirconium compound. So far, it has been known that some zirconium compounds have an effect of improving heat and moisture resistance with respect to polysiloxane (see Patent Document 1), but in this known example, the side chain of polysiloxane is limited to hydrophobic groups.
- the resulting cured film is also hydrophobic, so the effect of having a hydrophilic group such as a carboxyl group was not clear.
- a hydrophilic group such as a carboxyl group
- not only polysiloxane but also a carboxyl group-containing alkali-soluble resin, which is a hydrophilic resin has been found for the first time that the moisture and heat resistance of a cured film is improved by containing (D) a zirconium compound.
- (D) a zirconium compound reacts with (A) a plurality of carboxyl groups of an alkali-soluble resin having a carboxylic acid equivalent of 200 g / mol to 1,400 g / mol.
- the wet heat resistance of the resulting cured film is improved by forming a crosslinked structure and improving the film density and at the same time reducing the hydrophilicity derived from the carboxyl group.
- a zirconium compound is a compound containing a zirconium atom
- grains whose average particle diameter is 100 nm or less, and General formula (1) is preferable.
- the average particle diameter of the zirconium oxide particles is more preferably 40 nm or less.
- R 1 represents hydrogen, an alkyl group, an aryl group, an alkenyl group and a substituted product thereof
- R 2 and R 3 represent hydrogen, an alkyl group, an aryl group, an alkenyl group, an alkoxy group and a substituted product thereof.
- 1 , R 2 and R 3 may be the same or different, and n represents an integer of 0 to 4.
- the average particle diameter means the median diameter determined from the particle size distribution measured by the Coulter method.
- Zirconium oxide particles having an average particle size of 100 nm or less can be commercially available products. Specific examples include “Vilal Zr-C20 (trade name)” (average particle size 20 nm, manufactured by Taki Chemical Co., Ltd.), “Nanouse OZ-30M (trade name)” (average particle size 7 nm) (manufactured by Nissan Chemical Industries, Ltd.), “ZSL-10T (trade name)” (average particle size 15 nm), “ZSL-10A (trade name)” "(Average particle size 70 nm)” (above, manufactured by Daiichi Rare Element Chemical Co., Ltd.).
- R 1 includes a methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, s-butyl group, phenyl group, vinyl group and the like. Of these, n-propyl group, n-butyl group and phenyl group are preferable because the compound is stable.
- R 2 and R 3 are hydrogen, methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, s-butyl group, t-butyl group, phenyl group, vinyl group, methoxy group, ethoxy group N-propoxy group, i-propoxy group, n-butoxy group, s-butoxy group, benzyloxy group and the like.
- a methyl group, a t-butyl group, a phenyl group, a methoxy group, and an ethoxy group are preferable because they are easily synthesized and the compound is stable.
- Examples of the compound represented by the general formula (1) include zirconium tetranormal propoxide, zirconium tetranormal butoxide, zirconium tetrasecondary butoxide, zirconium tetraphenoxide, zirconium tetraacetylacetonate, zirconium tetra (2,2,6, 6-tetramethyl-3,5-heptanedionate), zirconium tetramethyl acetoacetate, zirconium tetraethyl acetoacetate, zirconium tetramethyl malonate, zirconium tetraethyl malonate, zirconium tetrabenzoyl acetonate, zirconium tetradibenzoyl methacrylate, zirconium Mononormal butoxyacetylacetonate bis (ethylacetoacetate), zirconium mononormalbutoxy Ethyl acetoacetate bis (acetylace
- zirconium tetranormal propoxide zirconium tetranormal butoxide, zirconium tetraphenoxide, zirconium tetraacetylacetonate, zirconium tetra (2,2,6,6-tetra Methyl-3,5-heptanedionate), zirconium tetramethyl malonate, zirconium tetraethyl malonate, zirconium tetraethyl acetoacetate, zirconium dinormalbutoxy bis (ethyl acetoacetate) and zirconium mononormal butoxy acetylacetonate bis (ethyl acetoacetate) ) Is preferred.
- the content of the (D) zirconium compound is not particularly limited, but in the case of zirconium oxide particles having an average particle size of 100 nm or less, the negative photosensitive resin composition is solid. 1 wt% or more and 60 wt% or less in the content is preferable, and in the case of other (D) zirconium compounds, 0.1 wt% or more and 10 wt% or less in the solid content of the negative photosensitive resin composition is preferable. By being in the above-mentioned range, both transparency and wet heat resistance can be achieved at a high level.
- the negative photosensitive resin composition of the present invention may contain a polymerization inhibitor.
- a polymerization inhibitor By containing a polymerization inhibitor, the storage stability of the resin composition is improved, and the resolution after development is improved.
- the content of the polymerization inhibitor is preferably 0.01 wt% or more and 1 wt% or less in the solid content of the negative photosensitive resin composition.
- polymerization inhibitor examples include phenol, catechol, resorcinol, hydroquinone, 4-t-butylcatechol, 2,6-di (t-butyl) -p-cresol, phenothiazine, 4-methoxyphenol and the like.
- the negative photosensitive resin composition of the present invention may contain an ultraviolet absorber.
- an ultraviolet absorber By containing the ultraviolet absorber, the light resistance of the resulting cured film is improved, and the resolution after development is improved in applications that require pattern processing.
- the ultraviolet absorber is not particularly limited and known ones can be used, but benzotriazole compounds, benzophenone compounds, and triazine compounds are preferably used in terms of transparency and non-coloring properties.
- Examples of ultraviolet absorbers for benzotriazole compounds include 2- (2H benzotriazol-2-yl) phenol, 2- (2H-benzotriazol-2-yl) -4,6-tert-pentylphenol, 2- (2H Benzotriazol-2-yl) -4- (1,1,3,3-tetramethylbutyl) phenol, 2 (2H-benzotriazol-2-yl) -6-dodecyl-4-methylphenol, 2- (2 And '-hydroxy-5'-methacryloxyethylphenyl) -2H-benzotriazole.
- Examples of the ultraviolet absorber of the benzophenone compound include 2-hydroxy-4-methoxybenzophenone.
- Examples of the ultraviolet absorber of the triazine compound include 2- (4,6-diphenyl-1,3,5 triazin-2-yl) -5-[(hexyl) oxy] -phenol.
- the negative photosensitive resin composition of the present invention may contain a solvent.
- a compound having an alcoholic hydroxyl group or a cyclic compound having a carbonyl group is preferably used in that each component can be dissolved uniformly and the transparency of the resulting coating film can be improved. Two or more of these may be used.
- a compound having a boiling point of 110 ° C. or more and 250 ° C. or less under atmospheric pressure is more preferable. By setting the boiling point to 110 ° C. or higher, drying proceeds moderately at the time of coating, and a good coating without uneven coating can be obtained. On the other hand, when the boiling point is 250 ° C. or lower, the amount of residual solvent in the film can be reduced, and film shrinkage during thermosetting can be further reduced, so that better flatness can be obtained.
- Specific examples of the compound having an alcoholic hydroxyl group and having a boiling point of 110 ° C. or more and 250 ° C. or less under atmospheric pressure include acetol, 3-hydroxy-3-methyl-2-butanone, 4-hydroxy-3-methyl- 2-butanone, 5-hydroxy-2-pentanone, 4-hydroxy-4-methyl-2-pentanone (diacetone alcohol), ethyl lactate, butyl lactate, butyl lactate, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene Examples thereof include glycol mono n-propyl ether, propylene glycol mono n-butyl ether, propylene glycol mono t-butyl ether, 3-methoxy-1-butanol, and 3-methyl-3-methoxy-1-butanol.
- diacetone alcohol is preferable from the viewpoint of storage stability
- propylene glycol mono t-butyl ether is particularly preferable from the viewpoint of step coverage.
- cyclic compound having a carbonyl group and having a boiling point of 110 ° C. or more and 250 ° C. or less under atmospheric pressure include ⁇ -butyrolactone, ⁇ -valerolactone, ⁇ -valerolactone, propylene carbonate, N-methylpyrrolidone, Examples include cyclohexanone and cycloheptanone. Among these, ⁇ -butyrolactone is particularly preferably used.
- the negative photosensitive resin composition of the present invention may contain a solvent other than the above.
- ethers such as ethylene glycol dimethyl ether, ethylene glycol diethyl ether, ethylene glycol dibutyl ether, diethyl ether; methyl ethyl ketone, acetyl acetone, methyl propyl ketone, methyl butyl ketone, methyl isobutyl ketone, diisobutyl ketone, cyclopentanone, 2-heptanone, etc.
- Ketones such as dimethylformamide and dimethylacetamide; ethyl acetate, propyl acetate, butyl acetate, isobutyl acetate, ethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate, 3-methoxybutyl acetate, 3-methyl-3 -Acetates such as methoxybutyl acetate.
- the content of the solvent is not particularly limited, and any amount can be used depending on the coating method. For example, when film formation is performed by spin coating, it is common to use 50 wt% or more and 95 wt% or less of the entire negative photosensitive resin composition.
- the negative photosensitive resin composition of the present invention may contain various curing agents that accelerate the curing of the resin composition or facilitate the curing.
- the curing agent is not particularly limited and known ones can be used. Specific examples include nitrogen-containing organic substances, silicone resin curing agents, various metal alcoholates, various metal chelate compounds, isocyanate compounds and polymers thereof, and methylolated melamine. Derivatives, methylolated urea derivatives and the like. Two or more of these may be contained. Of these, metal chelate compounds, methylolated melamine derivatives, and methylolated urea derivatives are preferably used because of the stability of the curing agent and the processability of the obtained coating film.
- a curing catalyst such as a thermal acid generator may be contained.
- the thermal acid generator is not particularly limited and known ones can be used.
- Various onium salt compounds such as aromatic diazonium salts, sulfonium salts, diaryl iodonium salts, triaryl sulfonium salts, triaryl selenium salts, and sulfonic acid esters. And halogen compounds.
- the negative photosensitive resin composition of the present invention may contain various surfactants such as various fluorine-based surfactants and silicone-based surfactants in order to improve the flowability during coating.
- various surfactants such as various fluorine-based surfactants and silicone-based surfactants in order to improve the flowability during coating.
- the type of the surfactant there is no particular limitation on the type of the surfactant, and for example, “Megafac (registered trademark)” “F142D (trade name)”, “F172 (trade name)”, “F173 (trade name)”, “F183 (trade name) ”,“ F445 (product name) ”,“ F470 (product name) ”,“ F475 (product name) ”,“ F477 (product name) ”(above, manufactured by Dainippon Ink & Chemicals, Inc.),“ NBX ” -15 (trade name) ",” FTX-218 (trade name) "(manufactured by Neos Co., Ltd.) and other flu
- the negative photosensitive resin composition of the present invention may contain additives such as a dissolution inhibitor, a stabilizer, and an antifoaming agent as necessary.
- the solid content concentration of the negative photosensitive resin composition of the present invention is not particularly limited, and any amount of solvent or solute can be used depending on the coating method and the like.
- the solid concentration is generally 5 wt% or more and 50 wt% or less.
- the carboxylic acid equivalent is 200 g / mol or more and 1,400 g / Add alkali-soluble resin and (C) polyfunctional monomer that are less than or equal to mol, and stir for another 20 minutes to 3 hours.
- the obtained solution is filtered to obtain a negative photosensitive resin composition.
- the negative photosensitive resin composition of the present invention is applied on a base substrate by a known method such as microgravure coating, spin coating, dip coating, curtain flow coating, roll coating, spray coating, slit coating, hot plate, Pre-bake with a heating device such as an oven. Pre-baking is preferably performed in the range of 50 ° C. to 150 ° C. for 30 seconds to 30 minutes, and the film thickness after pre-baking is preferably 0.1 ⁇ m to 15 ⁇ m.
- the exposure machine such as a stepper, mirror projection mask aligner (MPA), parallel light mask aligner (hereinafter referred to as PLA), light of about 10 to 4,000 J / m 2 (wavelength 365 nm exposure dose conversion) is desired Irradiate through or without the mask.
- the exposure light source is not limited, and ultraviolet rays such as i-line, g-line, and h-line, KrF (wavelength 248 nm) laser, ArF (wavelength 193 nm) laser, and the like can be used.
- Negative photosensitive resin composition of the present invention it is preferable sensitivity at exposure by the PLA is 100 J / m 2 or more 4,000J / m 2 or less.
- the sensitivity in the patterning exposure by the PLA is determined by the following method, for example.
- the composition is spin-coated on a silicon wafer at an arbitrary number of revolutions using a spin coater, and prebaked at 120 ° C. for 2 minutes using a hot plate to produce a film having a thickness of 2 ⁇ m.
- the prepared film was exposed to an ultra-high pressure mercury lamp through a gray scale mask for sensitivity measurement using PLA (“PLA-501F (trade name)” manufactured by Canon Inc.), and then an automatic developing device (Takizawa Sangyo ( Paddle development with a 0.4 wt% tetramethylammonium hydroxide aqueous solution for an arbitrary period of time using “AD-2000 (trade name)” manufactured by Co., Ltd., followed by rinsing with water for 30 seconds.
- PLA PLA
- AD-2000 trade name
- a developing method it is preferable to immerse in a developing solution for 5 seconds to 10 minutes by a method such as showering, dipping or paddle.
- a known alkali developer can be used. Specific examples include inorganic alkalis such as alkali metal hydroxides, carbonates, phosphates, silicates and borates, amines such as 2-diethylaminoethanol, monoethanolamine and diethanolamine, tetramethylammonium hydroxide. Examples thereof include an aqueous solution containing one or more quaternary ammonium salts such as side and choline.
- this film is thermally cured by a heating device such as a hot plate or an oven in the range of 120 ° C. or higher and 280 ° C. or lower for about 1 hour to obtain a cured film.
- a heating device such as a hot plate or an oven in the range of 120 ° C. or higher and 280 ° C. or lower for about 1 hour to obtain a cured film.
- the cured film obtained from the negative photosensitive resin composition of the present invention has a zirconium atom content of 0.02 wt% or more and 7.5 wt% or less, a carbon atom content of 25 wt% or more and 80 wt% or less, and a silicon atom content. It is preferable that it is 0.5 wt% or more and 20 wt% or less. By being in the above range, the transmittance, hardness, and heat and humidity resistance can be maintained in a well-balanced manner. Further, the resolution is preferably 20 ⁇ m or less. Although there is no restriction
- the hardness is 4H or more and the transmittance is 90% or more at a film thickness of 1.5 ⁇ m.
- the transmittance refers to the transmittance at a wavelength of 400 nm.
- the hardness and transmittance can be adjusted by selecting the exposure amount and the thermosetting temperature.
- Cured films obtained by curing the negative photosensitive resin composition of the present invention include various protective films such as touch panel protective films, various hard coat materials, TFT flattening films, color filter overcoats, and antireflection films. Further, it can be used for optical filters, insulating films for touch sensors, insulating films for TFTs, photo spacers for color filters, and the like. Among these, since it has high hardness and transparency, it can be suitably used as a protective film for a touch panel. Examples of the touch panel system include a resistive film type, an optical type, an electromagnetic induction type, and a capacitance type. Since especially high hardness is calculated
- the cured film obtained by curing the negative photosensitive resin composition of the present invention has high moisture and heat resistance, it can be suitably used as a metal wiring protective film.
- a metal wiring protective film By forming on the metal wiring, it is possible to prevent deterioration (such as a decrease in conductivity) due to corrosion of the metal.
- the metal to be protected is not particularly limited, and examples thereof include copper, silver, aluminum, chromium, molybdenum, titanium, ITO, IZO (indium zinc oxide), AZO (aluminum-added zinc oxide), and ZnO 2 .
- it can be suitably used in touch panel members containing molybdenum.
- the touch panel member here is a glass or film substrate provided with an electrode and an insulating film and / or a protective film, and refers to a member that can be used as a sensor substrate for a touch panel.
- a transparent electrode thin film is formed on a glass substrate with an arbitrary film thickness, a resist material is patterned by a photolithography technique, a chemical solution etching with an etching solution of the transparent electrode, and a resist stripping step with a stripping solution are performed.
- a glass substrate on which a transparent electrode forming a part of the shaft electrode is patterned is produced (FIG. 1-a).
- the transparent electrode include metal oxides such as ITO, IZO, AZO, ZnO 2 and tin antimonic acid, or thin films of metals such as gold, silver, copper, and aluminum.
- These transparent conductive electrodes can be formed by conventional methods such as physical methods such as vacuum deposition, sputtering, ion plating, ion beam deposition, and chemical vapor deposition. Subsequently, a cured film obtained from the negative photosensitive resin composition of the present invention is formed as a transparent insulating film at a site intersecting with an electrode to be formed later (FIG. 1-b). Thereafter, the connection wiring to the IC driver and the Y-axis electrode conduction wiring are formed through the resist pattern processing, etching, and resist stripping steps after forming the electrode thin film with an arbitrary film thickness (FIG. 1-c).
- FIG. 2 is a cross-sectional view of the above touch panel member manufacturing example.
- the evaluation methods in each example and comparative example are shown below.
- (1) Measurement of transmittance The prepared negative photosensitive resin composition is applied to a 5 cm square Tempax glass substrate (Asahi Techno Glass plate) and a spin coater (Mikasa Corp. “1H-360S” (trade name). ) ”), And after spin coating at 1,000 rpm for 4 seconds, hot plate (“ SCW-636 (trade name) ”manufactured by Dainippon Screen Mfg. Co., Ltd.) is used. And prebaked at 90 ° C. for 2 minutes to produce a film having a thickness of 2 ⁇ m.
- the prepared film was exposed using a parallel light mask aligner (hereinafter referred to as PLA) (“PLA-501F (trade name)” manufactured by Canon Inc.) as a light source with an ultrahigh pressure mercury lamp, and an oven (“IHPS” manufactured by ESPEC Corporation) was exposed. -222 ”) and cured in air at 230 ° C. for 1 hour to produce a cured film having a thickness of 1.5 ⁇ m.
- PLA parallel light mask aligner
- IHPS manufactured by ESPEC Corporation
- the obtained cured film was measured for transmittance at 400 nm using an ultraviolet-visible spectrophotometer “UV-260 (trade name)” (manufactured by Shimadzu Corporation).
- UV-260 trade name
- the film thickness was measured at a refractive index of 1.55 using “Lambda Ace STM-602 (trade name)” manufactured by Dainippon Screen Mfg. Co., Ltd. The same applies to the film thickness described below.
- (2) Measurement of hardness Pencil hardness was measured according to JIS K 5600-5-4 (1999) for a cured film having a film thickness of 1.5 ⁇ m obtained by the method described in (1) above.
- the obtained pre-baked film was exposed with a gap of 100 ⁇ m through a gray scale mask for sensitivity measurement using PLA as an ultrahigh pressure mercury lamp as a light source. Thereafter, using an automatic developing device (“AD-2000 (trade name)” manufactured by Takizawa Sangyo Co., Ltd.), a 0.4 wt% (or 2.38 wt%) aqueous solution of tetramethylammonium hydroxide (hereinafter, TMAH) is used. For 90 seconds and then rinsed with water for 30 seconds.
- AD-2000 automatic developing device
- TMAH a 0.4 wt% (or 2.38 wt%) aqueous solution of tetramethylammonium hydroxide
- the exposure amount for forming a 30 ⁇ m line-and-space pattern with a one-to-one width (hereinafter referred to as the optimum exposure amount) was defined as sensitivity.
- the exposure was measured with an I-line illuminometer.
- (4-2) Resolution The minimum pattern size after development at the optimum exposure amount was measured.
- (4-3) Residue after development After patterning on a silicon wafer by the method described in (4-1) above, determination was made as follows according to the degree of unmelted portion of the unexposed portion.
- Example 1 Under a yellow light, 0.277 g of 1,2-octanedione, 1- [4- (phenylthio) -2- (O-benzoyloxime)] (“Irgacure OXE-01 (trade name)” manufactured by Ciba Specialty Chemicals) Dissolved in DAA 2.846 g and PGMEA 2.317 g, zirconium dinormal butoxybis (ethyl acetoacetate) (70 wt% 1-butanol solution) (“Orgachix ZC-580 (trade name)”, manufactured by Matsumoto Fine Chemical) 0.227 g, 0.2000 g (corresponding to a concentration of 100 ppm) of PGMEA 1 wt% solution of “BYK-333 (trade name)” (manufactured by Big Chemie Japan Co., Ltd.) which is a silicone-based surfactant, 1 wt% solution of 4-
- PGMEA 50 wt% solution of dipentaerythritol hexaacrylate (“Kayarad (registered trademark)” DPHA (trade name), manufactured by Shin Nippon Kayaku) and 6.923 g of polysiloxane solution (i) were added. And stirred. Next, filtration was performed with a 0.45 ⁇ m filter to obtain a negative photosensitive resin composition (S-1). With respect to the obtained negative photosensitive resin composition (S-1), the transmittance, hardness, heat and humidity resistance, and pattern processability were evaluated by the above methods.
- Example 2 A negative photosensitive resin composition (S-2) was obtained in the same manner as in Example 1 except that the polysiloxane solution (ii) was used instead of the polysiloxane solution (i). Using the obtained negative photosensitive resin composition (S-2), evaluation was performed in the same manner as in Example 1. However, a 2.38 wt% TMAH aqueous solution was used as the developer. (Example 3) A negative photosensitive resin composition (S-3) was obtained in the same manner as in Example 1 except that the polysiloxane solution (iii) was used instead of the polysiloxane solution (i). Using the obtained negative photosensitive resin composition (S-3), evaluation was performed in the same manner as in Example 1.
- Example 4 A negative photosensitive resin composition (S-4) was obtained in the same manner as in Example 1 except that the polysiloxane solution (iv) was used instead of the polysiloxane solution (i). Using the obtained negative photosensitive resin composition (S-4), evaluation was performed in the same manner as in Example 1.
- Example 6 Instead of Irgacure OXE-01, ethanone, 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl]-, 1- (0-acetyloxime) (“Irgacure OXE-02 ( Product name) “Ciba Specialty Chemicals” was used in the same manner as in Example 1 to obtain a negative photosensitive resin composition (S-6). Using the obtained negative photosensitive resin composition (S-6), evaluation was performed in the same manner as in Example 1.
- Negative-type photosensitivity is obtained in the same manner as in Example 1 except that tripentaerythritol octaacrylate (“V # 802 (trade name)”, manufactured by Osaka Organic Chemical Co., Ltd.) is used instead of “DPHA (trade name)”. Resin composition (S-7) was obtained. Using the obtained negative photosensitive resin composition (S-7), evaluation was performed in the same manner as in Example 1.
- Example 8 Instead of “DPHA (trade name)”, “V # 802 (trade name)” (50% PGMEA solution) 3.323 g and 9,9-bis [4- (2-acryloyloxyethoxy) phenyl] fluorene (“BPEFA”) (Trade name) ”, manufactured by Osaka Gas Chemical Co., Ltd. (50 wt% PGMEA solution) Except for using 2.215 g, a negative photosensitive resin composition (S-8) was obtained in the same manner as in Example 1. Evaluation was carried out in the same manner as in Example 1 using the obtained negative photosensitive resin composition (S-8).
- BPEFA 9,9-bis [4- (2-acryloyloxyethoxy) phenyl] fluorene
- DPHA trade name
- Example 12 Under a yellow light, “OXE-01 (trade name)” 0.277 g, DAA 2.846 g, PGMEA 2.388 g, zirconium tetraacetylacetonate (“Narsem zirconium (trade name)”, manufactured by Nippon Chemical Industry Co., Ltd.) 166 g, 0.2000 g of silicone surfactant BYK-333 (1 wt% PGMEA solution) (corresponding to a concentration of 100 ppm) and 1.661 g of 4-t-butylcatechol (1 wt% PGMEA solution) were added and stirred.
- silicone surfactant BYK-333 (1 wt% PGMEA solution
- 4-t-butylcatechol (1 wt% PGMEA solution
- Example 14 A negative photosensitive resin composition (S-14) was obtained in the same manner as in Example 12 except that the amount of nursem zirconium added was 0.323 g. Evaluation was performed in the same manner as in Example 1 by using the obtained negative photosensitive resin composition (S-14).
- Example 15 A negative photosensitive resin composition (S-13) was obtained in the same manner as in Example 12 except that zirconium tetrapropoxide was used instead of nasem zirconium. Evaluation was performed in the same manner as in Example 1 using the obtained negative photosensitive resin composition (S-13).
- Example 16 A negative photosensitive resin composition (S-14) was obtained in the same manner as in Example 12 except that zirconium tetraphenoxide was used instead of nasem zirconium. Evaluation was performed in the same manner as in Example 1 by using the obtained negative photosensitive resin composition (S-14).
- Example 17 A negative photosensitive resin composition (S--) was prepared in the same manner as in Example 12 except that zirconium tetra (2,2,6,6-tetramethyl-3,5-heptanedionate) was used instead of nasem zirconium. 15) was obtained. Evaluation was performed in the same manner as in Example 1 using the obtained negative photosensitive resin composition (S-15).
- Example 18 A negative photosensitive resin composition (S-16) was obtained in the same manner as in Example 12 except that zirconium tetramethyl malonate was used instead of nasem zirconium. Using the obtained negative photosensitive resin composition (S-16), evaluation was performed in the same manner as in Example 1.
- Example 19 A negative photosensitive resin composition (S-17) was obtained in the same manner as in Example 12 except that zirconium tetrabenzoyl acetonate was used instead of nasem zirconium. Using the obtained negative photosensitive resin composition (S-17), evaluation was performed in the same manner as in Example 1.
- Example 20 A negative photosensitive resin composition (S-18) was obtained in the same manner as in Example 12 except that zirconium mono-normal butoxyacetylacetonate bis (ethyl acetoacetate) was used instead of nasem zirconium. Evaluation was performed in the same manner as in Example 1 using the obtained negative photosensitive resin composition (S-18).
- Example 21 A negative photosensitive resin composition (S-19) was obtained in the same manner as in Example 12 except that dichlorobis ( ⁇ 5-cyclopentadienyl) zirconium was used instead of nasemzirc. Using the obtained negative photosensitive resin composition (S-19), evaluation was performed in the same manner as in Example 1.
- Example 22 A negative photosensitive resin composition (S-20) was obtained in the same manner as in Example 12 except that bis ( ⁇ 5-cyclopentadienyl) zirconium chloride hydride was used instead of nasem zirconium. Evaluation was performed in the same manner as in Example 1 using the obtained negative photosensitive resin composition (S-20).
- Example 23 A negative photosensitive resin composition (S-21) was obtained in the same manner as in Example 12 except that zirconocene bis (trifluoromethanesulfonate) tetrahydrofuran adduct was used instead of nasem zirconium. Using the obtained negative photosensitive resin composition (S-21), evaluation was performed in the same manner as in Example 1.
- Example 24 A negative photosensitive resin composition (A-1) was prepared in the same manner as in Example 1 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA. ) Evaluation was carried out in the same manner as in Example 1 using the obtained negative photosensitive resin composition (A-1).
- Example 25 A negative photosensitive resin composition (A-2) was prepared in the same manner as in Example 2 except that the acrylic resin solution (b) was used instead of the polysiloxane solution (ii) and the same amount of PGMEA was further added instead of DAA. ) Evaluation was performed in the same manner as in Example 1 by using the obtained negative photosensitive resin composition (A-2).
- Example 26 A negative photosensitive resin composition (A-3) was prepared in the same manner as in Example 3 except that the acrylic resin solution (c) was used instead of the polysiloxane solution (iii) and the same amount of PGMEA was further added instead of DAA. ) Evaluation was carried out in the same manner as in Example 1 using the obtained negative photosensitive resin composition (A-3).
- Example 27 A negative photosensitive resin composition (A-4) was prepared in the same manner as in Example 5 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA.
- the obtained negative photosensitive resin composition (A-4) was used for evaluation in the same manner as in Example 1.
- Example 28 A negative photosensitive resin composition (A-5) was prepared in the same manner as in Example 6 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA.
- Evaluation was carried out in the same manner as in Example 1 using the obtained negative photosensitive resin composition (A-5).
- a negative photosensitive resin composition (A-6) was prepared in the same manner as in Example 7 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA.
- Example 30 A negative photosensitive resin composition (A-7) was prepared in the same manner as in Example 8 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA. ) Evaluation was carried out in the same manner as in Example 1 using the obtained negative photosensitive resin composition (A-7).
- Example 31 A negative photosensitive resin composition (A-8) was prepared in the same manner as in Example 9 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA.
- Example 32 A negative photosensitive resin composition (A-9) was prepared in the same manner as in Example 10 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA. ) Evaluation was performed in the same manner as in Example 1 using the obtained negative photosensitive resin composition (A-9).
- Example 33 A negative photosensitive resin composition (A-10) was prepared in the same manner as in Example 11 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA.
- Example 34 A negative photosensitive resin composition (A-11) was prepared in the same manner as in Example 12 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA. ) The obtained negative photosensitive resin composition (A-11) was used for evaluation in the same manner as in Example 1. (Example 35) The negative photosensitive resin composition (A-12) was prepared in the same manner as in Example 13 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA.
- Example 36 A negative photosensitive resin composition (A-13) was prepared in the same manner as in Example 14 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA. ) Evaluation was performed in the same manner as in Example 1 by using the obtained negative photosensitive resin composition (A-13).
- Example 37 A negative photosensitive resin composition (A-14) was prepared in the same manner as in Example 15 except that the acrylic resin solution (a) was used in place of the polysiloxane solution (i) and the same amount of PGMEA was added in place of DAA.
- Example 38 A negative photosensitive resin composition (A-15) was prepared in the same manner as in Example 16 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA. ) Evaluation was performed in the same manner as in Example 1 by using the obtained negative photosensitive resin composition (A-15).
- Example 39 A negative photosensitive resin composition (A-16) was prepared in the same manner as in Example 17 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA.
- the obtained negative photosensitive resin composition (A-16) was used for evaluation in the same manner as in Example 1.
- Example 40 A negative photosensitive resin composition (A-17) was prepared in the same manner as in Example 18 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA.
- Example 41 The negative photosensitive resin composition (A-18) was prepared in the same manner as in Example 19 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA.
- Example 42 The negative photosensitive resin composition (A-19) was prepared in the same manner as in Example 20 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA. ) Evaluation was performed in the same manner as in Example 1 by using the obtained negative photosensitive resin composition (A-19).
- Example 43 A negative photosensitive resin composition (A-20) was prepared in the same manner as in Example 21 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA.
- Example 44 A negative photosensitive resin composition (A-21) was prepared in the same manner as in Example 22 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA.
- Example 45 The negative photosensitive resin composition (A-22) was prepared in the same manner as in Example 23 except that the acrylic resin solution (a) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA.
- Example 46 A touch panel member was produced according to the following procedure. (1) Production of ITO Using a sputtering apparatus HSR-521A (manufactured by Shimadzu Corporation) on a glass substrate having a thickness of about 1 mm, RF power of 1.4 kW and vacuum degree of 6.65 ⁇ 10 ⁇ 1 Pa are 12.5 By sputtering for 1 minute, an ITO film having a film thickness of 150 nm and a surface resistance of 15 ⁇ / ⁇ is formed, and a positive photoresist (“OFPR-800” manufactured by Tokyo Ohka Kogyo Co., Ltd.) is applied at 80 ° C.
- HSR-521A manufactured by Shimadzu Corporation
- a resist film having a thickness of 1.1 ⁇ m.
- a MAM wiring was prepared by the same procedure as (1) except that a mixed solution was used.
- a resin composition (H-1) was obtained in the same manner as in Example 1 except that the acrylic resin solution (d) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was further added instead of DAA. .
- the carboxylic acid equivalent of the acrylic resin solution (d) was 4,600 g / mol. Evaluation was performed in the same manner as in Example 1 using the obtained resin composition (H-1). Since the unexposed portion was not dissolved in the 2.38 wt% TMAH aqueous solution and pattern processing could not be performed, other evaluations were performed without development.
- Example 2 A resin composition (H-2) was obtained in the same manner as in Example 1 except that the acrylic resin solution (e) was used instead of the polysiloxane solution (i) and the same amount of PGMEA was added instead of DAA. .
- the carboxylic acid equivalent of the acrylic resin solution (e) was 140 g / mol. Evaluation was performed in the same manner as in Example 1 using the obtained resin composition (H-2).
- This resin composition (H-3) does not contain a photopolymerization initiator. Evaluation was performed in the same manner as in Example 1 using the obtained resin composition (H-3). In addition, since both the exposed part and the unexposed part were soluble in 0.4 wt% TMAH aqueous solution and pattern processing could not be performed, the other evaluations were performed without development.
- the cured film obtained by curing the negative photosensitive resin composition of the present invention includes various hard coat films such as a protective film for a touch panel, an insulating film for a touch panel, a planarizing film for a TFT of a liquid crystal or an organic EL display, It is suitably used for metal wiring protective films, insulating films, antireflection films, antireflection films, optical filters, overcoats for color filters, pillar materials, and the like.
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Abstract
Description
中でも、感度向上の観点から、ペンタエリスリトールテトラアクリレート、ジペンタエリスリトールペンタアクリレート、ジペンタエリスリトールヘキサアクリレート、トリペンタエリスリトールヘプタアクリレート、トリペンタエリスリトールオクタアクリレート、などが好ましい。また、疎水性向上の観点から、ジメチロール-トリシクロデカンジアクリレート、ジメチロール-トリシクロデカンジメタクリレート、エトキシ化ビスフェノールAジアクリレート、9,9-ビス[4-(2-アクリロイルオキシエトキシ)フェニル]フルオレンなどが好ましい。
ここで、平均粒径とは、コールター法によって測定した粒度分布より求められるメディアン径を意味する。
(合成例1:ポリシロキサン溶液(i)の合成)
500mLの三口フラスコにメチルトリメトキシシランを47.67g(0.35mol)、フェニルトリメトキシシランを39.66g(0.20mol)、3-トリメトキシシリルプロピルコハク酸26.23g(0.10mol)、γ-アクリロイルプロピルトリメトキシシランを82.04g(0.35mol)、ダイアセトンアルコール(以下、DAA)を185.08g仕込み、40℃のオイルバスに漬けて撹拌しながら水55.8gにリン酸0.391g(仕込みモノマーに対して0.2wt%)を溶かしたリン酸水溶液を滴下ロートで10分かけて添加した。40℃で1時間撹拌した後、オイルバス温度を70℃に設定して1時間撹拌し、さらにオイルバスを30分かけて115℃まで昇温した。昇温開始1時間後に溶液の内温が100℃に到達し、そこから2時間加熱撹拌した(内温は100~110℃)。反応中に副生成物であるメタノール、水が合計120g留出した。得られたポリシロキサンのDAA溶液に、ポリマー濃度が40wt%となるようにDAAを加えてポリシロキサン溶液(i)を得た。なお、得られたポリマーの重量平均分子量(Mw)をGPCにより測定したところ8,000(ポリスチレン換算)であった。また、カルボン酸当量は620g/molであった。
(合成例2:ポリシロキサン溶液(ii)の合成)
500mLの三口フラスコにメチルトリメトキシシランを54.48g(0.40mol)、フェニルトリメトキシシランを39.66g(0.20mol)、3-トリメトキシシリルプロピルコハク酸13.12g(0.05mol)、γ-アクリロイルプロピルトリメトキシシランを82.04g(0.35mol)、DAAを174.74g仕込み、40℃のオイルバスに漬けて撹拌しながら水54.9gにリン酸0.379g(仕込みモノマーに対して0.2wt%)を溶かしたリン酸水溶液を滴下ロートで10分かけて添加した。次いで合成例1と同条件で加熱撹拌したところ、副生成物であるメタノール、水が合計110g留出した。得られたポリシロキサンのDAA溶液に、ポリマー濃度が40wt%となるようにDAAを加えてポリシロキサン溶液(ii)を得た。なお、得られたポリマーの重量平均分子量(Mw)をGPCにより測定したところ6,000(ポリスチレン換算)であった。また、カルボン酸当量は1,190g/molであった。
(合成例3:ポリシロキサン溶液(iii)の合成)
500mLの三口フラスコにメチルトリメトキシシランを27.24g(0.20mol)、フェニルトリメトキシシランを39.66g(0.20mol)、3-トリメトキシシリルプロピルコハク酸65.58g(0.25mol)、γ-アクリロイルプロピルトリメトキシシランを82.04g(0.35mol)、DAAを198.02g仕込み、40℃のオイルバスに漬けて撹拌しながら水58.5gにリン酸0.416g(仕込みモノマーに対して0.2wt%)を溶かしたリン酸水溶液を滴下ロートで10分かけて添加した。次いで合成例1と同条件で加熱撹拌したところ、副生成物であるメタノール、水が合計130g留出した。得られたポリシロキサンのDAA溶液に、ポリマー濃度が40wt%となるようにDAAを加えてポリシロキサン溶液(iii)を得た。なお、得られたポリマーの重量平均分子量(Mw)をGPCにより測定したところ7,000(ポリスチレン換算)であった。また、カルボン酸当量は280g/molであった。
(合成例4:ポリシロキサン溶液(iv)の合成)
500mLの三口フラスコにメチルトリメトキシシランを34.05g(0.20mol)、フェニルトリメトキシシランを39.66g(0.20mol)、3-トリメトキシシリル酪酸41.66g(0.20mol)、γ-アクリロイルプロピルトリメトキシシランを82.04g(0.35mol)、DAAを182.22g仕込み、40℃のオイルバスに漬けて撹拌しながら水54.0gにリン酸0.395g(仕込みモノマーに対して0.2wt%)を溶かしたリン酸水溶液を滴下ロートで10分かけて添加した。次いで合成例1と同条件で加熱撹拌したところ、副生成物であるメタノール、水が合計120g留出した。得られたポリシロキサンのDAA溶液に、ポリマー濃度が40wt%となるようにDAAを加えてポリシロキサン溶液(iv)を得た。なお、得られたポリマーの重量平均分子量(Mw)をGPCにより測定したところ8,000(ポリスチレン換算)であった。また、カルボン酸当量は640g/molであった。
(合成例5:ポリシロキサン溶液(v)の合成)
500mLの三口フラスコにメチルトリメトキシシランを68.10g(0.50mol)、フェニルトリメトキシシランを99.15g(0.50mol)、3-メチル-3-メトキシブタノール(以下、MMB)を143.37g仕込み、40℃のオイルバスに漬けて撹拌しながら水54.0gにリン酸0.167g(仕込みモノマーに対して0.1wt%)を溶かしたリン酸水溶液を滴下ロートで10分かけて添加した。次いで合成例1と同条件で加熱撹拌したところ、副生成物であるメタノール、水が合計120g留出した。得られたポリシロキサンのMMB溶液に、ポリマー濃度が40wt%となるようにMMBを加えてポリシロキサン溶液(v)を得た。なお、得られたポリマーの重量平均分子量(Mw)をGPCにより測定したところ8,000(ポリスチレン換算)であった。また、カルボン酸当量は0g/molであった。この合成例5は特許文献1に記載された態様である。
(合成例6:アクリル樹脂溶液(a)の合成)
500mlのフラスコに2,2’-アゾビス(イソブチロニトリル)を3g、プロピレングリコールメチルエーテルアセテート(以下、PGMEA)を50g仕込んだ。その後、メタクリル酸を23.0g、ベンジルメタクリレートを31.5g、トリシクロ[5.2.1.02,6]デカン-8-イルメタクリレートを32.8g仕込み、室温でしばらく撹拌し、フラスコ内をバブリングによって十分に窒素置換した後、70℃で5時間加熱撹拌した。次に、得られた溶液にメタクリル酸グリシジルを12.7g、ジメチルベンジルアミンを1g、p-メトキシフェノールを0.2g、PGMEAを100g添加し、90℃で4時間加熱撹拌し、アクリル樹脂溶液(a)を得た。得られたアクリル樹脂溶液(a)に固形分濃度が40wt%になるようにPGMEAを加えた。アクリル樹脂の重量平均分子量は18,000、カルボン酸当量は560g/molであった。
(合成例7:アクリル樹脂溶液(b)の合成)
500mlのフラスコに2,2’-アゾビス(イソブチロニトリル)を3g、PGMEA(プロピレングリコールメチルエーテルアセテート)を50g仕込んだ。その後、メタクリル酸を16.8g、ベンジルメタクリレートを34.4g、トリシクロ[5.2.1.02,6]デカン-8-イルメタクリレートを36.9g仕込み、室温でしばらく撹拌し、フラスコ内をバブリングによって十分に窒素置換した後、70℃で5時間加熱撹拌した。次に、得られた溶液にメタクリル酸グリシジルを11.9g、ジメチルベンジルアミンを1g、p-メトキシフェノールを0.2g、PGMEAを100g添加し、90℃で4時間加熱撹拌し、アクリル樹脂溶液(b)を得た。得られたアクリル樹脂溶液(b)に固形分濃度が40wt%になるようにPGMEAを加えた。アクリル樹脂の重量平均分子量は13,000、カルボン酸当量は890g/molであった。
(合成例8:アクリル樹脂溶液(c)の合成)
500mlのフラスコに2,2’-アゾビス(イソブチロニトリル)を3g、PGMEAを50g仕込んだ。その後、メタクリル酸を33.9g、ベンジルメタクリレートを34.4g、トリシクロ[5.2.1.02,6]デカン-8-イルメタクリレートを36.9g仕込み、室温でしばらく撹拌し、フラスコ内をバブリングによって十分に窒素置換した後、70℃で5時間加熱撹拌した。次に、得られた溶液にメタクリル酸グリシジルを14.0g、ジメチルベンジルアミンを1g、p-メトキシフェノールを0.2g、PGMEAを100g添加し、90℃で4時間加熱撹拌し、アクリル樹脂溶液(c)を得た。得られたアクリル樹脂溶液(c)に固形分濃度が40wt%になるようにPGMEAを加えた。アクリル樹脂の重量平均分子量は24,000、カルボン酸当量は340g/molであった。
(合成例9:アクリル樹脂溶液(d)の合成)
500mlのフラスコに2,2’-アゾビス(イソブチロニトリル)を3g、PGMEAを50g仕込んだ。その後、メタクリル酸を8.24g、ベンジルメタクリレートを35.5g、トリシクロ[5.2.1.02,6]デカン-8-イルメタクリレートを45.5g仕込み、室温でしばらく撹拌し、フラスコ内をバブリングによって十分に窒素置換した後、70℃で5時間加熱撹拌した。次に、得られた溶液にメタクリル酸グリシジルを10.7g、ジメチルベンジルアミンを1g、p-メトキシフェノールを0.2g、PGMEAを100g添加し、90℃で4時間加熱撹拌し、アクリル樹脂溶液(d)を得た。得られたアクリル樹脂溶液(d)に固形分濃度が40wt%になるようにPGMEAを加えた。アクリル樹脂の重量平均分子量は9,000、カルボン酸当量は4,600g/molであった。
(合成例10:アクリル樹脂溶液(e)の合成)
500mlのフラスコに2,2’-アゾビス(イソブチロニトリル)を3g、PGMEAを50g仕込んだ。その後、メタクリル酸を69.5g、ベンジルメタクリレートを7.9g、トリシクロ[5.2.1.02,6]デカン-8-イルメタクリレートを9.9g仕込み、室温でしばらく撹拌し、フラスコ内をバブリングによって十分に窒素置換した後、70℃で5時間加熱撹拌した。次に、得られた溶液にメタクリル酸グリシジルを12.8g、ジメチルベンジルアミンを1g、p-メトキシフェノールを0.2g、PGMEAを100g添加し、90℃で4時間加熱撹拌し、アクリル樹脂溶液(e)を得た。得られたアクリル樹脂溶液(e)に固形分濃度が40wt%になるようにPGMEAを加えた。アクリル樹脂の重量平均分子量は40,000、カルボン酸当量は140g/molであった。
(1)透過率の測定
作製したネガ型感光性樹脂組成物を5cm角のテンパックスガラス基板(旭テクノガラス板(株)製)にスピンコーター(ミカサ(株)製「1H-360S(商品名)」)を用いて500rpmで10秒回転した後、1,000rpmで4秒回転してスピンコートした後、ホットプレート(大日本スクリーン製造(株)製「SCW-636(商品名)」)を用いて90℃で2分間プリベークし、膜厚2μmの膜を作製した。作製した膜をパラレルライトマスクアライナー(以下PLAという)(キヤノン(株)製「PLA-501F(商品名)」)を用いて超高圧水銀灯を光源として露光し、オーブン(エスペック(株)製「IHPS-222」)を用いて空気中230℃で1時間キュアして膜厚1.5μmの硬化膜を作製した。
(2)硬度の測定
前記(1)記載の方法で得られた膜厚1.5μmの硬化膜について、JIS K 5600-5-4(1999)に準拠して鉛筆硬度を測定した。
(3)耐湿熱性
モリブデンスパッタ膜を具備するガラス上に、前記(1)記載の方法で硬化膜を作製した後、気温85℃、湿度85%のオーブン(エスペック株式会社、「EX-111(商品名)」)内に300時間放置する試験を行った後、モリブデンの変色度合いを評価した。また、モリブデンスパッタ膜のみのガラス基板も同時に試験を行い、試験前後の変色度合いの指標とし、以下のように判定した。
(4)パターン加工性
(4-1)感度
ネガ型感光性樹脂組成物Aをシリコンウエハにスピンコーター(ミカサ(株)製「1H-360S(商品名)」)を用いて500rpmで10秒回転した後、1,000rpmで4秒回転してスピンコートした後、ホットプレート(大日本スクリーン製造(株)製「SCW-636(商品名)」)を用いて90℃で2分間プリベークし、膜厚2μmのプリベーク膜を作製した。得られたプリベーク膜に、PLAを用いて超高圧水銀灯を光源として、感度測定用のグレースケールマスクを介して100μmのギャップで露光した。その後、自動現像装置(「AD-2000(商品名)」、滝沢産業(株)製)を用いて、水酸化テトラメチルアンモニウム(以下、TMAH)の0.4wt%(または2.38wt%)水溶液で90秒間シャワー現像し、次いで水で30秒間リンスした。
(4-2)解像度
最適露光量における現像後の最小パターン寸法を測定した。
(4-3)現像後残さ
前記(4-1)に記載の方法でシリコンウエハ上にパターン加工した後、未露光部の溶け残り程度により以下のようにして判定した。
(実施例1)
黄色灯下にて1,2-オクタンジオン,1-[4-(フェニルチオ)-2-(O-ベンゾイルオキシム)](「イルガキュアOXE-01(商品名)」チバスペシャリティケミカル製)0.277gをDAA2.846g、PGMEA2.317gに溶解させ、ジルコニウムジノルマルブトキシビス(エチルアセトアセテート)(70wt%1-ブタノール溶液)(「オルガチックスZC-580(商品名)」、マツモトファインケミカル製)0.227g、シリコーン系界面活性剤である「BYK-333(商品名)」(ビックケミージャパン(株)製)のPGMEA1wt%溶液0.2000g(濃度100ppmに相当)、4-t-ブチルカテコールのPGMEA1wt%溶液1.661gを加え、撹拌した。そこへ、ジペンタエリスリトールヘキサアクリレート(「“カヤラッド(登録商標)”DPHA(商品名)」、新日本化薬製)のPGMEA50重量%溶液5.538g、ポリシロキサン溶液(i)6.923gを加えて、撹拌した。次いで0.45μmのフィルターでろ過を行い、ネガ型感光性樹脂組成物(S-1)を得た。得られたネガ型感光性樹脂組成物(S-1)について、前記方法で透過率、硬度、耐湿熱性、パターン加工性を評価した。
(実施例2)
ポリシロキサン溶液(i)の替わりにポリシロキサン溶液(ii)を用いる以外は実施例1と同様に行い、ネガ型感光性樹脂組成物(S-2)を得た。得られたネガ型感光性樹脂組成物(S-2)を用いて、実施例1と同様にして評価を行った。ただし、現像液には2.38wt%TMAH水溶液を用いた。
(実施例3)
ポリシロキサン溶液(i)の替わりにポリシロキサン溶液(iii)を用いる以外は実施例1と同様に行い、ネガ型感光性樹脂組成物(S-3)を得た。得られたネガ型感光性樹脂組成物(S-3)を用いて、実施例1と同様にして評価を行った。
(実施例4)
ポリシロキサン溶液(i)の替わりにポリシロキサン溶液(iv)を用いる以外は実施例1と同様に行い、ネガ型感光性樹脂組成物(S-4)を得た。得られたネガ型感光性樹脂組成物(S-4)を用いて、実施例1と同様にして評価を行った。
(実施例5)
黄色灯下にて2-メチル-[4-(メチルチオ)フェニル]-2-モルフォリノプロパン-1-オン(「イルガキュア907(商品名)」チバスペシャリティケミカル製)0.503g、4,4-ビス(ジエチルアミノ)ベンゾフェノン(「EAB-F(商品名)」保土谷化学工業(株)製)0.026gをDAA3.030g、PGMEA2.515g、「ZC-580(商品名)」0.227g、シリコーン系界面活性剤であるBYK-333(1wt%PGMEA溶液)0.2000g(濃度100ppmに相当)、4-t-ブチルカテコール(1wt%PGMEA溶液)1.588gを加え、撹拌した。そこへ、「DPHA」(50wt%PGMEA溶液)5.294g、ポリシロキサン溶液(i)6.617gを加えて、撹拌した。次いで0.45μmのフィルターでろ過を行い、ネガ型感光性樹脂組成物(S-5)を得た。得られたネガ型感光性樹脂組成物(S-5)を用いて、実施例1と同様にして評価を行った。
(実施例6)
イルガキュアOXE-01の替わりにエタノン,1-[9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール-3-イル]-,1-(0-アセチルオキシム)(「イルガキュアOXE-02(商品名)」チバスペシャリティケミカル製)を用いる以外は実施例1と同様に行い、ネガ型感光性樹脂組成物(S-6)を得た。得られたネガ型感光性樹脂組成物(S-6)を用いて、実施例1と同様にして評価を行った。
(実施例7)
「DPHA(商品名)」の代わりにトリペンタエリスリトールオクタアクリレート(「V#802(商品名)」、大阪有機化学(株)製)を用いる以外は、実施例1と同様に行い、ネガ型感光性樹脂組成物(S-7)を得た。得られたネガ型感光性樹脂組成物(S-7)を用いて、実施例1と同様にして評価を行った。
(実施例8)
「DPHA(商品名)」の代わりに「V#802(商品名)」(50%PGMEA溶液)3.323gと9,9-ビス[4-(2-アクリロイルオキシエトキシ)フェニル]フルオレン(「BPEFA(商品名)」、大阪ガスケミカル製)(50wt%PGMEA溶液)2.215gを用いる以外は、実施例1と同様に行い、ネガ型感光性樹脂組成物(S-8)を得た。得られたネガ型感光性樹脂組成物(S-8)を用いて、実施例1と同様にして評価を行った。
(実施例9)
黄色灯下にて、「OXE-01(商品名)」0.277g、DAA2.846g、PGMEA2.016g、「ナノユースOZ-30M(商品名)」(メタノール溶液、固形分=30.9wt%)0.538g、シリコーン系界面活性剤であるBYK-333(1wt%PGMEA溶液)0.2000g(濃度100ppmに相当)、4-t-ブチルカテコール(1wt%PGMEA溶液)1.661gを加え、撹拌した。「DPHA(商品名)」(50%PGMEA溶液)5.538g、ポリシロキサン溶液(i)6.923gを加えて、撹拌した。次いで0.45μmのフィルターでろ過を行い、ネガ型感光性樹脂組成物(S-9)を得た。得られたネガ型感光性樹脂組成物(S-9)を用いて、実施例1と同様にして評価を行った。
(実施例10)
黄色灯下にて、「OXE-01(商品名)」0.239g、DAA3.410g、PGMEA0.846g、「ナノユースOZ-30M(商品名)」(メタノール溶液、固形分=30.9wt%)3.098g、シリコーン系界面活性剤であるBYK-333(1wt%PGMEA溶液)0.2000g(濃度100ppmに相当)、4-t-ブチルカテコール(1wt%PGMEA溶液)1.436gを加え、撹拌した。「DPHA(商品名)」(50%PGMEA溶液)4.787g、ポリシロキサン溶液(i)5.984gを加えて、撹拌した。次いで0.45μmのフィルターでろ過を行い、ネガ型感光性樹脂組成物(S-10)を得た。得られたネガ型感光性樹脂組成物(S-10)を用いて、実施例1と同様にして評価を行った。
(実施例11)
「ナノユースOZ-30M(商品名)」0.538gの代わりに、「バイラールZr-C20(商品名)」(メタノール溶液、固形分=20wt%)を0.831g用いる以外は実施例9と同様に行い、ネガ型感光性樹脂組成物(S-11)を得た。得られたネガ型感光性樹脂組成物(S-11)を用いて、実施例1と同様にして評価を行った。
(実施例12)
黄色灯下にて、「OXE-01(商品名)」0.277g、DAA2.846g、PGMEA2.388g、ジルコニウムテトラアセチルアセトネート(「ナーセムジルコニウム(商品名)」、日本化学産業製)0.166g、シリコーン系界面活性剤であるBYK-333(1wt%PGMEA溶液)0.2000g(濃度100ppmに相当)、4-t-ブチルカテコール(1wt%PGMEA溶液)1.661gを加え、撹拌した。「DPHA(商品名)」(50wt%PGMEA溶液)5.538g、ポリシロキサン溶液(i)6.923gを加えて、撹拌した。次いで0.45μmのフィルターでろ過を行い、ネガ型感光性樹脂組成物(S-12)を得た。得られたネガ型感光性樹脂組成物(S-12)を用いて、実施例1と同様にして評価を行った。
(実施例13)
ナーセムジルコニウムの添加量を0.017gとする以外は実施例12と同様に行い、ネガ型感光性樹脂組成物(S-13)を得た。得られたネガ型感光性樹脂組成物(S-13)を用いて、実施例1と同様にして評価を行った。
(実施例14)
ナーセムジルコニウムの添加量を0.323gとする以外は実施例12と同様に行い、ネガ型感光性樹脂組成物(S-14)を得た。得られたネガ型感光性樹脂組成物(S-14)を用いて、実施例1と同様にして評価を行った。
(実施例15)
ナーセムジルコニウムの替わりにジルコニウムテトラプロポキシドを用いる以外は実施例12と同様に行い、ネガ型感光性樹脂組成物(S-13)を得た。得られたネガ型感光性樹脂組成物(S-13)を用いて、実施例1と同様にして評価を行った。
(実施例16)
ナーセムジルコニウムの替わりにジルコニウムテトラフェノキシドを用いる以外は実施例12と同様に行い、ネガ型感光性樹脂組成物(S-14)を得た。得られたネガ型感光性樹脂組成物(S-14)を用いて、実施例1と同様にして評価を行った。
(実施例17)
ナーセムジルコニウムの替わりにジルコニウムテトラ(2,2,6,6-テトラメチル-3,5-ヘプタンジオネート)を用いる以外は実施例12と同様に行い、ネガ型感光性樹脂組成物(S-15)を得た。得られたネガ型感光性樹脂組成物(S-15)を用いて、実施例1と同様にして評価を行った。
(実施例18)
ナーセムジルコニウムの替わりにジルコニウムテトラメチルマロネートを用いる以外は実施例12と同様に行い、ネガ型感光性樹脂組成物(S-16)を得た。得られたネガ型感光性樹脂組成物(S-16)を用いて、実施例1と同様にして評価を行った。
(実施例19)
ナーセムジルコニウムの替わりにジルコニウムテトラベンゾイルアセトネートを用いる以外は実施例12と同様に行い、ネガ型感光性樹脂組成物(S-17)を得た。得られたネガ型感光性樹脂組成物(S-17)を用いて、実施例1と同様にして評価を行った。
(実施例20)
ナーセムジルコニウムの替わりにジルコニウムモノノルマルブトキシアセチルアセトネートビス(エチルアセトアセテート)を用いる以外は実施例12と同様に行い、ネガ型感光性樹脂組成物(S-18)を得た。得られたネガ型感光性樹脂組成物(S-18)を用いて、実施例1と同様にして評価を行った。
(実施例21)
ナーセムジルコニウムの替わりにジクロロビス(η5-シクロペンタジエニル)ジルコニウムを用いる以外は実施例12と同様に行い、ネガ型感光性樹脂組成物(S-19)を得た。得られたネガ型感光性樹脂組成物(S-19)を用いて、実施例1と同様にして評価を行った。
(実施例22)
ナーセムジルコニウムの替わりにビス(η5-シクロペンタジエニル)ジルコニウムクロリドヒドリドを用いる以外は実施例12と同様に行い、ネガ型感光性樹脂組成物(S-20)を得た。得られたネガ型感光性樹脂組成物(S-20)を用いて、実施例1と同様にして評価を行った。
(実施例23)
ナーセムジルコニウムの替わりにジルコノセンビス(トリフルオロメタンスルホナート) テトラヒドロフラン付加物を用いる以外は実施例12と同様に行い、ネガ型感光性樹脂組成物(S-21)を得た。得られたネガ型感光性樹脂組成物(S-21)を用いて、実施例1と同様にして評価を行った。
(実施例24)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例1と同様に行い、ネガ型感光性樹脂組成物(A-1)を得た。得られたネガ型感光性樹脂組成物(A-1)を用いて、実施例1と同様にして評価を行った。
(実施例25)
ポリシロキサン溶液(ii)の替わりにアクリル樹脂溶液(b)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例2と同様に行い、ネガ型感光性樹脂組成物(A-2)を得た。得られたネガ型感光性樹脂組成物(A-2)を用いて、実施例1と同様にして評価を行った。ただし、現像液には2.38wt%TMAH水溶液を用いた。
(実施例26)
ポリシロキサン溶液(iii)の替わりにアクリル樹脂溶液(c)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例3と同様に行い、ネガ型感光性樹脂組成物(A-3)を得た。得られたネガ型感光性樹脂組成物(A-3)を用いて、実施例1と同様にして評価を行った。
(実施例27)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例5と同様に行い、ネガ型感光性樹脂組成物(A-4)を得た。得られたネガ型感光性樹脂組成物(A-4)を用いて、実施例1と同様にして評価を行った。
(実施例28)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例6と同様に行い、ネガ型感光性樹脂組成物(A-5)を得た。得られたネガ型感光性樹脂組成物(A-5)を用いて、実施例1と同様にして評価を行った。
(実施例29)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例7と同様に行い、ネガ型感光性樹脂組成物(A-6)を得た。得られたネガ型感光性樹脂組成物(A-6)を用いて、実施例1と同様にして評価を行った。
(実施例30)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例8と同様に行い、ネガ型感光性樹脂組成物(A-7)を得た。得られたネガ型感光性樹脂組成物(A-7)を用いて、実施例1と同様にして評価を行った。
(実施例31)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例9と同様に行い、ネガ型感光性樹脂組成物(A-8)を得た。得られたネガ型感光性樹脂組成物(A-8)を用いて、実施例1と同様にして評価を行った。
(実施例32)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例10と同様に行い、ネガ型感光性樹脂組成物(A-9)を得た。得られたネガ型感光性樹脂組成物(A-9)を用いて、実施例1と同様にして評価を行った。
(実施例33)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例11と同様に行い、ネガ型感光性樹脂組成物(A-10)を得た。得られたネガ型感光性樹脂組成物(A-10)を用いて、実施例1と同様にして評価を行った。
(実施例34)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例12と同様に行い、ネガ型感光性樹脂組成物(A-11)を得た。得られたネガ型感光性樹脂組成物(A-11)を用いて、実施例1と同様にして評価を行った。
(実施例35)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例13と同様に行い、ネガ型感光性樹脂組成物(A-12)を得た。得られたネガ型感光性樹脂組成物(A-12)を用いて、実施例1と同様にして評価を行った。
(実施例36)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例14と同様に行い、ネガ型感光性樹脂組成物(A-13)を得た。得られたネガ型感光性樹脂組成物(A-13)を用いて、実施例1と同様にして評価を行った。
(実施例37)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例15と同様に行い、ネガ型感光性樹脂組成物(A-14)を得た。得られたネガ型感光性樹脂組成物(A-14)を用いて、実施例1と同様にして評価を行った。
(実施例38)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例16と同様に行い、ネガ型感光性樹脂組成物(A-15)を得た。得られたネガ型感光性樹脂組成物(A-15)を用いて、実施例1と同様にして評価を行った。
(実施例39)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例17と同様に行い、ネガ型感光性樹脂組成物(A-16)を得た。得られたネガ型感光性樹脂組成物(A-16)を用いて、実施例1と同様にして評価を行った。
(実施例40)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例18と同様に行い、ネガ型感光性樹脂組成物(A-17)を得た。得られたネガ型感光性樹脂組成物(A-17)を用いて、実施例1と同様にして評価を行った。
(実施例41)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例19と同様に行い、ネガ型感光性樹脂組成物(A-18)を得た。得られたネガ型感光性樹脂組成物(A-18)を用いて、実施例1と同様にして評価を行った。
(実施例42)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例20と同様に行い、ネガ型感光性樹脂組成物(A-19)を得た。得られたネガ型感光性樹脂組成物(A-19)を用いて、実施例1と同様にして評価を行った。
(実施例43)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例21と同様に行い、ネガ型感光性樹脂組成物(A-20)を得た。得られたネガ型感光性樹脂組成物(A-20)を用いて、実施例1と同様にして評価を行った。
(実施例44)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例22と同様に行い、ネガ型感光性樹脂組成物(A-21)を得た。得られたネガ型感光性樹脂組成物(A-20)を用いて、実施例1と同様にして評価を行った。
(実施例45)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(a)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例23と同様に行い、ネガ型感光性樹脂組成物(A-22)を得た。得られたネガ型感光性樹脂組成物(A-20)を用いて、実施例1と同様にして評価を行った。
(実施例46)
以下の手順に従い、タッチパネル部材を作製した。
(1)ITOの作製
厚み約1mmのガラス基板にスパッタリング装置HSR-521A((株)島津製作所製)を用いて、RFパワー1.4kW、真空度6.65×10-1Paで12.5分間スパッタリングすることにより、膜厚が150nmで、表面抵抗が15Ω/□のITOを成膜し、ポジ型フォトレジスト(東京応化工業(株)製「OFPR-800」)を塗布し、80℃で20分間プリベークして膜厚1.1μmのレジスト膜を得た。PLAを用いて、得られた膜に超高圧水銀灯をマスクを介してパターン露光した後、自動現像装置を用いて2.38wt%TMAH水溶液で90秒間シャワー現像し、次いで水で30秒間リンスした。その後、40℃のHCl/HNO3/H2O=18/4.5/77.5(重量比)混合溶液に80秒浸すことでITOをエッチングし、50℃の剥離液(ナガセケムテックス(株)製「N-300」)で120秒処理することでフォトレジストを除去し、膜厚200オングストロームのパターン加工された透明電極を有するガラス基板を作製した。
(2)透明絶縁膜の作製
得られたガラス基板上にネガ型感光性樹脂組成物(A-1)を用い、上述の評価の方法の手順に従い透明絶縁膜を作製した。
(3)モリブデン/アルミニウム/モリブデン積層膜(MAM)配線の作製
得られたガラス基板上に、ターゲットとしてモリブデンおよびアルミニウムを用い、エッチング液としてH3PO4/HNO3/CH3COOH/H2O=65/3/5/27(重量比)混合溶液を用いる以外は(1)と同様の手順によりMAM配線を作製した。
(4)透明保護膜の作製
得られたガラス基板上にネガ型感光性樹脂組成物(A-1)を用い、上述の評価の方法の手順に従い透明保護膜を作製した。
(比較例1)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(d)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例1と同様に行い、樹脂組成物(H-1)を得た。ここで、アクリル樹脂溶液(d)のカルボン酸当量は4,600g/molであった。得られた樹脂組成物(H-1)を用いて、実施例1と同様にして評価を行った。なお、未露光部が2.38wt%TMAH水溶液に溶解せず、パターン加工が出来なかったため、それ以外の評価は現像を行わずに行った。
(比較例2)
ポリシロキサン溶液(i)の替わりにアクリル樹脂溶液(e)を用い、DAAの替わりに同量のPGMEAをさらに加える以外は実施例1と同様に行い、樹脂組成物(H-2)を得た。ここで、アクリル樹脂溶液(e)のカルボン酸当量は140g/molであった。得られた樹脂組成物(H-2)を用いて、実施例1と同様にして評価を行った。
(比較例3)
黄色灯下にて、PGMEA4.740g、「ZC-580(商品名)」0.249g、シリコーン系界面活性剤であるBYK-333(1wt%PGMEA溶液)0.2000g(濃度100ppmに相当)、4-t-ブチルカテコール(1wt%PGMEA溶液)1.742gを加え、撹拌した。「DPHA(商品名)」(50wt%PGMEA溶液)5.806g、アクリル樹脂溶液(a)7.258gを加えて、撹拌した。次いで0.45μmのフィルターでろ過を行い、樹脂組成物(H-3)を得た。この樹脂組成物(H-3)に光重合開始剤は含まれていない。得られた樹脂組成物(H-3)を用いて、実施例1と同様にして評価を行った。なお、露光部・未露光部ともに0.4wt%TMAH水溶液に溶解性し、パターン加工が出来なかったため、それ以外の評価は現像を行わずに行った。
(比較例4)
黄色灯下にて、「OXE-01(商品名)」0.277g、PGMEA3.778g、「ZC-580(商品名)」0.237g、シリコーン系界面活性剤であるBYK-333(1wt%PGMEA溶液)0.2000g(濃度100ppmに相当)、4-t-ブチルカテコール(1wt%PGMEA溶液)1.661gを加え、撹拌した。アクリル樹脂溶液(a)13.846gを加えて、撹拌した。次いで0.45μmのフィルターでろ過を行い、樹脂組成物(H-4)を得た。この樹脂組成物(H-4)に多官能モノマーは含まれていない。得られた樹脂組成物(H-4)を用いて、実施例1と同様にして評価を行った。
(比較例5)
黄色灯下にて、「OXE-01(商品名)」0.285g、PGMEA4.990gシリコーン系界面活性剤であるBYK-333(1wt%PGMEA溶液)0.2000g(濃度100ppmに相当)、4-t-ブチルカテコール(1wt%PGMEA溶液)1.709gを加え、撹拌した。「DPHA(商品名)」(50wt%PGMEA溶液)5.696g、アクリル樹脂溶液(a)7.120gを加えて、撹拌した。次いで0.45μmのフィルターでろ過を行い、樹脂組成物(H-5)を得た。この樹脂組成物(H-5)にジルコニウム化合物は含まれていない。得られた樹脂組成物(H-5)を用いて、実施例1と同様にして評価を行った。
(比較例6)
黄色灯下にて、「OXE-01(商品名)」0.285g、PGMEA2.262g、DAA2.846g、シリコーン系界面活性剤であるBYK-333(1wt%PGMEA溶液)0.2000g(濃度100ppmに相当)、4-t-ブチルカテコール(1wt%PGMEA溶液)1.709gを加え、撹拌した。「DPHA(商品名)」(50wt%PGMEA溶液)5.696g、ポリシロキサン溶液(i)7.120gを加えて、撹拌した。次いで0.45μmのフィルターでろ過を行い、樹脂組成物(H-6)を得た。この樹脂組成物(H-6)にジルコニウム化合物は含まれていない。得られた樹脂組成物(H-6)を用いて、実施例1と同様にして評価を行った。
(比較例7)
ポリシロキサン溶液(i)の替わりにポリシロキサン溶液(v)を用いる以外は実施例1と同様に行い、ネガ型感光性樹脂組成物(H-7)を得た。得られたネガ型感光性樹脂組成物(H-7)を用いて、実施例1と同様にして評価を行った。なお、未露光部が0.4wt%TMAH水溶液に溶解しなかった。
2:透明電極
3:透明絶縁膜
4:配線電極
5:透明保護膜
Claims (10)
- (A)カルボン酸当量が200g/mol以上1,400g/mol以下であるアルカリ可溶性樹脂、(B)光重合開始剤、(C)多官能モノマー、(D)ジルコニウム化合物を含有するネガ型感光性樹脂組成物。
- ネガ型感光性樹脂組成物が、硬化膜形成用の組成物である請求項1記載のネガ型感光性樹脂組成物。
- ネガ型感光性樹脂組成物が、保護膜形成用の組成物である請求項1または2記載のネガ型感光性樹脂組成物。
- (A)カルボン酸当量が200g/mol以上1,400g/mol以下であるアルカリ可溶性樹脂が、エチレン性不飽和結合を有するアクリル樹脂である請求項1~3のいずれかに記載のネガ型感光性樹脂組成物。
- (A)カルボン酸当量が200g/mol以上1,400g/mol以下であるアルカリ可溶性樹脂が、エチレン性不飽和結合を有するポリシロキサンである請求項1~3のいずれかに記載のネガ型感光性樹脂組成物。
- (D)ジルコニウム化合物が、平均粒径が100nm以下のジルコニウム酸化物粒子である請求項1~5のいずれかに記載のネガ型感光性樹脂組成物。
- 請求項1~7のいずれかに記載のネガ型感光性樹脂組成物を硬化させてなるタッチパネル保護膜。
- 請求項1~7のいずれかに記載のネガ型感光性樹脂組成物を硬化させてなる金属配線保護膜。
- 請求項1~7のいずれかに記載のネガ型感光性樹脂組成物の硬化膜を具備し、該硬化膜によりモリブデン含有金属配線が保護されているタッチパネル部材。
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CN102844708B (zh) | 2015-11-25 |
KR20130070563A (ko) | 2013-06-27 |
JP2013083996A (ja) | 2013-05-09 |
CN102844708A (zh) | 2012-12-26 |
TW201142506A (en) | 2011-12-01 |
KR101807641B1 (ko) | 2017-12-11 |
SG184526A1 (en) | 2012-11-29 |
JPWO2011129210A1 (ja) | 2013-07-18 |
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JP5212571B2 (ja) | 2013-06-19 |
JP5867083B2 (ja) | 2016-02-24 |
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